DE69712311T2 - Verfahren und gerät zur erzeugung optische farbbilder mittels eines gitter-lichtventilarrays - Google Patents

Verfahren und gerät zur erzeugung optische farbbilder mittels eines gitter-lichtventilarrays

Info

Publication number
DE69712311T2
DE69712311T2 DE69712311T DE69712311T DE69712311T2 DE 69712311 T2 DE69712311 T2 DE 69712311T2 DE 69712311 T DE69712311 T DE 69712311T DE 69712311 T DE69712311 T DE 69712311T DE 69712311 T2 DE69712311 T2 DE 69712311T2
Authority
DE
Germany
Prior art keywords
elements
light
modulator
configuration
reflective surfaces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69712311T
Other languages
English (en)
Other versions
DE69712311D1 (de
Inventor
David M Bloom
Andrew Huibers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leland Stanford Junior University
Original Assignee
Leland Stanford Junior University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leland Stanford Junior University filed Critical Leland Stanford Junior University
Publication of DE69712311D1 publication Critical patent/DE69712311D1/de
Application granted granted Critical
Publication of DE69712311T2 publication Critical patent/DE69712311T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/001—Structures having a reduced contact area, e.g. with bumps or with a textured surface
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1828—Diffraction gratings having means for producing variable diffraction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/11—Treatments for avoiding stiction of elastic or moving parts of MEMS
    • B81C2201/115—Roughening a surface
DE69712311T 1996-01-18 1997-01-17 Verfahren und gerät zur erzeugung optische farbbilder mittels eines gitter-lichtventilarrays Expired - Lifetime DE69712311T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/591,231 US6219015B1 (en) 1992-04-28 1996-01-18 Method and apparatus for using an array of grating light valves to produce multicolor optical images
PCT/US1997/000854 WO1997026569A2 (en) 1996-01-18 1997-01-17 Method and apparatus for using an array of grating light valves to produce multicolor optical images

Publications (2)

Publication Number Publication Date
DE69712311D1 DE69712311D1 (de) 2002-06-06
DE69712311T2 true DE69712311T2 (de) 2002-12-19

Family

ID=24365635

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69712311T Expired - Lifetime DE69712311T2 (de) 1996-01-18 1997-01-17 Verfahren und gerät zur erzeugung optische farbbilder mittels eines gitter-lichtventilarrays

Country Status (7)

Country Link
US (2) US6219015B1 (de)
EP (1) EP0875010B1 (de)
JP (1) JP4053598B2 (de)
AT (1) ATE217094T1 (de)
CA (1) CA2243347C (de)
DE (1) DE69712311T2 (de)
WO (1) WO1997026569A2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106415346A (zh) * 2014-06-03 2017-02-15 华为技术有限公司 二维光栅偏振分束器及光相干接收机

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CN106415346A (zh) * 2014-06-03 2017-02-15 华为技术有限公司 二维光栅偏振分束器及光相干接收机
CN106415346B (zh) * 2014-06-03 2019-05-10 华为技术有限公司 二维光栅偏振分束器及光相干接收机

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US6219015B1 (en) 2001-04-17
DE69712311D1 (de) 2002-06-06
WO1997026569A2 (en) 1997-07-24
EP0875010B1 (de) 2002-05-02
WO1997026569A3 (en) 1997-10-09
CA2243347A1 (en) 1997-07-24
EP0875010A2 (de) 1998-11-04
ATE217094T1 (de) 2002-05-15
JP2001518198A (ja) 2001-10-09
US5808797A (en) 1998-09-15
CA2243347C (en) 2005-05-10
JP4053598B2 (ja) 2008-02-27

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