DE69715676D1 - Fotoresistschichttragender Film - Google Patents

Fotoresistschichttragender Film

Info

Publication number
DE69715676D1
DE69715676D1 DE69715676T DE69715676T DE69715676D1 DE 69715676 D1 DE69715676 D1 DE 69715676D1 DE 69715676 T DE69715676 T DE 69715676T DE 69715676 T DE69715676 T DE 69715676T DE 69715676 D1 DE69715676 D1 DE 69715676D1
Authority
DE
Germany
Prior art keywords
photoresist film
photoresist
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69715676T
Other languages
English (en)
Other versions
DE69715676T2 (de
Inventor
Takafumi Kudo
Tetsuo Yoshida
Yukihiko Minamihira
Kazutaka Masaoka
Youji Tanaka
Noriyo Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teijin Ltd
Original Assignee
Teijin Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP12457796A external-priority patent/JP3364380B2/ja
Priority claimed from JP12457696A external-priority patent/JP3150902B2/ja
Application filed by Teijin Ltd filed Critical Teijin Ltd
Application granted granted Critical
Publication of DE69715676D1 publication Critical patent/DE69715676D1/de
Publication of DE69715676T2 publication Critical patent/DE69715676T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18Manufacture of films or sheets
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/06Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G63/00Macromolecular compounds obtained by reactions forming a carboxylic ester link in the main chain of the macromolecule
    • C08G63/02Polyesters derived from hydroxycarboxylic acids or from polycarboxylic acids and polyhydroxy compounds
    • C08G63/12Polyesters derived from hydroxycarboxylic acids or from polycarboxylic acids and polyhydroxy compounds derived from polycarboxylic acids and polyhydroxy compounds
    • C08G63/16Dicarboxylic acids and dihydroxy compounds
    • C08G63/18Dicarboxylic acids and dihydroxy compounds the acids or hydroxy compounds containing carbocyclic rings
    • C08G63/181Acids containing aromatic rings
    • C08G63/183Terephthalic acids
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2367/00Characterised by the use of polyesters obtained by reactions forming a carboxylic ester link in the main chain; Derivatives of such polymers
    • C08J2367/02Polyesters derived from dicarboxylic acids and dihydroxy compounds
    • C08J2367/03Polyesters derived from dicarboxylic acids and dihydroxy compounds the dicarboxylic acids and dihydroxy compounds having the hydroxy and the carboxyl groups directly linked to aromatic rings
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K2201/00Specific properties of additives
    • C08K2201/002Physical properties
    • C08K2201/005Additives being defined by their particle size in general
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L67/00Compositions of polyesters obtained by reactions forming a carboxylic ester link in the main chain; Compositions of derivatives of such polymers
    • C08L67/02Polyesters derived from dicarboxylic acids and dihydroxy compounds
    • C08L67/03Polyesters derived from dicarboxylic acids and dihydroxy compounds the dicarboxylic acids and dihydroxy compounds having the carboxyl- and the hydroxy groups directly linked to aromatic rings
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16Coating processes; Apparatus therefor
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16Coating processes; Apparatus therefor
    • G03F7/161Coating processes; Apparatus therefor using a previously coated surface, e.g. by stamping or by transfer lamination
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0073Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0079Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the method of application or removal of the mask
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4644Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
DE69715676T 1996-05-20 1997-05-12 Fotoresistschichttragender Film Expired - Fee Related DE69715676T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP12457796A JP3364380B2 (ja) 1996-05-20 1996-05-20 ポリエステルフイルム
JP12457696A JP3150902B2 (ja) 1996-05-20 1996-05-20 ポリエステルフイルム

Publications (2)

Publication Number Publication Date
DE69715676D1 true DE69715676D1 (de) 2002-10-24
DE69715676T2 DE69715676T2 (de) 2003-05-22

Family

ID=26461248

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69703264T Expired - Fee Related DE69703264T2 (de) 1996-05-20 1997-05-12 Laminat aus einem Fotoresistschichtträger und einem Fotoresist
DE69715676T Expired - Fee Related DE69715676T2 (de) 1996-05-20 1997-05-12 Fotoresistschichttragender Film

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69703264T Expired - Fee Related DE69703264T2 (de) 1996-05-20 1997-05-12 Laminat aus einem Fotoresistschichtträger und einem Fotoresist

Country Status (5)

Country Link
US (2) US5994027A (de)
EP (2) EP0961173B1 (de)
KR (1) KR100287237B1 (de)
DE (2) DE69703264T2 (de)
TW (1) TW477916B (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0961173B1 (de) * 1996-05-20 2002-09-18 Teijin Limited Fotoresistschichttragender Film
KR100370557B1 (ko) * 1998-10-27 2003-03-17 에스케이씨 주식회사 포토레지스트 필름의 베이스 필름용 폴리에스테르 필름
TW403952B (en) * 1998-11-26 2000-09-01 United Microelectronics Corp The method of removing the photoresist
US6896941B1 (en) * 1999-06-01 2005-05-24 Teijin Limited Polyester film for use as an ink image receiving base film and ink
KR100687984B1 (ko) 2003-09-05 2007-02-27 주식회사 코오롱 저휘발성 방향족 폴리에스테르 수지조성물

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS566498A (en) * 1979-06-26 1981-01-23 Hitachi Chemical Co Ltd Method of manufacturing flexible printed circuit board
JPH07106394B2 (ja) * 1989-05-17 1995-11-15 東洋製罐株式会社 絞りしごき缶の製造方法
JP3016943B2 (ja) * 1992-02-12 2000-03-06 帝人株式会社 金属板貼合せ加工用ポリエステルフイルム
KR0171632B1 (ko) * 1992-01-16 1999-03-30 이따가끼 히로시 금속판 접합 가공용 폴리에스테르 필름 및 그 사용
DE69326399T2 (de) * 1992-07-22 2000-05-25 Teijin Ltd Biaxial orentierter, mehrschichtiger Polyesterfilm, geeignet zum Kleben auf Metallblech
EP0685509B1 (de) * 1993-12-10 2001-02-28 Teijin Limited Durchsichtige folie zur beschichtung einer metalldose
JPH0996907A (ja) * 1995-10-02 1997-04-08 Tamapori Kk 感光性フィルム
EP0961173B1 (de) * 1996-05-20 2002-09-18 Teijin Limited Fotoresistschichttragender Film

Also Published As

Publication number Publication date
DE69715676T2 (de) 2003-05-22
TW477916B (en) 2002-03-01
US5994027A (en) 1999-11-30
EP0961173A1 (de) 1999-12-01
US6140013A (en) 2000-10-31
DE69703264T2 (de) 2001-05-17
DE69703264D1 (de) 2000-11-16
EP0961173B1 (de) 2002-09-18
KR970074833A (ko) 1997-12-10
KR100287237B1 (ko) 2001-04-16
EP0809151A1 (de) 1997-11-26
EP0809151B1 (de) 2000-10-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee