DE69620677D1 - AIPSb/InP Einfach-Heteroübergang-Bipolartransistor auf InP Substrat für Hochgeschwindigkeit- und Hochleistungsanwendungen - Google Patents

AIPSb/InP Einfach-Heteroübergang-Bipolartransistor auf InP Substrat für Hochgeschwindigkeit- und Hochleistungsanwendungen

Info

Publication number
DE69620677D1
DE69620677D1 DE69620677T DE69620677T DE69620677D1 DE 69620677 D1 DE69620677 D1 DE 69620677D1 DE 69620677 T DE69620677 T DE 69620677T DE 69620677 T DE69620677 T DE 69620677T DE 69620677 D1 DE69620677 D1 DE 69620677D1
Authority
DE
Germany
Prior art keywords
inp
aipsb
bipolar transistor
heterojunction bipolar
high speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69620677T
Other languages
English (en)
Other versions
DE69620677T2 (de
Inventor
Takyiu Liu
Chanh Nguyen
Mehran Matloubian
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DirecTV Group Inc
Original Assignee
Hughes Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Electronics Corp filed Critical Hughes Electronics Corp
Application granted granted Critical
Publication of DE69620677D1 publication Critical patent/DE69620677D1/de
Publication of DE69620677T2 publication Critical patent/DE69620677T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/02Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/20Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
    • H01L29/201Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds including two or more compounds, e.g. alloys
    • H01L29/205Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds including two or more compounds, e.g. alloys in different semiconductor regions, e.g. heterojunctions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/02Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/20Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
    • H01L29/201Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds including two or more compounds, e.g. alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70Bipolar devices
    • H01L29/72Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/73Bipolar junction transistors
    • H01L29/737Hetero-junction transistors
    • H01L29/7371Vertical transistors
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/072Heterojunctions
DE69620677T 1995-06-06 1996-05-30 AIPSb/InP Einfach-Heteroübergang-Bipolartransistor auf InP Substrat für Hochgeschwindigkeit- und Hochleistungsanwendungen Expired - Lifetime DE69620677T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/468,584 US5610086A (en) 1995-06-06 1995-06-06 Method of making an AlPSb/InP single heterojunction bipolar transistor on InP substrate for high-speed, high-power applications

Publications (2)

Publication Number Publication Date
DE69620677D1 true DE69620677D1 (de) 2002-05-23
DE69620677T2 DE69620677T2 (de) 2002-11-21

Family

ID=23860401

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69620677T Expired - Lifetime DE69620677T2 (de) 1995-06-06 1996-05-30 AIPSb/InP Einfach-Heteroübergang-Bipolartransistor auf InP Substrat für Hochgeschwindigkeit- und Hochleistungsanwendungen

Country Status (4)

Country Link
US (2) US5610086A (de)
EP (1) EP0747963B1 (de)
JP (1) JPH09106992A (de)
DE (1) DE69620677T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6444552B1 (en) 1999-07-15 2002-09-03 Hrl Laboratories, Llc Method of reducing the conductivity of a semiconductor and devices made thereby
US6670653B1 (en) * 1999-07-30 2003-12-30 Hrl Laboratories, Llc InP collector InGaAsSb base DHBT device and method of forming same
US6482711B1 (en) * 1999-10-28 2002-11-19 Hrl Laboratories, Llc InPSb/InAs BJT device and method of making
US6787814B2 (en) * 2000-06-22 2004-09-07 Showa Denko Kabushiki Kaisha Group-III nitride semiconductor light-emitting device and production method thereof
US7834396B2 (en) * 2004-09-01 2010-11-16 Cree Sweden Ab Lateral field effect transistor and its fabrication comprising a spacer layer above and below the channel layer
US9530708B1 (en) 2013-05-31 2016-12-27 Hrl Laboratories, Llc Flexible electronic circuit and method for manufacturing same

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3979271A (en) * 1973-07-23 1976-09-07 Westinghouse Electric Corporation Deposition of solid semiconductor compositions and novel semiconductor materials
US4695857A (en) * 1983-06-24 1987-09-22 Nec Corporation Superlattice semiconductor having high carrier density
KR900002687B1 (ko) * 1985-12-16 1990-04-23 후지쓰가부시끼가이샤 Mbe법에 의한 기판에 격자 정합시키는 4원 또는 5원 흔정 반도체의 성장방법
US4821082A (en) * 1987-10-30 1989-04-11 International Business Machines Corporation Heterojunction bipolar transistor with substantially aligned energy levels
JP2793837B2 (ja) * 1989-05-10 1998-09-03 株式会社日立製作所 半導体装置の製造方法およびヘテロ接合バイポーラトランジスタ
JP2804095B2 (ja) * 1989-07-10 1998-09-24 株式会社東芝 ヘテロ接合バイボーラトランジスタ
US5164800A (en) * 1990-08-30 1992-11-17 Sumitomo Electric Industries, Ltd. Semiconductor device
JPH05152204A (ja) * 1991-11-29 1993-06-18 Fujitsu Ltd Iii−v族化合物半導体
US5349201A (en) * 1992-05-28 1994-09-20 Hughes Aircraft Company NPN heterojunction bipolar transistor including antimonide base formed on semi-insulating indium phosphide substrate
US5407491A (en) * 1993-04-08 1995-04-18 University Of Houston Tandem solar cell with improved tunnel junction

Also Published As

Publication number Publication date
DE69620677T2 (de) 2002-11-21
JPH09106992A (ja) 1997-04-22
EP0747963B1 (de) 2002-04-17
US5612551A (en) 1997-03-18
US5610086A (en) 1997-03-11
EP0747963A1 (de) 1996-12-11

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Legal Events

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