DE69836448D1 - Mikro-elektromechanischer (MEM) optischer Resonator und Verfahren - Google Patents

Mikro-elektromechanischer (MEM) optischer Resonator und Verfahren

Info

Publication number
DE69836448D1
DE69836448D1 DE69836448T DE69836448T DE69836448D1 DE 69836448 D1 DE69836448 D1 DE 69836448D1 DE 69836448 T DE69836448 T DE 69836448T DE 69836448 T DE69836448 T DE 69836448T DE 69836448 D1 DE69836448 D1 DE 69836448D1
Authority
DE
Germany
Prior art keywords
microelectromechanical
mem
optical resonator
resonator
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69836448T
Other languages
English (en)
Other versions
DE69836448T2 (de
Inventor
Edward M Motamedi
Angus P Andrews
Sangtae Park
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Boeing North American Inc
Original Assignee
Rockwell International Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rockwell International Corp filed Critical Rockwell International Corp
Application granted granted Critical
Publication of DE69836448D1 publication Critical patent/DE69836448D1/de
Publication of DE69836448T2 publication Critical patent/DE69836448T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
    • G06K7/10544—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum
    • G06K7/10554—Moving beam scanning
    • G06K7/10594—Beam path
    • G06K7/10603—Basic scanning using moving elements
    • G06K7/10633—Basic scanning using moving elements by oscillation
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
    • G06K7/10544—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum
    • G06K7/10554—Moving beam scanning
    • G06K7/10594—Beam path
    • G06K7/10603—Basic scanning using moving elements
    • G06K7/10633—Basic scanning using moving elements by oscillation
    • G06K7/10643—Activating means
    • G06K7/10653—Activating means using flexible or piezoelectric means
DE69836448T 1997-05-01 1998-04-27 Mikro-elektromechanischer (MEM) optischer Resonator und Verfahren Expired - Lifetime DE69836448T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US847018 1997-05-01
US08/847,018 US5903380A (en) 1997-05-01 1997-05-01 Micro-electromechanical (MEM) optical resonator and method

Publications (2)

Publication Number Publication Date
DE69836448D1 true DE69836448D1 (de) 2007-01-04
DE69836448T2 DE69836448T2 (de) 2007-03-08

Family

ID=25299564

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69836448T Expired - Lifetime DE69836448T2 (de) 1997-05-01 1998-04-27 Mikro-elektromechanischer (MEM) optischer Resonator und Verfahren

Country Status (4)

Country Link
US (2) US5903380A (de)
EP (1) EP0875780B1 (de)
JP (1) JPH10325935A (de)
DE (1) DE69836448T2 (de)

Families Citing this family (166)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6935724B2 (en) 1997-07-15 2005-08-30 Silverbrook Research Pty Ltd Ink jet nozzle having actuator with anchor positioned between nozzle chamber and actuator connection point
US6336710B1 (en) * 1997-07-15 2002-01-08 Silverbrook Research Pty Ltd Dual nozzle single horizontal actuator ink jet printing mechanism
US7328975B2 (en) * 1997-07-15 2008-02-12 Silverbrook Research Pty Ltd Injet printhead with thermal bend arm exposed to ink flow
US20100277531A1 (en) * 1997-07-15 2010-11-04 Silverbrook Research Pty Ltd Printer having processor for high volume printing
US20080303851A1 (en) * 1997-07-15 2008-12-11 Silverbrook Research Pty Ltd Electro-thermally actuated printer with high media feed speed
US20090273632A1 (en) * 1997-07-15 2009-11-05 Silverbrook Research Pty Ltd Printhead Integrated Circuit With Large Nozzle Array
US7753491B2 (en) * 1997-07-15 2010-07-13 Silverbrook Research Pty Ltd Printhead nozzle arrangement incorporating a corrugated electrode
US20080316267A1 (en) * 1997-07-15 2008-12-25 Silverbrook Research Pty Ltd Printhead integrated circuit with low power operation
US20090273622A1 (en) * 1997-07-15 2009-11-05 Silverbrook Research Pty Ltd Printhead Integrated Circuit With Low Operating Power
US8366243B2 (en) * 1997-07-15 2013-02-05 Zamtec Ltd Printhead integrated circuit with actuators proximate exterior surface
US20090278892A1 (en) * 1997-07-15 2009-11-12 Silverbrook Research Pty Ltd Printhead IC With Small Ink Chambers
US6188415B1 (en) 1997-07-15 2001-02-13 Silverbrook Research Pty Ltd Ink jet printer having a thermal actuator comprising an external coil spring
US7360871B2 (en) * 1997-07-15 2008-04-22 Silverbrook Research Pty Ltd Inkjet chamber with ejection actuator between inlet and nozzle
US20090273633A1 (en) * 1997-07-15 2009-11-05 Silverbrook Research Pty Ltd Printhead Integrated Circuit With High Density Nozzle Array
US7401900B2 (en) * 1997-07-15 2008-07-22 Silverbrook Research Pty Ltd Inkjet nozzle with long ink supply channel
US7591539B2 (en) * 1997-07-15 2009-09-22 Silverbrook Research Pty Ltd Inkjet printhead with narrow printing zone
AUPO800497A0 (en) * 1997-07-15 1997-08-07 Silverbrook Research Pty Ltd Image creation method and apparatus (IJ26)
US6682176B2 (en) * 1997-07-15 2004-01-27 Silverbrook Research Pty Ltd Ink jet printhead chip with nozzle arrangements incorporating spaced actuating arms
US20090273640A1 (en) * 1997-07-15 2009-11-05 Silverbrook Research Pty Ltd Printhead Integrated Circuit With Small Nozzle Apertures
US20080309714A1 (en) * 1997-07-15 2008-12-18 Silverbrook Research Pty Ltd Printhead integrated circuit with low volume ink chambers
US20090273642A1 (en) * 1997-07-15 2009-11-05 Silverbrook Research Pty Ltd Printhead IC With Low Velocity Droplet Ejection
US20080309713A1 (en) * 1997-07-15 2008-12-18 Silverbrook Research Pty Ltd Printhead integrated circuit with low droplet ejection velocity
US20090273643A1 (en) * 1997-07-15 2009-11-05 Silverbrook Research Pty Ltd Printhead Integrated Circuit With Ink Supply Through Wafer Thickness
US6648453B2 (en) 1997-07-15 2003-11-18 Silverbrook Research Pty Ltd Ink jet printhead chip with predetermined micro-electromechanical systems height
US7775634B2 (en) * 1997-07-15 2010-08-17 Silverbrook Research Pty Ltd Inkjet chamber with aligned nozzle and inlet
AUPP653998A0 (en) * 1998-10-16 1998-11-05 Silverbrook Research Pty Ltd Micromechanical device and method (ij46B)
US7556356B1 (en) 1997-07-15 2009-07-07 Silverbrook Research Pty Ltd Inkjet printhead integrated circuit with ink spread prevention
US6588882B2 (en) * 1997-07-15 2003-07-08 Silverbrook Research Pty Ltd Inkjet printheads
US6550896B2 (en) 1997-07-15 2003-04-22 Silverbrook Research Pty Ltd Nozzle arrangement for an ink jet printhead that includes a shape memory actuator
US20080316263A1 (en) * 1997-07-15 2008-12-25 Silverbrook Research Pty Ltd Printhead integrated circuit with high density array of droplet ejectors
US20090273634A1 (en) * 1997-07-15 2009-11-05 Silverbrook Research Pty Ltd Printhead Integrated Circuit With Thin Nozzle Layer
US7410243B2 (en) * 1997-07-15 2008-08-12 Silverbrook Research Pty Ltd Inkjet nozzle with resiliently biased ejection actuator
US7708372B2 (en) * 1997-07-15 2010-05-04 Silverbrook Research Pty Ltd Inkjet nozzle with ink feed channels etched from back of wafer
US20040246311A1 (en) * 1997-07-15 2004-12-09 Kia Silverbrook Inkjet printhead with heater element close to drive circuits
US20090273641A1 (en) * 1997-07-15 2009-11-05 Silverbrook Research Pty Ltd Printhead IC With Ink Supply Channel For Multiple Nozzle Rows
US20080316264A1 (en) * 1997-07-15 2008-12-25 Silverbrook Research Pty Ltd Printhead integrated circuit with nozzles in thin surface layer
US7628468B2 (en) * 1997-07-15 2009-12-08 Silverbrook Research Pty Ltd Nozzle with reciprocating plunger
US20090273623A1 (en) * 1997-07-15 2009-11-05 Silverbrook Research Pty Ltd Printhead With Low Power Actuators
US6447100B2 (en) * 1997-07-15 2002-09-10 Silverbrook Research Pty Ltd Nozzle arrangement for an ink jet printhead which includes a refill actuator
US7401884B2 (en) 1997-07-15 2008-07-22 Silverbrook Research Pty Ltd Inkjet printhead with integral nozzle plate
US7527357B2 (en) * 1997-07-15 2009-05-05 Silverbrook Research Pty Ltd Inkjet nozzle array with individual feed channel for each nozzle
US7753469B2 (en) * 1997-07-15 2010-07-13 Silverbrook Research Pty Ltd Inkjet nozzle chamber with single inlet and plurality of nozzles
US20080316265A1 (en) * 1997-07-15 2008-12-25 Silverbrook Research Pty Ltd Printhead integrated circuit with high density array of droplet ejectors
US20080309727A1 (en) * 1997-07-15 2008-12-18 Silverbrook Research Pty Ltd Printhead integrated circuit with ink supply from back face
US7393083B2 (en) * 1997-07-15 2008-07-01 Silverbrook Research Pty Ltd Inkjet printer with low nozzle to chamber cross-section ratio
US20090273635A1 (en) * 1997-07-15 2009-11-05 Silverbrook Research Pty Ltd Printhead Integrated Circuit For Low Volume Droplet Ejection
US7578582B2 (en) * 1997-07-15 2009-08-25 Silverbrook Research Pty Ltd Inkjet nozzle chamber holding two fluids
US20080316266A1 (en) * 1997-07-15 2008-12-25 Silverbrook Research Pty Ltd Printhead integrated circuit with small nozzle apertures
US20080316268A1 (en) * 1997-07-15 2008-12-25 Silverbrook Research Pty Ltd Printhead with low power drive pulses for actuators
US6866290B2 (en) * 2002-12-04 2005-03-15 James Tsai Apparatus of a collapsible handcart for turning a platform when operating a retractable handle
US7472984B2 (en) * 1997-07-15 2009-01-06 Silverbrook Research Pty Ltd Inkjet chamber with plurality of nozzles
US6682174B2 (en) 1998-03-25 2004-01-27 Silverbrook Research Pty Ltd Ink jet nozzle arrangement configuration
US20090273636A1 (en) * 1997-07-15 2009-11-05 Silverbrook Research Pty Ltd Electro-Thermal Inkjet Printer With High Speed Media Feed
US7360872B2 (en) * 1997-07-15 2008-04-22 Silverbrook Research Pty Ltd Inkjet printhead chip with nozzle assemblies incorporating fluidic seals
US7661793B2 (en) * 1997-07-15 2010-02-16 Silverbrook Research Pty Ltd Inkjet nozzle with individual ink feed channels etched from both sides of wafer
US6986202B2 (en) * 1997-07-15 2006-01-17 Silverbrook Research Pty Ltd. Method of fabricating a micro-electromechanical fluid ejection device
US8117751B2 (en) * 1997-07-15 2012-02-21 Silverbrook Research Pty Ltd Method of forming printhead by removing sacrificial material through nozzle apertures
US7337532B2 (en) 1997-07-15 2008-03-04 Silverbrook Research Pty Ltd Method of manufacturing micro-electromechanical device having motion-transmitting structure
US20080309723A1 (en) * 1997-07-15 2008-12-18 Silverbrook Research Pty Ltd Printhead integrated circuit with large array of droplet ejectors
US20080309724A1 (en) * 1997-07-15 2008-12-18 Silverbrook Research Pty Ltd Printhead integrated circuit with small volume droplet ejectors
US7195339B2 (en) 1997-07-15 2007-03-27 Silverbrook Research Pty Ltd Ink jet nozzle assembly with a thermal bend actuator
US7234795B2 (en) * 1997-07-15 2007-06-26 Silverbrook Research Pty Ltd Inkjet nozzle with CMOS compatible actuator voltage
US7784902B2 (en) * 1997-07-15 2010-08-31 Silverbrook Research Pty Ltd Printhead integrated circuit with more than 10000 nozzles
US20080303867A1 (en) * 1997-07-15 2008-12-11 Silverbrook Research Pty Ltd Method of forming printhead by removing sacrificial material through nozzle apertures
US7468139B2 (en) 1997-07-15 2008-12-23 Silverbrook Research Pty Ltd Method of depositing heater material over a photoresist scaffold
US7465030B2 (en) 1997-07-15 2008-12-16 Silverbrook Research Pty Ltd Nozzle arrangement with a magnetic field generator
US6712453B2 (en) 1997-07-15 2004-03-30 Silverbrook Research Pty Ltd. Ink jet nozzle rim
US7475965B2 (en) * 1997-07-15 2009-01-13 Silverbrook Research Pty Ltd Inkjet printer with low droplet to chamber volume ratio
US7293855B2 (en) * 1997-07-15 2007-11-13 Silverbrook Research Pty Ltd Inkjet nozzle with ink supply channel parallel to drop trajectory
US6557977B1 (en) * 1997-07-15 2003-05-06 Silverbrook Research Pty Ltd Shape memory alloy ink jet printing mechanism
US7497555B2 (en) * 1998-07-10 2009-03-03 Silverbrook Research Pty Ltd Inkjet nozzle assembly with pre-shaped actuator
US20080309712A1 (en) * 1997-07-15 2008-12-18 Silverbrook Research Pty Ltd Printhead integrated circuit with actuators close to exterior surface
US7410250B2 (en) * 1997-07-15 2008-08-12 Silverbrook Research Pty Ltd Inkjet nozzle with supply duct dimensioned for viscous damping
US20090273638A1 (en) * 1997-07-15 2009-11-05 Silverbrook Research Pty Ltd Printhead Integrated Circuit With More Than Two Metal Layer CMOS
AUPP398798A0 (en) * 1998-06-09 1998-07-02 Silverbrook Research Pty Ltd Image creation method and apparatus (ij43)
US20090278891A1 (en) * 1997-07-15 2009-11-12 Silverbrook Research Pty Ltd Printhead IC With Filter Structure At Inlet To Ink Chambers
US7434915B2 (en) * 1997-07-15 2008-10-14 Silverbrook Research Pty Ltd Inkjet printhead chip with a side-by-side nozzle arrangement layout
US6247796B1 (en) * 1997-07-15 2001-06-19 Silverbrook Research Pty Ltd Magnetostrictive ink jet printing mechanism
US7334874B2 (en) * 1997-07-15 2008-02-26 Silverbrook Research Pty Ltd Inkjet nozzle chamber with electrostatically attracted plates
US6392221B1 (en) 1997-12-22 2002-05-21 Agere Systems Guardian Corp. Micro-electro-mechanical optical device
US6265239B1 (en) 1997-12-22 2001-07-24 Agere Systems Optoelectronics Guardian Corp. Micro-electro-mechanical optical device
US6300619B1 (en) * 1997-12-22 2001-10-09 Lucent Technologies Inc. Micro-electro-mechanical optical device
US6404969B1 (en) * 1999-03-30 2002-06-11 Coretek, Inc. Optical switching and attenuation systems and methods therefor
US6159385A (en) 1998-05-08 2000-12-12 Rockwell Technologies, Llc Process for manufacture of micro electromechanical devices having high electrical isolation
DE19821527A1 (de) * 1998-05-13 1999-12-02 Siemens Ag Schwingkreis
US6430332B1 (en) 1998-06-05 2002-08-06 Fiber, Llc Optical switching apparatus
US6439695B2 (en) * 1998-06-08 2002-08-27 Silverbrook Research Pty Ltd Nozzle arrangement for an ink jet printhead including volume-reducing actuators
US6959981B2 (en) * 1998-06-09 2005-11-01 Silverbrook Research Pty Ltd Inkjet printhead nozzle having wall actuator
US6742873B1 (en) * 2001-04-16 2004-06-01 Silverbrook Research Pty Ltd Inkjet printhead construction
ATE367927T1 (de) * 1998-10-16 2007-08-15 Silverbrook Res Pty Ltd Verfahren zur herstellung einer düse für einen tintenstrahldruckkopf
US6002507A (en) * 1998-12-01 1999-12-14 Xerox Corpoation Method and apparatus for an integrated laser beam scanner
USRE38437E1 (en) * 1998-12-01 2004-02-24 Xerox Corporation Method and apparatus for an integrated laser beam scanner using a carrier substrate
US6249073B1 (en) * 1999-01-14 2001-06-19 The Regents Of The University Of Michigan Device including a micromechanical resonator having an operating frequency and method of extending same
US20020004759A1 (en) * 1999-06-03 2002-01-10 Bradford Kevin B. Method and apparatus for electronic barter system
US6402302B1 (en) * 1999-06-04 2002-06-11 Canon Kabushiki Kaisha Liquid discharge head, manufacturing method thereof, and microelectromechanical device
AUPQ130999A0 (en) * 1999-06-30 1999-07-22 Silverbrook Research Pty Ltd A method and apparatus (IJ47V11)
DE19939318A1 (de) * 1999-08-19 2001-02-22 Bosch Gmbh Robert Verfahren zur Herstellung eines mikromechanischen Bauelements
US6366414B1 (en) * 1999-09-03 2002-04-02 Agere Systems Guardian Corp. Micro-electro-mechanical optical device
US6211598B1 (en) * 1999-09-13 2001-04-03 Jds Uniphase Inc. In-plane MEMS thermal actuator and associated fabrication methods
US6617750B2 (en) 1999-09-21 2003-09-09 Rockwell Automation Technologies, Inc. Microelectricalmechanical system (MEMS) electrical isolator with reduced sensitivity to inertial noise
US6803755B2 (en) 1999-09-21 2004-10-12 Rockwell Automation Technologies, Inc. Microelectromechanical system (MEMS) with improved beam suspension
US6798312B1 (en) * 1999-09-21 2004-09-28 Rockwell Automation Technologies, Inc. Microelectromechanical system (MEMS) analog electrical isolator
US6535318B1 (en) * 1999-11-12 2003-03-18 Jds Uniphase Corporation Integrated optoelectronic devices having pop-up mirrors therein and methods of forming and operating same
US6327855B1 (en) 2000-02-04 2001-12-11 Jds Uniphase Inc. Actuators including serpentine arrangements of alternating actuating and opposing segments and related methods
US6412904B1 (en) * 2000-05-23 2002-07-02 Silverbrook Research Pty Ltd. Residue removal from nozzle guard for ink jet printhead
US6412908B2 (en) * 2000-05-23 2002-07-02 Silverbrook Research Pty Ltd Inkjet collimator
US6867897B2 (en) * 2003-01-29 2005-03-15 Reflectivity, Inc Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays
US6587612B1 (en) * 2000-09-06 2003-07-01 Southwest Research Institute Thermally actuated spectroscopic optical switch
US6501282B1 (en) 2000-09-29 2002-12-31 Rockwell Automation Technologies, Inc. Highly sensitive capacitance comparison circuit
JP2002116403A (ja) * 2000-10-10 2002-04-19 Univ Tokyo 光スキャナ装置
US7095309B1 (en) * 2000-10-20 2006-08-22 Silverbrook Research Pty Ltd Thermoelastic actuator design
US6654155B2 (en) * 2000-11-29 2003-11-25 Xerox Corporation Single-crystal-silicon ribbon hinges for micro-mirror and MEMS assembly on SOI material
US6756545B2 (en) * 2000-11-29 2004-06-29 Xerox Corporation Micro-device assembly with electrical capabilities
US6504641B2 (en) 2000-12-01 2003-01-07 Agere Systems Inc. Driver and method of operating a micro-electromechanical system device
US6532093B2 (en) * 2000-12-06 2003-03-11 Xerox Corporation Integrated micro-opto-electro-mechanical laser scanner
US20020074897A1 (en) * 2000-12-15 2002-06-20 Qing Ma Micro-electromechanical structure resonator frequency adjustment using radient energy trimming and laser/focused ion beam assisted deposition
TW472402B (en) * 2001-01-02 2002-01-11 Hung-Yi Lin Micro-mechanical driving device and its manufacturing method
US6386676B1 (en) * 2001-01-08 2002-05-14 Hewlett-Packard Company Reflective type media sensing methodology
TWI224578B (en) * 2001-01-18 2004-12-01 Ibm Fabrication of silicon micro mechanical structures
US6583374B2 (en) 2001-02-20 2003-06-24 Rockwell Automation Technologies, Inc. Microelectromechanical system (MEMS) digital electrical isolator
US6756310B2 (en) 2001-09-26 2004-06-29 Rockwell Automation Technologies, Inc. Method for constructing an isolate microelectromechanical system (MEMS) device using surface fabrication techniques
US6768628B2 (en) 2001-04-26 2004-07-27 Rockwell Automation Technologies, Inc. Method for fabricating an isolated microelectromechanical system (MEMS) device incorporating a wafer level cap
US6569701B2 (en) 2001-10-25 2003-05-27 Rockwell Automation Technologies, Inc. Method for fabricating an isolated microelectromechanical system device
US6815243B2 (en) 2001-04-26 2004-11-09 Rockwell Automation Technologies, Inc. Method of fabricating a microelectromechanical system (MEMS) device using a pre-patterned substrate
US6761829B2 (en) 2001-04-26 2004-07-13 Rockwell Automation Technologies, Inc. Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void
US6794271B2 (en) * 2001-09-28 2004-09-21 Rockwell Automation Technologies, Inc. Method for fabricating a microelectromechanical system (MEMS) device using a pre-patterned bridge
US20020188842A1 (en) * 2001-06-06 2002-12-12 Willeby Tandy G. Client system validation by network address and associated geographic location verification
US6664786B2 (en) 2001-07-30 2003-12-16 Rockwell Automation Technologies, Inc. Magnetic field sensor using microelectromechanical system
US6958566B2 (en) * 2001-08-16 2005-10-25 The Regents Of The University Of Michigan Mechanical resonator device having phenomena-dependent electrical stiffness
US6593870B2 (en) 2001-10-18 2003-07-15 Rockwell Automation Technologies, Inc. MEMS-based electrically isolated analog-to-digital converter
US6690178B2 (en) 2001-10-26 2004-02-10 Rockwell Automation Technologies, Inc. On-board microelectromechanical system (MEMS) sensing device for power semiconductors
EP1321792A1 (de) * 2001-12-21 2003-06-25 Agfa-Gevaert AG Vorrichtung und Verfahren zum Steuern der räumlichen Strahllage von Laserstrahlen und Aktor hierfür
US7177065B2 (en) * 2002-01-09 2007-02-13 Nikon Corporation Optical element, thin film structure, optical switch, and method of manufacturing optical element
US7405854B2 (en) 2002-03-21 2008-07-29 Cornell Research Foundation, Inc. Fibrous micro-composite material
GB2389457B (en) * 2002-06-07 2006-07-26 Microsaic Systems Ltd Microengineered optical scanner
US7119994B2 (en) * 2002-11-28 2006-10-10 Tdk Corporation Actuator having a pair of arms with piezoelectric devices attached thereto and methods of making the same
JP4003129B2 (ja) * 2003-01-22 2007-11-07 ソニー株式会社 立体撮像装置、立体表示装置、立体撮像表示装置および情報記録方法
US7349104B2 (en) * 2003-10-23 2008-03-25 Technest Holdings, Inc. System and a method for three-dimensional imaging systems
US6839172B1 (en) * 2003-11-15 2005-01-04 Manouchehr E. Motamedi Enhanced sampling rate in time domain imaging using MOEMS scanning optical delay line
US6999221B1 (en) * 2003-11-17 2006-02-14 Alabama A&M University Bimorphic polymeric photomechanical actuator
US6980339B2 (en) * 2003-12-19 2005-12-27 Lucent Technologies Inc. Deformable MEMS mirror
KR100595999B1 (ko) * 2003-12-22 2006-07-07 한국전자통신연구원 파장가변 필터
US20050161751A1 (en) * 2004-01-22 2005-07-28 Zyvex Corporation MEMS device having compact actuator
US7189362B2 (en) * 2004-03-05 2007-03-13 University Of Alabama In Huntsville Optical waveguide microcantilever with differential output and associated methods of cantilever sensing
US20050255448A1 (en) * 2004-05-13 2005-11-17 Arun Majumdar System for amplifying optical detection of cantilever deflection
EP1771763A1 (de) 2004-06-24 2007-04-11 Cornell Research Foundation, Inc. Auf fasrigem verbundmaterial basierender optischer mems-scanner
US7929195B2 (en) * 2004-11-19 2011-04-19 Trustees Of Boston University MEMS based retroreflector
US7311409B2 (en) * 2004-11-24 2007-12-25 Northrop Grumman Corporation Two axis independent driven single hinged gimbaled mirror beam steerer
US7319580B2 (en) * 2005-03-29 2008-01-15 Intel Corporation Collapsing zipper varactor with inter-digit actuation electrodes for tunable filters
US7397978B1 (en) 2005-07-13 2008-07-08 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Apparatus and method for packaging and integrating microphotonic devices
US7706573B1 (en) 2005-09-19 2010-04-27 Motamedi Manouchehr E Remote distance-measurement between any two arbitrary points using laser assisted optics
US7663295B2 (en) * 2005-12-15 2010-02-16 Imec Method and system for measuring physical parameters with a piezoelectric bimorph cantilever in a gaseous or liquid environment
US8061617B2 (en) * 2006-07-28 2011-11-22 Intermec Ip Corp. Enhanced resolution automatic data collection apparatus and method using an afocal optical element
US7967111B2 (en) * 2006-12-18 2011-06-28 Cosco Management, Inc. Stepladder
JP5286906B2 (ja) * 2007-06-08 2013-09-11 大日本印刷株式会社 圧電ミラーデバイスとこれを用いた光学機器および圧電ミラーデバイスの製造方法
KR20100130616A (ko) * 2008-04-08 2010-12-13 코니카 미노루따 호르딩구스 가부시끼가이샤 액추에이터 어레이 시트
US10752492B2 (en) 2014-04-01 2020-08-25 Agiltron, Inc. Microelectromechanical displacement structure and method for controlling displacement
US20150355458A1 (en) * 2014-06-10 2015-12-10 Shuyun (Steve) Wu Micro-machined optical mirror switch
CN107430269B (zh) * 2015-03-06 2020-10-02 英特尔公司 用于激光束操纵的声光学偏转器和反射镜
JP6671471B2 (ja) * 2015-07-13 2020-03-25 イントレピッド ヴィジョンズ インコーポレーテッドＩｎｔｒｅｐｉｄ Ｖｉｓｉｏｎｓ Ｉｎｃ． ベース励振によるマイクロ−カンチレバー作動のためのシステムおよび方法
US9830489B2 (en) 2016-03-29 2017-11-28 Analog Devices, Inc. Simple code reader
JP6524971B2 (ja) * 2016-06-14 2019-06-05 株式会社デンソー 荷重変動検出装置
CN107449491B (zh) * 2017-07-17 2019-09-24 西北工业大学 一种弱耦合谐振式传感器的扰动位置确定方法
JP7000874B2 (ja) * 2018-01-19 2022-01-19 船井電機株式会社 振動素子
GB2589357A (en) * 2019-11-28 2021-06-02 Nokia Technologies Oy Microactuator apparatus and system
US11420866B2 (en) 2020-03-23 2022-08-23 Taiwan Semiconductor Manufacturing Company, Ltd. Composite spring structure to reinforce mechanical robustness of a MEMS device

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3758199A (en) * 1971-11-22 1973-09-11 Sperry Rand Corp Piezoelectrically actuated light deflector
DE2321211C3 (de) * 1973-04-26 1980-04-17 Siemens Ag, 1000 Berlin Und 8000 Muenchen Strahlablenker mit piezoelektrisch angetriebenen schwenkbaren Spiegeln
US4385798A (en) * 1980-09-16 1983-05-31 Yevick George J Piezoelectric light beam deflector
DE3035315C2 (de) * 1980-09-18 1984-07-12 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Piezoelektrische Lichtablenkvorrichtung
JPS62250410A (ja) * 1986-04-23 1987-10-31 Matsushita Electric Ind Co Ltd 光走査装置
US5170277A (en) * 1988-05-11 1992-12-08 Symbol Technologies, Inc. Piezoelectric beam deflector
US5015831A (en) * 1988-11-07 1991-05-14 Photographic Sciences Corporation Scan modules for bar code readers and the like in which scan elements are flexurally supported
CA2025167A1 (en) * 1989-09-25 1991-03-26 Frederick W. Freyre Method and apparatus for signal multiplexing/demultiplexing
US5280165A (en) * 1989-10-30 1994-01-18 Symbol Technolgoies, Inc. Scan pattern generators for bar code symbol readers
US5371347A (en) * 1991-10-15 1994-12-06 Gap Technologies, Incorporated Electro-optical scanning system with gyrating scan head
US5198651A (en) * 1991-05-03 1993-03-30 Symbol Technologies, Inc. Laser diode device incorporating structure with integral scanning motor
JPH04342221A (ja) * 1991-05-20 1992-11-27 Fujitsu Ltd 曲面ガルバノミラ−スキャナ
US5329103A (en) * 1991-10-30 1994-07-12 Spectra-Physics Laser beam scanner with low cost ditherer mechanism
JPH0646207A (ja) * 1992-01-14 1994-02-18 Matsushita Electric Ind Co Ltd 圧電駆動マイクロスキャナ
JP3389270B2 (ja) * 1992-05-15 2003-03-24 シンボル テクノロジイズ インコーポレイテッド 小型バーコード走査装置
US5295014A (en) * 1992-11-12 1994-03-15 The Whitaker Corporation Two-dimensional laser beam scanner using PVDF bimorph
US5629510A (en) * 1992-12-04 1997-05-13 Psc Inc. Bar code scanning and reading apparatus with an oscillating scanning engine
JP3219123B2 (ja) * 1993-11-29 2001-10-15 株式会社デンソー ２次元光走査装置及びそれを用いたバーコード読取装置
JPH07270700A (ja) * 1994-03-30 1995-10-20 Olympus Optical Co Ltd 光偏向装置
JPH0815621A (ja) * 1994-06-28 1996-01-19 Yokogawa Electric Corp 光スイッチ
US5619177A (en) * 1995-01-27 1997-04-08 Mjb Company Shape memory alloy microactuator having an electrostatic force and heating means
US5804709A (en) * 1995-02-07 1998-09-08 International Business Machines Corporation Cantilever deflection sensor and use thereof
JP2848539B2 (ja) * 1995-02-07 1999-01-20 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン カンチレバー振れセンサ及びその使用方法
JPH08220463A (ja) * 1995-02-13 1996-08-30 Nikon Corp 光走査装置用ミラー
JP3518099B2 (ja) * 1995-10-06 2004-04-12 株式会社デンソー 光スキャナ装置

Also Published As

Publication number Publication date
US5903380A (en) 1999-05-11
EP0875780A2 (de) 1998-11-04
US6094289A (en) 2000-07-25
DE69836448T2 (de) 2007-03-08
JPH10325935A (ja) 1998-12-08
EP0875780A3 (de) 1999-07-14
EP0875780B1 (de) 2006-11-22

Similar Documents

Publication Publication Date Title
DE69836448D1 (de) Mikro-elektromechanischer (MEM) optischer Resonator und Verfahren
DE69834401D1 (de) Businterfacesystem und verfahren
DE69736792D1 (de) Mikromechanischer optischer Modulator und Verfahren zu seiner Herstellung
DE69811861D1 (de) Optisches herstellungsverfahren und - gerät
DE59607318D1 (de) Mikromechanisches bauelement
DE69831678D1 (de) Optisches übertragungssystem und verfahren
DE69809213D1 (de) Telekommunikationsgerät und verfahren
DE69508160D1 (de) Verbesserte mikromechanische Geräte
DE69827902D1 (de) Optische Vorrichtung und Herstellungsverfahren
DE69720663D1 (de) Mikromechanische Geräte
DE69529880D1 (de) Mikromechanische Vorrichtung
DE69828471D1 (de) Oberflächenartige optische Vorrichtung und Herstellungsverfahren
KR970704546A (ko) 희생 기층을 사용하는 선단 및 상호 접속부의 제조(Fabricating Interconnects and Tips Using Sacrificial Substrates)
DK1243299T3 (da) Mikrostruktureret filter
ID24490A (id) Metode untuk menggunakan dan metode pembuatan tabung oven-pijar
DE69835071D1 (de) Selbstanordnende mikromechanische Einrichtung
DE69519439D1 (de) Kalibrierbares optisches Entfernungsbestimmungssystem und Verfahren dafür
DE69826800D1 (de) Integriert-optischer Wellenleiter und Verfahren zu seiner Herstellung
DE69508624D1 (de) Kontaktlinsenwendeapparat und verfahren
DE69522165T2 (de) Mikrokreisel
DE60041204D1 (de) Optischer verbinder und verfahren zu seinem zusammenbau
DE69622264D1 (de) Kompakter laserapparat und verfahren
DE69820208D1 (de) TDMA Kommunikationssystem und Verfahren
DE69812750T2 (de) Selbstabstimmendes optisches Wellenleiterfilter
DE69823904D1 (de) Mikromechanische Pipettiervorrichtung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition