DE69828713D1 - Vibrationsstrukturkreisel - Google Patents

Vibrationsstrukturkreisel

Info

Publication number
DE69828713D1
DE69828713D1 DE69828713T DE69828713T DE69828713D1 DE 69828713 D1 DE69828713 D1 DE 69828713D1 DE 69828713 T DE69828713 T DE 69828713T DE 69828713 T DE69828713 T DE 69828713T DE 69828713 D1 DE69828713 D1 DE 69828713D1
Authority
DE
Germany
Prior art keywords
resonator
vibrate
vibrating structure
ring
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69828713T
Other languages
English (en)
Other versions
DE69828713T2 (de
Inventor
Ian David Hopkin
Christopher Paul Fell
Kevin Townsend
Timothy Robert Mason
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atlantic Inertial Systems Ltd
Original Assignee
BAE Systems PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BAE Systems PLC filed Critical BAE Systems PLC
Application granted granted Critical
Publication of DE69828713D1 publication Critical patent/DE69828713D1/de
Publication of DE69828713T2 publication Critical patent/DE69828713T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
DE69828713T 1997-02-18 1998-02-17 Vibrationsstrukturkreisel Expired - Lifetime DE69828713T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9703357 1997-02-18
GB9703357A GB2322196B (en) 1997-02-18 1997-02-18 A vibrating structure gyroscope

Publications (2)

Publication Number Publication Date
DE69828713D1 true DE69828713D1 (de) 2005-03-03
DE69828713T2 DE69828713T2 (de) 2005-06-30

Family

ID=10807878

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69828713T Expired - Lifetime DE69828713T2 (de) 1997-02-18 1998-02-17 Vibrationsstrukturkreisel

Country Status (7)

Country Link
US (1) US5932804A (de)
EP (1) EP0859219B1 (de)
JP (1) JP2872213B2 (de)
AT (1) ATE288072T1 (de)
DE (1) DE69828713T2 (de)
ES (1) ES2232915T3 (de)
GB (1) GB2322196B (de)

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FR2769086B1 (fr) * 1997-09-30 1999-12-03 Salaberry Bernard Lucien Charl Gyrometre vibrant a excitation et detection electromagnetique
GB2335273B (en) * 1998-03-14 2002-02-27 British Aerospace A two axis gyroscope
GB9817347D0 (en) * 1998-08-11 1998-10-07 British Aerospace An angular rate sensor
US6272925B1 (en) * 1999-09-16 2001-08-14 William S. Watson High Q angular rate sensing gyroscope
GB0122256D0 (en) 2001-09-14 2001-11-07 Bae Systems Plc Vibratory gyroscopic rate sensor
GB0122253D0 (en) 2001-09-14 2001-11-07 Bae Systems Plc Vibratory gyroscopic rate sensor
GB0122254D0 (en) 2001-09-14 2001-11-07 Bae Systems Plc Vibratory gyroscopic rate sensor
DE60333756D1 (de) * 2002-06-28 2010-09-23 Sumitomo Precision Prod Co Leiter für eine bewegliche elektrische schaltung und kreisel des vibrationstyps
GB0227084D0 (en) * 2002-11-20 2002-12-24 Bae Systems Plc Method and apparatus for measuring scalefactor variation in a vibrating structure gyroscope
JP4058378B2 (ja) 2003-05-16 2008-03-05 Ｔｄｋ株式会社 角速度センサおよび角速度検出装置
JP4058379B2 (ja) 2003-05-16 2008-03-05 Ｔｄｋ株式会社 角速度センサおよび角速度検出装置
US7240533B2 (en) * 2004-02-04 2007-07-10 Bae Systems Plc Method for reducing bias error in a vibrating structure gyroscope
JP2006064539A (ja) * 2004-08-26 2006-03-09 Matsushita Electric Works Ltd ジャイロセンサおよび角速度検出方法
US7992438B2 (en) * 2007-11-28 2011-08-09 Chung Shan Institute Of Science And Technology, Armaments Bureau, M.N.D. Multiaxial gyroscope
CN101910790A (zh) * 2008-01-29 2010-12-08 住友精密工业株式会社 使用压电体膜的振动陀螺仪及其制造方法
US8205495B2 (en) * 2008-06-10 2012-06-26 The Boeing Company Systematic disc resonator gyroscope tuning
EP2163848A1 (de) 2008-07-12 2010-03-17 Atlantic Inertial Systems Limited Verbesserung an oder im Zusammenhang mit vibrierenden Strukturgyroskopen
GB0812788D0 (en) * 2008-07-12 2008-08-20 Atlantic Inertial Systems Ltd Improvements in or relating to vibrating structure gyroscopes
JP5523755B2 (ja) * 2009-02-11 2014-06-18 住友精密工業株式会社 圧電体膜を用いた振動ジャイロ及びその製造方法
US8664951B2 (en) * 2009-03-30 2014-03-04 Honeywell International Inc. MEMS gyroscope magnetic sensitivity reduction
US8375791B2 (en) * 2009-07-13 2013-02-19 Shanghai Lexvu Opto Microelectronics Technology Co., Ltd. Capacitive MEMS gyroscope and method of making the same
US20120125100A1 (en) * 2009-07-27 2012-05-24 Sumitomo Precision Products Co, Ltd. Vibrating gyroscope including piezoelectric film
GB201003539D0 (en) * 2010-03-03 2010-04-21 Silicon Sensing Systems Ltd Sensor
GB201005875D0 (en) 2010-04-08 2010-05-26 Silicon Sensing Systems Ltd Sensors
GB201008195D0 (en) * 2010-05-17 2010-06-30 Silicon Sensing Systems Ltd Sensor
GB201008526D0 (en) 2010-05-21 2010-07-07 Silicon Sensing Systems Ltd Sensor
GB201015585D0 (en) * 2010-09-17 2010-10-27 Atlantic Inertial Systems Ltd Sensor
GB201200128D0 (en) 2012-01-05 2012-02-15 Atlantic Inertial Systems Ltd Strain decoupled sensor
US20140026659A1 (en) * 2012-07-27 2014-01-30 Biao Zhang Mems device and a method of using the same
US9448069B2 (en) 2012-10-01 2016-09-20 The Royal Institution For The Advancement Of Learning/Mcgill University Microelectromechanical bulk acoustic wave devices and methods
RU2518379C1 (ru) * 2012-11-26 2014-06-10 Открытое акционерное общество "Раменское приборостроительное конструкторское бюро" Вибрационный вакуумный микрогироскоп
GB201307773D0 (en) 2013-04-30 2013-06-12 Atlantic Inertial Systems Ltd MEMS sensors
GB201313389D0 (en) 2013-07-26 2013-09-11 Atlantic Inertial Systems Ltd Signal processing
GB2531723B (en) 2014-10-27 2020-10-21 Atlantic Inertial Systems Ltd Digital controlled VCO for vibrating structure gyroscope
US10571267B1 (en) * 2015-09-01 2020-02-25 Hrl Laboratories, Llc High stability angular sensor
CN106224480B (zh) * 2016-08-08 2018-07-20 太原理工大学 一种基于四杆机构的大行程柔性旋转铰
JP6571065B2 (ja) 2016-12-08 2019-09-04 株式会社東芝 振動装置
WO2019059187A1 (ja) * 2017-09-21 2019-03-28 住友精密工業株式会社 角速度センサ
GB2567479B (en) 2017-10-13 2022-04-06 Atlantic Inertial Systems Ltd Angular rate sensors
GB2570732B (en) 2018-02-06 2023-01-11 Atlantic Inertial Systems Ltd Angular rate sensors
JP6769517B2 (ja) 2018-05-08 2020-10-14 株式会社村田製作所 ピエゾリングジャイロスコープ
JP2022524171A (ja) 2018-05-08 2022-04-28 株式会社村田製作所 ピエゾリングジャイロスコープ
JP6787437B2 (ja) 2018-05-08 2020-11-18 株式会社村田製作所 ピエゾリングジャイロスコープ
CN110058041A (zh) * 2019-04-08 2019-07-26 瑞声科技(新加坡)有限公司 陀螺仪
CN109900262B (zh) * 2019-04-08 2021-08-10 瑞声科技(新加坡)有限公司 陀螺仪
GB2586081B (en) 2019-08-02 2023-12-20 Atlantic Inertial Systems Ltd Signal processing
GB201911534D0 (en) 2019-08-12 2019-09-25 Atlantic Inertial Systems Ltd Improved noise performance for vibrating structure gyroscopes
WO2021226993A1 (zh) * 2020-05-15 2021-11-18 深圳市汇顶科技股份有限公司 一种陀螺仪及惯性传感器

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US3924475A (en) * 1973-10-23 1975-12-09 Singer Co Vibrating ring gyro
GB8404668D0 (en) * 1984-02-22 1984-03-28 Burdess J S Gyroscopic devices
EP0175508B1 (de) * 1984-09-07 1988-10-12 The Marconi Company Limited Oszillierender Kreisel
US5060039A (en) * 1988-01-13 1991-10-22 The Charles Stark Draper Laboratory, Inc. Permanent magnet force rebalance micro accelerometer
ES2056580T3 (es) * 1990-05-18 1994-10-01 British Aerospace Sensores inerciales.
US5203208A (en) * 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
GB9207148D0 (en) * 1992-04-01 1992-05-13 British Aerospace Planar rate sensor
US5696323A (en) * 1996-06-25 1997-12-09 Alliedsignal, Inc. Two bar resonant beam Coriolis rate sensor

Also Published As

Publication number Publication date
DE69828713T2 (de) 2005-06-30
ATE288072T1 (de) 2005-02-15
EP0859219B1 (de) 2005-01-26
ES2232915T3 (es) 2005-06-01
JPH10267667A (ja) 1998-10-09
GB2322196A (en) 1998-08-19
GB2322196B (en) 2000-10-18
JP2872213B2 (ja) 1999-03-17
US5932804A (en) 1999-08-03
GB9703357D0 (en) 1997-04-09
EP0859219A2 (de) 1998-08-19
EP0859219A3 (de) 2000-05-24

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Legal Events

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8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: ATLANTIC INERTIAL SYSTEMS LIMITED, PLYMOUTH, GB