EP1447567A3 - Vakuumpumpanordnung - Google Patents

Vakuumpumpanordnung Download PDF

Info

Publication number
EP1447567A3
EP1447567A3 EP04000831A EP04000831A EP1447567A3 EP 1447567 A3 EP1447567 A3 EP 1447567A3 EP 04000831 A EP04000831 A EP 04000831A EP 04000831 A EP04000831 A EP 04000831A EP 1447567 A3 EP1447567 A3 EP 1447567A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
pump arrangement
recipient
component
flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP04000831A
Other languages
English (en)
French (fr)
Other versions
EP1447567A2 (de
EP1447567B1 (de
Inventor
Robert Watz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=32668001&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP1447567(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1447567A2 publication Critical patent/EP1447567A2/de
Publication of EP1447567A3 publication Critical patent/EP1447567A3/de
Application granted granted Critical
Publication of EP1447567B1 publication Critical patent/EP1447567B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Abstract

Die Erfindung beschreibt eine Vakuumpumpanordnung, welche an einem Rezipienten (14) angeschlossen ist. Zwischen dem Flansch (13) auf der Ansaugseite (2) der Vakuumpumpe und dem Anschlussflansch (16) des Rezipienten (14) ist ein eigenständiges Bauteil (18) angebracht. Dieses Bauteil ist mit einer Temperiereinrichtung (20) versehen.
EP04000831A 2003-02-07 2004-01-16 Vakuumpumpanordnung Expired - Lifetime EP1447567B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10305038 2003-02-07
DE10305038A DE10305038A1 (de) 2003-02-07 2003-02-07 Vakuumpumpanordnung

Publications (3)

Publication Number Publication Date
EP1447567A2 EP1447567A2 (de) 2004-08-18
EP1447567A3 true EP1447567A3 (de) 2005-06-15
EP1447567B1 EP1447567B1 (de) 2007-09-19

Family

ID=32668001

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04000831A Expired - Lifetime EP1447567B1 (de) 2003-02-07 2004-01-16 Vakuumpumpanordnung

Country Status (5)

Country Link
US (1) US7500821B2 (de)
EP (1) EP1447567B1 (de)
JP (1) JP2004239258A (de)
AT (1) ATE373781T1 (de)
DE (2) DE10305038A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202008011489U1 (de) * 2008-08-28 2010-01-07 Oerlikon Leybold Vacuum Gmbh Stator-Rotor-Anordnung für eine Vakuumpumpe sowie Vakuumpumpe
DE102013203421A1 (de) * 2013-02-28 2014-08-28 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE202013008468U1 (de) * 2013-09-24 2015-01-08 Oerlikon Leybold Vacuum Gmbh Vakuumpumpengehäuse
JP5772994B2 (ja) * 2014-01-10 2015-09-02 株式会社島津製作所 ターボ分子ポンプ

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0397051A1 (de) * 1989-05-09 1990-11-14 Kabushiki Kaisha Toshiba Evakuierungsvorrichtung und Evakuierungsverfahren
EP0767307A1 (de) * 1995-10-04 1997-04-09 Alcatel Cit Sekundär-Pumpenaggregat
EP0819856A1 (de) * 1996-07-18 1998-01-21 VARIAN S.p.A. Vakuumpumpe
DE19724323A1 (de) * 1997-06-10 1998-12-17 Leybold Vakuum Gmbh Flanschverbindung
EP1231383A1 (de) * 2001-02-01 2002-08-14 Seiko Instruments Inc. Vakuumpumpe

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1136957A (en) * 1914-01-06 1915-04-27 Carl F Hettinger Rotary compressor.
US1288728A (en) * 1915-09-18 1918-12-24 Spencer Turbine Co Rotary blower.
US1601531A (en) * 1925-05-11 1926-09-28 Jeannin Electric Company Electric-motor casing
CA584954A (en) * 1954-07-01 1959-10-13 Westinghouse Electric Corporation Motor pump unit
US3142155A (en) * 1961-11-29 1964-07-28 Gen Electric Gas turbine engine cooling arrangement
US4073338A (en) * 1973-06-26 1978-02-14 Toyota Chuo Kenkyusho Heat exchangers
USRE36610E (en) * 1989-05-09 2000-03-14 Kabushiki Kaisha Toshiba Evacuation apparatus and evacuation method
DE4020015C1 (de) 1990-06-20 1991-09-26 Mannesmann Ag, 4000 Duesseldorf, De
US5154573A (en) * 1991-09-12 1992-10-13 Ingersoll-Rand Company Cooling system for centrifugal pump components
DE4237972C2 (de) * 1992-11-11 1997-06-12 Leybold Ag Vakuumpumpe mit Rotor
DE4220015A1 (de) * 1992-06-19 1993-12-23 Leybold Ag Gasreibungsvakuumpumpe
JPH11315794A (ja) * 1998-05-01 1999-11-16 Kashiyama Kogyo Kk 冷却機構付スクリュードライ真空ポンプ
DE59905762D1 (de) * 1998-08-18 2003-07-03 Siemens Ag Turbinengehäuse

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0397051A1 (de) * 1989-05-09 1990-11-14 Kabushiki Kaisha Toshiba Evakuierungsvorrichtung und Evakuierungsverfahren
EP0767307A1 (de) * 1995-10-04 1997-04-09 Alcatel Cit Sekundär-Pumpenaggregat
EP0819856A1 (de) * 1996-07-18 1998-01-21 VARIAN S.p.A. Vakuumpumpe
DE19724323A1 (de) * 1997-06-10 1998-12-17 Leybold Vakuum Gmbh Flanschverbindung
EP1231383A1 (de) * 2001-02-01 2002-08-14 Seiko Instruments Inc. Vakuumpumpe

Also Published As

Publication number Publication date
DE502004004989D1 (de) 2007-10-31
EP1447567A2 (de) 2004-08-18
US7500821B2 (en) 2009-03-10
EP1447567B1 (de) 2007-09-19
US20040156713A1 (en) 2004-08-12
DE10305038A1 (de) 2004-08-19
ATE373781T1 (de) 2007-10-15
JP2004239258A (ja) 2004-08-26

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