DE69604645D1 - Chip des piezoelektrischen/elektrostriktiven types - Google Patents

Chip des piezoelektrischen/elektrostriktiven types

Info

Publication number
DE69604645D1
DE69604645D1 DE69604645T DE69604645T DE69604645D1 DE 69604645 D1 DE69604645 D1 DE 69604645D1 DE 69604645 T DE69604645 T DE 69604645T DE 69604645 T DE69604645 T DE 69604645T DE 69604645 D1 DE69604645 D1 DE 69604645D1
Authority
DE
Germany
Prior art keywords
piezoelectric
type chip
electrostrictive type
electrostrictive
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69604645T
Other languages
English (en)
Other versions
DE69604645T2 (de
Inventor
Minoru Usui
Takahiro Katakura
Fujio Akahane
Kazumi Kamoi
Satoshi Shinada
Yukihisa Takeuchi
Nobuo Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Seiko Epson Corp
Original Assignee
NGK Insulators Ltd
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd, Seiko Epson Corp filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE69604645D1 publication Critical patent/DE69604645D1/de
Publication of DE69604645T2 publication Critical patent/DE69604645T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1637Manufacturing processes molding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2/14233Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1607Production of print heads with piezoelectric elements
    • B41J2/161Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1632Manufacturing processes machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1642Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1646Manufacturing processes thin film formation thin film formation by sputtering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2002/14306Flow passage between manifold and chamber
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14387Front shooter
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14491Electrical connection
DE69604645T 1995-07-24 1996-07-23 Chip des piezoelektrischen/elektrostriktiven types Expired - Lifetime DE69604645T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP20839795 1995-07-24
JP29015395 1995-11-08
PCT/JP1996/002054 WO1997003836A1 (fr) 1995-07-24 1996-07-23 Puce du type a couche piezo-electrique/electrostrictive

Publications (2)

Publication Number Publication Date
DE69604645D1 true DE69604645D1 (de) 1999-11-18
DE69604645T2 DE69604645T2 (de) 2000-03-02

Family

ID=26516808

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69604645T Expired - Lifetime DE69604645T2 (de) 1995-07-24 1996-07-23 Chip des piezoelektrischen/elektrostriktiven types

Country Status (4)

Country Link
US (1) US6440174B1 (de)
EP (1) EP0785071B1 (de)
DE (1) DE69604645T2 (de)
WO (1) WO1997003836A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3236542B2 (ja) * 1997-11-17 2001-12-10 セイコーエプソン株式会社 インクジェットプリントヘッド用アクチュエータの熱処理方法およびインクジェットプリントヘッドの製造方法
US6862806B2 (en) * 2000-10-17 2005-03-08 Brother Kogyo Kabushiki Kaisha Method for fabricating an ink-jet printer head
JP2010269227A (ja) * 2009-05-20 2010-12-02 Seiko Epson Corp 液滴吐出装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0345812Y2 (de) * 1984-10-09 1991-09-27
US4752789A (en) 1986-07-25 1988-06-21 Dataproducts Corporation Multi-layer transducer array for an ink jet apparatus
JP2558116B2 (ja) * 1987-04-14 1996-11-27 セイコーエプソン株式会社 インクジエツトヘツド
JP2655725B2 (ja) 1989-07-10 1997-09-24 電源開発株式会社 微粉炭燃焼ボイラの排ガス処理方法
US5255016A (en) * 1989-09-05 1993-10-19 Seiko Epson Corporation Ink jet printer recording head
JPH03118159A (ja) * 1989-10-02 1991-05-20 Nitsukooshi Kk プリンターヘッド
JP3144948B2 (ja) * 1992-05-27 2001-03-12 日本碍子株式会社 インクジェットプリントヘッド
JP3478297B2 (ja) * 1992-06-26 2003-12-15 セイコーエプソン株式会社 インクジェット式記録ヘッド
JP3106044B2 (ja) * 1992-12-04 2000-11-06 日本碍子株式会社 アクチュエータ及びそれを用いたインクジェットプリントヘッド
JPH06238895A (ja) * 1993-02-19 1994-08-30 Seiko Epson Corp インクジェットヘッドおよびその製造方法
JP3117340B2 (ja) * 1993-03-30 2000-12-11 日本碍子株式会社 インクジェットプリントヘッド
JP3088890B2 (ja) * 1994-02-04 2000-09-18 日本碍子株式会社 圧電/電歪膜型アクチュエータ

Also Published As

Publication number Publication date
US6440174B1 (en) 2002-08-27
EP0785071B1 (de) 1999-10-13
EP0785071A1 (de) 1997-07-23
DE69604645T2 (de) 2000-03-02
EP0785071A4 (de) 1997-10-08
WO1997003836A1 (fr) 1997-02-06

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Legal Events

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