DE69711702T2 - Verfahren und vorrichtung zur herstellung einer kohlenstoffreichen beschichtung auf einem beweglichen substrat - Google Patents

Verfahren und vorrichtung zur herstellung einer kohlenstoffreichen beschichtung auf einem beweglichen substrat

Info

Publication number
DE69711702T2
DE69711702T2 DE69711702T DE69711702T DE69711702T2 DE 69711702 T2 DE69711702 T2 DE 69711702T2 DE 69711702 T DE69711702 T DE 69711702T DE 69711702 T DE69711702 T DE 69711702T DE 69711702 T2 DE69711702 T2 DE 69711702T2
Authority
DE
Germany
Prior art keywords
carbon
producing
moving substrate
rich coating
rich
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69711702T
Other languages
English (en)
Other versions
DE69711702D1 (de
Inventor
M David
J Mcclure
P Maki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Co
Original Assignee
Minnesota Mining and Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/744,227 external-priority patent/US5888594A/en
Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co
Publication of DE69711702D1 publication Critical patent/DE69711702D1/de
Application granted granted Critical
Publication of DE69711702T2 publication Critical patent/DE69711702T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
DE69711702T 1996-11-05 1997-10-01 Verfahren und vorrichtung zur herstellung einer kohlenstoffreichen beschichtung auf einem beweglichen substrat Expired - Lifetime DE69711702T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/744,227 US5888594A (en) 1996-11-05 1996-11-05 Process for depositing a carbon-rich coating on a moving substrate
US08/938,890 US5948166A (en) 1996-11-05 1997-09-26 Process and apparatus for depositing a carbon-rich coating on a moving substrate
PCT/US1997/017733 WO1998020185A1 (en) 1996-11-05 1997-10-01 A process and apparatus for depositing a carbon-rich coating on a moving substrate

Publications (2)

Publication Number Publication Date
DE69711702D1 DE69711702D1 (de) 2002-05-08
DE69711702T2 true DE69711702T2 (de) 2002-11-21

Family

ID=27114284

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69711702T Expired - Lifetime DE69711702T2 (de) 1996-11-05 1997-10-01 Verfahren und vorrichtung zur herstellung einer kohlenstoffreichen beschichtung auf einem beweglichen substrat

Country Status (8)

Country Link
US (1) US5948166A (de)
EP (1) EP0953067B1 (de)
JP (1) JP4139441B2 (de)
KR (1) KR100502124B1 (de)
CN (1) CN1109130C (de)
AU (1) AU4605897A (de)
DE (1) DE69711702T2 (de)
WO (1) WO1998020185A1 (de)

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US7423155B2 (en) * 2003-11-14 2008-09-09 3M Innovative Properties Company N-sulfonyldicarboximide containing tethering compounds
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JP2007302928A (ja) * 2006-05-10 2007-11-22 Sumitomo Electric Ind Ltd 長尺基材連続処理用の搬送機構、それを用いた処理装置およびそれによって得られる長尺部材
JP4811108B2 (ja) * 2006-05-10 2011-11-09 住友電気工業株式会社 被覆層の厚み計量機構およびそれを用いた被覆層形成装置
EP2100130A1 (de) * 2006-12-29 2009-09-16 3M Innovative Properties Company Verfahren zur detektion von bioanalyten durch akustisch-mechanische detektionssysteme unter dem zusatz von liposomen
US8241713B2 (en) * 2007-02-21 2012-08-14 3M Innovative Properties Company Moisture barrier coatings for organic light emitting diode devices
WO2009009188A2 (en) * 2007-04-19 2009-01-15 3M Innovative Properties Company Uses of water-dispersible silica nanoparticles for attaching biomolecules
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KR200445155Y1 (ko) * 2007-07-06 2009-07-02 (주) 에이알티 이온건챔버의 가스유출 방지가 가능한 롤투롤스퍼터 시스템
US8080073B2 (en) * 2007-12-20 2011-12-20 3M Innovative Properties Company Abrasive article having a plurality of precisely-shaped abrasive composites
JP5597140B2 (ja) * 2007-12-31 2014-10-01 スリーエム イノベイティブ プロパティズ カンパニー プラズマ処理された研磨物品及び同物品の作製方法
KR101615787B1 (ko) * 2008-12-30 2016-04-26 쓰리엠 이노베이티브 프로퍼티즈 컴파니 나노구조화 표면의 제조 방법
BRPI0923760A2 (pt) 2008-12-30 2016-01-26 3M Innovative Properties Co artigos nanoestruturados e métodos para fabricação de artigos nanoestruturados
US9435916B2 (en) 2008-12-30 2016-09-06 3M Innovative Properties Company Antireflective articles and methods of making the same
JP5542488B2 (ja) * 2010-03-18 2014-07-09 富士フイルム株式会社 成膜装置
JP5929761B2 (ja) * 2010-12-15 2016-06-08 株式会社ニコン 基板処理システム及び表示素子の製造方法
CN105121096B (zh) 2013-03-29 2018-10-16 3M创新有限公司 非织造磨料制品及其制备方法
JP6373982B2 (ja) 2013-06-24 2018-08-15 スリーエム イノベイティブ プロパティズ カンパニー 研磨粒子、研磨粒子の作製方法、及び研磨物品
DE102013019058B4 (de) * 2013-11-15 2016-03-24 Cinogy Gmbh Gerät zur Behandlung einer Fläche mit einem Plasma
JP6030542B2 (ja) * 2013-12-26 2016-11-24 エステック株式会社 プラズマ処理装置
KR102292300B1 (ko) 2014-05-20 2021-08-24 쓰리엠 이노베이티브 프로퍼티즈 컴파니 복수의 연마 요소의 상이한 세트들을 갖는 연마 재료
CN105018900A (zh) * 2015-06-05 2015-11-04 刘南林 气相打印技术与设备
KR102439501B1 (ko) * 2022-07-04 2022-09-02 주식회사 세미안 카본 코팅 장치용 카본 파이버 자동공급 장치

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Also Published As

Publication number Publication date
AU4605897A (en) 1998-05-29
DE69711702D1 (de) 2002-05-08
WO1998020185A1 (en) 1998-05-14
KR20000053077A (ko) 2000-08-25
CN1109130C (zh) 2003-05-21
JP4139441B2 (ja) 2008-08-27
US5948166A (en) 1999-09-07
CN1235647A (zh) 1999-11-17
EP0953067A1 (de) 1999-11-03
JP2001508124A (ja) 2001-06-19
EP0953067B1 (de) 2002-04-03
KR100502124B1 (ko) 2005-07-20

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