DE69830817D1 - Verfahren zur Herstellung einer Elektronen-emittierenden Vorrichtung - Google Patents

Verfahren zur Herstellung einer Elektronen-emittierenden Vorrichtung

Info

Publication number
DE69830817D1
DE69830817D1 DE69830817T DE69830817T DE69830817D1 DE 69830817 D1 DE69830817 D1 DE 69830817D1 DE 69830817 T DE69830817 T DE 69830817T DE 69830817 T DE69830817 T DE 69830817T DE 69830817 D1 DE69830817 D1 DE 69830817D1
Authority
DE
Germany
Prior art keywords
electron
producing
emitting device
emitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69830817T
Other languages
English (en)
Other versions
DE69830817T2 (de
Inventor
Takamasa Yoshikawa
Takashi Chuman
Nobuyasu Negishi
Shingo Iwasaki
Kiyohide Ogasawara
Hiroshi Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pioneer Corp
Original Assignee
Pioneer Electronic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Electronic Corp filed Critical Pioneer Electronic Corp
Application granted granted Critical
Publication of DE69830817D1 publication Critical patent/DE69830817D1/de
Publication of DE69830817T2 publication Critical patent/DE69830817T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/312—Cold cathodes, e.g. field-emissive cathode having an electric field perpendicular to the surface, e.g. tunnel-effect cathodes of Metal-Insulator-Metal [MIM] type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
DE69830817T 1997-05-15 1998-05-15 Verfahren zur Herstellung einer Elektronen-emittierenden Vorrichtung Expired - Fee Related DE69830817T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP12595797 1997-05-15
JP12595797A JPH10321123A (ja) 1997-05-15 1997-05-15 電子放出素子及びこれを用いた表示装置

Publications (2)

Publication Number Publication Date
DE69830817D1 true DE69830817D1 (de) 2005-08-18
DE69830817T2 DE69830817T2 (de) 2006-05-18

Family

ID=14923162

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69830817T Expired - Fee Related DE69830817T2 (de) 1997-05-15 1998-05-15 Verfahren zur Herstellung einer Elektronen-emittierenden Vorrichtung

Country Status (4)

Country Link
US (1) US6144155A (de)
EP (1) EP0878819B1 (de)
JP (1) JPH10321123A (de)
DE (1) DE69830817T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1056110B1 (de) * 1998-02-09 2009-12-16 Panasonic Corporation Elektronenemissionsvorrichtung, verfahren zur herstellung derselben und verfahren zur steuerung derselben; bildanzeige mit solchen elektronenemissions- vorrichtung und verfahren zur herstellung derselben
US7002287B1 (en) * 1998-05-29 2006-02-21 Candescent Intellectual Property Services, Inc. Protected substrate structure for a field emission display device
US6291283B1 (en) 1998-11-09 2001-09-18 Texas Instruments Incorporated Method to form silicates as high dielectric constant materials
JP2000208508A (ja) * 1999-01-13 2000-07-28 Texas Instr Inc <Ti> 珪酸塩高誘電率材料の真空蒸着
US6329726B1 (en) * 2000-03-03 2001-12-11 Broadband Telcom Power, Inc. Proportional distribution of power from a plurality of power sources
US6853129B1 (en) * 2000-07-28 2005-02-08 Candescent Technologies Corporation Protected substrate structure for a field emission display device
WO2002011169A1 (en) * 2000-07-28 2002-02-07 Candescent Technologies Corporation Protected structure of flat panel display
US6822380B2 (en) * 2001-10-12 2004-11-23 Hewlett-Packard Development Company, L.P. Field-enhanced MIS/MIM electron emitters
US7160577B2 (en) 2002-05-02 2007-01-09 Micron Technology, Inc. Methods for atomic-layer deposition of aluminum oxides in integrated circuits
US7687409B2 (en) 2005-03-29 2010-03-30 Micron Technology, Inc. Atomic layer deposited titanium silicon oxide films
US7662729B2 (en) 2005-04-28 2010-02-16 Micron Technology, Inc. Atomic layer deposition of a ruthenium layer to a lanthanide oxide dielectric layer
US7572695B2 (en) 2005-05-27 2009-08-11 Micron Technology, Inc. Hafnium titanium oxide films
US7927948B2 (en) 2005-07-20 2011-04-19 Micron Technology, Inc. Devices with nanocrystals and methods of formation
CN109097042A (zh) * 2018-09-14 2018-12-28 广东工业大学 一种锂、铒和镱三掺杂铌酸钠上转换材料及其制备方法和应用

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1252818B (de) * 1962-03-22 1900-01-01
EP0367195A3 (de) * 1988-10-31 1991-10-02 Matsushita Electric Industrial Co., Ltd. Elektronen-Emissionselemente mit MIM-Kaltkathode und dessen Herstellungsverfahren
JP3390495B2 (ja) * 1993-08-30 2003-03-24 株式会社日立製作所 Ｍｉｍ構造素子およびその製造方法
US6130503A (en) * 1997-03-04 2000-10-10 Pioneer Electronic Corporation Electron emission device and display using the same
JPH10308165A (ja) * 1997-03-04 1998-11-17 Pioneer Electron Corp 電子放出素子及びこれを用いた表示装置
JPH10308166A (ja) * 1997-03-04 1998-11-17 Pioneer Electron Corp 電子放出素子及びこれを用いた表示装置

Also Published As

Publication number Publication date
EP0878819A3 (de) 1998-12-09
EP0878819A2 (de) 1998-11-18
DE69830817T2 (de) 2006-05-18
EP0878819B1 (de) 2005-07-13
JPH10321123A (ja) 1998-12-04
US6144155A (en) 2000-11-07

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Legal Events

Date Code Title Description
8320 Willingness to grant licences declared (paragraph 23)
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee