DE69730371D1 - Selbstkalibrierende Temperatursonde - Google Patents

Selbstkalibrierende Temperatursonde

Info

Publication number: DE69730371D1
Authority: DE; Germany
Prior art keywords: self; temperature probe; calibrating temperature; calibrating; probe
Prior art date: 1996-04-08
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE69730371T

Other languages

English (en)

Other versions

DE69730371T2 (de

Inventor

Mark Yam

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Applied Materials Inc

Original Assignee

Applied Materials Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1996-04-08

Filing date

1997-04-08

Publication date

2004-09-30

1997-04-08 Application filed by Applied Materials Inc filed Critical Applied Materials Inc

2004-09-30 Application granted granted Critical

2004-09-30 Publication of DE69730371D1 publication Critical patent/DE69730371D1/de

2005-09-08 Publication of DE69730371T2 publication Critical patent/DE69730371T2/de

2017-04-09 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

239000000523 sample Substances 0.000 title 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
- G01J5/0007—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter of wafers or semiconductor substrates, e.g. using Rapid Thermal Processing
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0818—Waveguides
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0818—Waveguides
- G01J5/0821—Optical fibres
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0846—Optical arrangements having multiple detectors for performing different types of detection, e.g. using radiometry and reflectometry channels
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/52—Radiation pyrometry, e.g. infrared or optical thermometry using comparison with reference sources, e.g. disappearing-filament pyrometer
- G01J5/53—Reference sources, e.g. standard lamps; Black bodies
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/80—Calibration

DE69730371T 1996-04-08 1997-04-08 Selbstkalibrierende Temperatursonde Expired - Fee Related DE69730371T2 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US08/629,422 US5938335A (en)	1996-04-08	1996-04-08	Self-calibrating temperature probe
US629422		1996-04-08

Publications (2)

Publication Number	Publication Date
DE69730371D1 true DE69730371D1 (de)	2004-09-30
DE69730371T2 DE69730371T2 (de)	2005-09-08

Family

ID=24522924

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69730371T Expired - Fee Related DE69730371T2 (de)	1996-04-08	1997-04-08	Selbstkalibrierende Temperatursonde

Country Status (4)

Country	Link
US (1)	US5938335A (de)
EP (1)	EP0801292B1 (de)
JP (4)	JPH1038699A (de)
DE (1)	DE69730371T2 (de)

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US7807253B2 (en) *	2005-03-21	2010-10-05	Sealed Air Corporation (Us)	Formed inflatable cellular cushioning article and method of making same
US7473032B2 (en) *	2006-06-30	2009-01-06	Honeywell International Inc.	System and method for enabling temperature measurement using a pyrometer and pyrometer target for use with same
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US20090034581A1 (en) *	2007-08-02	2009-02-05	Tokyo Electron Limited	Method for hot plate substrate monitoring and control
DE102007042779B4 (de)	2007-09-07	2009-07-09	Mattson Thermal Products Gmbh	Kalibrationssubstrat und -verfahren
US8254767B2 (en) *	2008-08-29	2012-08-28	Applied Materials, Inc.	Method and apparatus for extended temperature pyrometry
US8535115B2 (en) *	2011-01-28	2013-09-17	Applied Materials, Inc.	Gathering spectra from multiple optical heads
US9028135B1 (en)	2012-01-12	2015-05-12	United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration	Pyrometer
US8772055B1 (en) *	2013-01-16	2014-07-08	Applied Materials, Inc.	Multizone control of lamps in a conical lamphead using pyrometers
DE102014117388A1 (de)	2014-11-27	2016-06-02	Aixtron Se	Verfahren zum Kalibrieren einer Pyrometeranordnung eines CVD- oder PVD-Reaktors
JP6758128B2 (ja)	2016-08-30	2020-09-23	エルジーディスプレイカンパニーリミテッド	画像表示装置および画像表示方法
JP6804237B2 (ja)	2016-08-30	2020-12-23	エルジーディスプレイカンパニーリミテッド	画像表示装置および画像表示方法
US10444083B2 (en)	2017-11-21	2019-10-15	Watlow Electric Manufacturing Company	Multi-fiber optic sensing system
JP7066557B2 (ja) *	2018-07-12	2022-05-13	東京エレクトロン株式会社	温度測定センサ、温度測定システム、および、温度測定方法
CN115311805B (zh) *	2022-08-18	2024-02-27	重庆大学	一种综合多参数传感的消防安全系统及信号处理方法

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1996
- 1996-04-08 US US08/629,422 patent/US5938335A/en not_active Expired - Lifetime
1997
- 1997-04-08 DE DE69730371T patent/DE69730371T2/de not_active Expired - Fee Related
- 1997-04-08 EP EP97302408A patent/EP0801292B1/de not_active Expired - Lifetime
- 1997-04-08 JP JP9089590A patent/JPH1038699A/ja active Pending
2006
- 2006-04-03 JP JP2006101998A patent/JP4128590B2/ja not_active Expired - Lifetime
- 2006-10-20 JP JP2006286597A patent/JP2007108183A/ja active Pending
2008
- 2008-01-24 JP JP2008014019A patent/JP2008164622A/ja active Pending

Also Published As

Publication number	Publication date
JP2006234828A (ja)	2006-09-07
EP0801292B1 (de)	2004-08-25
JPH1038699A (ja)	1998-02-13
JP2007108183A (ja)	2007-04-26
JP2008164622A (ja)	2008-07-17
EP0801292A2 (de)	1997-10-15
EP0801292A3 (de)	1998-05-20
JP4128590B2 (ja)	2008-07-30
US5938335A (en)	1999-08-17
DE69730371T2 (de)	2005-09-08

Legal Events

Date	Code	Title	Description
2005-10-13	8364	No opposition during term of opposition
2010-02-18	8339	Ceased/non-payment of the annual fee

Publication	Publication Date	Title
DE69730371D1 (de)	2004-09-30	Selbstkalibrierende Temperatursonde
DE59611425D1 (de)	2007-05-24	Messfühler
FR2784183B1 (fr)	2001-05-11	Palpeur de temperature
DE59712810D1 (de)	2007-03-22	Temperaturmessvorrichtung
DE59611184D1 (de)	2005-02-24	Temperatursonde
DE59510271D1 (de)	2002-08-14	Messfühler
DE69708751D1 (de)	2002-01-17	Messfühler
DE69724017D1 (de)	2003-09-18	Temperaturdetektor
DE59810721D1 (de)	2004-03-11	Messfühler
DE59805163D1 (de)	2002-09-19	Messanordnung
DE69736457D1 (de)	2006-09-21	Interatomares messverfahren
DE69721886D1 (de)	2003-06-18	Kontaktloses Thermometer
DE59609492D1 (de)	2002-09-05	Hochtemperatursonde
DK0908712T3 (da)	2005-09-05	Temperaturföler
DE69822315D1 (de)	2004-04-15	Atomsonde
DE59712366D1 (de)	2005-08-25	Messspitzeneinheit
DE59708154D1 (de)	2002-10-17	Mechanisch-elektrisches Kombinationsthermometer
DE69919457D1 (de)	2004-09-23	Messtaster
DE29612475U1 (de)	1996-09-19	Tastkopf
DE29621433U1 (de)	1998-04-16	Temperaturfühler
DE59710374D1 (de)	2003-08-07	Kombinationswaage
DE59709096D1 (de)	2003-02-13	Kombinationswaage
DE29621005U1 (de)	1997-01-23	Thermometer
FI970136A (fi)	1997-12-12	CB-Tunnelointiin perustuva lämpömittari
DE29611262U1 (de)	1996-09-05	Temperaturindikator