DE69620581D1 - Interferometrische messung von oberflächen mit diffraktionsoptik mit streifender inzidenz - Google Patents

Interferometrische messung von oberflächen mit diffraktionsoptik mit streifender inzidenz

Info

Publication number
DE69620581D1
DE69620581D1 DE69620581T DE69620581T DE69620581D1 DE 69620581 D1 DE69620581 D1 DE 69620581D1 DE 69620581 T DE69620581 T DE 69620581T DE 69620581 T DE69620581 T DE 69620581T DE 69620581 D1 DE69620581 D1 DE 69620581D1
Authority
DE
Germany
Prior art keywords
striping
incidence
interferometric measurement
optics
differential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69620581T
Other languages
English (en)
Other versions
DE69620581T2 (de
Inventor
H Bruning
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tropel Corp
Original Assignee
Tropel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tropel Corp filed Critical Tropel Corp
Application granted granted Critical
Publication of DE69620581D1 publication Critical patent/DE69620581D1/de
Publication of DE69620581T2 publication Critical patent/DE69620581T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02018—Multipass interferometers, e.g. double-pass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02022—Interferometers characterised by the beam path configuration contacting one object by grazing incidence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
    • G01B9/02038—Shaping the wavefront, e.g. generating a spherical wavefront
    • G01B9/02039—Shaping the wavefront, e.g. generating a spherical wavefront by matching the wavefront with a particular object surface shape
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
DE69620581T 1995-01-19 1996-01-18 Interferometrische messung von oberflächen mit diffraktionsoptik mit streifender inzidenz Expired - Fee Related DE69620581T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US37549995A 1995-01-19 1995-01-19
US08/483,737 US5654798A (en) 1995-01-19 1995-06-07 Interferometric measurement of surfaces with diffractive optics at grazing incidence
PCT/US1996/000707 WO1996022505A1 (en) 1995-01-19 1996-01-18 Interferometric measurement of surfaces with diffractive optics at grazing incidence

Publications (2)

Publication Number Publication Date
DE69620581D1 true DE69620581D1 (de) 2002-05-16
DE69620581T2 DE69620581T2 (de) 2002-11-28

Family

ID=27007080

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69620581T Expired - Fee Related DE69620581T2 (de) 1995-01-19 1996-01-18 Interferometrische messung von oberflächen mit diffraktionsoptik mit streifender inzidenz

Country Status (5)

Country Link
US (2) US5654798A (de)
EP (1) EP0804712B1 (de)
JP (1) JPH10512674A (de)
DE (1) DE69620581T2 (de)
WO (1) WO1996022505A1 (de)

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Publication number Priority date Publication date Assignee Title
US5793488A (en) * 1995-07-31 1998-08-11 Tropel Corporation Interferometer with compound optics for measuring cylindrical objects at oblique incidence
DE19602445A1 (de) * 1996-01-24 1997-07-31 Nanopro Luftlager Produktions Vorrichtung und Verfahren zum Vermessen von zwei einander gegenüberliegenden Oberflächen eines Körpers
US5719676A (en) * 1996-04-12 1998-02-17 Tropel Corporation Diffraction management for grazing incidence interferometer
DE19643074C2 (de) * 1996-05-07 1999-07-29 Johannes Prof Dr Schwider Verfahren zur interferometrischen Prüfung von technischen Oberflächen
US6100979A (en) * 1996-09-09 2000-08-08 Robert Bosch Gmbh Arrangement for the testing of surfaces
US5889591A (en) * 1996-10-17 1999-03-30 Tropel Corporation Interferometric measurement of toric surfaces at grazing incidence
US5777738A (en) * 1997-03-17 1998-07-07 Tropel Corporation Interferometric measurement of absolute dimensions of cylindrical surfaces at grazing incidence
US7551288B1 (en) 1997-10-28 2009-06-23 Rockwell Automation Technologies, Inc. System for monitoring bearing wear
US6111643A (en) * 1997-10-28 2000-08-29 Reliance Electric Industrial Company Apparatus, system and method for determining wear of an article
US6249351B1 (en) 1999-06-03 2001-06-19 Zygo Corporation Grazing incidence interferometer and method
US7057741B1 (en) 1999-06-18 2006-06-06 Kla-Tencor Corporation Reduced coherence symmetric grazing incidence differential interferometer
DE10195052B3 (de) * 2000-01-25 2015-06-18 Zygo Corp. Verfahren und Einrichtungen zur Bestimmung einer geometrischen Eigenschaft eines Versuchsgegenstands sowie optisches Profilmesssystem
US6304332B1 (en) 2000-02-17 2001-10-16 Lucent Technologies Inc. Precision grating period measurement arrangement
US7433053B2 (en) * 2002-08-08 2008-10-07 Applied Materials, Israel, Ltd. Laser inspection using diffractive elements for enhancement and suppression of surface features
DE102010041556A1 (de) 2010-09-28 2012-03-29 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage für die Mikrolithographie und Verfahren zur mikrolithographischen Abbildung
DE102013203211A1 (de) * 2012-06-15 2013-12-19 Dr. Johannes Heidenhain Gmbh Vorrichtung zur interferentiellen Abstandsmessung
US9651358B2 (en) 2013-08-19 2017-05-16 Corning Incorporated Grazing-incidence interferometer with dual-side measurement capability using a common image plane
TWI486550B (zh) * 2014-01-20 2015-06-01 Nat Univ Tsing Hua 厚度線上即時檢測之光學干涉裝置及其方法
JP6513697B2 (ja) * 2014-03-13 2019-05-15 ナショナル ユニバーシティ オブ シンガポール 光干渉デバイス

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE106769C (de) *
DE233644C (de) *
DE215388C (de) *
DD106769A3 (de) * 1972-01-04 1974-07-05 Verfahren und anordnung zur pr]fung beliebiger mantelfl[chen rotationssymmetrischer festk\rper mittels synthetischer hologramme
US3907438A (en) * 1973-06-22 1975-09-23 Gen Electric Contour measuring system for cylinders
US4436424A (en) * 1981-07-27 1984-03-13 Gca Corporation Interferometer using transverse deviation of test beam
US4391526A (en) * 1981-08-24 1983-07-05 Itek Corporation Interferometric surface contour measuring arrangement
US4606640A (en) * 1984-04-02 1986-08-19 The Perkin-Elmer Corporation Method and apparatus for optically testing cylindrical surfaces
EP0179935B1 (de) * 1984-10-31 1988-05-18 Ibm Deutschland Gmbh Interferometrischer Dickenanalysierer und Messmethode
US4678333A (en) * 1985-05-10 1987-07-07 Nicolet Instrument Corporation Double-pass optical interferometer
JPS62177421A (ja) * 1986-01-31 1987-08-04 Fuji Photo Optical Co Ltd 斜入射干渉計装置
US4791584A (en) * 1986-10-15 1988-12-13 Eastman Kodak Company Sub-nyquist interferometry
US4898470A (en) * 1988-07-12 1990-02-06 Eastman Kodak Company Apparatus and method for testing circular cylindrical or conical surfaces
US5041726A (en) * 1990-06-11 1991-08-20 Hughes Aircraft Company Infrared holographic defect detector
JP2619566B2 (ja) * 1990-11-20 1997-06-11 オ−クマ株式会社 光学式位置検出器
JPH04221704A (ja) * 1990-12-25 1992-08-12 Matsushita Electric Works Ltd 位相シフト斜入射干渉計
US5220403A (en) * 1991-03-11 1993-06-15 International Business Machines Corporation Apparatus and a method for high numerical aperture microscopic examination of materials
JP2823707B2 (ja) * 1991-03-15 1998-11-11 松下電工株式会社 位相シフト斜入射干渉計
US5210591A (en) * 1991-08-02 1993-05-11 Hughes Aircraft Company Interferometric ball bearing test station
US5268742A (en) * 1992-06-15 1993-12-07 Hughes Aircraft Company Full aperture interferometry for grazing incidence optics

Also Published As

Publication number Publication date
DE69620581T2 (de) 2002-11-28
WO1996022505A1 (en) 1996-07-25
EP0804712A1 (de) 1997-11-05
US5909281A (en) 1999-06-01
JPH10512674A (ja) 1998-12-02
US5654798A (en) 1997-08-05
EP0804712B1 (de) 2002-04-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee