DE69629216D1 - Neues reinigungsverfahren unter verwendung von kohlendioxid als lösungsmittel und anwendung von molekular vorbearbeiteten tensiden - Google Patents

Neues reinigungsverfahren unter verwendung von kohlendioxid als lösungsmittel und anwendung von molekular vorbearbeiteten tensiden

Info

Publication number
DE69629216D1
DE69629216D1 DE69629216T DE69629216T DE69629216D1 DE 69629216 D1 DE69629216 D1 DE 69629216D1 DE 69629216 T DE69629216 T DE 69629216T DE 69629216 T DE69629216 T DE 69629216T DE 69629216 D1 DE69629216 D1 DE 69629216D1
Authority
DE
Germany
Prior art keywords
carbon dioxide
surfactors
solvent
cleaning process
new cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69629216T
Other languages
English (en)
Other versions
DE69629216T2 (de
Inventor
M Desimone
Timothy Romack
E Betts
B Mclain
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of North Carolina at Chapel Hill
University of North Carolina System
Original Assignee
University of North Carolina at Chapel Hill
University of North Carolina System
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of North Carolina at Chapel Hill, University of North Carolina System filed Critical University of North Carolina at Chapel Hill
Publication of DE69629216D1 publication Critical patent/DE69629216D1/de
Application granted granted Critical
Publication of DE69629216T2 publication Critical patent/DE69629216T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/16—Organic compounds
    • C11D3/37—Polymers
    • C11D3/3746—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds
    • C11D3/3757—(Co)polymerised carboxylic acids, -anhydrides, -esters in solid and liquid compositions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0021—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by liquid gases or supercritical fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0064—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes
    • B08B7/0092—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes by cooling
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/02—Inorganic compounds ; Elemental compounds
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/16—Organic compounds
    • C11D3/37—Polymers
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/43—Solvents
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/02—Inorganic compounds
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/50—Solvents
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06L—DRY-CLEANING, WASHING OR BLEACHING FIBRES, FILAMENTS, THREADS, YARNS, FABRICS, FEATHERS OR MADE-UP FIBROUS GOODS; BLEACHING LEATHER OR FURS
    • D06L1/00—Dry-cleaning or washing fibres, filaments, threads, yarns, fabrics, feathers or made-up fibrous goods
    • C11D2111/14—
    • C11D2111/20—
DE69629216T 1995-11-03 1996-11-01 Neues reinigungsverfahren unter verwendung von kohlendioxid als lösungsmittel und anwendung von molekular vorbearbeiteten tensiden Expired - Fee Related DE69629216T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/553,082 US5783082A (en) 1995-11-03 1995-11-03 Cleaning process using carbon dioxide as a solvent and employing molecularly engineered surfactants
US553082 1995-11-03
PCT/US1996/017338 WO1997016264A1 (en) 1995-11-03 1996-11-01 Novel cleaning process using carbon dioxide as a solvent and employing molecularly engineered surfactants

Publications (2)

Publication Number Publication Date
DE69629216D1 true DE69629216D1 (de) 2003-08-28
DE69629216T2 DE69629216T2 (de) 2004-04-15

Family

ID=24208057

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69629216T Expired - Fee Related DE69629216T2 (de) 1995-11-03 1996-11-01 Neues reinigungsverfahren unter verwendung von kohlendioxid als lösungsmittel und anwendung von molekular vorbearbeiteten tensiden

Country Status (7)

Country Link
US (4) US5783082A (de)
EP (1) EP0958068B1 (de)
JP (1) JPH11514570A (de)
AT (1) ATE245495T1 (de)
AU (1) AU7525896A (de)
DE (1) DE69629216T2 (de)
WO (1) WO1997016264A1 (de)

Families Citing this family (195)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6148644A (en) 1995-03-06 2000-11-21 Lever Brothers Company, Division Of Conopco, Inc. Dry cleaning system using densified carbon dioxide and a surfactant adjunct
US5783082A (en) * 1995-11-03 1998-07-21 University Of North Carolina Cleaning process using carbon dioxide as a solvent and employing molecularly engineered surfactants
GB2311992A (en) * 1996-04-10 1997-10-15 Bespak Plc A method of cleaning or purifying elastomers and elastomeric articles which are intended for medical or pharmaceutical uses
US7338563B2 (en) * 1996-10-16 2008-03-04 Clark Steve L Process for cleaning hydrocarbons from soils
US5860467A (en) * 1996-12-03 1999-01-19 The University Of North Carolina At Chapel Hill Use of CO2 -soluble materials in making molds
US6500605B1 (en) * 1997-05-27 2002-12-31 Tokyo Electron Limited Removal of photoresist and residue from substrate using supercritical carbon dioxide process
US6306564B1 (en) 1997-05-27 2001-10-23 Tokyo Electron Limited Removal of resist or residue from semiconductors using supercritical carbon dioxide
US6287640B1 (en) 1997-05-30 2001-09-11 Micell Technologies, Inc. Surface treatment of substrates with compounds that bind thereto
US6344243B1 (en) 1997-05-30 2002-02-05 Micell Technologies, Inc. Surface treatment
US6165560A (en) * 1997-05-30 2000-12-26 Micell Technologies Surface treatment
EP0986667B1 (de) 1997-05-30 2009-01-07 Micell Integrated Systems, Inc. Oberflächebehandlung
US6200352B1 (en) 1997-08-27 2001-03-13 Micell Technologies, Inc. Dry cleaning methods and compositions
US5858022A (en) * 1997-08-27 1999-01-12 Micell Technologies, Inc. Dry cleaning methods and compositions
US6218353B1 (en) 1997-08-27 2001-04-17 Micell Technologies, Inc. Solid particulate propellant systems and aerosol containers employing the same
US6010542A (en) * 1997-08-29 2000-01-04 Micell Technologies, Inc. Method of dyeing substrates in carbon dioxide
WO1999010587A1 (en) * 1997-08-29 1999-03-04 Micell Technologies End functionalized polysiloxane surfactants in carbon dioxide formulations
US6127000A (en) * 1997-10-10 2000-10-03 North Carolina State University Method and compositions for protecting civil infrastructure
US6846789B2 (en) * 1998-03-30 2005-01-25 The Regents Of The University Of California Composition and method for removing photoresist materials from electronic components
AU3360399A (en) * 1998-03-30 1999-10-18 Leisa B. Davenhall Composition and method for removing photoresist materials from electronic components
US6120613A (en) * 1998-04-30 2000-09-19 Micell Technologies, Inc. Carbon dioxide cleaning and separation systems
US6506259B1 (en) 1998-04-30 2003-01-14 Micell Technologies, Inc. Carbon dioxide cleaning and separation systems
US5977045A (en) * 1998-05-06 1999-11-02 Lever Brothers Company Dry cleaning system using densified carbon dioxide and a surfactant adjunct
US6200943B1 (en) * 1998-05-28 2001-03-13 Micell Technologies, Inc. Combination surfactant systems for use in carbon dioxide-based cleaning formulations
US6010729A (en) 1998-08-20 2000-01-04 Ecolab Inc. Treatment of animal carcasses
US6277753B1 (en) 1998-09-28 2001-08-21 Supercritical Systems Inc. Removal of CMP residue from semiconductors using supercritical carbon dioxide process
CA2255413A1 (en) 1998-12-11 2000-06-11 Fracmaster Ltd. Foamed nitrogen in liquid co2 for fracturing
DE60018044T2 (de) * 1999-02-18 2005-12-29 Commonwealth Scientific And Industrial Research Organisation Neue biomaterialien
EP1171567A1 (de) * 1999-04-26 2002-01-16 3M Innovative Properties Company Stabilisierte fluide kohlendioxidzusammensetzung und ihre verwendung
US6558622B1 (en) 1999-05-04 2003-05-06 Steris Corporation Sub-critical fluid cleaning and antimicrobial decontamination system and process
US6602349B2 (en) 1999-08-05 2003-08-05 S.C. Fluids, Inc. Supercritical fluid cleaning process for precision surfaces
US6747179B1 (en) 1999-08-20 2004-06-08 North Carolina State University Carbon dioxide-soluble polymers and swellable polymers for carbon dioxide applications
US6403663B1 (en) 1999-09-20 2002-06-11 North Carolina State University Method of making foamed materials using surfactants and carbon dioxide
US6309425B1 (en) * 1999-10-12 2001-10-30 Unilever Home & Personal Care, Usa, Division Of Conopco, Inc. Cleaning composition and method for using the same
US6355072B1 (en) 1999-10-15 2002-03-12 R.R. Street & Co. Inc. Cleaning system utilizing an organic cleaning solvent and a pressurized fluid solvent
US6755871B2 (en) * 1999-10-15 2004-06-29 R.R. Street & Co. Inc. Cleaning system utilizing an organic cleaning solvent and a pressurized fluid solvent
US6558432B2 (en) * 1999-10-15 2003-05-06 R. R. Street & Co., Inc. Cleaning system utilizing an organic cleaning solvent and a pressurized fluid solvent
US7097715B1 (en) * 2000-10-11 2006-08-29 R. R. Street Co. Inc. Cleaning system utilizing an organic cleaning solvent and a pressurized fluid solvent
EP1234322A2 (de) * 1999-11-02 2002-08-28 Tokyo Electron Limited Verfahren und vorrichtungen zur überkritischen verarbeitung von werkstücken
US6748960B1 (en) * 1999-11-02 2004-06-15 Tokyo Electron Limited Apparatus for supercritical processing of multiple workpieces
US6248136B1 (en) 2000-02-03 2001-06-19 Micell Technologies, Inc. Methods for carbon dioxide dry cleaning with integrated distribution
DE50107279D1 (de) * 2000-02-18 2005-10-06 Eco2 Sa Mezzovico Autoklav zur präzisionsreinigung von stücken und verwendung des autoklavs
TW558736B (en) * 2000-02-26 2003-10-21 Shipley Co Llc Method of reducing defects
US6313079B1 (en) 2000-03-02 2001-11-06 Unilever Home & Personal Care Usa, Division Of Conopco Heterocyclic dry-cleaning surfactant and method for using the same
AU2001255656A1 (en) * 2000-04-25 2001-11-07 Tokyo Electron Limited Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module
US6855173B2 (en) 2000-06-05 2005-02-15 Procter & Gamble Company Use of absorbent materials to separate water from lipophilic fluid
US6840963B2 (en) 2000-06-05 2005-01-11 Procter & Gamble Home laundry method
US6706076B2 (en) 2000-06-05 2004-03-16 Procter & Gamble Company Process for separating lipophilic fluid containing emulsions with electric coalescence
US6840069B2 (en) 2000-06-05 2005-01-11 Procter & Gamble Company Systems for controlling a drying cycle in a drying apparatus
US6670317B2 (en) 2000-06-05 2003-12-30 Procter & Gamble Company Fabric care compositions and systems for delivering clean, fresh scent in a lipophilic fluid treatment process
US6691536B2 (en) 2000-06-05 2004-02-17 The Procter & Gamble Company Washing apparatus
US6673764B2 (en) 2000-06-05 2004-01-06 The Procter & Gamble Company Visual properties for a wash process using a lipophilic fluid based composition containing a colorant
US6930079B2 (en) 2000-06-05 2005-08-16 Procter & Gamble Company Process for treating a lipophilic fluid
US6828292B2 (en) * 2000-06-05 2004-12-07 Procter & Gamble Company Domestic fabric article refreshment in integrated cleaning and treatment processes
US6939837B2 (en) * 2000-06-05 2005-09-06 Procter & Gamble Company Non-immersive method for treating or cleaning fabrics using a siloxane lipophilic fluid
US6706677B2 (en) 2000-06-05 2004-03-16 Procter & Gamble Company Bleaching in conjunction with a lipophilic fluid cleaning regimen
US6564591B2 (en) 2000-07-21 2003-05-20 Procter & Gamble Company Methods and apparatus for particulate removal from fabrics
CN1246888C (zh) * 2000-08-14 2006-03-22 东京毅力科创株式会社 用超临界二氧化碳工艺从半导体上去除光致抗蚀剂和光致抗蚀残留物
KR100501559B1 (ko) * 2000-08-30 2005-07-18 마쯔시다덴기산교 가부시키가이샤 저항기 및 그 제조 방법
CN1246429C (zh) * 2000-09-26 2006-03-22 北卡罗来纳-查佩尔山大学 用于二氧化碳的磷酸酯氟表面活性剂
US20020077435A1 (en) * 2000-10-09 2002-06-20 Desimone Joseph M. Methods for preparing polymers in carbon dioxide having reactive functionality
US6623355B2 (en) 2000-11-07 2003-09-23 Micell Technologies, Inc. Methods, apparatus and slurries for chemical mechanical planarization
US20020123452A1 (en) * 2001-01-25 2002-09-05 Desimone Joseph M. Zwitterionic gemini surfactants for use in carbon dioxide
JP2004528404A (ja) * 2001-01-30 2004-09-16 ナノゲート テクノロジーズ ゲゼルシャフト ミット ベシュレンクテル ハフツング 方法、物質および物品
US6602351B2 (en) 2001-02-15 2003-08-05 Micell Technologies, Inc. Methods for the control of contaminants following carbon dioxide cleaning of microelectronic structures
US6641678B2 (en) 2001-02-15 2003-11-04 Micell Technologies, Inc. Methods for cleaning microelectronic structures with aqueous carbon dioxide systems
US6905555B2 (en) 2001-02-15 2005-06-14 Micell Technologies, Inc. Methods for transferring supercritical fluids in microelectronic and other industrial processes
KR20030075185A (ko) * 2001-02-15 2003-09-22 미셀 테크놀로지즈, 인코포레이티드 마이크로 전자 소자를 세정하는 방법
US6613157B2 (en) 2001-02-15 2003-09-02 Micell Technologies, Inc. Methods for removing particles from microelectronic structures
US6562146B1 (en) * 2001-02-15 2003-05-13 Micell Technologies, Inc. Processes for cleaning and drying microelectronic structures using liquid or supercritical carbon dioxide
US6596093B2 (en) 2001-02-15 2003-07-22 Micell Technologies, Inc. Methods for cleaning microelectronic structures with cyclical phase modulation
US7658989B2 (en) * 2001-03-28 2010-02-09 North Carolina State University Nano-and micro-cellular foamed thin-walled material, and processes and apparatuses for making the same
US20020189543A1 (en) * 2001-04-10 2002-12-19 Biberger Maximilian A. High pressure processing chamber for semiconductor substrate including flow enhancing features
US20030116176A1 (en) * 2001-04-18 2003-06-26 Rothman Laura B. Supercritical fluid processes with megasonics
US20030162685A1 (en) * 2001-06-05 2003-08-28 Man Victor Fuk-Pong Solid cleaning composition including stabilized active oxygen component
US6457480B1 (en) * 2001-06-27 2002-10-01 International Business Machines Corporation Process and apparatus for cleaning filters
US6454869B1 (en) * 2001-06-27 2002-09-24 International Business Machines Corporation Process of cleaning semiconductor processing, handling and manufacturing equipment
US6653233B2 (en) * 2001-06-27 2003-11-25 International Business Machines Corporation Process of providing a semiconductor device with electrical interconnection capability
WO2003053561A2 (en) * 2001-07-12 2003-07-03 Eastman Kodak Company A surfactant assisted nanomaterial generation process
US20030139310A1 (en) * 2001-08-07 2003-07-24 Smith Kim R. Peroxygen compositions and methods for carpet or upholstery cleaning or sanitizing
US6838015B2 (en) * 2001-09-04 2005-01-04 International Business Machines Corporation Liquid or supercritical carbon dioxide composition
US6706641B2 (en) 2001-09-13 2004-03-16 Micell Technologies, Inc. Spray member and method for using the same
US6782900B2 (en) * 2001-09-13 2004-08-31 Micell Technologies, Inc. Methods and apparatus for cleaning and/or treating a substrate using CO2
US6666928B2 (en) 2001-09-13 2003-12-23 Micell Technologies, Inc. Methods and apparatus for holding a substrate in a pressure chamber
US6619304B2 (en) 2001-09-13 2003-09-16 Micell Technologies, Inc. Pressure chamber assembly including non-mechanical drive means
US6763840B2 (en) 2001-09-14 2004-07-20 Micell Technologies, Inc. Method and apparatus for cleaning substrates using liquid carbon dioxide
US6841641B2 (en) * 2001-09-27 2005-01-11 Ppg Industries Ohio, Inc. Copolymers comprising low surface tension (meth) acrylates
US20030136942A1 (en) * 2001-11-30 2003-07-24 Smith Kim R. Stabilized active oxygen compositions
US6737225B2 (en) 2001-12-28 2004-05-18 Texas Instruments Incorporated Method of undercutting micro-mechanical device with super-critical carbon dioxide
US7326673B2 (en) * 2001-12-31 2008-02-05 Advanced Technology Materials, Inc. Treatment of semiconductor substrates using long-chain organothiols or long-chain acetates
US7557073B2 (en) * 2001-12-31 2009-07-07 Advanced Technology Materials, Inc. Non-fluoride containing supercritical fluid composition for removal of ion-implant photoresist
AU2003235748A1 (en) * 2002-01-07 2003-07-24 Praxair Technology, Inc. Method for cleaning an article
US20050227183A1 (en) * 2002-01-11 2005-10-13 Mark Wagner Compositions and methods for image development of conventional chemically amplified photoresists
WO2003061860A1 (en) * 2002-01-24 2003-07-31 S. C. Fluids Inc. Supercritical fluid processes with megasonics
US6924086B1 (en) * 2002-02-15 2005-08-02 Tokyo Electron Limited Developing photoresist with supercritical fluid and developer
US20030213747A1 (en) * 2002-02-27 2003-11-20 Carbonell Ruben G. Methods and compositions for removing residues and substances from substrates using environmentally friendly solvents
US6953654B2 (en) 2002-03-14 2005-10-11 Tokyo Electron Limited Process and apparatus for removing a contaminant from a substrate
US6765030B2 (en) 2002-03-22 2004-07-20 The University Of North Carolina At Chapel Hill Methods of forming polymeric structures using carbon dioxide and polymeric structures formed therapy
US20030190818A1 (en) * 2002-04-03 2003-10-09 Ruben Carbonell Enhanced processing of performance films using high-diffusivity penetrants
US6764552B1 (en) 2002-04-18 2004-07-20 Novellus Systems, Inc. Supercritical solutions for cleaning photoresist and post-etch residue from low-k materials
WO2003091290A1 (en) * 2002-04-23 2003-11-06 Boehringer Ingelheim Pharmaceuticals, Inc. Method for reduction of residual organic solvent in carbomer
US6669785B2 (en) * 2002-05-15 2003-12-30 Micell Technologies, Inc. Methods and compositions for etch cleaning microelectronic substrates in carbon dioxide
US20030217764A1 (en) * 2002-05-23 2003-11-27 Kaoru Masuda Process and composition for removing residues from the microstructure of an object
DE10222943B4 (de) * 2002-05-24 2010-08-05 Karlsruher Institut für Technologie Verfahren zur Reinigung eines Gegenstandes
US6846380B2 (en) * 2002-06-13 2005-01-25 The Boc Group, Inc. Substrate processing apparatus and related systems and methods
US20040011386A1 (en) * 2002-07-17 2004-01-22 Scp Global Technologies Inc. Composition and method for removing photoresist and/or resist residue using supercritical fluids
US20040050406A1 (en) * 2002-07-17 2004-03-18 Akshey Sehgal Compositions and method for removing photoresist and/or resist residue at pressures ranging from ambient to supercritical
US6905556B1 (en) 2002-07-23 2005-06-14 Novellus Systems, Inc. Method and apparatus for using surfactants in supercritical fluid processing of wafers
US6962714B2 (en) * 2002-08-06 2005-11-08 Ecolab, Inc. Critical fluid antimicrobial compositions and their use and generation
DE10236491B4 (de) * 2002-08-09 2012-05-03 Air Liquide Deutschland Gmbh Reinigung mittels CO2 und N2O
AU2002951005A0 (en) * 2002-08-27 2002-09-12 Shell Internationale Research Maatschappij B.V. Method of removing carbon dioxide fouling from cryogenic equipment
US7267727B2 (en) * 2002-09-24 2007-09-11 Air Products And Chemicals, Inc. Processing of semiconductor components with dense processing fluids and ultrasonic energy
US20040055621A1 (en) * 2002-09-24 2004-03-25 Air Products And Chemicals, Inc. Processing of semiconductor components with dense processing fluids and ultrasonic energy
US20080000505A1 (en) * 2002-09-24 2008-01-03 Air Products And Chemicals, Inc. Processing of semiconductor components with dense processing fluids
US20080004194A1 (en) * 2002-09-24 2008-01-03 Air Products And Chemicals, Inc. Processing of semiconductor components with dense processing fluids
US6953041B2 (en) * 2002-10-09 2005-10-11 Micell Technologies, Inc. Compositions of transition metal species in dense phase carbon dioxide and methods of use thereof
US6943139B2 (en) * 2002-10-31 2005-09-13 Advanced Technology Materials, Inc. Removal of particle contamination on patterned silicon/silicon dioxide using supercritical carbon dioxide/chemical formulations
US7485611B2 (en) * 2002-10-31 2009-02-03 Advanced Technology Materials, Inc. Supercritical fluid-based cleaning compositions and methods
US6989358B2 (en) * 2002-10-31 2006-01-24 Advanced Technology Materials, Inc. Supercritical carbon dioxide/chemical formulation for removal of photoresists
US20060019850A1 (en) * 2002-10-31 2006-01-26 Korzenski Michael B Removal of particle contamination on a patterned silicon/silicon dioxide using dense fluid/chemical formulations
US6880560B2 (en) * 2002-11-18 2005-04-19 Techsonic Substrate processing apparatus for processing substrates using dense phase gas and sonic waves
US6683008B1 (en) * 2002-11-19 2004-01-27 International Business Machines Corporation Process of removing ion-implanted photoresist from a workpiece
US20040112409A1 (en) * 2002-12-16 2004-06-17 Supercritical Sysems, Inc. Fluoride in supercritical fluid for photoresist and residue removal
US20040154647A1 (en) * 2003-02-07 2004-08-12 Supercritical Systems, Inc. Method and apparatus of utilizing a coating for enhanced holding of a semiconductor substrate during high pressure processing
AU2003900534A0 (en) * 2003-02-07 2003-02-20 Shell Internationale Research Maatschappij B.V. Process and apparatus for removal of a contaminant from a natural gas feed stream
US20040198066A1 (en) * 2003-03-21 2004-10-07 Applied Materials, Inc. Using supercritical fluids and/or dense fluids in semiconductor applications
US20040244818A1 (en) * 2003-05-13 2004-12-09 Fury Michael A. System and method for cleaning of workpieces using supercritical carbon dioxide
US6951769B2 (en) 2003-06-04 2005-10-04 Texas Instruments Incorporated Method for stripping sacrificial layer in MEMS assembly
US6806993B1 (en) 2003-06-04 2004-10-19 Texas Instruments Incorporated Method for lubricating MEMS components
US7119052B2 (en) * 2003-06-24 2006-10-10 Advanced Technology Materials, Inc. Compositions and methods for high-efficiency cleaning/polishing of semiconductor wafers
US20050003988A1 (en) * 2003-06-27 2005-01-06 The Procter & Gamble Company Enzyme bleach lipophilic fluid cleaning compositions
US20050003987A1 (en) * 2003-06-27 2005-01-06 The Procter & Gamble Co. Lipophilic fluid cleaning compositions
US7345016B2 (en) * 2003-06-27 2008-03-18 The Procter & Gamble Company Photo bleach lipophilic fluid cleaning compositions
US7365043B2 (en) * 2003-06-27 2008-04-29 The Procter & Gamble Co. Lipophilic fluid cleaning compositions capable of delivering scent
US7044376B2 (en) * 2003-07-23 2006-05-16 Eastman Kodak Company Authentication method and apparatus for use with compressed fluid printed swatches
US20050029492A1 (en) * 2003-08-05 2005-02-10 Hoshang Subawalla Processing of semiconductor substrates with dense fluids comprising acetylenic diols and/or alcohols
JP2007504306A (ja) * 2003-09-02 2007-03-01 ナノン アクティーゼルスカブ ゴム含有廃材の処理方法
US7887641B2 (en) * 2004-01-09 2011-02-15 Ecolab Usa Inc. Neutral or alkaline medium chain peroxycarboxylic acid compositions and methods employing them
US7507429B2 (en) 2004-01-09 2009-03-24 Ecolab Inc. Methods for washing carcasses, meat, or meat products with medium chain peroxycarboxylic acid compositions
JP2007520479A (ja) * 2004-01-09 2007-07-26 イーコラブ インコーポレイティド 中鎖ペルオキシカルボン酸組成物
US7771737B2 (en) 2004-01-09 2010-08-10 Ecolab Inc. Medium chain peroxycarboxylic acid compositions
US20050183208A1 (en) * 2004-02-20 2005-08-25 The Procter & Gamble Company Dual mode laundry apparatus and method using the same
US7553803B2 (en) * 2004-03-01 2009-06-30 Advanced Technology Materials, Inc. Enhancement of silicon-containing particulate material removal using supercritical fluid-based compositions
US20050288485A1 (en) * 2004-06-24 2005-12-29 Mahl Jerry M Method and apparatus for pretreatment of polymeric materials utilized in carbon dioxide purification, delivery and storage systems
US7250374B2 (en) * 2004-06-30 2007-07-31 Tokyo Electron Limited System and method for processing a substrate using supercritical carbon dioxide processing
US7195676B2 (en) * 2004-07-13 2007-03-27 Air Products And Chemicals, Inc. Method for removal of flux and other residue in dense fluid systems
US7307019B2 (en) * 2004-09-29 2007-12-11 Tokyo Electron Limited Method for supercritical carbon dioxide processing of fluoro-carbon films
US20060081273A1 (en) * 2004-10-20 2006-04-20 Mcdermott Wayne T Dense fluid compositions and processes using same for article treatment and residue removal
US20060102591A1 (en) * 2004-11-12 2006-05-18 Tokyo Electron Limited Method and system for treating a substrate using a supercritical fluid
US7491036B2 (en) * 2004-11-12 2009-02-17 Tokyo Electron Limited Method and system for cooling a pump
US20060102208A1 (en) * 2004-11-12 2006-05-18 Tokyo Electron Limited System for removing a residue from a substrate using supercritical carbon dioxide processing
US20060102590A1 (en) * 2004-11-12 2006-05-18 Tokyo Electron Limited Method for treating a substrate with a high pressure fluid using a preoxide-based process chemistry
US20060102204A1 (en) * 2004-11-12 2006-05-18 Tokyo Electron Limited Method for removing a residue from a substrate using supercritical carbon dioxide processing
US7375154B2 (en) * 2004-12-06 2008-05-20 Eastman Chemical Company Polyester/polyamide blend having improved flavor retaining property and clarity
CN101072820B (zh) * 2004-12-06 2013-01-02 伊士曼化工公司 用于氧清除组合物的聚酯基钴母料
AU2005314117A1 (en) * 2004-12-06 2006-06-15 Constar International Inc. Blends of oxygen scavenging polyamides with polyesters which contain zinc and cobalt
US7410751B2 (en) * 2005-01-28 2008-08-12 Micell Technologies, Inc. Compositions and methods for image development of conventional chemically amplified photoresists
WO2006081534A1 (en) * 2005-01-28 2006-08-03 Micell Technologies, Inc. Compositions and methods for image development of conventional chemically amplified photoresists
US20060180174A1 (en) * 2005-02-15 2006-08-17 Tokyo Electron Limited Method and system for treating a substrate with a high pressure fluid using a peroxide-based process chemistry in conjunction with an initiator
US7291565B2 (en) * 2005-02-15 2007-11-06 Tokyo Electron Limited Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid
US20060180572A1 (en) * 2005-02-15 2006-08-17 Tokyo Electron Limited Removal of post etch residue for a substrate with open metal surfaces
US7008853B1 (en) * 2005-02-25 2006-03-07 Infineon Technologies, Ag Method and system for fabricating free-standing nanostructures
US20060255012A1 (en) * 2005-05-10 2006-11-16 Gunilla Jacobson Removal of particles from substrate surfaces using supercritical processing
US7789971B2 (en) 2005-05-13 2010-09-07 Tokyo Electron Limited Treatment of substrate using functionalizing agent in supercritical carbon dioxide
US7361231B2 (en) * 2005-07-01 2008-04-22 Ekc Technology, Inc. System and method for mid-pressure dense phase gas and ultrasonic cleaning
US20070012337A1 (en) * 2005-07-15 2007-01-18 Tokyo Electron Limited In-line metrology for supercritical fluid processing
US20070059201A1 (en) * 2005-09-15 2007-03-15 Meenakshi Sundaram Dry ice product containing antimicrobial formulation prepared using carrier chemicals
US8087926B2 (en) * 2005-12-28 2012-01-03 Jupiter Oxygen Corporation Oxy-fuel combustion with integrated pollution control
JP2007225647A (ja) * 2006-02-21 2007-09-06 Tokyo Ohka Kogyo Co Ltd 超臨界現像プロセス用レジスト組成物
FR2897786B1 (fr) * 2006-02-24 2008-06-27 Commissariat Energie Atomique Procede de nettoyage d'un substrat contamine par des contaminants inorganiques particulaires, a l'aide d'un fluide dense sous pression
WO2007140261A2 (en) * 2006-05-24 2007-12-06 Jupiter Oxygen Corporation Integrated capture of fossil fuel gas pollutants including co2 with energy recovery
US7547421B2 (en) 2006-10-18 2009-06-16 Ecolab Inc. Apparatus and method for making a peroxycarboxylic acid
US8075857B2 (en) * 2006-10-18 2011-12-13 Ecolab Usa Inc. Apparatus and method for making a peroxycarboxylic acid
EP2548934A1 (de) 2007-05-10 2013-01-23 Halliburton Energy Services, Inc. Verfahren zur Stimulation der Öl- oder Gaserzeugung
US7854651B2 (en) * 2008-07-02 2010-12-21 Ballinger Kenneth E Highly bacteriocidal chlorine dioxide, formulation, preparation and use thereof
DE102008040486A1 (de) 2008-07-17 2010-01-21 Evonik Goldschmidt Gmbh Verwendung von ionischen Flüssigkeiten als Zusatzstoff für Reinigungsverfahren in verflüssigtem und/oder überkritischem Gas
US8881820B2 (en) 2009-08-31 2014-11-11 Halliburton Energy Services, Inc. Treatment fluids comprising entangled equilibrium polymer networks
US8887809B2 (en) 2009-08-31 2014-11-18 Halliburton Energy Services, Inc. Treatment fluids comprising transient polymer networks
US8813845B2 (en) 2009-08-31 2014-08-26 Halliburton Energy Services, Inc. Polymeric additives for enhancement of treatment fluids comprising viscoelastic surfactants and methods of use
US8905135B2 (en) 2010-03-24 2014-12-09 Halliburton Energy Services, Inc. Zero shear viscosifying agent
WO2011158054A1 (en) 2010-06-14 2011-12-22 Sony Ericsson Mobile Communications Ab Regulation of audio volume and/or speed responsive to user applied pressure and related methods
KR101101098B1 (ko) 2010-07-27 2012-01-03 부경대학교 산학협력단 초임계이산화탄소에 적용되는 부분 불소화된 계면활성제의 제조방법 및 이의 용도
TW201217045A (en) * 2010-09-27 2012-05-01 Sumitomo Electric Industries Method for cleaning filter membrane, and membrane filter
MX358434B (es) 2011-01-31 2018-08-06 Halliburton Energy Services Inc Incremento de la complejidad de la fractura en formacion subterranea permeable ultra baja usando un material particulado degradable.
WO2012146304A1 (en) 2011-04-29 2012-11-01 Ecolab Usa Inc. Method for applying a laundry finishing agent to laundry articles
WO2012159679A1 (en) 2011-05-26 2012-11-29 Ecolab Usa Inc. Method for applying laundry finishing agent to laundry articles using solid carbon dioxide as carrier
US8955588B2 (en) 2012-09-10 2015-02-17 Halliburton Energy Services, Inc. Electron-poor orthoester for generating acid in a well fluid
US20140308162A1 (en) 2013-04-15 2014-10-16 Ecolab Usa Inc. Peroxycarboxylic acid based sanitizing rinse additives for use in ware washing
US9752105B2 (en) 2012-09-13 2017-09-05 Ecolab Usa Inc. Two step method of cleaning, sanitizing, and rinsing a surface
CN103130969B (zh) * 2013-02-06 2015-04-15 上海维凯光电新材料有限公司 含氟聚合物微球
US9822328B2 (en) * 2013-09-12 2017-11-21 Electric Power Research Institute, Inc. Cleaner for grease rejuvenation and method of maintaining bearings, bushings, linkage pins, and chains
KR102161725B1 (ko) * 2015-02-20 2020-10-05 나이키 이노베이트 씨.브이. 초임계 유체 재료 정련
CN106606993B (zh) * 2015-10-26 2018-12-21 中国石油化工集团公司 一种二氧化碳可溶两性离子表面活性剂及其制备方法
WO2018219441A1 (en) * 2017-05-31 2018-12-06 Lafer S.P.A. Device to remove fluids, and washing apparatus comprising said device
WO2018237027A1 (en) 2017-06-22 2018-12-27 Zimmerman Keith TISSUE PROCESSING COMPOSITIONS AND ASSOCIATED METHODS
CN111349194B (zh) * 2020-04-29 2021-08-31 中海石油(中国)有限公司 一种含氟聚乙烯吡咯烷酮天然气水合物抑制剂及其制备方法

Family Cites Families (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4219333A (en) * 1978-07-03 1980-08-26 Harris Robert D Carbonated cleaning solution
US4877530A (en) * 1984-04-25 1989-10-31 Cf Systems Corporation Liquid CO2 /cosolvent extraction
US5238671A (en) * 1987-11-27 1993-08-24 Battelle Memorial Institute Chemical reactions in reverse micelle systems
US4933404A (en) * 1987-11-27 1990-06-12 Battelle Memorial Institute Processes for microemulsion polymerization employing novel microemulsion systems
US5266205A (en) * 1988-02-04 1993-11-30 Battelle Memorial Institute Supercritical fluid reverse micelle separation
US5013366A (en) * 1988-12-07 1991-05-07 Hughes Aircraft Company Cleaning process using phase shifting of dense phase gases
DE4004111C2 (de) * 1989-02-15 1999-08-19 Deutsches Textilforschzentrum Verfahren zur Vorbehandlung von textilen Flächengebilden oder Garnen
DE3904514C2 (de) * 1989-02-15 1999-03-11 Oeffentliche Pruefstelle Und T Verfahren zum Reinigen bzw. Waschen von Bekleidungsteilen o. dgl.
DE3906737A1 (de) * 1989-03-03 1990-09-13 Deutsches Textilforschzentrum Verfahren zum mercerisieren, laugieren oder abkochen
DE3906724C2 (de) * 1989-03-03 1998-03-12 Deutsches Textilforschzentrum Verfahren zum Färben von textilen Substraten
DE3906734A1 (de) 1989-03-03 1990-09-06 Bosch Gmbh Robert Verfahren zum mischen von tonsignalen
DE3906735C2 (de) * 1989-03-03 1999-04-15 Deutsches Textilforschzentrum Verfahren zum Bleichen
US5068040A (en) * 1989-04-03 1991-11-26 Hughes Aircraft Company Dense phase gas photochemical process for substrate treatment
US5213619A (en) * 1989-11-30 1993-05-25 Jackson David P Processes for cleaning, sterilizing, and implanting materials using high energy dense fluids
US5306350A (en) * 1990-12-21 1994-04-26 Union Carbide Chemicals & Plastics Technology Corporation Methods for cleaning apparatus using compressed fluids
US5201960A (en) * 1991-02-04 1993-04-13 Applied Photonics Research, Inc. Method for removing photoresist and other adherent materials from substrates
DE59204395D1 (de) * 1991-05-17 1996-01-04 Ciba Geigy Ag Verfahren zum Färben von hydrophobem Textilmaterial mit Dispersionsfarbstoffen aus überkritischem CO2.
US5356538A (en) * 1991-06-12 1994-10-18 Idaho Research Foundation, Inc. Supercritical fluid extraction
US5279615A (en) * 1991-06-14 1994-01-18 The Clorox Company Method and composition using densified carbon dioxide and cleaning adjunct to clean fabrics
US5431843A (en) * 1991-09-04 1995-07-11 The Clorox Company Cleaning through perhydrolysis conducted in dense fluid medium
GB2259525B (en) * 1991-09-11 1995-06-28 Ciba Geigy Ag Process for dyeing cellulosic textile material with disperse dyes
EP0543779A1 (de) * 1991-11-20 1993-05-26 Ciba-Geigy Ag Verfahren zum optischen Aufhellen von hydrophobem Textilmaterial mit dispersen optischen Aufhellern in überkritischem CO2
DE4200352A1 (de) * 1992-01-09 1993-08-19 Deutsches Textilforschzentrum Verfahren zum aufbringen von substanzen auf fasermaterialien und textile substrate
DE4200498A1 (de) * 1992-01-10 1993-07-15 Amann & Soehne Verfahren zum auftragen einer avivage
US5474812A (en) * 1992-01-10 1995-12-12 Amann & Sohne Gmbh & Co. Method for the application of a lubricant on a sewing yarn
US5496901A (en) * 1992-03-27 1996-03-05 University Of North Carolina Method of making fluoropolymers
US5267455A (en) * 1992-07-13 1993-12-07 The Clorox Company Liquid/supercritical carbon dioxide dry cleaning system
US5370742A (en) * 1992-07-13 1994-12-06 The Clorox Company Liquid/supercritical cleaning with decreased polymer damage
US5316591A (en) * 1992-08-10 1994-05-31 Hughes Aircraft Company Cleaning by cavitation in liquefied gas
US5456759A (en) * 1992-08-10 1995-10-10 Hughes Aircraft Company Method using megasonic energy in liquefied gases
US5339844A (en) * 1992-08-10 1994-08-23 Hughes Aircraft Company Low cost equipment for cleaning using liquefiable gases
US5337446A (en) * 1992-10-27 1994-08-16 Autoclave Engineers, Inc. Apparatus for applying ultrasonic energy in precision cleaning
AU671895B2 (en) * 1993-04-12 1996-09-12 Colgate-Palmolive Company, The Tricritical point composition
US5312882A (en) * 1993-07-30 1994-05-17 The University Of North Carolina At Chapel Hill Heterogeneous polymerization in carbon dioxide
DE4429470A1 (de) * 1993-08-23 1995-03-02 Ciba Geigy Ag Verfahren zur Verbesserung der Stabilität von Färbungen auf hydrophoben Textilmaterial
US5377705A (en) * 1993-09-16 1995-01-03 Autoclave Engineers, Inc. Precision cleaning system
US5509431A (en) * 1993-12-14 1996-04-23 Snap-Tite, Inc. Precision cleaning vessel
DE4344021B4 (de) * 1993-12-23 2006-06-29 Deutsches Textilforschungszentrum Nord-West E.V. Färbung von beschlichteten textilen Flächengebilden aus Synthesefasermaterial in überkritischem Medien
US5467492A (en) * 1994-04-29 1995-11-21 Hughes Aircraft Company Dry-cleaning of garments using liquid carbon dioxide under agitation as cleaning medium
US5501761A (en) * 1994-10-18 1996-03-26 At&T Corp. Method for stripping conformal coatings from circuit boards
EP0711864B1 (de) * 1994-11-08 2001-06-13 Raytheon Company Trockenreinigung von Kleidungstücken unter Verwendung von Gasstrahlverwirbelung
US5505219A (en) * 1994-11-23 1996-04-09 Litton Systems, Inc. Supercritical fluid recirculating system for a precision inertial instrument parts cleaner
TR199700901T1 (xx) * 1995-03-06 1998-02-21 Unilever N.V. Yoğunlaştırılmış karbon dioksit ve bir surfaktan yardımcı kullanan kuru temizleme sistemi.
US5683977A (en) * 1995-03-06 1997-11-04 Lever Brothers Company, Division Of Conopco, Inc. Dry cleaning system using densified carbon dioxide and a surfactant adjunct
US5676705A (en) * 1995-03-06 1997-10-14 Lever Brothers Company, Division Of Conopco, Inc. Method of dry cleaning fabrics using densified carbon dioxide
US5783082A (en) * 1995-11-03 1998-07-21 University Of North Carolina Cleaning process using carbon dioxide as a solvent and employing molecularly engineered surfactants
US5669251A (en) * 1996-07-30 1997-09-23 Hughes Aircraft Company Liquid carbon dioxide dry cleaning system having a hydraulically powered basket

Also Published As

Publication number Publication date
US5783082A (en) 1998-07-21
US6224774B1 (en) 2001-05-01
JPH11514570A (ja) 1999-12-14
WO1997016264A1 (en) 1997-05-09
ATE245495T1 (de) 2003-08-15
US5944996A (en) 1999-08-31
DE69629216T2 (de) 2004-04-15
US5866005A (en) 1999-02-02
EP0958068B1 (de) 2003-07-23
EP0958068A1 (de) 1999-11-24
AU7525896A (en) 1997-05-22

Similar Documents

Publication Publication Date Title
DE69629216D1 (de) Neues reinigungsverfahren unter verwendung von kohlendioxid als lösungsmittel und anwendung von molekular vorbearbeiteten tensiden
DK0552192T3 (da) Forbedret tangentialstrømningsfiltreringsfremgangsmåde og -apparat
FI870173A0 (fi) Foerfarande och anordning foer avlaegsnande av vatten ur etanol.
DE69106815T2 (de) Verfahren zur Herstellung von veränderten Kohlenstoffmolekularsieben zur Gastrennung.
DK0732975T3 (da) Væskeforstøvningsapparat og -fremgangsmåde
UA25940C2 (uk) Спосіб розділеhhя суміші полімерhих частиhок
DE3771753D1 (de) Separationssystem unter verwendung von koaleszenztechniken.
ATE226726T1 (de) Verfahren und vorrichtung zur sammlung, lagerung und echtzeitanalyse von blut und anderen körperflüssigkeiten
ATE116158T1 (de) Verfahren zur herstellung von kollagenpartikeln und ihre verwendung als wirkstoffträger.
FI962086A0 (fi) Faasierotuslaite
DE69229706D1 (de) Verfahren zur Kultur von Mikroorganismen des Genus Helicobacter, Campylobacter und Arcobacter unter Verwendung von Cyclodextrinen oder Methylcellulose oder deren Gemischen enthaltenden Kulturmedien
KR910007848A (ko) 1-메톡시-2-프로판올과 물의 분리 방법
ATE348328T1 (de) Vorrichtung und verfahren zur herstellung von aus blut oder plasma bestehenden lösungen bekannter konzentration
DE69108102D1 (de) Verfahren zur Gewinnung von Maleinsäureanhydrid aus Reaktionsgasgemischen.
DK0479086T3 (da) Fremgangsmåde til indvinding af teicoplanin
DE59608211D1 (de) Verfahren zur umwandlung der achiralen meso-form oder des racemats eines ansa-metallocenkomplexes oder deren mischungen in eines seiner enantiomeren
ATE127033T1 (de) Verfahren zum entfernen von schadstoffen aus substrattrocknungsgas.
ATE224541T1 (de) Verfahren und kit zum abscheiden von plasma aus vollblut
DE59611093D1 (de) Verfahren zur Herstellung von Proteinen durch kontrollierte proteolytische spaltung von Pro-Proteinen
ATE158022T1 (de) Prozess zur produktion von cyclosporin-a und/oder c
CA2236529A1 (en) Novel cleaning process using carbon dioxide as a solvent and employing molecularly engineered surfactants
KR970032984A (ko) 바이오필터 및 그를 이용한 휘발성 유기화합물 제거방법
RU95101297A (ru) Способ мебранного выделения фтористого водорода
DE59402389D1 (de) Verfahren zur abtrennung von fulleren aus fullerenhaltigem russ
ATE197476T1 (de) Uv-polymerisierbare enzympaste zur herstellung von biosensoren und damit hergestellte biosensoren

Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee