DE69634641D1 - Dünnschichtkondensator mit diamantähnlichen nanoverbundstoffmaterialen - Google Patents

Dünnschichtkondensator mit diamantähnlichen nanoverbundstoffmaterialen

Info

Publication number
DE69634641D1
DE69634641D1 DE69634641T DE69634641T DE69634641D1 DE 69634641 D1 DE69634641 D1 DE 69634641D1 DE 69634641 T DE69634641 T DE 69634641T DE 69634641 T DE69634641 T DE 69634641T DE 69634641 D1 DE69634641 D1 DE 69634641D1
Authority
DE
Germany
Prior art keywords
diamond
nano
condenser
filed
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69634641T
Other languages
English (en)
Other versions
DE69634641T2 (de
Inventor
Arvind Goel
J Bray
C Martin
A Blakely
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bekaert NV SA
Original Assignee
Bekaert NV SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bekaert NV SA filed Critical Bekaert NV SA
Application granted granted Critical
Publication of DE69634641D1 publication Critical patent/DE69634641D1/de
Publication of DE69634641T2 publication Critical patent/DE69634641T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/002Details
    • H01G4/018Dielectrics
    • H01G4/06Solid dielectrics
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/002Details
    • H01G4/018Dielectrics
    • H01G4/06Solid dielectrics
    • H01G4/08Inorganic dielectrics
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S427/00Coating processes
    • Y10S427/103Diamond-like carbon coating, i.e. DLC
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/43Electric condenser making
    • Y10T29/435Solid dielectric type
DE69634641T 1995-10-03 1996-09-25 Dünnschichtkondensator mit diamantähnlichen nanoverbundstoffmaterialen Expired - Lifetime DE69634641T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US538475 1995-10-03
US08/538,475 US5638251A (en) 1995-10-03 1995-10-03 Capacitive thin films using diamond-like nanocomposite materials
PCT/US1996/015368 WO1997013263A1 (en) 1995-10-03 1996-09-25 Capacitive thin films using diamond-like nanocomposite materials

Publications (2)

Publication Number Publication Date
DE69634641D1 true DE69634641D1 (de) 2005-05-25
DE69634641T2 DE69634641T2 (de) 2006-03-02

Family

ID=24147084

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69634641T Expired - Lifetime DE69634641T2 (de) 1995-10-03 1996-09-25 Dünnschichtkondensator mit diamantähnlichen nanoverbundstoffmaterialen

Country Status (12)

Country Link
US (1) US5638251A (de)
EP (1) EP1008157B1 (de)
JP (1) JP3961025B2 (de)
KR (1) KR100449603B1 (de)
CN (1) CN1111882C (de)
AT (1) ATE293835T1 (de)
AU (1) AU700713B2 (de)
CA (1) CA2233631A1 (de)
DE (1) DE69634641T2 (de)
MX (1) MX9802581A (de)
TW (1) TW355803B (de)
WO (1) WO1997013263A1 (de)

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CN110407299A (zh) * 2018-04-28 2019-11-05 深圳先进技术研究院 一种多孔硼氮镍共掺杂金刚石电极及其制备方法和应用
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KR20220107849A (ko) * 2021-01-26 2022-08-02 삼성전자주식회사 박막 적층 구조체, 이를 포함하는 집적 소자, 및 상기 박막 적층체의 제조방법
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Also Published As

Publication number Publication date
DE69634641T2 (de) 2006-03-02
KR19990063955A (ko) 1999-07-26
AU700713B2 (en) 1999-01-14
AU7513296A (en) 1997-04-28
EP1008157B1 (de) 2005-04-20
KR100449603B1 (ko) 2004-11-16
TW355803B (en) 1999-04-11
WO1997013263A1 (en) 1997-04-10
MX9802581A (es) 1998-11-30
EP1008157A1 (de) 2000-06-14
CA2233631A1 (en) 1997-04-10
JPH11512885A (ja) 1999-11-02
ATE293835T1 (de) 2005-05-15
US5638251A (en) 1997-06-10
CN1111882C (zh) 2003-06-18
JP3961025B2 (ja) 2007-08-15
EP1008157A4 (de) 2001-02-07
CN1202978A (zh) 1998-12-23

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