DE69528217D1 - Vorrichtung und Verfahren zur Bearbeitung von Substraten - Google Patents
Vorrichtung und Verfahren zur Bearbeitung von SubstratenInfo
- Publication number
- DE69528217D1 DE69528217D1 DE69528217T DE69528217T DE69528217D1 DE 69528217 D1 DE69528217 D1 DE 69528217D1 DE 69528217 T DE69528217 T DE 69528217T DE 69528217 T DE69528217 T DE 69528217T DE 69528217 D1 DE69528217 D1 DE 69528217D1
- Authority
- DE
- Germany
- Prior art keywords
- processing substrates
- substrates
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45519—Inert gas curtains
- C23C16/45521—Inert gas curtains the gas, other than thermal contact gas, being introduced the rear of the substrate to flow around its periphery
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4585—Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/263,617 US5476548A (en) | 1994-06-20 | 1994-06-20 | Reducing backside deposition in a substrate processing apparatus through the use of a shadow ring |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69528217D1 true DE69528217D1 (de) | 2002-10-24 |
DE69528217T2 DE69528217T2 (de) | 2003-04-30 |
Family
ID=23002524
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69528217T Expired - Fee Related DE69528217T2 (de) | 1994-06-20 | 1995-06-15 | Vorrichtung und Verfahren zur Bearbeitung von Substraten |
Country Status (5)
Country | Link |
---|---|
US (1) | US5476548A (de) |
EP (1) | EP0688888B1 (de) |
JP (2) | JP3963966B2 (de) |
KR (1) | KR960002527A (de) |
DE (1) | DE69528217T2 (de) |
Families Citing this family (53)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5855687A (en) * | 1990-12-05 | 1999-01-05 | Applied Materials, Inc. | Substrate support shield in wafer processing reactors |
US5800686A (en) * | 1993-04-05 | 1998-09-01 | Applied Materials, Inc. | Chemical vapor deposition chamber with substrate edge protection |
US5888304A (en) * | 1996-04-02 | 1999-03-30 | Applied Materials, Inc. | Heater with shadow ring and purge above wafer surface |
US5766365A (en) * | 1994-02-23 | 1998-06-16 | Applied Materials, Inc. | Removable ring for controlling edge deposition in substrate processing apparatus |
US6033480A (en) * | 1994-02-23 | 2000-03-07 | Applied Materials, Inc. | Wafer edge deposition elimination |
US5590239A (en) * | 1994-06-06 | 1996-12-31 | Motorola | Planar uniform heating surface with additional circumscribing ring |
US5705080A (en) * | 1994-07-06 | 1998-01-06 | Applied Materials, Inc. | Plasma-inert cover and plasma cleaning process |
JP3257328B2 (ja) * | 1995-03-16 | 2002-02-18 | 株式会社日立製作所 | プラズマ処理装置及びプラズマ処理方法 |
JPH08302474A (ja) * | 1995-04-28 | 1996-11-19 | Anelva Corp | Cvd装置の加熱装置 |
US5908530A (en) * | 1995-05-18 | 1999-06-01 | Obsidian, Inc. | Apparatus for chemical mechanical polishing |
US5772773A (en) * | 1996-05-20 | 1998-06-30 | Applied Materials, Inc. | Co-axial motorized wafer lift |
US5866067A (en) * | 1997-03-24 | 1999-02-02 | Sony Corporation And Materials Research Corporation | High purity chromium metal by casting with controlled oxygen content |
US6110025A (en) * | 1997-05-07 | 2000-08-29 | Obsidian, Inc. | Containment ring for substrate carrier apparatus |
FR2763964B1 (fr) * | 1997-05-28 | 1999-08-13 | Sgs Thomson Microelectronics | Amelioration du flux gazeux dans un reacteur d'epitaxie |
US6063440A (en) * | 1997-07-11 | 2000-05-16 | Applied Materials, Inc. | Method for aligning a wafer |
US5985033A (en) * | 1997-07-11 | 1999-11-16 | Applied Materials, Inc. | Apparatus and method for delivering a gas |
US6296712B1 (en) | 1997-12-02 | 2001-10-02 | Applied Materials, Inc. | Chemical vapor deposition hardware and process |
US6210483B1 (en) | 1997-12-02 | 2001-04-03 | Applied Materials, Inc. | Anti-notch thinning heater |
US5955381A (en) * | 1998-03-03 | 1999-09-21 | Lucent Technologies Inc. | Integrated circuit fabrication |
US6159299A (en) * | 1999-02-09 | 2000-12-12 | Applied Materials, Inc. | Wafer pedestal with a purge ring |
US6323129B1 (en) * | 1999-04-02 | 2001-11-27 | National Semiconductor Corporation | Process for maintaining a semiconductor substrate layer deposition equipment chamber in a preconditioned and low particulate state |
US6423949B1 (en) * | 1999-05-19 | 2002-07-23 | Applied Materials, Inc. | Multi-zone resistive heater |
US6464795B1 (en) | 1999-05-21 | 2002-10-15 | Applied Materials, Inc. | Substrate support member for a processing chamber |
US6176931B1 (en) | 1999-10-29 | 2001-01-23 | International Business Machines Corporation | Wafer clamp ring for use in an ionized physical vapor deposition apparatus |
US6589352B1 (en) * | 1999-12-10 | 2003-07-08 | Applied Materials, Inc. | Self aligning non contact shadow ring process kit |
US6494955B1 (en) | 2000-02-15 | 2002-12-17 | Applied Materials, Inc. | Ceramic substrate support |
US6350320B1 (en) * | 2000-02-22 | 2002-02-26 | Applied Materials, Inc. | Heater for processing chamber |
US6488565B1 (en) | 2000-08-29 | 2002-12-03 | Applied Materials, Inc. | Apparatus for chemical mechanical planarization having nested load cups |
JP4583591B2 (ja) * | 2000-12-15 | 2010-11-17 | 東京エレクトロン株式会社 | 処理方法及び処理装置 |
US6709721B2 (en) | 2001-03-28 | 2004-03-23 | Applied Materials Inc. | Purge heater design and process development for the improvement of low k film properties |
US6795292B2 (en) | 2001-05-15 | 2004-09-21 | Dennis Grimard | Apparatus for regulating temperature of a process kit in a semiconductor wafer-processing chamber |
US6730175B2 (en) | 2002-01-22 | 2004-05-04 | Applied Materials, Inc. | Ceramic substrate support |
US7582186B2 (en) * | 2002-12-20 | 2009-09-01 | Tokyo Electron Limited | Method and apparatus for an improved focus ring in a plasma processing system |
US20040244949A1 (en) * | 2003-05-30 | 2004-12-09 | Tokyo Electron Limited | Temperature controlled shield ring |
EP1719167B1 (de) * | 2004-02-13 | 2011-10-26 | ASM America, Inc. | Substrathaltesystem zur reduzierten autodotierung und rückseiten-ablagerung |
US8372203B2 (en) * | 2005-09-30 | 2013-02-12 | Applied Materials, Inc. | Apparatus temperature control and pattern compensation |
US7691204B2 (en) * | 2005-09-30 | 2010-04-06 | Applied Materials, Inc. | Film formation apparatus and methods including temperature and emissivity/pattern compensation |
US9917001B2 (en) * | 2008-01-21 | 2018-03-13 | Applied Materials, Inc. | High temperature fine grain aluminum heater |
JP2009277720A (ja) * | 2008-05-12 | 2009-11-26 | Nec Electronics Corp | 半導体装置の製造方法及びエッチング装置 |
US8449679B2 (en) | 2008-08-15 | 2013-05-28 | Lam Research Corporation | Temperature controlled hot edge ring assembly |
US8753447B2 (en) * | 2009-06-10 | 2014-06-17 | Novellus Systems, Inc. | Heat shield for heater in semiconductor processing apparatus |
WO2011082020A2 (en) | 2009-12-31 | 2011-07-07 | Applied Materials, Inc. | Shadow ring for modifying wafer edge and bevel deposition |
WO2011094230A2 (en) | 2010-01-27 | 2011-08-04 | Applied Materials, Inc. | Life enhancement of ring assembly in semiconductor manufacturing chambers |
JP6056403B2 (ja) * | 2012-11-15 | 2017-01-11 | 東京エレクトロン株式会社 | 成膜装置 |
US9997381B2 (en) * | 2013-02-18 | 2018-06-12 | Lam Research Corporation | Hybrid edge ring for plasma wafer processing |
JP6024921B2 (ja) * | 2013-11-01 | 2016-11-16 | パナソニックIpマネジメント株式会社 | プラズマ処理装置及びプラズマ処理方法 |
ITCO20130058A1 (it) * | 2013-11-11 | 2015-05-12 | Lpe Spa | Suscettore con lavorazioni di forma arcuata nella superficie d'appoggio dei substrati |
ITCO20130072A1 (it) * | 2013-12-19 | 2015-06-20 | Lpe Spa | Suscettore con lavorazioni curve e concentriche nella superficie d'appoggio dei substrati |
US10903055B2 (en) * | 2015-04-17 | 2021-01-26 | Applied Materials, Inc. | Edge ring for bevel polymer reduction |
TWI734770B (zh) * | 2016-04-24 | 2021-08-01 | 美商應用材料股份有限公司 | 用於防止空間ald處理腔室中之背側沉積的設備 |
US10147610B1 (en) | 2017-05-30 | 2018-12-04 | Lam Research Corporation | Substrate pedestal module including metallized ceramic tubes for RF and gas delivery |
US11330673B2 (en) | 2017-11-20 | 2022-05-10 | Applied Materials, Inc. | Heated substrate support |
KR20210030074A (ko) * | 2019-09-09 | 2021-03-17 | 삼성전자주식회사 | 진공 척 및 상기 진공 척을 포함하는 기판 처리 장치 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5262029A (en) * | 1988-05-23 | 1993-11-16 | Lam Research | Method and system for clamping semiconductor wafers |
JPH04226027A (ja) * | 1990-04-23 | 1992-08-14 | Genus Inc | ガス阻止装置を有するウエファ周辺封止装置 |
US5230741A (en) * | 1990-07-16 | 1993-07-27 | Novellus Systems, Inc. | Gas-based backside protection during substrate processing |
US5238499A (en) * | 1990-07-16 | 1993-08-24 | Novellus Systems, Inc. | Gas-based substrate protection during processing |
US5304248A (en) * | 1990-12-05 | 1994-04-19 | Applied Materials, Inc. | Passive shield for CVD wafer processing which provides frontside edge exclusion and prevents backside depositions |
WO1993013241A1 (en) * | 1991-12-23 | 1993-07-08 | Genus, Inc. | Purge gas in wafer coating area selection |
US5328722A (en) * | 1992-11-06 | 1994-07-12 | Applied Materials, Inc. | Metal chemical vapor deposition process using a shadow ring |
US5292554A (en) * | 1992-11-12 | 1994-03-08 | Applied Materials, Inc. | Deposition apparatus using a perforated pumping plate |
US5326725A (en) * | 1993-03-11 | 1994-07-05 | Applied Materials, Inc. | Clamping ring and susceptor therefor |
US5800686A (en) * | 1993-04-05 | 1998-09-01 | Applied Materials, Inc. | Chemical vapor deposition chamber with substrate edge protection |
EP0628644B1 (de) * | 1993-05-27 | 2003-04-02 | Applied Materials, Inc. | Verbesserungen betreffend Substrathalter geeignet für den Gebrauch in Vorrichtungen für die chemische Abscheidung aus der Dampfphase |
US5511799A (en) * | 1993-06-07 | 1996-04-30 | Applied Materials, Inc. | Sealing device useful in semiconductor processing apparatus for bridging materials having a thermal expansion differential |
DE69401863T2 (de) * | 1993-07-15 | 1997-07-03 | Applied Materials Inc | Verbesserte Suszeptor Ausführung |
EP0746874A1 (de) * | 1994-02-23 | 1996-12-11 | Applied Materials, Inc. | Cvd-klammer |
-
1994
- 1994-06-20 US US08/263,617 patent/US5476548A/en not_active Expired - Lifetime
-
1995
- 1995-06-15 EP EP95304139A patent/EP0688888B1/de not_active Expired - Lifetime
- 1995-06-15 DE DE69528217T patent/DE69528217T2/de not_active Expired - Fee Related
- 1995-06-20 KR KR1019950016322A patent/KR960002527A/ko not_active Application Discontinuation
- 1995-06-20 JP JP15329395A patent/JP3963966B2/ja not_active Expired - Lifetime
-
2006
- 2006-11-15 JP JP2006309527A patent/JP4563984B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP4563984B2 (ja) | 2010-10-20 |
EP0688888A2 (de) | 1995-12-27 |
DE69528217T2 (de) | 2003-04-30 |
JP2007113119A (ja) | 2007-05-10 |
US5476548A (en) | 1995-12-19 |
EP0688888B1 (de) | 2002-09-18 |
KR960002527A (ko) | 1996-01-26 |
JP3963966B2 (ja) | 2007-08-22 |
EP0688888A3 (de) | 1998-02-04 |
JPH0881775A (ja) | 1996-03-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |