DE69904184T2 - Photonisches baulement mit integralem leiter und herstellungsverfahren - Google Patents
Photonisches baulement mit integralem leiter und herstellungsverfahrenInfo
- Publication number
- DE69904184T2 DE69904184T2 DE69904184T DE69904184T DE69904184T2 DE 69904184 T2 DE69904184 T2 DE 69904184T2 DE 69904184 T DE69904184 T DE 69904184T DE 69904184 T DE69904184 T DE 69904184T DE 69904184 T2 DE69904184 T2 DE 69904184T2
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- photonic component
- integral ladder
- ladder
- integral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
- G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/111,943 US6151430A (en) | 1998-07-08 | 1998-07-08 | Photonic device having an integal guide and method of manufacturing |
PCT/US1999/014370 WO2000003282A1 (en) | 1998-07-08 | 1999-06-24 | Photonic device having an integral guide and method of manufacturing |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69904184D1 DE69904184D1 (de) | 2003-01-09 |
DE69904184T2 true DE69904184T2 (de) | 2003-11-13 |
Family
ID=22341277
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69904184T Expired - Fee Related DE69904184T2 (de) | 1998-07-08 | 1999-06-24 | Photonisches baulement mit integralem leiter und herstellungsverfahren |
Country Status (7)
Country | Link |
---|---|
US (2) | US6151430A (de) |
EP (1) | EP1095302B1 (de) |
JP (1) | JP2002520650A (de) |
AU (1) | AU4718599A (de) |
CA (1) | CA2336768A1 (de) |
DE (1) | DE69904184T2 (de) |
WO (1) | WO2000003282A1 (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100686920B1 (ko) * | 1998-11-10 | 2007-02-27 | 라이트웨이브 마이크로시스템스 코오포레이션 | 열광학 폴리머를 포함하는 광소자 |
US6798953B1 (en) * | 2000-01-07 | 2004-09-28 | International Business Machines Corporation | Guides lithographically fabricated on semiconductor devices |
US7087179B2 (en) * | 2000-12-11 | 2006-08-08 | Applied Materials, Inc. | Optical integrated circuits (ICs) |
US20020164129A1 (en) * | 2001-04-05 | 2002-11-07 | Jackson Michael K. | Optical fiber passive alignment fixture |
GB2378316A (en) * | 2001-07-30 | 2003-02-05 | Suisse Electronique Microtech | Passive alignment microstructures for electroptical devices |
US6634802B2 (en) | 2001-08-09 | 2003-10-21 | International Business Machines Corporation | Optical-electronic array module and method therefore |
US6839488B2 (en) | 2001-09-10 | 2005-01-04 | California Institute Of Technology | Tunable resonant cavity based on the field effect in semiconductors |
US6990257B2 (en) * | 2001-09-10 | 2006-01-24 | California Institute Of Technology | Electronically biased strip loaded waveguide |
US7082235B2 (en) * | 2001-09-10 | 2006-07-25 | California Institute Of Technology | Structure and method for coupling light between dissimilar waveguides |
US6888989B1 (en) * | 2001-12-11 | 2005-05-03 | Phosistor Technologies, Inc. | Photonic chip mounting in a recess for waveguide alignment and connection |
US7303339B2 (en) * | 2002-08-28 | 2007-12-04 | Phosistor Technologies, Inc. | Optical beam transformer module for light coupling between a fiber array and a photonic chip and the method of making the same |
US7426328B2 (en) * | 2002-08-28 | 2008-09-16 | Phosistor Technologies, Inc. | Varying refractive index optical medium using at least two materials with thicknesses less than a wavelength |
US8538208B2 (en) * | 2002-08-28 | 2013-09-17 | Seng-Tiong Ho | Apparatus for coupling light between input and output waveguides |
US6817776B2 (en) * | 2002-11-19 | 2004-11-16 | International Business Machines Corporation | Method of bonding optical fibers and optical fiber assembly |
US8053159B2 (en) | 2003-11-18 | 2011-11-08 | Honeywell International Inc. | Antireflective coatings for via fill and photolithography applications and methods of preparation thereof |
US7079740B2 (en) * | 2004-03-12 | 2006-07-18 | Applied Materials, Inc. | Use of amorphous carbon film as a hardmask in the fabrication of optical waveguides |
US7315679B2 (en) | 2004-06-07 | 2008-01-01 | California Institute Of Technology | Segmented waveguide structures |
TWI291725B (en) * | 2004-11-12 | 2007-12-21 | Nat Applied Res Lab Nat Ch | Method for dicing a released CMOS-MEMS multi-project wafer |
GB2425895A (en) * | 2005-03-04 | 2006-11-08 | Afonics Fibreoptics Ltd | Registration structure for aligning components on a substrate |
US7826688B1 (en) | 2005-10-21 | 2010-11-02 | Luxtera, Inc. | Enhancing the sensitivity of resonant optical modulating and switching devices |
KR100944336B1 (ko) * | 2006-01-13 | 2010-03-02 | 주식회사 하이닉스반도체 | 반도체 소자의 미세패턴 형성 방법 |
US8755655B2 (en) * | 2009-09-22 | 2014-06-17 | Oracle America, Inc. | Edge-coupled optical proximity communication |
TWI550262B (zh) * | 2012-11-08 | 2016-09-21 | 鴻海精密工業股份有限公司 | 用於光纖檢測的固定裝置 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2440563A1 (fr) * | 1978-11-02 | 1980-05-30 | Labo Electronique Physique | Dispositif de liaison entre fibres optiques et/ou dispositifs electro-optiques, et procede pour assurer leur positionnement optimal |
US4882245A (en) * | 1985-10-28 | 1989-11-21 | International Business Machines Corporation | Photoresist composition and printed circuit boards and packages made therewith |
US4779946A (en) * | 1986-02-14 | 1988-10-25 | American Telephone And Telegraph Company, At&T Bell Laboratories | Microminiature optical assembly |
US4826272A (en) | 1987-08-27 | 1989-05-02 | American Telephone And Telegraph Company At&T Bell Laboratories | Means for coupling an optical fiber to an opto-electronic device |
US4826275A (en) * | 1987-12-14 | 1989-05-02 | Ltv Aerospace And Defense Company | Optical communication systems using star couplers |
US5054872A (en) | 1990-03-16 | 1991-10-08 | Ibm Corporation | Polymeric optical waveguides and methods of forming the same |
US5093883A (en) * | 1991-04-26 | 1992-03-03 | Hoechst Celanese Corp. | Nonlinear optically responsive polymeric waveguides |
US5125054A (en) | 1991-07-25 | 1992-06-23 | Motorola, Inc. | Laminated polymer optical waveguide interface and method of making same |
US5357103A (en) * | 1991-10-02 | 1994-10-18 | Sumitomo Electric Industries, Inc. | Light receiving module with optical fiber coupling |
DE4212208A1 (de) * | 1992-04-10 | 1993-10-14 | Bosch Gmbh Robert | Verfahren zur Herstellung optischer Polymerbauelemente mit integrierter Faser-Chip-Kopplung in Abformtechnik |
US5355386A (en) * | 1992-11-17 | 1994-10-11 | Gte Laboratories Incorporated | Monolithically integrated semiconductor structure and method of fabricating such structure |
JP3484543B2 (ja) * | 1993-03-24 | 2004-01-06 | 富士通株式会社 | 光結合部材の製造方法及び光装置 |
US5420954A (en) * | 1993-05-24 | 1995-05-30 | Photonics Research Incorporated | Parallel optical interconnect |
US5359687A (en) * | 1993-08-23 | 1994-10-25 | Alliedsignal Inc. | Polymer microstructures which facilitate fiber optic to waveguide coupling |
DE69618035T2 (de) * | 1995-06-30 | 2002-07-11 | Whitaker Corp | Vorrichtung zur ausrichtung eines optoelektronischen bauteils |
US5886102A (en) * | 1996-06-11 | 1999-03-23 | Shipley Company, L.L.C. | Antireflective coating compositions |
US6085007A (en) * | 1998-02-27 | 2000-07-04 | Jiang; Ching-Long | Passive alignment member for vertical surface emitting/detecting device |
-
1998
- 1998-07-08 US US09/111,943 patent/US6151430A/en not_active Expired - Lifetime
-
1999
- 1999-06-24 JP JP2000559462A patent/JP2002520650A/ja active Pending
- 1999-06-24 DE DE69904184T patent/DE69904184T2/de not_active Expired - Fee Related
- 1999-06-24 EP EP99930704A patent/EP1095302B1/de not_active Expired - Lifetime
- 1999-06-24 CA CA002336768A patent/CA2336768A1/en not_active Abandoned
- 1999-06-24 AU AU47185/99A patent/AU4718599A/en not_active Abandoned
- 1999-06-24 WO PCT/US1999/014370 patent/WO2000003282A1/en active IP Right Grant
-
2000
- 2000-09-26 US US09/669,750 patent/US6472126B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2002520650A (ja) | 2002-07-09 |
EP1095302A1 (de) | 2001-05-02 |
CA2336768A1 (en) | 2000-01-20 |
US6472126B1 (en) | 2002-10-29 |
EP1095302B1 (de) | 2002-11-27 |
AU4718599A (en) | 2000-02-01 |
US6151430A (en) | 2000-11-21 |
DE69904184D1 (de) | 2003-01-09 |
WO2000003282A1 (en) | 2000-01-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |