DE69729827D1 - Deformierbare Spiegelvorrichtung und Herstellungsmethode - Google Patents

Deformierbare Spiegelvorrichtung und Herstellungsmethode

Info

Publication number: DE69729827D1
Authority: DE; Germany
Prior art keywords: manufacturing; mirror device; deformable mirror; deformable; mirror
Prior art date: 1996-06-10
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

DE69729827T

Other languages

English (en)

Other versions

DE69729827T2 (de

Inventor

Bum-Kyoo Choi

Yong-Kweon Kim

Jong-Woo Shin

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Samsung Electronics Co Ltd

Original Assignee

Samsung Electronics Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1996-06-10

Filing date

1997-06-09

Publication date

2004-08-19

1997-06-09 Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd

2004-08-19 Application granted granted Critical

2004-08-19 Publication of DE69729827D1 publication Critical patent/DE69729827D1/de

2005-07-07 Publication of DE69729827T2 publication Critical patent/DE69729827T2/de

2017-06-10 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

Classifications

- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

DE69729827T 1996-06-10 1997-06-09 Deformierbare Spiegelvorrichtung und Herstellungsmethode Expired - Lifetime DE69729827T2 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
KR9620611		1996-06-10
KR1019960020611A KR100243190B1 (ko)	1996-06-10	1996-06-10	가동미러장치 및 그 제조방법

Publications (2)

Publication Number	Publication Date
DE69729827D1 true DE69729827D1 (de)	2004-08-19
DE69729827T2 DE69729827T2 (de)	2005-07-07

Family

ID=19461309

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69729827T Expired - Lifetime DE69729827T2 (de)	1996-06-10	1997-06-09	Deformierbare Spiegelvorrichtung und Herstellungsmethode

Country Status (7)

Country	Link
US (2)	US5936760A (de)
EP (1)	EP0813089B1 (de)
JP (1)	JP3194889B2 (de)
KR (1)	KR100243190B1 (de)
CN (1)	CN1172208C (de)
DE (1)	DE69729827T2 (de)
MY (1)	MY116908A (de)

Families Citing this family (63)

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EP0877272B1 (de) *	1997-05-08	2002-07-31	Texas Instruments Incorporated	Verbesserungen für räumliche Lichtmodulatoren
US6962419B2 (en) *	1998-09-24	2005-11-08	Reflectivity, Inc	Micromirror elements, package for the micromirror elements, and projection system therefor
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EP2343128A1 (de)	1999-09-17	2011-07-13	BioArray Solutions Ltd.	Substrat und Chip zum Durchführen von Bioassays
US6753638B2 (en)	2000-02-03	2004-06-22	Calient Networks, Inc.	Electrostatic actuator for micromechanical systems
US6283601B1 (en) *	2000-04-14	2001-09-04	C Speed Corporation	Optical mirror system with multi-axis rotational control
US6585383B2 (en)	2000-05-18	2003-07-01	Calient Networks, Inc.	Micromachined apparatus for improved reflection of light
US6560384B1 (en)	2000-06-01	2003-05-06	Calient Networks, Inc.	Optical switch having mirrors arranged to accommodate freedom of movement
DE20122371U1 (de) *	2000-08-03	2005-05-19	Reflectivity Inc., Sunnyvale	Projektionsanzeigeeinrichtung
KR100349941B1 (ko) *	2000-09-29	2002-08-24	삼성전자 주식회사	광 스위칭을 위한 마이크로 액추에이터 및 그 제조방법
US6825967B1 (en)	2000-09-29	2004-11-30	Calient Networks, Inc.	Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same
US6512625B2 (en) *	2000-11-22	2003-01-28	Ball Semiconductor, Inc.	Light modulation device and system
US6433917B1 (en) *	2000-11-22	2002-08-13	Ball Semiconductor, Inc.	Light modulation device and system
FR2820834B1 (fr) *	2001-02-15	2004-06-25	Teem Photonics	Procede de fabrication d'un micro-miroir optique et micro-miroir ou matrice de micro-miroirs obtenu par ce procede
TW556044B (en) *	2001-02-15	2003-10-01	Sipix Imaging Inc	Process for roll-to-roll manufacture of a display by synchronized photolithographic exposure on a substrate web
FR2820833B1 (fr) *	2001-02-15	2004-05-28	Teem Photonics	Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir
JP2003005101A (ja) *	2001-06-26	2003-01-08	Seiko Epson Corp	光変調装置及びその製造方法
JP3740444B2 (ja) *	2001-07-11	2006-02-01	キヤノン株式会社	光偏向器、それを用いた光学機器、ねじれ揺動体
US7728339B1 (en)	2002-05-03	2010-06-01	Calient Networks, Inc.	Boundary isolation for microelectromechanical devices
US6984049B2 (en) *	2002-11-04	2006-01-10	General Dynamics Advanced Information Systems, Inc.	Hinged substrate for large-aperture, lightweight, deformable mirrors
US20050094241A1 (en) *	2003-11-01	2005-05-05	Fusao Ishii	Electromechanical micromirror devices and methods of manufacturing the same
US7054052B2 (en) *	2003-09-04	2006-05-30	Frank Niklaus	Adhesive sacrificial bonding of spatial light modulators
CN101084462B (zh) *	2003-10-27	2010-06-02	视频有限公司	高反差空间光调制器和方法
US7973994B2 (en) *	2003-11-01	2011-07-05	Silicon Quest Kabushiki-Kaisha	Spatial light modulator
US7835062B2 (en) *	2006-08-30	2010-11-16	Silicon Quest Kabushiki-Kaisha	Mircromirror device having a vertical hinge
US8228595B2 (en) *	2003-11-01	2012-07-24	Silicon Quest Kabushiki-Kaisha	Sequence and timing control of writing and rewriting pixel memories with substantially lower data rate
US8179591B2 (en) *	2003-11-01	2012-05-15	Silicon Quest Kabushiki-Kaisha	Spatial light modulator and mirror array device
US7183618B2 (en) *	2004-08-14	2007-02-27	Fusao Ishii	Hinge for micro-mirror devices
US7605971B2 (en) *	2003-11-01	2009-10-20	Silicon Quest Kabushiki-Kaisha	Plurality of hidden hinges for mircromirror device
US7643195B2 (en) *	2003-11-01	2010-01-05	Silicon Quest Kabushiki-Kaisha	Mirror device
US20090207325A1 (en) *	2003-11-01	2009-08-20	Naoya Sugimoto	Algorithm for SLM of single hinge type
US8064123B2 (en) *	2003-11-01	2011-11-22	Silicon Quest Kabushiki-Kaisha	Mirror device and MEMS device comprising layered electrode
US20090180038A1 (en) *	2003-11-01	2009-07-16	Naoya Sugimoto	Mirror control within time slot for SLM
US7760415B2 (en) *	2003-11-01	2010-07-20	Silicon Quest Kabushiki-Kaisha	Micro mirror device
US7876488B2 (en) *	2003-11-01	2011-01-25	Silicon Quest Kabushiki-Kaisha	Mirror device having vertical hinge
US8154474B2 (en) *	2003-11-01	2012-04-10	Silicon Quest Kabushiki Kaisha	Driving method of memory access
US7933060B2 (en) *	2003-11-01	2011-04-26	Silicon Quest Kabushiki-Kaisha	Three states of micro mirror device
US7733558B2 (en) *	2003-11-01	2010-06-08	Silicon Quest Kabushiki-Kaisha	Display device with an addressable movable electrode
US20090207164A1 (en) *	2003-11-01	2009-08-20	Naoya Sugimoto	Mirror control within time slot for SLM
US20090207324A1 (en) *	2003-11-01	2009-08-20	Naoya Sugimoto	Circuit for SLM's pixel
US20090195858A1 (en) *	2003-11-01	2009-08-06	Naoya Sugimoto	Changing an electrode function
US8081371B2 (en) *	2003-11-01	2011-12-20	Silicon Quest Kabushiki-Kaisha	Spatial light modulator and display apparatus
US7957050B2 (en)	2003-11-01	2011-06-07	Silicon Quest Kabushiki-Kaisha	Mirror device comprising layered electrode
US7969395B2 (en)	2003-11-01	2011-06-28	Silicon Quest Kabushiki-Kaisha	Spatial light modulator and mirror device
US7755830B2 (en) *	2003-11-01	2010-07-13	Silicon Quest Kabushiki-Kaisha	Micro mirror device
US8858811B2 (en) *	2003-11-01	2014-10-14	Fred Ishii	Method for manufacturing a mirror device by means of a plurality of sacrificial layers
CN100368862C (zh) *	2004-01-16	2008-02-13	侯继东	一种可调反射式装置
US8115986B2 (en) *	2004-08-14	2012-02-14	Silicon Quest Kabushiki-Kaisha	Mirror device comprising drive electrode equipped with stopper function
WO2006129797A1 (ja) *	2005-06-03	2006-12-07	Kuraray Co., Ltd.	背面投写型表示装置
KR101423321B1 (ko) *	2005-07-22	2014-07-30	퀄컴 엠이엠에스 테크놀로지스, 인크.	지지 구조물들을 가지는 전자기계 장치들 및 그 제조방법들
US7449759B2 (en) *	2005-08-30	2008-11-11	Uni-Pixel Displays, Inc.	Electromechanical dynamic force profile articulating mechanism
US7321457B2 (en)	2006-06-01	2008-01-22	Qualcomm Incorporated	Process and structure for fabrication of MEMS device having isolated edge posts
US8023172B2 (en) *	2006-08-30	2011-09-20	Silicon Quest Kabushiki-Kaisha	Mirror device
US7652813B2 (en) *	2006-08-30	2010-01-26	Silicon Quest Kabushiki-Kaisha	Mirror device
US7649673B2 (en) *	2007-02-26	2010-01-19	Silicon Quest Kabushiki-Kaisha	Micromirror device with a single address electrode
US7848005B2 (en) *	2007-11-16	2010-12-07	Silicon Quest Kabushiki-Kaisha	Spatial light modulator implemented with a mirror array device
US20090128887A1 (en) *	2007-11-16	2009-05-21	Naoya Sugimoto	Spatial light modulator and mirror array device
US20090128464A1 (en) *	2007-11-16	2009-05-21	Naoya Sugimoto	Mirror array device
US7876492B2 (en) *	2007-11-16	2011-01-25	Silicon Quest Kabushiki-Kaisha	Spatial light modulator and mirror array device
US20090128462A1 (en) *	2007-11-16	2009-05-21	Naoya Sugimoto	Spatial light modulator and mirror device
US20100149623A1 (en) *	2008-12-17	2010-06-17	Silverbrook Research Pty Ltd	Method of fabricating micro-mirror assembly
US20120086948A1 (en) *	2010-10-08	2012-04-12	Electronics And Telecommunications Research Institute	Optical coherence tomography apparatus for enhanced axial contrast and reference mirror having multiple planes for the same
CN102253486B (zh) *	2011-08-05	2013-07-10	中国科学院光电技术研究所	偏转轴可自由变换的二维mems倾斜镜

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US4592628A (en) *	1981-07-01	1986-06-03	International Business Machines	Mirror array light valve
US4710732A (en) *	1984-07-31	1987-12-01	Texas Instruments Incorporated	Spatial light modulator and method
US5083857A (en) *	1990-06-29	1992-01-28	Texas Instruments Incorporated	Multi-level deformable mirror device
US5018256A (en) *	1990-06-29	1991-05-28	Texas Instruments Incorporated	Architecture and process for integrating DMD with control circuit substrates
US5673139A (en) *	1993-07-19	1997-09-30	Medcom, Inc.	Microelectromechanical television scanning device and method for making the same
US5447600A (en) *	1994-03-21	1995-09-05	Texas Instruments	Polymeric coatings for micromechanical devices

1996
- 1996-06-10 KR KR1019960020611A patent/KR100243190B1/ko not_active IP Right Cessation
1997
- 1997-06-06 JP JP14939197A patent/JP3194889B2/ja not_active Expired - Fee Related
- 1997-06-09 DE DE69729827T patent/DE69729827T2/de not_active Expired - Lifetime
- 1997-06-09 CN CNB971129193A patent/CN1172208C/zh not_active Expired - Fee Related
- 1997-06-09 EP EP97303985A patent/EP0813089B1/de not_active Expired - Lifetime
- 1997-06-09 MY MYPI97002566A patent/MY116908A/en unknown
- 1997-06-10 US US08/872,160 patent/US5936760A/en not_active Expired - Fee Related
1999
- 1999-04-30 US US09/306,557 patent/US6128121A/en not_active Expired - Fee Related

Also Published As

Publication number	Publication date
JP3194889B2 (ja)	2001-08-06
MY116908A (en)	2004-04-30
CN1177112A (zh)	1998-03-25
EP0813089B1 (de)	2004-07-14
EP0813089A3 (de)	1998-07-15
DE69729827T2 (de)	2005-07-07
KR100243190B1 (ko)	2000-02-01
US6128121A (en)	2000-10-03
KR980006400A (ko)	1998-03-30
CN1172208C (zh)	2004-10-20
EP0813089A2 (de)	1997-12-17
JPH1062699A (ja)	1998-03-06
US5936760A (en)	1999-08-10

Legal Events

Date	Code	Title	Description
2005-08-11	8364	No opposition during term of opposition

Publication	Publication Date	Title
DE69729827D1 (de)	2004-08-19	Deformierbare Spiegelvorrichtung und Herstellungsmethode
DE69811861D1 (de)	2003-04-10	Optisches herstellungsverfahren und - gerät
DE69721411D1 (de)	2003-06-05	Halbleiteranordnung und Herstellungsverfahren dafür
DE69503473D1 (de)	1998-08-20	Festkörper-Bildaufnahme-Vorrichtung und Herstellungsmethode
DE69635745D1 (de)	2006-04-06	Elektrostatische Haltevorrichtung und Herstellungsverfahren derselben
DE69527330T2 (de)	2003-03-13	Halbleiteranordnung und Herstellungsverfahren
DE69214568D1 (de)	1996-11-21	Deformierbare Farbspiegelvorrichtung und Herstellungsmethode
DE69736600D1 (de)	2006-10-12	Hermetisch heisssiegelbarer film und herstellungsverfahren
DE69737588D1 (de)	2007-05-24	Halbleiteranordnung und Herstellungsverfahren dafür
DE69734921D1 (de)	2006-01-26	Antibeschlag-gegenstand und dessen herstellungsverfahren
DE69637488D1 (de)	2008-05-21	Halbleiter und Halbleitermodul
DE69708619D1 (de)	2002-01-10	Elektroentionisierungsvorrichtung und methode
DE69808948T2 (de)	2003-06-18	Stossfänger und herstellungsverfahren
DE69727608D1 (de)	2004-03-25	Halbleiterlaservorrichtung und zugehöriges Entwurfsverfahren
DE69830796D1 (de)	2005-08-11	Optisches regelverfahren und gerät
DE69517913T2 (de)	2000-12-07	Fixiervorrichtung und Fixierverfahren
KR960013620A (ko)	1996-05-22	성형 방법 및 성형 장치
DE69735327D1 (de)	2006-04-27	Optische Halbleitervorrichtung und Herstellungsverfahren
DE69703563T2 (de)	2001-05-31	Innenhochdruck-umformverfahren und umformvorrichtung
DE69726642D1 (de)	2004-01-22	Übertragungsverfahren und Übertragungsvorrichtung
DE69704287T2 (de)	2001-08-09	Elektrolumineszenz-Vorrichtung und Herstellungsverfahren
DE19882097T1 (de)	2000-03-23	Codiereinrichtung und Codierverfahren
DE69737490D1 (de)	2007-05-03	Anzeigegerät und dessen Herstellungsverfahren
DE69812595T2 (de)	2003-09-25	Walzvorrichtung und walzverfahren
DE69516495T2 (de)	2001-01-11	Beleuchtungsvorrichtung und Vorrichtungsherstellungsverfahren