DE69809681D1 - Metallisierte Siliziumnitridkeramik, Verfahren zu ihrer Herstellung und Metallisierungszusammensetzung - Google Patents

Metallisierte Siliziumnitridkeramik, Verfahren zu ihrer Herstellung und Metallisierungszusammensetzung

Info

Publication number
DE69809681D1
DE69809681D1 DE69809681T DE69809681T DE69809681D1 DE 69809681 D1 DE69809681 D1 DE 69809681D1 DE 69809681 T DE69809681 T DE 69809681T DE 69809681 T DE69809681 T DE 69809681T DE 69809681 D1 DE69809681 D1 DE 69809681D1
Authority
DE
Germany
Prior art keywords
production
silicon nitride
nitride ceramic
metallized silicon
metallization composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69809681T
Other languages
English (en)
Other versions
DE69809681T2 (de
Inventor
Akira Yamakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of DE69809681D1 publication Critical patent/DE69809681D1/de
Application granted granted Critical
Publication of DE69809681T2 publication Critical patent/DE69809681T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/51—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
    • C04B41/5111—Ag, Au, Pd, Pt or Cu
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/51—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
    • C04B41/5133—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal with a composition mainly composed of one or more of the refractory metals
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/88—Metals
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
    • C04B2111/00844—Uses not provided for elsewhere in C04B2111/00 for electronic applications
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
DE69809681T 1997-09-03 1998-08-24 Metallisierte Siliziumnitridkeramik, Verfahren zu ihrer Herstellung und Metallisierungszusammensetzung Expired - Fee Related DE69809681T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9238167A JPH1179872A (ja) 1997-09-03 1997-09-03 メタライズ窒化ケイ素系セラミックス、その製造方法及びその製造に用いるメタライズ組成物

Publications (2)

Publication Number Publication Date
DE69809681D1 true DE69809681D1 (de) 2003-01-09
DE69809681T2 DE69809681T2 (de) 2003-09-18

Family

ID=17026187

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69809681T Expired - Fee Related DE69809681T2 (de) 1997-09-03 1998-08-24 Metallisierte Siliziumnitridkeramik, Verfahren zu ihrer Herstellung und Metallisierungszusammensetzung

Country Status (4)

Country Link
US (1) US6447923B1 (de)
EP (1) EP0908429B1 (de)
JP (1) JPH1179872A (de)
DE (1) DE69809681T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7400042B2 (en) * 2005-05-03 2008-07-15 Rosemount Aerospace Inc. Substrate with adhesive bonding metallization with diffusion barrier
US20070013014A1 (en) * 2005-05-03 2007-01-18 Shuwen Guo High temperature resistant solid state pressure sensor
US7628309B1 (en) 2005-05-03 2009-12-08 Rosemount Aerospace Inc. Transient liquid phase eutectic bonding
US7538401B2 (en) * 2005-05-03 2009-05-26 Rosemount Aerospace Inc. Transducer for use in harsh environments
JP4858319B2 (ja) * 2007-06-07 2012-01-18 住友電気工業株式会社 ウェハ保持体の電極接続構造
CN103895281B (zh) * 2012-12-24 2015-11-18 北京有色金属研究总院 一种高导热绝缘层状复合材料及其制备方法
EP4335834A1 (de) * 2021-05-06 2024-03-13 Amotech Co., Ltd. Verfahren zur herstellung eines siliciumnitridsubstrats und dadurch hergestelltes siliciumnitridsubstrat

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4113830A (en) * 1974-03-18 1978-09-12 The United States Of America As Represented By The Secretary Of The Air Force Method of fabricating silicon nitride bodies
US4093687A (en) * 1977-01-03 1978-06-06 General Electric Company Hot pressing of silicon nitride using magnesium silicide
JPS57160984A (en) * 1981-03-26 1982-10-04 Ngk Spark Plug Co Silicon nitride ceramic having metallized surface and manufacture
US4552711A (en) * 1983-06-21 1985-11-12 Cornell Research Foundation, Inc. Use of free silicon in liquid phase sintering of silicon nitrides and sialons
EP0150180B1 (de) * 1983-07-19 1988-11-02 Ford Motor Company Verfahren zur herstellung von verdichtetem si3/n4/oxynitrid-komposit mittels vorgemischten siliziums und sauerstoff enthaltenden agenzien
US4685607A (en) * 1984-05-21 1987-08-11 Kabushiki Kaisha Toshiba Nitride ceramic-metal complex material and method of producing the same
JPS61248302A (ja) * 1985-04-25 1986-11-05 株式会社日立製作所 炭化ケイ素焼結体用メタライズペ−スト
JPS62113783A (ja) * 1985-11-13 1987-05-25 日本セメント株式会社 窒化けい素焼結体のメタライズ方法
US5587111A (en) * 1990-03-29 1996-12-24 Vacuum Metallurgical Co., Ltd. Metal paste, process for producing same and method of making a metallic thin film using the metal paste
US5294750A (en) 1990-09-18 1994-03-15 Ngk Insulators, Ltd. Ceramic packages and ceramic wiring board
DE4102628A1 (de) * 1991-01-30 1992-08-06 Bayer Ag Verfahren zur herstellung eines werkstoffes auf si(pfeil abwaerts)3(pfeil abwaerts)n(pfeil abwaerts)4(pfeil abwaerts)-basis, so hergestellte werkstoffe sowie deren verwendung
JP3230861B2 (ja) * 1992-12-16 2001-11-19 株式会社東芝 窒化けい素メタライズ基板
JP3408298B2 (ja) * 1993-11-26 2003-05-19 株式会社東芝 高熱伝導性窒化けい素メタライズ基板，その製造方法および窒化けい素モジュール
CA2116644A1 (en) * 1994-02-28 1995-08-29 Yasunobu Kawakami Silicon nitride reaction-sintered body and method and apparatus for producing same
US5928601A (en) * 1994-02-28 1999-07-27 Honda Giken Kogyo Kabushiki Kaisha Method for producing silicon nitride reaction sintered body
KR100232660B1 (ko) * 1995-03-20 1999-12-01 니시무로 타이죠 질화규소 회로기판
EP0766307B1 (de) 1995-03-20 2007-08-08 Kabushiki Kaisha Toshiba Schaltungssubstrat aus siliziumnitrid
JP3151166B2 (ja) * 1996-05-16 2001-04-03 日本碍子株式会社 高圧放電灯およびその製造方法

Also Published As

Publication number Publication date
JPH1179872A (ja) 1999-03-23
DE69809681T2 (de) 2003-09-18
US6447923B1 (en) 2002-09-10
EP0908429B1 (de) 2002-11-27
EP0908429A1 (de) 1999-04-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee