DE69939889D1 - Bildaufnahmevorrichtung und Bildaufnahmesystem sowie Herstellungsverfahren einer solchen Vorrichtung - Google Patents
Bildaufnahmevorrichtung und Bildaufnahmesystem sowie Herstellungsverfahren einer solchen VorrichtungInfo
- Publication number
- DE69939889D1 DE69939889D1 DE69939889T DE69939889T DE69939889D1 DE 69939889 D1 DE69939889 D1 DE 69939889D1 DE 69939889 T DE69939889 T DE 69939889T DE 69939889 T DE69939889 T DE 69939889T DE 69939889 D1 DE69939889 D1 DE 69939889D1
- Authority
- DE
- Germany
- Prior art keywords
- image pickup
- manufacturing
- pickup system
- pickup device
- image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
- H01L27/14658—X-ray, gamma-ray or corpuscular radiation imagers
- H01L27/14663—Indirect radiation imagers, e.g. using luminescent members
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2018—Scintillation-photodiode combinations
- G01T1/20183—Arrangements for preventing or correcting crosstalk, e.g. optical or electrical arrangements for correcting crosstalk
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2018—Scintillation-photodiode combinations
- G01T1/20188—Auxiliary details, e.g. casings or cooling
- G01T1/20189—Damping or insulation against damage, e.g. caused by heat or pressure
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10307033A JP2000131444A (ja) | 1998-10-28 | 1998-10-28 | 放射線検出装置、放射線検出システム、及び放射線検出装置の製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69939889D1 true DE69939889D1 (de) | 2008-12-24 |
Family
ID=17964238
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69939889T Expired - Lifetime DE69939889D1 (de) | 1998-10-28 | 1999-10-26 | Bildaufnahmevorrichtung und Bildaufnahmesystem sowie Herstellungsverfahren einer solchen Vorrichtung |
Country Status (4)
Country | Link |
---|---|
US (2) | US7102676B1 (de) |
EP (1) | EP0997949B1 (de) |
JP (1) | JP2000131444A (de) |
DE (1) | DE69939889D1 (de) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000131444A (ja) * | 1998-10-28 | 2000-05-12 | Canon Inc | 放射線検出装置、放射線検出システム、及び放射線検出装置の製造方法 |
DE19914701B4 (de) * | 1999-03-31 | 2005-07-07 | Siemens Ag | Verfahren zur Herstellung eines Festkörperbilddetektors sowie Festkörperbilddetektor |
JP4447752B2 (ja) | 2000-08-03 | 2010-04-07 | 浜松ホトニクス株式会社 | 放射線検出器 |
EP1879050A3 (de) * | 2000-09-11 | 2008-03-26 | Hamamatsu Photonics K.K. | Sintillator-panel, Strahlungsbildsensor und entsprechende Produktionsverfahren |
US6414316B1 (en) * | 2000-11-30 | 2002-07-02 | Fyodor I. Maydanich | Protective cover and attachment method for moisture sensitive devices |
US6927379B2 (en) * | 2000-12-22 | 2005-08-09 | Ge Medical Systems Global Technology Company, Llc | Hermetically sealed digital detector |
JP4593806B2 (ja) * | 2001-02-09 | 2010-12-08 | キヤノン株式会社 | 放射線検出装置の製造方法、蛍光板の製造方法及び放射線検出装置の製造装置 |
JP4587431B2 (ja) * | 2001-08-30 | 2010-11-24 | キヤノン株式会社 | 蛍光板の製造方法および放射線検出装置の製造方法 |
JP4587432B2 (ja) * | 2001-08-30 | 2010-11-24 | キヤノン株式会社 | シンチレータパネル、放射線検出装置及びシステム |
US7034309B2 (en) * | 2001-11-13 | 2006-04-25 | Canon Kabushiki Kaisha | Radiation detecting apparatus and method of driving the same |
JP3688677B2 (ja) * | 2002-11-19 | 2005-08-31 | 株式会社東芝 | カメラの組み込み方法及びカメラ付き携帯形電子機器 |
US6946661B2 (en) * | 2002-12-23 | 2005-09-20 | Ge Medical Systems Global Technology Company, Llc | Methods and apparatus for X-ray image detector assemblies |
US7315027B2 (en) | 2003-10-22 | 2008-01-01 | Canon Kabushiki Kaisha | Radiation detection device, scintillator panel, method of making the same, making apparatus, and radiation image pick-up system |
WO2005060011A1 (ja) * | 2003-12-16 | 2005-06-30 | National University Corporation Shizuoka University | 広域エネルギーレンジ放射線検出器及び製造方法 |
US8331057B2 (en) * | 2005-10-03 | 2012-12-11 | Sharp Kabushiki Kaisha | Electromagnetic field detecting element utilizing ballistic current paths |
JP2007192807A (ja) * | 2005-12-22 | 2007-08-02 | Toshiba Corp | X線検出器の製造方法およびx線検出器 |
CN101669041B (zh) * | 2007-04-23 | 2012-11-28 | 皇家飞利浦电子股份有限公司 | 具有部分透明闪烁体衬底的探测器 |
KR100882537B1 (ko) * | 2007-04-25 | 2009-02-18 | 라드텍주식회사 | 일체화된 픽셀형 섬광체를 갖는 방사선 영상 검출기 모듈및 그 제작방법 |
JP4693827B2 (ja) * | 2007-09-20 | 2011-06-01 | 株式会社東芝 | 半導体装置とその製造方法 |
JP2009128185A (ja) * | 2007-11-22 | 2009-06-11 | Toshiba Corp | 放射線検出器およびその製造方法 |
JP4743269B2 (ja) | 2008-04-23 | 2011-08-10 | エプソンイメージングデバイス株式会社 | 固体撮像装置 |
WO2010026789A1 (ja) * | 2008-09-08 | 2010-03-11 | コニカミノルタエムジー株式会社 | 放射線シンチレータおよび放射線画像検出器 |
US7902512B1 (en) * | 2009-12-04 | 2011-03-08 | Carestream Health, Inc. | Coplanar high fill factor pixel architecture |
US9473714B2 (en) * | 2010-07-01 | 2016-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Solid-state imaging device and semiconductor display device |
JP2012047487A (ja) | 2010-08-24 | 2012-03-08 | Hamamatsu Photonics Kk | 放射線検出器 |
JP5927873B2 (ja) * | 2011-12-01 | 2016-06-01 | 三菱電機株式会社 | 画像検出器 |
JP6245799B2 (ja) | 2012-11-29 | 2017-12-13 | キヤノン株式会社 | 放射線撮像装置、及び放射線撮像システム |
JP6226579B2 (ja) * | 2013-06-13 | 2017-11-08 | 東芝電子管デバイス株式会社 | 放射線検出器及びその製造方法 |
JP6502614B2 (ja) * | 2014-01-30 | 2019-04-17 | キヤノン株式会社 | 放射線検出装置、放射線検出システム |
JP5727068B2 (ja) * | 2014-04-11 | 2015-06-03 | 株式会社東芝 | シンチレータ部材 |
US9513383B1 (en) * | 2015-06-03 | 2016-12-06 | Perkinelmer Holdings, Inc. | Scintillator sealing with foil |
JP7125502B2 (ja) | 2018-09-27 | 2022-08-24 | 富士フイルム株式会社 | 放射線検出器、放射線画像撮影装置、及び製造方法 |
CN112822416B (zh) * | 2019-11-15 | 2022-09-09 | 合圣科技股份有限公司 | 图像传输系统及图像传输方法 |
Family Cites Families (43)
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US4011454A (en) * | 1975-04-28 | 1977-03-08 | General Electric Company | Structured X-ray phosphor screen |
US4510173A (en) * | 1983-04-25 | 1985-04-09 | Kabushiki Kaisha Toshiba | Method for forming flattened film |
JP2680002B2 (ja) * | 1987-11-14 | 1997-11-19 | キヤノン株式会社 | 光電変換装置 |
JPH01191087A (ja) | 1988-01-27 | 1989-08-01 | Hitachi Medical Corp | 放射線検出器 |
DE68920448T2 (de) * | 1988-02-10 | 1995-05-18 | Kanegafuchi Chemical Ind | Photodetektorenanordnung und Lesegerät. |
US5475225A (en) * | 1989-03-17 | 1995-12-12 | Advanced Scientific Concepts Inc. | Autoradiographic digital imager |
US5262649A (en) | 1989-09-06 | 1993-11-16 | The Regents Of The University Of Michigan | Thin-film, flat panel, pixelated detector array for real-time digital imaging and dosimetry of ionizing radiation |
CA2034118A1 (en) * | 1990-02-09 | 1991-08-10 | Nang Tri Tran | Solid state radiation detector |
US5187369A (en) | 1990-10-01 | 1993-02-16 | General Electric Company | High sensitivity, high resolution, solid state x-ray imaging device with barrier layer |
US5866905A (en) * | 1991-05-15 | 1999-02-02 | Hitachi, Ltd. | Electron microscope |
US5552602A (en) * | 1991-05-15 | 1996-09-03 | Hitachi, Ltd. | Electron microscope |
US5208460A (en) * | 1991-09-23 | 1993-05-04 | General Electric Company | Photodetector scintillator radiation imager having high efficiency light collection |
JP3691077B2 (ja) | 1992-01-08 | 2005-08-31 | 浜松ホトニクス株式会社 | 放射線検出素子およびその製造方法 |
GB9202693D0 (en) | 1992-02-08 | 1992-03-25 | Philips Electronics Uk Ltd | A method of manufacturing a large area active matrix array |
JPH0661463A (ja) | 1992-08-07 | 1994-03-04 | Sony Corp | 固体撮像素子及びその製造方法 |
JP3019632B2 (ja) * | 1992-10-16 | 2000-03-13 | カシオ計算機株式会社 | フォトセンサシステム及びその駆動方法 |
JP3516459B2 (ja) | 1992-10-19 | 2004-04-05 | ソニー株式会社 | 固体撮像素子の製造方法 |
JP2721476B2 (ja) | 1993-07-07 | 1998-03-04 | 浜松ホトニクス株式会社 | 放射線検出素子及びその製造方法 |
