US 20050214188 A1
An ultra-efficient multilobal cross-sectioned fiber filter for chemical contaminant filtering applications is described. An absorptive chemically reactive reagent, preferably an acid or base and in liquid or an adsorptive chemically reactive reagent (an acid or base) in solid form, is disposed within longitudinal slots in each length of fiber. The reagent may be used alone or in conjunction with solid adsorptive particles which may also be utilized with the reagents in the longitudinal slots within the fibers. Reagents within the fibers remain exposed to a base-contaminated airstream passing through the filter. Base contaminants in the airstream, chemicals such as ammonium and amines (as well as particles), react with the acid reagent within the longitudinal slots of the fibers. As the contaminant and reagent react, the ammonium or amine becomes irreversibly absorbed (or adsorbed if reagent is a solid acid) to the liquid acid reagent and multilobal fiber.
86. A fiber mat comprising:
a plurality of elongated fibers, each fiber comprising an internal cavity;
a plurality of powdered particulate matter; and
a chemically-reactive reagent disposed within the internal cavities of the fibers, wherein the reagent comprises at least one acid, at least one base, at least one coordinating agent, at least one complexing agent, at least one deliquescent agent or a combination thereof.
87. The mat of
88. The mat of
89. The mat of
90. The mat of
91. The mat of
92. The mat of
93. The mat of
94. The mat of
95. The mat of
96. The mat of
97. The mat of
98. The mat of
99. The mat of
100. The mat of
101. The mat of
102. The mat of
103. The mat of
104. A gas filter comprising the mat of
105. A filtering chamber comprising the mat of
106. A housing comprising the mat of
This application is a divisional of application Ser. No. 10/652,230, filed Aug. 28, 2003, which claims priority to application Ser. No. 09/834,581, filed Apr. 12, 2001 (U.S. Pat. No. 6,623,715), both of which are incorporated herein by reference in their entirety.
1. Field of the Invention
This invention relates to a filter system and specifically to a system utilizing solid and liquid reagents.
2. Description of Related Art
It is conventionally known to use activated charcoal and other materials as adsorptive elements to remove impurities from an airstream. With the advent of effective fiber cross sections, it is possible to produce fibers which are partially hollow. A particularly effective cross section is one having three T-shaped lobes extending from a central core, as described in U.S. Pat. No. 5,057,368, which is incorporated herein by reference. Conventional filters have used filtering media coated with solid or liquid materials in a variety of applications; however, many of these applications have relied on absorption, rather than adsorption. Adsorption occurs where particles to be removed attach to the surface of the filter material elements; whereas, absorption occurs where molecular motion mobility is harnessed to move unwanted particles from one zone to another in a non-mechanical manner. The multilobal fiber has been particularly effective as a wicking fiber where certain contaminant-removing liquids or solids are filled in cavities formed within the fiber.
The multilobal fiber filled with solid filtering particles have been used in adsorptive air filtration and odor-removing applications. Such filtering particles have included the use of carbon particles, zeolites, baking soda, cyclodextrins, and solids which could adsorb certain contaminants (see U.S. Pat. No. 5,759,394, which is incorporated herein by reference). Other applications utilizing multilobal-type fibers as wicking fibers also have involved absorptive properties of certain liquids which are filled within the cavities of the fibers. These liquids were typically chosen to lightly absorb odor and gas molecules in a reversible manner from a contaminated airstream to aid in the eventual dispersion of these molecules into a second airstream (see U.S. Pat. Nos. 5,891,221 and 5,704,966, which are incorporated herein by reference).
Maintaining environments free of contaminants is particularly critical in the manufacturing of integrated circuits because wafers are very susceptible to small particles and low levels of certain chemicals. This can be done by manufacturing wafers inside cleanroom's with filtered air. The filters are used to reduce particle and chemical levels to extremely low levels (less than 1 part-per-billion). Semiconductor tools are also sometimes equipped with environmental controls that provide local ultra clean airflow during processing. However, conventional chemical filters have a very short life span, require frequent replacement, and are ineffective at efficiently filtering out certain chemicals.
In accordance with the invention, an ultra-high efficient multilobal fiber filter is described with long life use for chemical contaminant filtering applications. The unexpected ultra efficiency of the fiber filter reduces contaminants to low levels in the parts-per-billion. A reactive reagent, preferably an acid or base and in either liquid or solid form, is disposed within longitudinal slots in each length of fiber. The reagent may be reactive with base contaminants by any known mechanism, such as an acid-base reaction to form ionic bonds, an oxidation-reduction reaction, and various other organic and inorganic reaction mechanisms as known in the art to form covalent bonds, hydrogen bonds, coordination compounds, or complex compounds. The reagent may be used alone or in conjunction with solid adsorptive particles which may also be utilized with the reagents in the longitudinal slots within the fibers. The fibers are formed into a single layered, in one embodiment, or a multi-layered fiber mat, in another embodiment, but the reagents remain exposed to the flow of a contaminated airstream passing through the filter. The contaminants in a fluid stream react within the longitudinal slots of the fibers. As the base contaminant and reagent react, the contaminant is retained within the longitudinal slots of the fiber.
In a preferred embodiment, the contaminants are ammonium and/or amines and the reagent is an acid. The acid-impregnated multilobal fiber is significantly more efficient than several commercially available filters. The filter can be used in a variety of applications including clean rooms and in filtering chambers for installation in the field.
Use of the same reference symbols in different figures indicates similar or identical items.
Preferably, fiber 2 can hold, through capillary forces, liquids within slot 10.
Reagent 12 can be formed into liquid droplets by different methods such as forcing reagent 12 through a mechanical atomizer or preferably by using a conventional liquid dropper. Reagent 12 can range from a variety of liquids such as acids, oxidants, reductants, complexing agents, coordinating agents, and deliquescent agents; however, it is preferable to use acids. Acids for use as reagent 12 include, but are not limited to, inorganic acids such as boric acid and preferably phosphoric or sulfuric acid. Organic acids may also be used rather than inorganic acids. Organic acids include, but are not limited to, moncarboxylic, dicarboxylic, and tricarboxylic acids; these types of organic acids include citric, lactic, maleic, fumaric, caproic, lauric, oxalic, malonic, tartaric, succinic, salicyclic, and malic acids. In another embodiment, powdered acids may also be used in place of the liquid acid and impregnated within slots 11 in a method similar to that described above for carbon powder. In an alternative embodiment, powdered bases may also be used to filter non-basic contaminants. Such powdered bases may include, e.g., sodium bicarbonate (baking soda), sodium carbonate, sodium hydroxide, trisodium phosphate, potassium carbonate, potassium hydroxide, and sodium tetraborate. Also, reagent 12 may include coordinating agents which comprise transition metals, e.g., copper, and complexing agents which comprise entrapping agents, e.g., cyclodextrines.
Fiber mat 100 is particularly effective in filtering base contaminants from a passing fluid stream. Bases are considered any chemicals or compounds conventionally regarded as a base in the chemical arts. These chemicals and compounds include Lewis bases, shift bases, aqueous bases, and preferably any compounds that are alkaline in an aqueous environment. Ammonium and amines are preferable bases.
A fiber mat 100 impregnated with liquid acid reagents 12 is particularly effective in specifically absorbing base contaminants, such as ammonium, NH3, and amines (for example, n-methyl-2-pyrrolidone (NMP)) from a passing fluid stream. An airstream with contaminants, for example, ammonium ions, passes through fiber mat 100. As it passes over multilobal fibers 2 impregnated with acid reagent 12, the ammonium ion chemically reacts (in a reaction well known in the art) with and is adsorbed by acid reagent 12 to form a salt. Acid reagent 12 exchanges hydrogen atoms with the ammonium ions, forming water as a byproduct and leaving the ammonium ion to react with and attach to acid reagent 12. Reagent 12 irreversibly retains the ammonium ions within the slots 10 of multilobal fiber 2.
The combination of multilobal fibers 2 impregnated with a liquid acid reagent 12 gives unexpected, ultra-high efficient results in filtering out base contaminants. The effectiveness of fiber mat 100 utilizing multilobal fibers 2 impregnated with acid reagent 12 can be seen in
As seen in
Fiber mat 100 utilizing acid reagent 12 in multilobal fiber 2 can be used in a variety of applications, e.g., pleating or layering multilobal fiber 2 to form fiber mat 100. Fiber mat 100 can be used, in one embodiment, as a filtering element in a filtering chamber 102 as shown in
Although the invention has been described with reference to particular embodiments, the description is only an example of the invention's application and should not be taken as a limitation. In particular, even though much of preceding discussion was aimed at liquid acid-impregnated multilobal fibers 2, alternative embodiments of this invention include multilobal fibers 2 impregnated with solid acid reagents 12 and multilobal fibers 2 impregnated with a base, both in liquid and solid form to filter non-basic contaminants. Various other adaptations and combinations of features of the embodiments disclosed are within the scope of the invention as defined by the following claims.