EP1086352A1 - Measuring probe with diaphragms and modules - Google Patents
Measuring probe with diaphragms and modulesInfo
- Publication number
- EP1086352A1 EP1086352A1 EP00915298A EP00915298A EP1086352A1 EP 1086352 A1 EP1086352 A1 EP 1086352A1 EP 00915298 A EP00915298 A EP 00915298A EP 00915298 A EP00915298 A EP 00915298A EP 1086352 A1 EP1086352 A1 EP 1086352A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- stylus
- stylus holder
- diaphragms
- measuring probe
- housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
- G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
- G01B5/012—Contact-making feeler heads therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
- G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S33/00—Geometrical instruments
- Y10S33/03—Photoelectric
Abstract
Description
Claims
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP04077945.6A EP1505362B1 (en) | 1999-04-06 | 2000-04-06 | Measuring probe with modules |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9907643.2A GB9907643D0 (en) | 1999-04-06 | 1999-04-06 | Measuring probe |
GB9907643 | 1999-04-06 | ||
PCT/GB2000/001309 WO2000060307A1 (en) | 1999-04-06 | 2000-04-06 | Measuring probe with diaphragms and modules |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP04077945.6A Division EP1505362B1 (en) | 1999-04-06 | 2000-04-06 | Measuring probe with modules |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1086352A1 true EP1086352A1 (en) | 2001-03-28 |
EP1086352B1 EP1086352B1 (en) | 2004-11-03 |
Family
ID=10850899
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP00915298A Expired - Lifetime EP1086352B1 (en) | 1999-04-06 | 2000-04-06 | Measuring probe with diaphragms ( modules) |
EP04077945.6A Expired - Lifetime EP1505362B1 (en) | 1999-04-06 | 2000-04-06 | Measuring probe with modules |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP04077945.6A Expired - Lifetime EP1505362B1 (en) | 1999-04-06 | 2000-04-06 | Measuring probe with modules |
Country Status (6)
Country | Link |
---|---|
US (2) | US6430833B1 (en) |
EP (2) | EP1086352B1 (en) |
JP (2) | JP4726303B2 (en) |
DE (1) | DE60015465T2 (en) |
GB (1) | GB9907643D0 (en) |
WO (1) | WO2000060307A1 (en) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9907643D0 (en) * | 1999-04-06 | 1999-05-26 | Renishaw Plc | Measuring probe |
WO2001096809A1 (en) | 2000-06-16 | 2001-12-20 | Renishaw Plc | Force sensing probe |
GB0102324D0 (en) | 2001-01-30 | 2001-03-14 | Renishaw Plc | Capacitance type displacement responsive device and a suspension system for a displacement responsive device |
DE10122200A1 (en) † | 2001-05-08 | 2002-11-14 | Zeiss Carl | Probe for a coordinate measuring machine. Coordinate measuring device, calibration body for a coordinate measuring device and method for calibrating a coordinate measuring device |
GB0201845D0 (en) | 2002-01-26 | 2002-03-13 | Renishaw Plc | Analogue probe |
US20040125382A1 (en) * | 2002-12-30 | 2004-07-01 | Banks Anton G. | Optically triggered probe |
WO2004068068A1 (en) * | 2003-01-31 | 2004-08-12 | Carl Zeiss Industrielle Messtechnik Gmbh | Probe for a coordinate measuring device |
US6772527B1 (en) | 2003-04-09 | 2004-08-10 | Renishaw Plc | Modular measurement device |
US7281920B2 (en) * | 2005-03-28 | 2007-10-16 | Komag, Inc. | Die set utilizing compliant gasket |
JP4663378B2 (en) * | 2005-04-01 | 2011-04-06 | パナソニック株式会社 | Shape measuring apparatus and method |
GB0508395D0 (en) | 2005-04-26 | 2005-06-01 | Renishaw Plc | Method for scanning the surface of a workpiece |
GB0508388D0 (en) * | 2005-04-26 | 2005-06-01 | Renishaw Plc | Surface sensing device with optical sensor |
DE102005036126A1 (en) * | 2005-07-26 | 2007-02-01 | Carl Zeiss Industrielle Messtechnik Gmbh | Sensor module for a probe of a tactile coordinate measuring machine |
GB0608998D0 (en) * | 2006-05-08 | 2006-06-14 | Renishaw Plc | Contact sensing probe |
JP5276803B2 (en) * | 2007-06-11 | 2013-08-28 | パナソニック株式会社 | Shape measurement method |
EP2028439A1 (en) * | 2007-07-26 | 2009-02-25 | Renishaw plc | Deactivatable measurement apparatus |
