DE69904517D1 - Verfahren und Vorrichtung zur dreidimensionalen Verarbeitung von strangförmigen Substraten - Google Patents

Verfahren und Vorrichtung zur dreidimensionalen Verarbeitung von strangförmigen Substraten

Info

Publication number
DE69904517D1
DE69904517D1 DE69904517T DE69904517T DE69904517D1 DE 69904517 D1 DE69904517 D1 DE 69904517D1 DE 69904517 T DE69904517 T DE 69904517T DE 69904517 T DE69904517 T DE 69904517T DE 69904517 D1 DE69904517 D1 DE 69904517D1
Authority
DE
Germany
Prior art keywords
strand
substrates
dimensional processing
dimensional
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69904517T
Other languages
English (en)
Other versions
DE69904517T2 (de
Inventor
Stephen C Jacobsen
David L Wells
Michael R Mcneely
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sarcos LC
Original Assignee
Sarcos LC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sarcos LC filed Critical Sarcos LC
Application granted granted Critical
Publication of DE69904517D1 publication Critical patent/DE69904517D1/de
Publication of DE69904517T2 publication Critical patent/DE69904517T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
DE69904517T 1998-02-10 1999-02-04 Verfahren und Vorrichtung zur dreidimensionalen Verarbeitung von strangförmigen Substraten Expired - Lifetime DE69904517T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/021,103 US6063200A (en) 1998-02-10 1998-02-10 Three-dimensional micro fabrication device for filamentary substrates

Publications (2)

Publication Number Publication Date
DE69904517D1 true DE69904517D1 (de) 2003-01-30
DE69904517T2 DE69904517T2 (de) 2003-09-25

Family

ID=21802356

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69904517T Expired - Lifetime DE69904517T2 (de) 1998-02-10 1999-02-04 Verfahren und Vorrichtung zur dreidimensionalen Verarbeitung von strangförmigen Substraten

Country Status (5)

Country Link
US (2) US6063200A (de)
EP (1) EP0936281B1 (de)
JP (1) JP4512212B2 (de)
CA (1) CA2261425C (de)
DE (1) DE69904517T2 (de)

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US8795202B2 (en) 2011-02-04 2014-08-05 Boston Scientific Scimed, Inc. Guidewires and methods for making and using the same
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CN103866249A (zh) * 2012-12-13 2014-06-18 中国科学院大连化学物理研究所 一种磁控溅射装置及其应用
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Also Published As

Publication number Publication date
EP0936281B1 (de) 2002-12-18
JP2000038667A (ja) 2000-02-08
CA2261425A1 (en) 1999-08-10
JP4512212B2 (ja) 2010-07-28
US6063200A (en) 2000-05-16
DE69904517T2 (de) 2003-09-25
EP0936281A1 (de) 1999-08-18
CA2261425C (en) 2007-06-05
US6066361A (en) 2000-05-23

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