DE69718328T2 - Magnetrongerät - Google Patents

Magnetrongerät Download PDF

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Publication number
DE69718328T2
DE69718328T2 DE69718328T DE69718328T DE69718328T2 DE 69718328 T2 DE69718328 T2 DE 69718328T2 DE 69718328 T DE69718328 T DE 69718328T DE 69718328 T DE69718328 T DE 69718328T DE 69718328 T2 DE69718328 T2 DE 69718328T2
Authority
DE
Germany
Prior art keywords
magnetron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69718328T
Other languages
English (en)
Other versions
DE69718328D1 (de
Inventor
Ing-Feng Hu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dow Global Technologies LLC
Original Assignee
Dow Global Technologies LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Global Technologies LLC filed Critical Dow Global Technologies LLC
Publication of DE69718328D1 publication Critical patent/DE69718328D1/de
Application granted granted Critical
Publication of DE69718328T2 publication Critical patent/DE69718328T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means
DE69718328T 1996-07-30 1997-07-28 Magnetrongerät Expired - Lifetime DE69718328T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US68845496A 1996-07-30 1996-07-30
US08/898,158 US5993598A (en) 1996-07-30 1997-07-22 Magnetron
PCT/US1997/013473 WO1998005057A1 (en) 1996-07-30 1997-07-28 Magnetron

Publications (2)

Publication Number Publication Date
DE69718328D1 DE69718328D1 (de) 2003-02-13
DE69718328T2 true DE69718328T2 (de) 2004-01-15

Family

ID=27104231

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69718328T Expired - Lifetime DE69718328T2 (de) 1996-07-30 1997-07-28 Magnetrongerät

Country Status (9)

Country Link
US (1) US5993598A (de)
EP (1) EP0919066B1 (de)
JP (1) JP2002505792A (de)
KR (1) KR100454318B1 (de)
CN (1) CN1106670C (de)
AU (1) AU3902397A (de)
BR (1) BR9710719A (de)
DE (1) DE69718328T2 (de)
WO (1) WO1998005057A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1142577C (zh) 1997-10-01 2004-03-17 陶氏化学公司 用于磁控管等离子体产生装置的双面簇射头电极
GB2332087A (en) * 1997-12-02 1999-06-09 Superion Ltd Apparatus and method relating to ion beams and gaseous plasma
US20020006487A1 (en) * 2000-06-06 2002-01-17 O'connor Paul J. Transmission barrier layer for polymers and containers
KR20050086510A (ko) * 2002-11-12 2005-08-30 다우 글로벌 테크놀로지스 인크. 용기상에 플라즈마 코팅을 퇴적시키기 위한 방법 및 장치
US7513953B1 (en) 2003-11-25 2009-04-07 Nano Scale Surface Systems, Inc. Continuous system for depositing films onto plastic bottles and method
CN103108482B (zh) * 2013-01-11 2015-08-05 哈尔滨工业大学 一种等离子体射流密度大范围调节器
JP2018028109A (ja) * 2014-12-22 2018-02-22 旭硝子株式会社 プラズマｃｖｄ装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL50072C (de) * 1935-12-28
US4013532A (en) * 1975-03-03 1977-03-22 Airco, Inc. Method for coating a substrate
HU179482B (en) * 1979-02-19 1982-10-28 Mikroelektronikai Valalat Penning pulverizel source
US4260647A (en) * 1979-06-13 1981-04-07 Rca Corporation Method of depositing an abrasive layer
JPS59179152A (ja) * 1983-03-31 1984-10-11 Agency Of Ind Science & Technol アモルファスシリコン半導体薄膜の製造方法
JPS60156547A (ja) * 1984-01-27 1985-08-16 Tokuyama Soda Co Ltd プラズマ処理方法
DE3521318A1 (de) * 1985-06-14 1986-12-18 Leybold-Heraeus GmbH, 5000 Köln Verfahren und vorrichtung zum behandeln, insbesondere zum beschichten, von substraten mittels einer plasmaentladung
EP0273741B1 (de) * 1986-12-29 1991-10-23 Sumitomo Metal Industries, Ltd. Plasmagerät
DE3721373A1 (de) * 1987-06-29 1989-01-12 Leybold Ag Beschichtungsvorrichtung
JPH01302726A (ja) * 1988-02-10 1989-12-06 Japan Synthetic Rubber Co Ltd 反応性イオンエッチング装置
US5178743A (en) * 1989-06-15 1993-01-12 Microelectronics And Computer Technology Corporation Cylindrical magnetron sputtering system
JP3033104B2 (ja) * 1989-11-17 2000-04-17 ソニー株式会社 エッチング方法
US5298587A (en) * 1992-12-21 1994-03-29 The Dow Chemical Company Protective film for articles and method
EP0634778A1 (de) * 1993-07-12 1995-01-18 The Boc Group, Inc. Hohlkathoden-Netzwerk
US5433786A (en) * 1993-08-27 1995-07-18 The Dow Chemical Company Apparatus for plasma enhanced chemical vapor deposition comprising shower head electrode with magnet disposed therein
US5364666A (en) * 1993-09-23 1994-11-15 Becton, Dickinson And Company Process for barrier coating of plastic objects

Also Published As

Publication number Publication date
KR100454318B1 (ko) 2004-10-26
DE69718328D1 (de) 2003-02-13
AU3902397A (en) 1998-02-20
EP0919066B1 (de) 2003-01-08
JP2002505792A (ja) 2002-02-19
US5993598A (en) 1999-11-30
BR9710719A (pt) 1999-08-17
CN1226339A (zh) 1999-08-18
CN1106670C (zh) 2003-04-23
WO1998005057A1 (en) 1998-02-05
KR20000029621A (ko) 2000-05-25
EP0919066A1 (de) 1999-06-02

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: DOW GLOBAL TECHNOLOGIES, INC., MIDLAND, MICH., US

8364 No opposition during term of opposition