DE69735022D1 - Verfahren zur Herstellung einer Matrixanzeigevorrichtung - Google Patents

Verfahren zur Herstellung einer Matrixanzeigevorrichtung

Info

Publication number
DE69735022D1
DE69735022D1 DE69735022T DE69735022T DE69735022D1 DE 69735022 D1 DE69735022 D1 DE 69735022D1 DE 69735022 T DE69735022 T DE 69735022T DE 69735022 T DE69735022 T DE 69735022T DE 69735022 D1 DE69735022 D1 DE 69735022D1
Authority
DE
Germany
Prior art keywords
producing
display device
matrix display
matrix
display
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69735022T
Other languages
English (en)
Other versions
DE69735022T2 (de
Inventor
Mutsumi Kimura
Hiroshi Kiguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of DE69735022D1 publication Critical patent/DE69735022D1/de
Publication of DE69735022T2 publication Critical patent/DE69735022T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133377—Cells with plural compartments or having plurality of liquid crystal microcells partitioned by walls, e.g. one microcell per pixel
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1341—Filling or closing of cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136286—Wiring, e.g. gate line, drain line
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/122—Pixel-defining structures or layers, e.g. banks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/17—Passive-matrix OLED displays
    • H10K59/173—Passive-matrix OLED displays comprising banks or shadow masks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/13613—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit the semiconductor element being formed on a first substrate and thereafter transferred to the final cell substrate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K2102/00—Constructional details relating to the organic devices covered by this subclass
    • H10K2102/301—Details of OLEDs
    • H10K2102/351—Thickness
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/805—Electrodes
    • H10K50/81—Anodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/1201—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/131—Interconnections, e.g. wiring lines or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/17—Passive-matrix OLED displays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/50—Forming devices by joining two substrates together, e.g. lamination techniques
DE69735022T 1996-09-19 1997-09-18 Verfahren zur Herstellung einer Matrixanzeigevorrichtung Expired - Lifetime DE69735022T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP24808796 1996-09-19
JP24808796 1996-09-19

Publications (2)

Publication Number Publication Date
DE69735022D1 true DE69735022D1 (de) 2006-02-02
DE69735022T2 DE69735022T2 (de) 2006-08-10

Family

ID=17173021

Family Applications (3)

Application Number Title Priority Date Filing Date
DE69735023T Expired - Lifetime DE69735023T2 (de) 1996-09-19 1997-09-18 Verfahren zur Herstellung einer Matrixanzeigevorrichtung
DE69733057T Expired - Lifetime DE69733057T2 (de) 1996-09-19 1997-09-18 Verfahren zur herstellung einer matrixanzeigevorrichtung
DE69735022T Expired - Lifetime DE69735022T2 (de) 1996-09-19 1997-09-18 Verfahren zur Herstellung einer Matrixanzeigevorrichtung

Family Applications Before (2)

Application Number Title Priority Date Filing Date
DE69735023T Expired - Lifetime DE69735023T2 (de) 1996-09-19 1997-09-18 Verfahren zur Herstellung einer Matrixanzeigevorrichtung
DE69733057T Expired - Lifetime DE69733057T2 (de) 1996-09-19 1997-09-18 Verfahren zur herstellung einer matrixanzeigevorrichtung

Country Status (9)

Country Link
US (3) US20060210704A1 (de)
EP (4) EP1365443A3 (de)
JP (2) JP3786427B2 (de)
KR (4) KR100524284B1 (de)
CN (5) CN1882206A (de)
DE (3) DE69735023T2 (de)
HK (1) HK1017120A1 (de)
TW (1) TW438992B (de)
WO (1) WO1998012689A1 (de)

Families Citing this family (127)

* Cited by examiner, † Cited by third party
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EP1365443A3 (de) 1996-09-19 2004-11-17 Seiko Epson Corporation Matrixanzeigevorrichtung und ihr Herstellungsverfahren
JP3520396B2 (ja) 1997-07-02 2004-04-19 セイコーエプソン株式会社 アクティブマトリクス基板と表示装置
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JP2001110575A (ja) 1999-10-04 2001-04-20 Sanyo Electric Co Ltd エレクトロルミネッセンス表示装置
JP4780826B2 (ja) * 1999-10-12 2011-09-28 株式会社半導体エネルギー研究所 電気光学装置の作製方法
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JP4533489B2 (ja) * 2000-01-28 2010-09-01 大日本印刷株式会社 画像表示媒体およびその製造方法
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JP2001230077A (ja) * 2000-02-18 2001-08-24 Dainippon Printing Co Ltd エレクトロルミネッセンス素子の製造方法
JP4831873B2 (ja) * 2000-02-22 2011-12-07 株式会社半導体エネルギー研究所 自発光装置及びその作製方法
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JP4048687B2 (ja) * 2000-04-07 2008-02-20 セイコーエプソン株式会社 有機ｅｌ素子および有機ｅｌ素子の製造方法
KR100649722B1 (ko) 2000-04-21 2006-11-24 엘지.필립스 엘시디 주식회사 일렉트로루미네센스 표시소자의 패터닝장치 및 이를이용한 패터닝방법
US6356031B1 (en) * 2000-05-03 2002-03-12 Time Warner Entertainment Co, Lp Electroluminescent plastic devices with an integral thin film solar cell
JP4713010B2 (ja) * 2000-05-08 2011-06-29 株式会社半導体エネルギー研究所 発光装置及びその作製方法
JP4860052B2 (ja) * 2000-05-12 2012-01-25 株式会社半導体エネルギー研究所 発光装置
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JP2002015866A (ja) * 2000-06-30 2002-01-18 Seiko Epson Corp 有機ｅｌ表示体の製造方法
JP3943900B2 (ja) * 2000-11-09 2007-07-11 株式会社東芝 自己発光型表示装置
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JP2002373781A (ja) * 2001-03-29 2002-12-26 Hitachi Ltd 有機ｅｌ表示体、及びカラーフィルターの製造装置
JP3599047B2 (ja) 2001-06-25 2004-12-08 セイコーエプソン株式会社 カラーフィルタおよびその製造方法、カラーフィルタ用液滴材料着弾精度試験基板、液滴材料着弾精度の測定方法、電気光学装置、ならびに電子機器
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JP3951750B2 (ja) * 2002-03-07 2007-08-01 セイコーエプソン株式会社 物質充填方法、膜形成方法、デバイスおよびデバイスの製造方法
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US20090053396A1 (en) 2009-02-26
CN1901159A (zh) 2007-01-24
CN100403355C (zh) 2008-07-16
CN1480913A (zh) 2004-03-10
DE69735023T2 (de) 2006-08-17
WO1998012689A1 (fr) 1998-03-26
EP1365443A3 (de) 2004-11-17
US20100173450A1 (en) 2010-07-08
EP1365276B1 (de) 2005-12-28
EP1365443A2 (de) 2003-11-26
EP0862156A4 (de) 2000-09-27
DE69735022T2 (de) 2006-08-10
EP1367431B1 (de) 2005-12-28
JP3786427B2 (ja) 2006-06-14
KR20050010961A (ko) 2005-01-28
TW438992B (en) 2001-06-07
EP1365276A3 (de) 2004-01-21
CN1205096A (zh) 1999-01-13
KR19990067364A (ko) 1999-08-16
EP0862156B1 (de) 2005-04-20
KR100477153B1 (ko) 2005-08-01
JP2008210808A (ja) 2008-09-11
US8431182B2 (en) 2013-04-30
HK1017120A1 (en) 1999-11-12
US8580333B2 (en) 2013-11-12
KR100572238B1 (ko) 2006-04-24
US20060210704A1 (en) 2006-09-21
EP1365276A2 (de) 2003-11-26
CN100485904C (zh) 2009-05-06
CN1516528A (zh) 2004-07-28
KR20050008842A (ko) 2005-01-21
DE69733057D1 (de) 2005-05-25
EP1367431A3 (de) 2004-01-21
EP0862156A1 (de) 1998-09-02
KR20050008841A (ko) 2005-01-21
KR100524284B1 (ko) 2005-10-28
CN1882206A (zh) 2006-12-20
EP1367431A2 (de) 2003-12-03
CN100481560C (zh) 2009-04-22
DE69735023D1 (de) 2006-02-02
KR100525642B1 (ko) 2005-11-02
CN1173315C (zh) 2004-10-27

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