DE69528218D1 - Flüssigkeitseigenschaftsfühler mit metallplattierten Ringen für verbessertes Packaging - Google Patents

Flüssigkeitseigenschaftsfühler mit metallplattierten Ringen für verbessertes Packaging

Info

Publication number
DE69528218D1
DE69528218D1 DE69528218T DE69528218T DE69528218D1 DE 69528218 D1 DE69528218 D1 DE 69528218D1 DE 69528218 T DE69528218 T DE 69528218T DE 69528218 T DE69528218 T DE 69528218T DE 69528218 D1 DE69528218 D1 DE 69528218D1
Authority
DE
Germany
Prior art keywords
metal
liquid property
improved packaging
property probe
plated rings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69528218T
Other languages
English (en)
Other versions
DE69528218T2 (de
Inventor
Phillip W Barth
Michel G Goedert
Erwin Littau
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Application granted granted Critical
Publication of DE69528218D1 publication Critical patent/DE69528218D1/de
Publication of DE69528218T2 publication Critical patent/DE69528218T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/20—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow
    • G01F1/28—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow by drag-force, e.g. vane type or impact flowmeter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/704—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow using marked regions or existing inhomogeneities within the fluid stream, e.g. statistically occurring variations in a fluid parameter
    • G01F1/708—Measuring the time taken to traverse a fixed distance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/704—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow using marked regions or existing inhomogeneities within the fluid stream, e.g. statistically occurring variations in a fluid parameter
    • G01F1/708—Measuring the time taken to traverse a fixed distance
    • G01F1/7084—Measuring the time taken to traverse a fixed distance using thermal detecting arrangements
DE69528218T 1994-06-23 1995-03-15 Flüssigkeitseigenschaftsfühler mit metallplattierten Ringen für verbessertes Packaging Expired - Fee Related DE69528218T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/265,084 US5581028A (en) 1994-06-23 1994-06-23 Fluid property sensors incorporating plated metal rings for improved packaging

Publications (2)

Publication Number Publication Date
DE69528218D1 true DE69528218D1 (de) 2002-10-24
DE69528218T2 DE69528218T2 (de) 2003-04-17

Family

ID=23008902

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69528218T Expired - Fee Related DE69528218T2 (de) 1994-06-23 1995-03-15 Flüssigkeitseigenschaftsfühler mit metallplattierten Ringen für verbessertes Packaging

Country Status (4)

Country Link
US (1) US5581028A (de)
EP (1) EP0689036B1 (de)
JP (1) JPH0815294A (de)
DE (1) DE69528218T2 (de)

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US6551857B2 (en) 1997-04-04 2003-04-22 Elm Technology Corporation Three dimensional structure integrated circuits
US6546785B1 (en) 1998-04-02 2003-04-15 Rockwell Automation Technologies, Inc. System and method for dynamic lubrication adjustment for a lubrication analysis system
US6324899B1 (en) 1998-04-02 2001-12-04 Reliance Electric Technologies, Llc Bearing-sensor integration for a lubrication analysis system
US6023961A (en) * 1998-04-02 2000-02-15 Reliance Electric Industrial Company Micro-viscosity sensor and lubrication analysis system employing the same
US6196057B1 (en) 1998-04-02 2001-03-06 Reliance Electric Technologies, Llc Integrated multi-element lubrication sensor and lubricant health assessment
US6227034B1 (en) * 1998-10-16 2001-05-08 Daniel Industries, Inc. Integrated valve design for gas chromatograph
US7258003B2 (en) 1998-12-07 2007-08-21 Honeywell International Inc. Flow sensor with self-aligned flow channel
DE10046510A1 (de) * 2000-09-14 2002-04-18 Siemens Ag Sensorbauteil mit einem in einem Kanal isoliert, umströmbar gelagerten, elektrisch leitenden, länglichen Element und Herstellverfahren hierfür
DE10046509A1 (de) * 2000-09-14 2002-04-04 Siemens Ag Sensorbauteil und Verfahren zu seiner Herstellung
US6686642B2 (en) * 2001-06-11 2004-02-03 Hewlett-Packard Development Company, L.P. Multi-level integrated circuit for wide-gap substrate bonding
JP2004301740A (ja) * 2003-03-31 2004-10-28 Denso Corp 半導体センサ
US7581434B1 (en) 2003-09-25 2009-09-01 Rockwell Automation Technologies, Inc. Intelligent fluid sensor for machinery diagnostics, prognostics, and control
US7181963B2 (en) * 2004-06-30 2007-02-27 Codman & Shurtleff, Inc Thermal flow sensor having streamlined packaging
US7409875B1 (en) 2006-12-04 2008-08-12 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration System and method for determining velocity of electrically conductive fluid
US9128028B2 (en) * 2010-07-29 2015-09-08 Honeywell International Inc. Thermal conductivity detectors
US9151652B2 (en) * 2013-09-20 2015-10-06 Teledyne Instruments, Inc. Coriolis flow sensor fabricated with laminated films processes
DE102017131204A1 (de) 2017-12-22 2019-06-27 Tdk Electronics Ag Sensorkomponente und Mobilkommunikationsvorrichtung einschließlich derselben
US10314171B1 (en) * 2017-12-29 2019-06-04 Intel Corporation Package assembly with hermetic cavity
US10809139B2 (en) * 2018-02-14 2020-10-20 Carefusion 303, Inc. Integrated sensor to monitor fluid delivery

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5544786A (en) * 1978-09-27 1980-03-29 Hitachi Ltd Pressure sensor
US4471647A (en) * 1980-04-18 1984-09-18 Board Of Regents Of Stanford University Gas chromatography system and detector and method
US4389876A (en) * 1980-08-26 1983-06-28 Honeywell Inc. Temperature sensor and detector cell utilizing the same
US4474889A (en) * 1982-04-26 1984-10-02 Microsensor Technology Inc. Miniature gas chromatograph apparatus
US4478076A (en) * 1982-09-30 1984-10-23 Honeywell Inc. Flow sensor
US4478077A (en) * 1982-09-30 1984-10-23 Honeywell Inc. Flow sensor
US4548078A (en) * 1982-09-30 1985-10-22 Honeywell Inc. Integral flow sensor and channel assembly
US4501144A (en) * 1982-09-30 1985-02-26 Honeywell Inc. Flow sensor
DE68919471T2 (de) * 1988-07-26 1995-04-06 Hitachi Construction Machinery Drucksensor.
US4935040A (en) * 1989-03-29 1990-06-19 The Perkin-Elmer Corporation Miniature devices useful for gas chromatography
DE69112251T2 (de) * 1990-04-13 1996-02-22 Yamatake Honeywell Co Ltd Membransensor.
US5319980A (en) * 1991-06-07 1994-06-14 Maclean-Fogg Company Board construction for resistive strain gauge pressure sensors
US5220830A (en) * 1991-07-09 1993-06-22 Honeywell Inc. Compact gas flow meter using electronic microsensors
JPH0552863A (ja) * 1991-08-21 1993-03-02 Honda Motor Co Ltd 半導体ガスフローセンサ
JP2784286B2 (ja) * 1991-12-09 1998-08-06 三菱電機株式会社 半導体センサー装置の製造方法
US5313832A (en) * 1991-12-23 1994-05-24 Ford Motor Company Composite mass air flow sensor
US5437189A (en) * 1994-05-03 1995-08-01 Motorola, Inc. Dual absolute pressure sensor and method thereof

Also Published As

Publication number Publication date
US5581028A (en) 1996-12-03
EP0689036A3 (de) 1996-11-20
DE69528218T2 (de) 2003-04-17
EP0689036B1 (de) 2002-09-18
EP0689036A2 (de) 1995-12-27
JPH0815294A (ja) 1996-01-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US

8339 Ceased/non-payment of the annual fee