DE69904338D1 - Vorricthung zum messen von translation,rotation oder geschwindigkeit durch interferenz von lichtstrahlen - Google Patents
Vorricthung zum messen von translation,rotation oder geschwindigkeit durch interferenz von lichtstrahlenInfo
- Publication number
- DE69904338D1 DE69904338D1 DE69904338T DE69904338T DE69904338D1 DE 69904338 D1 DE69904338 D1 DE 69904338D1 DE 69904338 T DE69904338 T DE 69904338T DE 69904338 T DE69904338 T DE 69904338T DE 69904338 D1 DE69904338 D1 DE 69904338D1
- Authority
- DE
- Germany
- Prior art keywords
- grating
- rotation
- interference
- speed
- light beams
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP98115810 | 1998-08-21 | ||
PCT/EP1999/006057 WO2000011431A1 (en) | 1998-08-21 | 1999-08-19 | Device for measuring translation, rotation or velocity via light beam interference |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69904338D1 true DE69904338D1 (de) | 2003-01-16 |
DE69904338T2 DE69904338T2 (de) | 2003-10-16 |
Family
ID=8232496
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69904338T Expired - Lifetime DE69904338T2 (de) | 1998-08-21 | 1999-08-19 | Vorricthung zum messen von translation,rotation oder geschwindigkeit durch interferenz von lichtstrahlen |
Country Status (7)
Country | Link |
---|---|
US (2) | US6359691B2 (de) |
EP (1) | EP1104543B1 (de) |
AT (1) | ATE229169T1 (de) |
CA (1) | CA2341432C (de) |
DE (1) | DE69904338T2 (de) |
IL (1) | IL141536A (de) |
WO (1) | WO2000011431A1 (de) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4381671B2 (ja) * | 2002-10-23 | 2009-12-09 | ソニーマニュファクチュアリングシステムズ株式会社 | 変位検出装置 |
EP1519158B1 (de) * | 2003-09-23 | 2010-08-11 | Dr. Johannes Heidenhain GmbH | Positionsmesseinrichtung |
FR2872898A1 (fr) * | 2004-07-09 | 2006-01-13 | Neviere Michel | Capteur optique de deplacement de resolution nanometrique |
FR2872899A1 (fr) * | 2004-07-09 | 2006-01-13 | Neviere Michel | Capteur optique de deplacement de resolution nanometrique |
DE102004035172A1 (de) * | 2004-07-16 | 2006-02-09 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
CN101061370A (zh) * | 2004-11-22 | 2007-10-24 | 皇家飞利浦电子股份有限公司 | 用于探测物体的平移的探测系统 |
JP2008520997A (ja) * | 2004-11-22 | 2008-06-19 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 物体の動きを検出する光学システム |
US7800823B2 (en) | 2004-12-06 | 2010-09-21 | Moxtek, Inc. | Polarization device to polarize and further control light |
US20080055719A1 (en) * | 2006-08-31 | 2008-03-06 | Perkins Raymond T | Inorganic, Dielectric Grid Polarizer |
US7961393B2 (en) | 2004-12-06 | 2011-06-14 | Moxtek, Inc. | Selectively absorptive wire-grid polarizer |
US7570424B2 (en) | 2004-12-06 | 2009-08-04 | Moxtek, Inc. | Multilayer wire-grid polarizer |
DE102005043569A1 (de) * | 2005-09-12 | 2007-03-22 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
US8755113B2 (en) | 2006-08-31 | 2014-06-17 | Moxtek, Inc. | Durable, inorganic, absorptive, ultra-violet, grid polarizer |
GB0621487D0 (en) * | 2006-10-28 | 2006-12-06 | Renishaw Plc | Opto-electronic read head |
EP2233892B1 (de) * | 2009-03-27 | 2015-05-27 | SICK STEGMANN GmbH | Zylindrischer Gitterrotationssensor |
US8611007B2 (en) | 2010-09-21 | 2013-12-17 | Moxtek, Inc. | Fine pitch wire grid polarizer |
US8913321B2 (en) | 2010-09-21 | 2014-12-16 | Moxtek, Inc. | Fine pitch grid polarizer |
DE102011050030B4 (de) * | 2011-05-02 | 2013-03-28 | Scanlab Ag | Positionsdetektor und Lichtablenkvorrichtung mit Positionsdetektor |
US8913320B2 (en) | 2011-05-17 | 2014-12-16 | Moxtek, Inc. | Wire grid polarizer with bordered sections |
US8873144B2 (en) | 2011-05-17 | 2014-10-28 | Moxtek, Inc. | Wire grid polarizer with multiple functionality sections |
US8922890B2 (en) | 2012-03-21 | 2014-12-30 | Moxtek, Inc. | Polarizer edge rib modification |
US9632223B2 (en) | 2013-10-24 | 2017-04-25 | Moxtek, Inc. | Wire grid polarizer with side region |
JP6261380B2 (ja) * | 2014-02-27 | 2018-01-17 | 株式会社東京精密 | 光学式エンコーダ |
JP6386337B2 (ja) * | 2014-10-23 | 2018-09-05 | 株式会社ミツトヨ | 光学式エンコーダ |
US9970845B2 (en) * | 2016-02-10 | 2018-05-15 | Apple Inc. | Interrogating DOE integrity by reverse illumination |
EP3586189B1 (de) * | 2017-02-23 | 2024-01-10 | Nikon Corporation | Messung einer änderung bei einer geometrischen eigenschaft und / oder position eines werkstücks |
US11740399B2 (en) * | 2018-02-06 | 2023-08-29 | Raytheon Company | Low cost dispersive optical elements |
US10901202B2 (en) * | 2018-09-19 | 2021-01-26 | Illumina, Inc. | Structured illumination of a sample |
WO2020179342A1 (ja) * | 2019-03-01 | 2020-09-10 | パナソニックIpマネジメント株式会社 | 光学装置 |
DE102019206937A1 (de) * | 2019-05-14 | 2020-11-19 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
RU201730U1 (ru) * | 2020-10-29 | 2020-12-29 | Федеральное государственное бюджетное учреждение "Петербургский институт ядерной физики им. Б.П. Константинова Национального исследовательского центра "Курчатовский институт" | Датчик линейных перемещений |
CN113758428B (zh) * | 2021-09-27 | 2022-12-13 | 清华大学 | 光刻机掩模台六自由度位移测量系统 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE8816647U1 (de) * | 1988-03-25 | 1990-02-15 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut, De | |
DE4027024A1 (de) * | 1990-08-27 | 1992-03-05 | Standard Elektrik Lorenz Ag | Faserkreisel |
DE59204951D1 (de) * | 1992-09-21 | 1996-02-15 | Heidenhain Gmbh Dr Johannes | Längen- oder Winkelmesseinrichtung |
US5424833A (en) | 1992-09-21 | 1995-06-13 | Dr. Johannes Heidenhain Gmbh | Interferential linear and angular displacement apparatus having scanning and scale grating respectively greater than and less than the source wavelength |
JP3478567B2 (ja) * | 1992-09-25 | 2003-12-15 | キヤノン株式会社 | 回転情報検出装置 |
JP3210111B2 (ja) | 1992-12-24 | 2001-09-17 | キヤノン株式会社 | 変位検出装置 |
JP3005131B2 (ja) * | 1992-12-28 | 2000-01-31 | キヤノン株式会社 | 変位検出装置 |
JP3082516B2 (ja) * | 1993-05-31 | 2000-08-28 | キヤノン株式会社 | 光学式変位センサおよび該光学式変位センサを用いた駆動システム |
JP3513251B2 (ja) * | 1994-03-14 | 2004-03-31 | キヤノン株式会社 | 光学式変位センサ |
EP0741282A3 (de) * | 1995-05-04 | 1998-06-17 | CSEM Centre Suisse d'Electronique et de Microtechnique S.A. - Recherche et Développement | Optische Vorrichtung zum Messen der relativen Verschiebung zwischen zwei Bauteilen |
GB9522491D0 (en) * | 1995-11-02 | 1996-01-03 | Renishaw Plc | Opto-electronic rotary encoder |
-
1999
- 1999-08-19 IL IL14153699A patent/IL141536A/xx not_active IP Right Cessation
- 1999-08-19 DE DE69904338T patent/DE69904338T2/de not_active Expired - Lifetime
- 1999-08-19 EP EP99944433A patent/EP1104543B1/de not_active Expired - Lifetime
- 1999-08-19 WO PCT/EP1999/006057 patent/WO2000011431A1/en active IP Right Grant
- 1999-08-19 AT AT99944433T patent/ATE229169T1/de not_active IP Right Cessation
- 1999-08-19 CA CA002341432A patent/CA2341432C/en not_active Expired - Lifetime
-
2001
- 2001-02-21 US US09/788,444 patent/US6359691B2/en not_active Ceased
-
2004
- 2004-03-18 US US10/803,198 patent/USRE40551E1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US6359691B2 (en) | 2002-03-19 |
CA2341432C (en) | 2008-01-15 |
WO2000011431A1 (en) | 2000-03-02 |
DE69904338T2 (de) | 2003-10-16 |
EP1104543B1 (de) | 2002-12-04 |
CA2341432A1 (en) | 2000-03-02 |
IL141536A (en) | 2005-07-25 |
USRE40551E1 (en) | 2008-10-28 |
EP1104543A1 (de) | 2001-06-06 |
IL141536A0 (en) | 2002-03-10 |
US20010006421A1 (en) | 2001-07-05 |
ATE229169T1 (de) | 2002-12-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69904338D1 (de) | Vorricthung zum messen von translation,rotation oder geschwindigkeit durch interferenz von lichtstrahlen | |
DE58904369D1 (de) | Positionsmesseinrichtung. | |
WO1997026514A3 (en) | Spectral analyser and direction indicator | |
EP0311144A3 (de) | Optisches Instrument zur Messung einer Verschiebung | |
DE59712671D1 (de) | Lichtelektrische Positionsmesseinrichtung | |
DE69733430D1 (de) | System und verfahren zum ausführen von bestimmten optischen messungen | |
KR900006921A (ko) | 광픽업장치 | |
ATE89920T1 (de) | Lichtelektrische positionsmesseinrichtung. | |
GB1461084A (en) | Detection of the intensity of light | |
JPH08105708A (ja) | 干渉計 | |
ATE89406T1 (de) | Positionsmesseinrichtung. | |
GB1431067A (en) | Apparatus for measuring a property of movement | |
GB1474049A (en) | Arrangement for the modulation of light | |
ATE189057T1 (de) | Vorrichtung zum erzeugen von positionsabhängigen signalen | |
KR860700294A (ko) | 스펙트럼 분석 및 방향표시 시스템 | |
ATE91781T1 (de) | Winkelmesseinrichtung. | |
JPS57207805A (en) | Displacement measuring device | |
JPH04324316A (ja) | 定点検出装置 | |
ATE122456T1 (de) | Winkelmesseinrichtung. | |
FR2361630A1 (fr) | Procede de mesure interferometrique, relative a la surface | |
FR2235354A1 (en) | Photoelectric optical test sensor - measures displacement of a diffraction screen with constant spacing in the test sensor plane | |
JPS5618709A (en) | Method of measuring minute angle | |
JPH01182707A (ja) | 格子周期測定装置 | |
ATE89410T1 (de) | Positionsmesseinrichtung. | |
SU140588A1 (ru) | Устройство дл измерени линейных перемещений при помощи двух дифракционных решеток |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |