DE69932558D1 - Monolithische Filter mit Benützung von Dünnfilmvorrichtungen mit akustischen Volumenwellen und mit einem Minimum an passiven Komponenten zur Kontrolle der Form und Breite im Durchlassbereich - Google Patents

Monolithische Filter mit Benützung von Dünnfilmvorrichtungen mit akustischen Volumenwellen und mit einem Minimum an passiven Komponenten zur Kontrolle der Form und Breite im Durchlassbereich

Info

Publication number
DE69932558D1
DE69932558D1 DE69932558T DE69932558T DE69932558D1 DE 69932558 D1 DE69932558 D1 DE 69932558D1 DE 69932558 T DE69932558 T DE 69932558T DE 69932558 T DE69932558 T DE 69932558T DE 69932558 D1 DE69932558 D1 DE 69932558D1
Authority
DE
Germany
Prior art keywords
passband
minimum
thin
width
shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69932558T
Other languages
English (en)
Other versions
DE69932558T2 (de
Inventor
Juha Ella
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Avago Technologies International Sales Pte Ltd
Original Assignee
Nokia Oyj
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nokia Oyj filed Critical Nokia Oyj
Publication of DE69932558D1 publication Critical patent/DE69932558D1/de
Application granted granted Critical
Publication of DE69932558T2 publication Critical patent/DE69932558T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/586—Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/589—Acoustic mirrors
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/0023—Balance-unbalance or balance-balance networks
    • H03H9/0095—Balance-unbalance or balance-balance networks using bulk acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/542—Filters comprising resonators of piezo-electric or electrostrictive material including passive elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/583—Multiple crystal filters implemented with thin-film techniques comprising a plurality of piezoelectric layers acoustically coupled
    • H03H9/585—Stacked Crystal Filters [SCF]
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/586—Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/587—Air-gaps
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/586—Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/588—Membranes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/60—Electric coupling means therefor
    • H03H9/605—Electric coupling means therefor consisting of a ladder configuration
DE69932558T 1998-04-08 1999-04-08 Monolithische Filter mit Benützung von Dünnfilmvorrichtungen mit akustischen Volumenwellen und mit einem Minimum an passiven Komponenten zur Kontrolle der Form und Breite im Durchlassbereich Expired - Lifetime DE69932558T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/057,299 US6081171A (en) 1998-04-08 1998-04-08 Monolithic filters utilizing thin film bulk acoustic wave devices and minimum passive components for controlling the shape and width of a passband response
US57299 1998-04-08

Publications (2)

Publication Number Publication Date
DE69932558D1 true DE69932558D1 (de) 2006-09-14
DE69932558T2 DE69932558T2 (de) 2007-08-09

Family

ID=22009749

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69932558T Expired - Lifetime DE69932558T2 (de) 1998-04-08 1999-04-08 Monolithische Filter mit Benützung von Dünnfilmvorrichtungen mit akustischen Volumenwellen und mit einem Minimum an passiven Komponenten zur Kontrolle der Form und Breite im Durchlassbereich

Country Status (4)

Country Link
US (1) US6081171A (de)
EP (1) EP0949756B1 (de)
JP (1) JP4326063B2 (de)
DE (1) DE69932558T2 (de)

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US6081171A (en) 2000-06-27
EP0949756B1 (de) 2006-08-02
DE69932558T2 (de) 2007-08-09
JPH11346140A (ja) 1999-12-14
EP0949756A3 (de) 2001-05-09
JP4326063B2 (ja) 2009-09-02
EP0949756A2 (de) 1999-10-13

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