DE69531926D1 - Mikrospiegel-Vorrichtung mit Herstellungsfehlern sowie Verfahren zu ihrem Betrieb - Google Patents

Mikrospiegel-Vorrichtung mit Herstellungsfehlern sowie Verfahren zu ihrem Betrieb

Info

Publication number
DE69531926D1
DE69531926D1 DE69531926T DE69531926T DE69531926D1 DE 69531926 D1 DE69531926 D1 DE 69531926D1 DE 69531926 T DE69531926 T DE 69531926T DE 69531926 T DE69531926 T DE 69531926T DE 69531926 D1 DE69531926 D1 DE 69531926D1
Authority
DE
Germany
Prior art keywords
micromirror device
manufacturing defects
defects
manufacturing
micromirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69531926T
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English (en)
Other versions
DE69531926T2 (de
Inventor
Rohit L Bhuva
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of DE69531926D1 publication Critical patent/DE69531926D1/de
Publication of DE69531926T2 publication Critical patent/DE69531926T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
DE69531926T 1994-11-30 1995-11-30 Mikrospiegel-Vorrichtung mit Herstellungsfehlern sowie Verfahren zu ihrem Betrieb Expired - Lifetime DE69531926T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/346,812 US5610624A (en) 1994-11-30 1994-11-30 Spatial light modulator with reduced possibility of an on state defect
US346812 1994-11-30

Publications (2)

Publication Number Publication Date
DE69531926D1 true DE69531926D1 (de) 2003-11-20
DE69531926T2 DE69531926T2 (de) 2004-05-19

Family

ID=23361146

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69531926T Expired - Lifetime DE69531926T2 (de) 1994-11-30 1995-11-30 Mikrospiegel-Vorrichtung mit Herstellungsfehlern sowie Verfahren zu ihrem Betrieb

Country Status (6)

Country Link
US (1) US5610624A (de)
EP (1) EP0715199B1 (de)
JP (1) JPH08227044A (de)
KR (1) KR960018639A (de)
DE (1) DE69531926T2 (de)
TW (1) TW303447B (de)

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KR960018639A (ko) 1996-06-17
US5610624A (en) 1997-03-11
EP0715199A3 (de) 1998-06-17
JPH08227044A (ja) 1996-09-03
DE69531926T2 (de) 2004-05-19
EP0715199A2 (de) 1996-06-05
EP0715199B1 (de) 2003-10-15
TW303447B (de) 1997-04-21

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