DE69637351D1 - Elektromagnetischer stellantrieb - Google Patents

Elektromagnetischer stellantrieb

Info

Publication number
DE69637351D1
DE69637351D1 DE69637351T DE69637351T DE69637351D1 DE 69637351 D1 DE69637351 D1 DE 69637351D1 DE 69637351 T DE69637351 T DE 69637351T DE 69637351 T DE69637351 T DE 69637351T DE 69637351 D1 DE69637351 D1 DE 69637351D1
Authority
DE
Germany
Prior art keywords
electromagnetic actuator
actuator
electromagnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69637351T
Other languages
English (en)
Other versions
DE69637351T2 (de
Inventor
Norihiro Asada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Shingo KK
Original Assignee
Nihon Shingo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=27317598&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69637351(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Nihon Shingo KK filed Critical Nihon Shingo KK
Application granted granted Critical
Publication of DE69637351D1 publication Critical patent/DE69637351D1/de
Publication of DE69637351T2 publication Critical patent/DE69637351T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0062—Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
DE69637351T 1995-06-05 1996-06-05 Elektromagnetischer stellantrieb Expired - Lifetime DE69637351T2 (de)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP13808195 1995-06-05
JP13808295 1995-06-05
JP13808195 1995-06-05
JP13808295 1995-06-05
JP14881195 1995-06-15
JP14881195 1995-06-15
PCT/JP1996/001520 WO1996039643A1 (fr) 1995-06-05 1996-06-05 Actionneur electromagnetique

Publications (2)

Publication Number Publication Date
DE69637351D1 true DE69637351D1 (de) 2008-01-17
DE69637351T2 DE69637351T2 (de) 2008-11-27

Family

ID=27317598

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69637351T Expired - Lifetime DE69637351T2 (de) 1995-06-05 1996-06-05 Elektromagnetischer stellantrieb

Country Status (5)

Country Link
US (2) US6232861B1 (de)
EP (1) EP0774681B1 (de)
KR (1) KR100415246B1 (de)
DE (1) DE69637351T2 (de)
WO (1) WO1996039643A1 (de)

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DE60043726D1 (de) * 2000-08-09 2010-03-11 St Microelectronics Srl Mikroelektromechanische Struktur mit unterschiedlichen Teilen, die durch eine Vorrichtung zur Umwandlung von translatorischen in rotatorische Bewegungen miteinander mechanisch verbunden sind
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JP4544734B2 (ja) * 2000-12-21 2010-09-15 シチズンファインテックミヨタ株式会社 プレーナー型ガルバノミラー
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JP4102037B2 (ja) * 2001-04-26 2008-06-18 富士通株式会社 マイクロミラー素子およびその製造方法
JP3618317B2 (ja) * 2001-11-26 2005-02-09 日本レーザ電子株式会社 蛋白質チップ保持具
US6804959B2 (en) 2001-12-31 2004-10-19 Microsoft Corporation Unilateral thermal buckle-beam actuator
US7053519B2 (en) 2002-03-29 2006-05-30 Microsoft Corporation Electrostatic bimorph actuator
US20040004775A1 (en) * 2002-07-08 2004-01-08 Turner Arthur Monroe Resonant scanning mirror with inertially coupled activation
JP3793125B2 (ja) * 2002-07-18 2006-07-05 富士通株式会社 デバイスチップの製造方法
JP4020120B2 (ja) * 2002-07-31 2007-12-12 松下電工株式会社 マイクロリレー
US6924915B2 (en) * 2002-08-26 2005-08-02 Canon Kabushiki Kaisha Oscillation device, optical deflector using the oscillation device, and image display device and image forming apparatus using the optical deflector, and method of manufacturing the oscillation device
JP2005165276A (ja) * 2003-11-10 2005-06-23 Olympus Corp 光偏向器
JP4729289B2 (ja) * 2003-12-04 2011-07-20 オリンパス株式会社 光偏向器
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US7636101B2 (en) 2005-02-09 2009-12-22 Microvision, Inc. MEMS scanner adapted to a laser printer
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KR100713408B1 (ko) * 2005-09-01 2007-05-04 삼성전자주식회사 단측파대 변조 모듈과 그를 이용한 단측파대 변조 수단
JP2007252124A (ja) * 2006-03-17 2007-09-27 Nippon Signal Co Ltd:The 電磁アクチュエータ
KR100738114B1 (ko) * 2006-05-18 2007-07-12 삼성전자주식회사 액츄에이터 및 이차원 스캐너
KR100829563B1 (ko) * 2006-09-01 2008-05-14 삼성전자주식회사 전자기방식 마이크로 액츄에이터 및 그 제조방법
DE102006051207B4 (de) 2006-10-30 2019-09-12 Robert Bosch Gmbh Mikromechanisches Bauelement mit einer Mikroschwingvorrichtung und Verfahren zum Abgleich eines Bauelements
DE102006058563B3 (de) * 2006-12-12 2008-06-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikrospiegel-Aktuator mit Kapselungsmöglichkeit sowie Verfahren zur Herstellung
KR100868758B1 (ko) 2007-01-15 2008-11-13 삼성전기주식회사 압저항 센서를 구비한 회전형 ｍｅｍｓ 디바이스
KR100868759B1 (ko) 2007-01-25 2008-11-17 삼성전기주식회사 멤스 디바이스 및 이의 제조방법
DE09770219T8 (de) 2008-06-25 2013-04-25 Panasonic Electric Works Co., Ltd. Bewegliche struktur und lichtabtastspiegel damit
KR100973979B1 (ko) * 2008-08-22 2010-08-05 한국과학기술원 전자기력을 이용한 다축 구동기
US7952602B2 (en) 2008-09-02 2011-05-31 Coherent, Inc. Wide field diode-laser marker with swinging projection-optics
DE102008042346A1 (de) * 2008-09-25 2010-04-01 Robert Bosch Gmbh Magnetjoch, mikromechanisches Bauteil und Herstellungsverfahren für ein Magnetjoch und ein mikromechanisches Bauteil
US7952603B2 (en) * 2008-09-29 2011-05-31 Coherent, Inc. Diode-laser marker with one-axis scanning mirror mounted on a translatable carriage
US7961370B2 (en) * 2008-09-29 2011-06-14 Coherent, Inc. Two frequency resonantly excited MEMS mirror for diode-laser marker
US20100078857A1 (en) * 2008-09-29 2010-04-01 Coherent, Inc. Diode-laser marker with one-axis scanning mirror mounted on a translatable carriage
DE102010000878B4 (de) 2010-01-14 2022-04-28 Robert Bosch Gmbh Mikromechanisches Bauteil, Optikvorrichtung, Herstellungsverfahren für ein mikromechanisches Bauteil und Herstellungsverfahren für eine Optikvorrichtung
US9401240B2 (en) * 2010-03-01 2016-07-26 California Institute Of Technology Integrated passive iron shims in silicon
US8558859B2 (en) 2011-04-20 2013-10-15 Coherent, Inc. Laser printer with multiple laser-beam sources
JP2013034301A (ja) * 2011-08-02 2013-02-14 Nippon Signal Co Ltd:The プレーナ型電磁アクチュエータ
JP6180074B2 (ja) * 2011-08-30 2017-08-16 日本信号株式会社 プレーナ型電磁アクチュエータ
DE102012111716A1 (de) * 2012-12-03 2014-06-05 Trw Automotive Electronics & Components Gmbh Strahlungserfassungseinrichtung
WO2014192123A1 (ja) * 2013-05-30 2014-12-04 パイオニア株式会社 剛体構造体
US9310609B2 (en) 2014-07-25 2016-04-12 Hand Held Products, Inc. Axially reinforced flexible scan element
US20180025824A1 (en) * 2015-02-01 2018-01-25 K.A. Advertising Solutions Ltd. Electromagnetic actuator
JP2017181715A (ja) * 2016-03-30 2017-10-05 セイコーエプソン株式会社 光スキャナー用部材、光スキャナー、光スキャナーの製造方法、画像表示装置およびヘッドマウントディスプレイ
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JP6585147B2 (ja) 2017-12-01 2019-10-02 浜松ホトニクス株式会社 アクチュエータ装置
USD903614S1 (en) 2018-05-01 2020-12-01 Hamamatsu Photonics K.K. Laser beam reflector
USD907085S1 (en) * 2018-05-01 2021-01-05 Hamamatsu Photonics K.K. Laser beam reflector
JP1680507S (de) 2018-05-01 2021-03-08
JP1680388S (de) * 2018-05-01 2021-03-01
JP1625495S (de) * 2018-05-01 2019-03-18
JP1680387S (de) * 2018-05-01 2021-03-01
JP1680385S (de) * 2018-05-01 2021-03-01
JP1639597S (de) * 2018-05-01 2019-08-19
JP1680386S (de) * 2018-05-01 2021-03-01
JP1680755S (de) 2018-05-01 2021-03-08
JP1625135S (de) * 2018-05-01 2019-03-18
WO2020101110A1 (ko) * 2018-11-14 2020-05-22 고려오트론(주) 스페이서부를 구비하는 광 스캐너
CN113933987A (zh) * 2020-06-29 2022-01-14 华为技术有限公司 Mems微镜及光学扫描装置
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CN116601737A (zh) * 2021-12-13 2023-08-15 华为技术有限公司 微机电系统mems微镜及其制备方法、探测装置

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Also Published As

Publication number Publication date
US6232861B1 (en) 2001-05-15
KR100415246B1 (ko) 2004-06-12
DE69637351T2 (de) 2008-11-27
EP0774681B1 (de) 2007-12-05
KR970705042A (ko) 1997-09-06
EP0774681A1 (de) 1997-05-21
US20010052834A1 (en) 2001-12-20
EP0774681A4 (de) 1998-05-06
US6404313B2 (en) 2002-06-11
WO1996039643A1 (fr) 1996-12-12

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