DE69801626D1 - Sinterkörper aus Aluminiumnitrid, elektronisches Funktionsmaterial und elektrostatische Einspannvorrichtung - Google Patents

Sinterkörper aus Aluminiumnitrid, elektronisches Funktionsmaterial und elektrostatische Einspannvorrichtung

Info

Publication number
DE69801626D1
DE69801626D1 DE69801626T DE69801626T DE69801626D1 DE 69801626 D1 DE69801626 D1 DE 69801626D1 DE 69801626 T DE69801626 T DE 69801626T DE 69801626 T DE69801626 T DE 69801626T DE 69801626 D1 DE69801626 D1 DE 69801626D1
Authority
DE
Germany
Prior art keywords
sintered body
aluminum nitride
electrostatic chuck
body made
functional material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69801626T
Other languages
English (en)
Other versions
DE69801626T2 (de
Inventor
Yuji Katsuda
Kiyoshi Araki
Tsuneaki Ohashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=17387968&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69801626(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of DE69801626D1 publication Critical patent/DE69801626D1/de
Application granted granted Critical
Publication of DE69801626T2 publication Critical patent/DE69801626T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833—Details of electrostatic chucks
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00—Chucks or sockets
    • Y10T279/23—Chucks or sockets with magnetic or electrostatic means
DE69801626T 1997-09-29 1998-09-28 Sinterkörper aus Aluminiumnitrid, elektronisches Funktionsmaterial und elektrostatische Einspannvorrichtung Expired - Lifetime DE69801626T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26332997A JP3433063B2 (ja) 1997-09-29 1997-09-29 窒化アルミニウム焼結体、電子機能材料および静電チャック

Publications (2)

Publication Number Publication Date
DE69801626D1 true DE69801626D1 (de) 2001-10-18
DE69801626T2 DE69801626T2 (de) 2002-06-27

Family

ID=17387968

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69801626T Expired - Lifetime DE69801626T2 (de) 1997-09-29 1998-09-28 Sinterkörper aus Aluminiumnitrid, elektronisches Funktionsmaterial und elektrostatische Einspannvorrichtung

Country Status (6)

Country Link
US (1) US5998321A (de)
EP (1) EP0905106B1 (de)
JP (1) JP3433063B2 (de)
KR (1) KR100345083B1 (de)
DE (1) DE69801626T2 (de)
TW (1) TW494093B (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4013386B2 (ja) * 1998-03-02 2007-11-28 住友電気工業株式会社 半導体製造用保持体およびその製造方法
EP1249433A4 (de) 1999-09-06 2005-01-05 Ibiden Co Ltd Brikett und keramisches substrat aus gesintertem kohlenstoffhaltigem aluminiumnitrid zur verwendung in vorrichtungen zur herstellung und untersuchung von halbleitern
JP4447750B2 (ja) 1999-09-30 2010-04-07 日本碍子株式会社 窒化アルミニウム焼結体および半導体製造用部材
US6891263B2 (en) 2000-02-07 2005-05-10 Ibiden Co., Ltd. Ceramic substrate for a semiconductor production/inspection device
WO2001059833A1 (fr) 2000-02-08 2001-08-16 Ibiden Co., Ltd. Carte en ceramique destinee a la production de semi-conducteurs et a des dispositifs de controle
US6809299B2 (en) 2000-07-04 2004-10-26 Ibiden Co., Ltd. Hot plate for semiconductor manufacture and testing
TWI243158B (en) * 2000-12-21 2005-11-11 Ngk Insulators Ltd Aluminum nitride sintered bodies
JP4243943B2 (ja) * 2002-04-22 2009-03-25 日本碍子株式会社 窒化アルミニウム材料および半導体製造用部材
US6982125B2 (en) * 2002-12-23 2006-01-03 Saint-Gobain Ceramics & Plastics, Inc. ALN material and electrostatic chuck incorporating same
US7369393B2 (en) * 2004-04-15 2008-05-06 Saint-Gobain Ceramics & Plastics, Inc. Electrostatic chucks having barrier layer
JP4987238B2 (ja) * 2005-03-25 2012-07-25 日本碍子株式会社 窒化アルミニウム焼結体、半導体製造用部材及び窒化アルミニウム焼結体の製造方法
KR101101214B1 (ko) * 2006-08-07 2012-01-04 가부시끼가이샤 도꾸야마 질화알루미늄 소결체 및 그 제조 방법
JP5121268B2 (ja) * 2007-03-27 2013-01-16 日本碍子株式会社 窒化アルミニウム焼結体及び半導体製造装置用部材
JP5042886B2 (ja) * 2008-03-06 2012-10-03 太平洋セメント株式会社 静電チャック
JP6338998B2 (ja) * 2014-10-23 2018-06-06 国立大学法人九州工業大学 蛍光素子
KR101965895B1 (ko) 2018-11-08 2019-04-04 주식회사 케이에스엠컴포넌트 정전 척 및 그 제조 방법
KR102138983B1 (ko) * 2018-12-14 2020-07-28 한국세라믹기술원 중고온에서 높은 비저항을 갖는 정전척용 질화알루미늄 소결체의 제조방법

