DE69609284D1 - Verfahren zum Konstruieren und Herstellen von auf Abruf arbeitenden Druckköpfen mit Erwärmevorrichtungen für die Düsen - Google Patents

Verfahren zum Konstruieren und Herstellen von auf Abruf arbeitenden Druckköpfen mit Erwärmevorrichtungen für die Düsen

Info

Publication number
DE69609284D1
DE69609284D1 DE69609284T DE69609284T DE69609284D1 DE 69609284 D1 DE69609284 D1 DE 69609284D1 DE 69609284 T DE69609284 T DE 69609284T DE 69609284 T DE69609284 T DE 69609284T DE 69609284 D1 DE69609284 D1 DE 69609284D1
Authority
DE
Germany
Prior art keywords
heaters
nozzles
designing
manufacturing
methods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69609284T
Other languages
English (en)
Other versions
DE69609284T2 (de
Inventor
Kia Silverbrook
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eastman Kodak Co
Original Assignee
Eastman Kodak Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eastman Kodak Co filed Critical Eastman Kodak Co
Application granted granted Critical
Publication of DE69609284D1 publication Critical patent/DE69609284D1/de
Publication of DE69609284T2 publication Critical patent/DE69609284T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1635Manufacturing processes dividing the wafer into individual chips
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14451Structure of ink jet print heads discharging by lowering surface tension of meniscus
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1603Production of bubble jet print heads of the front shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1628Manufacturing processes etching dry etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1629Manufacturing processes etching wet etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1631Manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1632Manufacturing processes machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1642Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1645Manufacturing processes thin film formation thin film formation by spincoating
DE69609284T 1995-10-30 1996-10-09 Verfahren zum Herstellen eines Drop-on-demand Druckkopfs mit Heizvorrichtungen für die Düsen Expired - Fee Related DE69609284T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AUPN6238A AUPN623895A0 (en) 1995-10-30 1995-10-30 A manufacturing process for lift print heads with nozzle rim heaters

Publications (2)

Publication Number Publication Date
DE69609284D1 true DE69609284D1 (de) 2000-08-17
DE69609284T2 DE69609284T2 (de) 2001-01-25

Family

ID=3790565

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69609284T Expired - Fee Related DE69609284T2 (de) 1995-10-30 1996-10-09 Verfahren zum Herstellen eines Drop-on-demand Druckkopfs mit Heizvorrichtungen für die Düsen

Country Status (5)

Country Link
US (2) US5871656A (de)
EP (1) EP0771658B1 (de)
JP (1) JPH09164686A (de)
AU (1) AUPN623895A0 (de)
DE (1) DE69609284T2 (de)

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US6171510B1 (en) * 1997-10-30 2001-01-09 Applied Materials Inc. Method for making ink-jet printer nozzles
AUPP335898A0 (en) * 1998-05-06 1998-05-28 Silverbrook Research Pty Limited An ink jet printhead unit (LIFT06)
ITTO980562A1 (it) 1998-06-29 1999-12-29 Olivetti Lexikon Spa Testina di stampa a getto di inchiostro
US6742873B1 (en) * 2001-04-16 2004-06-01 Silverbrook Research Pty Ltd Inkjet printhead construction
US6076917A (en) * 1998-09-30 2000-06-20 Eastman Kodak Company Ink jet printing of color image and annotations
AU1139100A (en) * 1998-10-16 2000-05-08 Silverbrook Research Pty Limited Improvements relating to inkjet printers
US6364459B1 (en) * 1999-10-05 2002-04-02 Eastman Kodak Company Printing apparatus and method utilizing light-activated ink release system
US6270634B1 (en) 1999-10-29 2001-08-07 Applied Materials, Inc. Method for plasma etching at a high etch rate
KR100408268B1 (ko) * 2000-07-20 2003-12-01 삼성전자주식회사 버블 젯 방식의 잉크 젯 프린트 헤드 및 그 제조방법
US6629756B2 (en) 2001-02-20 2003-10-07 Lexmark International, Inc. Ink jet printheads and methods therefor
US7160806B2 (en) * 2001-08-16 2007-01-09 Hewlett-Packard Development Company, L.P. Thermal inkjet printhead processing with silicon etching
US7090325B2 (en) 2001-09-06 2006-08-15 Ricoh Company, Ltd. Liquid drop discharge head and manufacture method thereof, micro device ink-jet head ink cartridge and ink-jet printing device
US7105097B2 (en) * 2002-01-31 2006-09-12 Hewlett-Packard Development Company, L.P. Substrate and method of forming substrate for fluid ejection device
US6554403B1 (en) * 2002-04-30 2003-04-29 Hewlett-Packard Development Company, L.P. Substrate for fluid ejection device
US7052117B2 (en) * 2002-07-03 2006-05-30 Dimatix, Inc. Printhead having a thin pre-fired piezoelectric layer
US6648454B1 (en) * 2002-10-30 2003-11-18 Hewlett-Packard Development Company, L.P. Slotted substrate and method of making
US6880926B2 (en) * 2002-10-31 2005-04-19 Hewlett-Packard Development Company, L.P. Circulation through compound slots
US6885083B2 (en) * 2002-10-31 2005-04-26 Hewlett-Packard Development Company, L.P. Drop generator die processing
US7025433B2 (en) * 2002-11-27 2006-04-11 Hewlett-Packard Development Company, L.P. Changing drop-ejection velocity in an ink-jet pen
US6821450B2 (en) * 2003-01-21 2004-11-23 Hewlett-Packard Development Company, L.P. Substrate and method of forming substrate for fluid ejection device
US7281778B2 (en) * 2004-03-15 2007-10-16 Fujifilm Dimatix, Inc. High frequency droplet ejection device and method
US8491076B2 (en) 2004-03-15 2013-07-23 Fujifilm Dimatix, Inc. Fluid droplet ejection devices and methods
US7429335B2 (en) * 2004-04-29 2008-09-30 Shen Buswell Substrate passage formation
US7182422B2 (en) 2004-08-23 2007-02-27 Silverbrook Research Pty Ltd Printhead having first and second rows of print nozzles
CN101005951B (zh) * 2004-08-23 2010-05-26 西尔弗布鲁克研究有限公司 对称的喷嘴装置
US7296871B2 (en) * 2004-12-29 2007-11-20 Lexmark International, Inc. Device and structure arrangements for integrated circuits and methods for analyzing the same
CN101094770B (zh) 2004-12-30 2010-04-14 富士胶卷迪马蒂克斯股份有限公司 喷墨打印
WO2006105581A1 (en) * 2005-04-04 2006-10-12 Silverbrook Research Pty Ltd Printhead assembly suitable for redirecting ejected ink droplets
US7431431B2 (en) * 2005-04-04 2008-10-07 Silverbrook Research Pty Ltd Self passivating transition metal nitride printhead heaters
US20070076051A1 (en) * 2005-09-30 2007-04-05 Fuji Photo Film Co., Ltd. Liquid ejection head and manufacturing method thereof
US7712884B2 (en) * 2005-10-11 2010-05-11 Silverbrook Research Pty Ltd High density thermal ink jet printhead
US7510267B2 (en) * 2005-10-11 2009-03-31 Silverbrook Research Pty Ltd Reduced stiction printhead surface
US7431432B2 (en) * 2005-10-11 2008-10-07 Silverbrook Research Pty Ltd Printhead that combines ink from adjacent actuators
US7322681B2 (en) * 2005-10-11 2008-01-29 Silverbrook Research Pty Ltd Printhead with ink feed to chamber via adjacent chamber
US7465032B2 (en) * 2005-10-11 2008-12-16 Silverbrook Research Pty Ltd. Printhead with inlet filter for ink chamber
US7753496B2 (en) 2005-10-11 2010-07-13 Silverbrook Research Pty Ltd Inkjet printhead with multiple chambers and multiple nozzles for each drive circuit
US7708387B2 (en) * 2005-10-11 2010-05-04 Silverbrook Research Pty Ltd Printhead with multiple actuators in each chamber
US7445317B2 (en) * 2005-10-11 2008-11-04 Silverbrook Research Pty Ltd Inkjet printhead with droplet stem anchor
US7661800B2 (en) * 2005-10-11 2010-02-16 Silverbrook Research Pty Ltd Inkjet printhead with multiple heater elements and cross bracing
US7712876B2 (en) * 2005-10-11 2010-05-11 Silverbrook Research Pty Ltd Inkjet printhead with opposing actuator electrode polarities
US7401890B2 (en) * 2005-10-11 2008-07-22 Silverbrook Research Pty Ltd Intercolour surface barriers in multi colour inkjet printhead
US7470010B2 (en) * 2005-10-11 2008-12-30 Silverbrook Research Pty Ltd Inkjet printhead with multiple ink inlet flow paths
US7465041B2 (en) * 2005-10-11 2008-12-16 Silverbrook Research Pty Ltd Inkjet printhead with inlet priming feature
US7744195B2 (en) * 2005-10-11 2010-06-29 Silverbrook Research Pty Ltd Low loss electrode connection for inkjet printhead
TWI276548B (en) * 2006-05-19 2007-03-21 Int United Technology Co Ltd Inkjet printhead
GB0618065D0 (en) * 2006-09-14 2006-10-25 Inkski Ltd Management of surface tension and other rheological properties of liquids
US7988247B2 (en) * 2007-01-11 2011-08-02 Fujifilm Dimatix, Inc. Ejection of drops having variable drop size from an ink jet printer
US7966743B2 (en) * 2007-07-31 2011-06-28 Eastman Kodak Company Micro-structured drying for inkjet printers
CN102015311B (zh) * 2008-04-29 2015-05-20 惠普开发有限公司 打印装置
SG187483A1 (en) * 2008-11-10 2013-02-28 Silverbrook Res Pty Ltd Printhead with increasing drive pulse to counter heater oxide growth
US8931431B2 (en) * 2009-03-25 2015-01-13 The Regents Of The University Of Michigan Nozzle geometry for organic vapor jet printing
DE102017205505B4 (de) * 2017-03-31 2019-03-07 Heidelberger Druckmaschinen Ag Verfahren zur Kompensation von Tonwerteschwankungen in einer Inkjet-Druckmaschine

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Also Published As

Publication number Publication date
JPH09164686A (ja) 1997-06-24
EP0771658A2 (de) 1997-05-07
EP0771658B1 (de) 2000-07-12
AUPN623895A0 (en) 1995-11-23
EP0771658A3 (de) 1997-11-05
DE69609284T2 (de) 2001-01-25
US5871656A (en) 1999-02-16
US6217155B1 (en) 2001-04-17

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8364 No opposition during term of opposition
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Representative=s name: BLICKLE, K., DIPL.-ING., PAT.-ASS., 70327 STUTTGAR

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Representative=s name: DR. KUEHNER, H., RECHTSANW., 70327 STUTTGART

8339 Ceased/non-payment of the annual fee