TWI417515B (en) * | 2007-08-03 | 2013-12-01 | Hon Hai Prec Ind Co Ltd | Height gauge |
DE102008038134A1 (en) | 2007-09-13 | 2009-04-16 | Hexagon Metrology Gmbh | Measuring type probe head for coordinate measuring device, has axially arranged diaphragms connected by pin, and absorption device including ball-like end of absorption rod, pot and suspension arranged in space formed for Z-swing |
JP5221211B2 (en) * | 2008-06-02 | 2013-06-26 | パナソニック株式会社 | Shape measuring device |
JP5209440B2 (en) * | 2008-10-30 | 2013-06-12 | 独立行政法人理化学研究所 | Shape measuring probe |
JP2010160002A (en) * | 2009-01-07 | 2010-07-22 | Mitsutoyo Corp | Displacement sensor and measuring instrument |
CN103328919B (en) | 2011-01-19 | 2016-08-17 | 瑞尼斯豪公司 | Analogue measurement for machine tool is popped one's head in and operational approach |
JP6063233B2 (en) * | 2012-12-05 | 2017-01-18 | 株式会社ミツトヨ | Probe support mechanism and probe |
JP6049785B2 (en) * | 2015-03-05 | 2016-12-21 | 株式会社ミツトヨ | Measuring probe |
JP6049786B2 (en) * | 2015-03-05 | 2016-12-21 | 株式会社ミツトヨ | Measuring probe |
JP6039718B2 (en) * | 2015-03-05 | 2016-12-07 | 株式会社ミツトヨ | Measuring probe |
US9791262B2 (en) * | 2015-12-17 | 2017-10-17 | Mitutoyo Corporation | Measurement device with multiplexed position signals |
US9803972B2 (en) | 2015-12-17 | 2017-10-31 | Mitutoyo Corporation | Optical configuration for measurement device |
US10101141B2 (en) | 2016-12-07 | 2018-10-16 | Mitutoyo Corporation | Trigger counter for measurement device with count values stored in flash memory |
US11428589B2 (en) * | 2017-10-16 | 2022-08-30 | Saf-Holland, Inc. | Displacement sensor utilizing ronchi grating interference |
KR102522627B1 (en) * | 2020-09-17 | 2023-04-17 | 주식회사 제이시스메디칼 | Ultrasonic medical instrument with adjusable focusing depth of ultrasonic wave generator |
CN112757631B (en) * | 2020-12-21 | 2022-11-11 | 深圳市创想三维科技股份有限公司 | Automatic leveling device of 3D printer and 3D printer |
Family Cites Families (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1551218A (en) | 1975-05-13 | 1979-08-22 | Rolls Royce | Probe for use in displacement measuring apparatus |
US4110611A (en) * | 1975-12-17 | 1978-08-29 | Candid Logic, Inc. | Optical position transducer |
US4158919A (en) | 1976-03-24 | 1979-06-26 | Rolls-Royce Limited | Apparatus for measuring displacement in at least two orthogonal dimensions |
GB1593682A (en) * | 1977-01-20 | 1981-07-22 | Rolls Royce | Probe for use in mearusing apparatus |
US4187614A (en) | 1978-08-04 | 1980-02-12 | Mitsubishi Jukogyo Kabushiki Kaisha | Tracer head |
US4443946A (en) * | 1980-07-01 | 1984-04-24 | Renishaw Electrical Limited | Probe for measuring workpieces |
US4523383A (en) | 1982-07-28 | 1985-06-18 | Renishaw Electrical Limited | Position sensing apparatus |
DE3229992C2 (en) * | 1982-08-12 | 1986-02-06 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Multi-coordinate probe |
DE3234471C1 (en) * | 1982-09-17 | 1983-08-25 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Multi-coordinate probe |
JPH0617766B2 (en) * | 1984-08-23 | 1994-03-09 | 株式会社ミツトヨ | Touch signal probe |
US4625417A (en) * | 1985-06-17 | 1986-12-02 | Gte Valeron Corporation | Probe with stylus pressure adjustment |
US4734994A (en) * | 1986-12-22 | 1988-04-05 | Gte Valeron Corporation | Probe having a plurality of hinged plates |
US4752166A (en) * | 1987-01-02 | 1988-06-21 | Manuflex Corp. | Probing device |
US5154002A (en) * | 1987-02-26 | 1992-10-13 | Klaus Ulbrich | Probe, motion guiding device, position sensing apparatus, and position sensing method |
GB8728500D0 (en) * | 1987-12-05 | 1988-01-13 | Renishaw Plc | Position sensing probe |
CH674485A5 (en) * | 1988-03-11 | 1990-06-15 | Saphirwerk Ind Prod | |
GB8815984D0 (en) * | 1988-07-05 | 1988-08-10 | Univ Brunel | Probes |
DE3824548A1 (en) * | 1988-07-20 | 1990-01-25 | Zeiss Carl Fa | METHOD AND DEVICE FOR OPERATING A PROBE OF THE SWITCHING TYPE |
DE3834117A1 (en) * | 1988-10-07 | 1990-04-12 | Zeiss Carl Fa | COORDINATE MEASURING DEVICE WITH AN OPTICAL PROBE |
EP0407489B1 (en) | 1988-10-11 | 1994-03-23 | Renishaw plc | Measurement probe using bearings with centralised rolling elements |
US4896543A (en) * | 1988-11-15 | 1990-01-30 | Sri International, Inc. | Three-axis force measurement stylus |
JPH0789045B2 (en) * | 1988-12-15 | 1995-09-27 | 富山県 | Three-dimensional displacement measuring instrument |
US5209131A (en) | 1989-11-03 | 1993-05-11 | Rank Taylor Hobson | Metrology |
US5010773A (en) * | 1990-01-24 | 1991-04-30 | Wisconsin Alumni Research Foundation | Sensor tip for a robotic gripper and method of manufacture |
GB9001682D0 (en) * | 1990-01-25 | 1990-03-28 | Renishaw Plc | Position sensing probe |
US5491904A (en) * | 1990-02-23 | 1996-02-20 | Mcmurtry; David R. | Touch probe |
US5339535A (en) * | 1990-02-23 | 1994-08-23 | Renishaw Metrology Limited | Touch probe |
GB9004117D0 (en) * | 1990-02-23 | 1990-04-18 | Renishaw Plc | Touch probe |
US5390423A (en) * | 1991-01-22 | 1995-02-21 | Renishaw Plc | Analogue probe |
EP0501710B1 (en) * | 1991-02-25 | 1995-04-12 | Renishaw Metrology Limited | Touch probe |
GB9111382D0 (en) | 1991-05-25 | 1991-07-17 | Renishaw Metrology Ltd | Improvements in measuring probes |
DE59208088D1 (en) * | 1991-06-07 | 1997-04-10 | Saphirwerk Ind Prod | Probe head |
GB9116044D0 (en) * | 1991-07-24 | 1991-09-11 | Nat Res Dev | Probes |
GB9117974D0 (en) | 1991-08-20 | 1991-10-09 | Renishaw Metrology Ltd | Non-contact trigger probe |
JPH0792373B2 (en) * | 1991-09-25 | 1995-10-09 | 株式会社ミツトヨ | Touch signal probe |
DE69217548T2 (en) * | 1991-11-09 | 1997-06-05 | Renishaw Metrology Ltd | MEASURING PROBE |
DE4217641C2 (en) * | 1992-05-28 | 1997-07-17 | Wolfgang Madlener | Probe for three-dimensional probing of workpieces |
EP0605140B2 (en) * | 1992-12-24 | 2002-10-09 | Renishaw plc | Touch probe and signal processing circuit therefor |
DE4325743C1 (en) * | 1993-07-31 | 1994-09-08 | Heidenhain Gmbh Dr Johannes | Multi-coordinate probe |
GB9423176D0 (en) * | 1994-11-17 | 1995-01-04 | Renishaw Plc | Touch probe |
IT1299955B1 (en) * | 1998-04-06 | 2000-04-04 | Marposs Spa | HEAD FOR THE CONTROL OF LINEAR DIMENSIONS OF PIECES. |
US6430828B1 (en) * | 1998-04-17 | 2002-08-13 | Electronic Measuring Devices, Inc. | Coordinate positioning apparatus with indexable stylus, components thereof, and method of using it |
GB9907643D0 (en) * | 1999-04-06 | 1999-05-26 | Renishaw Plc | Measuring probe |
WO2001096809A1 (en) * | 2000-06-16 | 2001-12-20 | Renishaw Plc | Force sensing probe |
-
1999
- 1999-04-06 GB GBGB9907643.2A patent/GB9907643D0/en not_active Ceased
-
2000
- 2000-04-06 EP EP00915298A patent/EP1086352B1/en not_active Expired - Lifetime
- 2000-04-06 EP EP04077945.6A patent/EP1505362B1/en not_active Expired - Lifetime
- 2000-04-06 WO PCT/GB2000/001309 patent/WO2000060307A1/en active IP Right Grant
- 2000-04-06 DE DE60015465T patent/DE60015465T2/en not_active Expired - Lifetime
- 2000-04-06 US US09/701,335 patent/US6430833B1/en not_active Expired - Fee Related
- 2000-04-06 JP JP2000609757A patent/JP4726303B2/en not_active Expired - Lifetime
-
2002
- 2002-07-05 US US10/188,811 patent/US7146741B2/en not_active Expired - Lifetime
-
2007
- 2007-04-06 JP JP2007101061A patent/JP5210536B2/en not_active Expired - Lifetime
Non-Patent Citations (1)
Title |
---|
See references of WO0060307A1 * |
Also Published As
Publication number | Publication date |
---|---|
JP4726303B2 (en) | 2011-07-20 |
US7146741B2 (en) | 2006-12-12 |
EP1505362A1 (en) | 2005-02-09 |
WO2000060307A1 (en) | 2000-10-12 |
EP1086352B1 (en) | 2004-11-03 |
DE60015465T2 (en) | 2005-03-24 |
JP2002541444A (en) | 2002-12-03 |
GB9907643D0 (en) | 1999-05-26 |
DE60015465D1 (en) | 2004-12-09 |
JP5210536B2 (en) | 2013-06-12 |
EP1505362B1 (en) | 2015-11-18 |
US6430833B1 (en) | 2002-08-13 |
JP2007183294A (en) | 2007-07-19 |
US20020174556A1 (en) | 2002-11-28 |
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Legal Events
Date | Code | Title | Description |
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PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
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Free format text: MEASURING PROBE WITH DIAPHRAGMS ( MODULES) |
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