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4672046A (en) * 1984-10-15 1987-06-09 Tdk Corporation Sintered aluminum nitride body
JPH01203270A (ja) * 1988-02-08 1989-08-16 Sumitomo Electric Ind Ltd 高熱伝導性窒化アルミニウム焼結体及びその製造法
JP3404813B2 (ja) * 1992-09-04 2003-05-12 住友電気工業株式会社 窒化アルミニウム焼結体およびその製造方法
US5413360A (en) * 1992-12-01 1995-05-09 Kyocera Corporation Electrostatic chuck
JP3152847B2 (ja) * 1994-09-30 2001-04-03 京セラ株式会社 静電チャック
JP3559123B2 (ja) * 1995-08-04 2004-08-25 日本碍子株式会社 窒化アルミニウムおよび半導体製造用装置
KR970011434A (ko) * 1995-08-31 1997-03-27 배순훈 온수순환펌프의 샤프트 지지용 베어링 결합구조
JP3670416B2 (ja) * 1995-11-01 2005-07-13 日本碍子株式会社 金属包含材および静電チャック
JP3457495B2 (ja) * 1996-03-29 2003-10-20 日本碍子株式会社 窒化アルミニウム焼結体、金属埋設品、電子機能材料および静電チャック

Also Published As

Publication number Publication date
JP3433063B2 (ja) 2003-08-04
TW494093B (en) 2002-07-11
EP0905106B1 (de) 2001-09-12
KR100345083B1 (ko) 2002-10-25
DE69801626T2 (de) 2002-06-27
US5998321A (en) 1999-12-07
JPH11100270A (ja) 1999-04-13
EP0905106A2 (de) 1999-03-31
EP0905106A3 (de) 1999-06-23
KR19990030057A (ko) 1999-04-26

Similar Documents

Publication Publication Date Title
DE69706734D1 (de) Aluminiumnitrid-Sinterkörper, eingebetteter Metallgegenstand, Elektronikfunktionsmaterial und elektrostatische Einspannvorrichtung
DE69801626D1 (de) Sinterkörper aus Aluminiumnitrid, elektronisches Funktionsmaterial und elektrostatische Einspannvorrichtung
DE69917993D1 (de) Sinterkörper aus kubischem Bornitrid
DE69823876D1 (de) Induktives bauelement und induktive bauelementanordnung
ATE252832T1 (de) Kombinationen aus herbiziden und safenern
DE69811135T2 (de) Keramischer Wabenkörper
DE69611964T2 (de) Aluminiumnitrid-Sinterkörper und ihre Herstellung
DE69921909D1 (de) Sinterkörper aus Aluminiumnitrid und Verfahren zur Herstellung desselben
DZ3355A1 (fr) Steroides 3-azote-6,7-dioxyde et les emplois qui s'y rapportent
DE69841416D1 (de) Integrierte Halbleiterschaltungsanordnung und Packungstruktur dafür
DE69803910D1 (de) Gesinterter Aluminiumnitridkörper und daraus hergestelltes metallisiertes Substrat
ATE227724T1 (de) Muscarinagonisten und antagonisten
DE69623000D1 (de) Elektrolumineszentes bauelement aus porösem silizium
DE69722329D1 (de) Postkarte und Umschlag
DE60007595D1 (de) Piezoelektrisches keramisches Material, und die Keramik verwendendes elektronisches Bauteil
DE69917098D1 (de) Stifthaltebecher und damit versehene Schminkeverpackung
DE69703999D1 (de) Gleitwerkstoff aus Siliciumnitridkeramik und Herstellung desselben
DE69317254T2 (de) Siliciumnitrid-Sinterkörper
DE69815627D1 (de) Halbleitende Keramik und halbleitendes keramisches Element damit
DE69708353D1 (de) Sinterkörper aus Siliziumnitrid
GB2364303B (en) Semiconducting ceramic material and electronic part employing the same
DE69510979T2 (de) Kompositpulver aus Siliciumnitrid und Siliciumcarbid
DE69832407D1 (de) Chipträgerelement und dessen verwendung
DE60133966D1 (de) Drucken von Postzeichen und dessen Nachweis
AU2001276258A1 (en) Ceramic component and the use thereof

Legal Events

Date Code Title Description
8364 No opposition during term of opposition