US5401668A (en) | 1993-09-02 | 1995-03-28 | General Electric Company | Method for fabrication solid state radiation imager having improved scintillator adhesion |
US5399884A (en) * | 1993-11-10 | 1995-03-21 | General Electric Company | Radiation imager with single passivation dielectric for transistor and diode |
JP3066944B2 (ja) | 1993-12-27 | 2000-07-17 | キヤノン株式会社 | 光電変換装置、その駆動方法及びそれを有するシステム |
US5587591A (en) * | 1993-12-29 | 1996-12-24 | General Electric Company | Solid state fluoroscopic radiation imager with thin film transistor addressable array |
US5381014B1 (en) | 1993-12-29 | 1997-06-10 | Du Pont | Large area x-ray imager and method of fabrication |
US5430298A (en) * | 1994-06-21 | 1995-07-04 | General Electric Company | CT array with improved photosensor linearity and reduced crosstalk |
US5572034A (en) * | 1994-08-08 | 1996-11-05 | University Of Massachusetts Medical Center | Fiber optic plates for generating seamless images |
US5812109A (en) * | 1994-08-23 | 1998-09-22 | Canon Kabushiki Kaisha | Image input/output apparatus |
US5723865A (en) * | 1994-11-23 | 1998-03-03 | Thermotrex Corporation | X-ray imaging device |
TW355845B (en) * | 1995-03-27 | 1999-04-11 | Semiconductor Energy Lab Co Ltd | Semiconductor device and a method of manufacturing the same |
US5739548A (en) * | 1995-05-02 | 1998-04-14 | Matsushita Electronics Corporation | Solid state imaging device having a flattening layer and optical lenses |
US5587611A (en) * | 1995-05-08 | 1996-12-24 | Analogic Corporation | Coplanar X-ray photodiode assemblies |
US5731584A (en) * | 1995-07-14 | 1998-03-24 | Imec Vzw | Position sensitive particle sensor and manufacturing method therefor |
JP3416351B2 (ja) * | 1995-09-28 | 2003-06-16 | キヤノン株式会社 | 光電変換装置及びその駆動方法、それを用いたx線撮像装置及びその駆動方法 |
JP3235717B2 (ja) * | 1995-09-28 | 2001-12-04 | キヤノン株式会社 | 光電変換装置及びx線撮像装置 |
JPH09199699A (ja) | 1996-01-12 | 1997-07-31 | Hitachi Ltd | 薄膜イメージセンサ |
JP3957803B2 (ja) * | 1996-02-22 | 2007-08-15 | キヤノン株式会社 | 光電変換装置 |
JPH09275202A (ja) | 1996-04-05 | 1997-10-21 | Canon Inc | 光検出装置 |
FR2758654B1 (fr) | 1997-01-21 | 1999-04-09 | Thomson Tubes Electroniques | Procede de realisation d'un detecteur de rayonnement a ecran plat et detecteur obtenu par ce procede |
AU5878798A (en) | 1997-02-14 | 1998-09-08 | Hamamatsu Photonics K.K. | Radiation detection device and method of producing the same |
JP3805100B2 (ja) | 1997-04-10 | 2006-08-02 | キヤノン株式会社 | 光電変換装置 |
US6271525B1 (en) * | 1998-09-23 | 2001-08-07 | Southeastern University Research Assn. | Mini gamma camera, camera system and method of use |
JP2000131444A (ja) * | 1998-10-28 | 2000-05-12 | Canon Inc | 放射線検出装置、放射線検出システム、及び放射線検出装置の製造方法 |
US6545711B1 (en) * | 1998-11-02 | 2003-04-08 | Agilent Technologies, Inc. | Photo diode pixel sensor array having a guard ring |
DE60027740T2 (de) * | 1999-09-30 | 2006-09-21 | Gatan, Inc., Pleasanton | Glasfasergekoppeltes elektronen-bildaufnahmegerät mit reduziertem streulicht unter verwendung von glasfasern mit absorbierender umhüllung |
-
1998
- 1998-10-28 JP JP10307033A patent/JP2000131444A/ja active Pending
-
1999
- 1999-10-22 US US09/422,792 patent/US7102676B1/en not_active Expired - Fee Related
- 1999-10-26 EP EP99308455A patent/EP0997949B1/de not_active Expired - Lifetime
- 1999-10-26 DE DE69939889T patent/DE69939889D1/de not_active Expired - Lifetime
-
2006
- 2006-08-31 US US11/513,066 patent/US7852392B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20070075247A1 (en) | 2007-04-05 |
EP0997949B1 (de) | 2008-11-12 |
EP0997949A2 (de) | 2000-05-03 |
EP0997949A3 (de) | 2004-02-25 |
JP2000131444A (ja) | 2000-05-12 |
US7102676B1 (en) | 2006-09-05 |
US7852392B2 (en) | 2010-12-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |