US20060079095A1 - Method of removing a polymer coating from an etched trench - Google Patents

Method of removing a polymer coating from an etched trench Download PDF

Info

Publication number
US20060079095A1
US20060079095A1 US11/242,917 US24291705A US2006079095A1 US 20060079095 A1 US20060079095 A1 US 20060079095A1 US 24291705 A US24291705 A US 24291705A US 2006079095 A1 US2006079095 A1 US 2006079095A1
Authority
US
United States
Prior art keywords
etching
wafer
range
chamber
trench
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/242,917
Inventor
Darrell McReynolds
Kia Silverbrook
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Silverbrook Research Pty Ltd
Original Assignee
Silverbrook Research Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from AU2004905800A external-priority patent/AU2004905800A0/en
Application filed by Silverbrook Research Pty Ltd filed Critical Silverbrook Research Pty Ltd
Assigned to SILVERBROOK RESEARCH PTY LTD reassignment SILVERBROOK RESEARCH PTY LTD ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MCREYNOLDS, DARRELL LARUE, SILVERBROOK, KIA
Publication of US20060079095A1 publication Critical patent/US20060079095A1/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3065—Plasma etching; Reactive-ion etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02057—Cleaning during device manufacture
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/1412—Shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00841—Cleaning during or after manufacture
    • B81C1/00849—Cleaning during or after manufacture during manufacture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/052—Ink-jet print cartridges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0323—Grooves
    • B81B2203/033—Trenches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0111—Bulk micromachining
    • B81C2201/0112—Bosch process
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0132—Dry etching, i.e. plasma etching, barrel etching, reactive ion etching [RIE], sputter etching or ion milling

Definitions

  • This invention relates to a process for modifying sidewalls of a trench etched into a semiconductor wafer. It has been developed primarily for incorporation into a printhead integrated circuit manufacturing process in order to provide an ink channel having improved surface properties and/or improved surface profile. However, it may equally be incorporated into any etching process.
  • MEMS Microelectromechanical Systems
  • MEMS devices have found applications in a wide variety of fields, such as in physical, chemical and biological sensing devices.
  • One important application of MEMS devices is in inkjet printheads, where micro-scale actuators for inkjet nozzles may be manufactured using MEMS techniques.
  • the present Applicant has developed printheads incorporating MEMS ink ejection devices and these are the subject of a number of patents and patent applications listed in the Cross References section above and all of which are incorporated herein by reference.
  • MEMS inkjet printhead (“MEMJET printhead”) is comprised of a plurality of integrated circuits, with each integrated circuit having several thousand nozzles.
  • Each nozzle comprises an actuator for ejecting ink, which may be, for example, a thermal bend actuator (e.g. U.S. Pat. No. 6,322,195) or a bubble-forming heater element actuator (e.g. U.S. Pat. No. 6,672,709).
  • the integrated circuits are manufactured using MEMS techniques, meaning that a high nozzle density and, hence, high resolution printheads can be mass-produced at relatively low cost.
  • Etch depths of about 3 ⁇ m to 10 ⁇ m may be termed “deep etches”, whereas etch depths of more than about 10 ⁇ m may be termed “ultradeep etches”.
  • MEMS printhead integrated circuits typically require delivery of ink to each nozzle through individual ink supply channels having a diameter of about 20 ⁇ m. These ink channels are typically etched through wafers having a thickness of about 200 ⁇ m, and therefore place considerable demands on the etching method employed. It is especially important that each ink channel is perpendicular to the wafer surface and does not contain kinks, sidewall projections (e.g. grassing) or angular junctions, which can interfere with the flow of ink.
  • the wafer typically has a thickness “B” of about 200 ⁇ m, whilst the nozzle chamber typically occupies a thickness “A” of about 20 ⁇ m.
  • the nozzle chamber 3 has an inlet 8 , which joins an ink supply channel (not shown in FIG. 1 ) in the silicon wafer 5 .
  • an ink supply channel 6 is formed in the wafer 5 by first etching a trench through the CMOS metallization layer of a TEOS interconnect 7 and partially through the wafer 5 from the ink ejection side 20 of the wafer. Once formed, the trench is plugged with photoresist 10 whilst nozzle structures are formed on the ink ejection side 20 of the wafer. After formation of the nozzle arrangement 1 , the ink supply channel 6 is formed by ultradeep etching from the ink supply side 30 of the wafer to and past the photresist plug 10 .
  • FIG. 3 the photoresist plug 10 is finally stripped away to form the inlet 8 .
  • the inlet 8 provides fluid connection between the ink supply channel 6 and the nozzle chamber 3 .
  • FIGS. 2 and 3 also shows the CMOS drive circuitry 9 , which is provided between the wafer 5 and the interconnect 7 .
  • the “back-etching” of the ink supply channel avoids filling and removing an entire 200 ⁇ m long ink supply channel with resist whilst nozzle structures in the wafer are being lithographically formed.
  • the mask on the ink supply side needs to be carefully aligned so that the etched channels meet the trenches plugged with photoresist, and do not damage the drive circuitry 9 .
  • the etching needs to be perpendicular and anisotropic to a depth of about 200 ⁇ m.
  • etching ultradeep trenches into silicon are known in the art. All these methods involve deep reactive ion etching (DRIE) using a gas plasma.
  • DRIE deep reactive ion etching
  • the semiconductor substrate, with a suitable mask disposed thereon, is placed on a lower electrode in a plasma reactor, and exposed to an ionized gas plasma formed from a mixture of gases.
  • the ionized plasma gases (usually positively charged) are accelerated towards the substrate by a biasing voltage applied to the electrode.
  • the plasma gases etch the substrate either by physical bombardment, chemical reaction or a combination of both.
  • Etching of silicon is usually ultimately achieved by formation of volatile silicon halides, such as SiF 4 , which are carried away from the etch front by a light inert carrier gas, such as helium.
  • Anisotropic etching is usually achieved by depositing a passivation layer onto the base and sidewalls of the trench as it is being formed, and selectively etching the base of the trench using the gas plasma.
  • a first polymer deposition step deposits a polymer onto the base and sidewalls of the trench.
  • the polymer is deposited by a gas plasma formed from a fluorocarbon gas (e.g. CHF 3 , C 4 F 8 or C 2 F 4 ) in the presence or in the absence of an inert gas.
  • a fluorocarbon gas e.g. CHF 3 , C 4 F 8 or C 2 F 4
  • the plasma gas mix is changed to SF 6 /Ar.
  • the polymer deposited on the base of the trench is quickly broken up by ion assistance in the etching step, while the sidewalls remain protected. Hence, anisotropic etching may be achieved.
  • a major disadvantage of the Bosch process is that polymer deposition and etching steps need to be alternated, which means continuously alternating the gas composition of the plasma, thereby slowing etch rates. This alternation, in turn, leads to uneven trench sidewalls, characterized by scalloped surface formations.
  • a further disadvantage of the Bosch process is that it leaves a hydrophobic fluorocarbon polymer coating (‘Bosch polymer’) on the trench sidewalls.
  • ‘Bosch polymer’ hydrophobic fluorocarbon polymer coating
  • inkjet nozzles already fabricated the frontside of the wafer.
  • nozzles are first formed on a frontside of wafer and then ink supply channels are etched from a backside of the wafer.
  • backside processing steps e.g. wafer grinding, etching
  • the frontside of the wafer, having a protective photoresist coating is usually attached to a handle wafer using a thermal release tape.
  • the thermal release tape comprises a film having a thermal release adhesive on one side. The thermal release adhesive conveniently allows the silicon wafer to be detached from the handle wafer by controlled heating after the completion of backside processing steps.
  • FIGS. 2 and 3 show an idealized fabrication process in which the etch front continues to etch anistropically and flush against the photoresist plug 10 when the etch front meets the photoresist.
  • the etch flares radially outwards, leaving a spiked circumferential rim 13 around the photoresist plug.
  • the radially flared etch terminus 12 is undesirable in the final printhead integrated circuit when the photoresist is removed ( FIG. 5 ).
  • the flared etch terminus 12 acts as a pocket, which can trap slow-moving ink or gas bubbles. This can lead to disruption of the flow of ink from the ink channel 6 to the inlet 8 and the nozzle downstream.
  • the spiked rim 13 which faces the flow of oncoming ink, is relatively weakly supported by the bulk wafer 5 and can easily break off into one or more slivers.
  • the creation of slivers in the ink flow is highly undesirable and will typically result in failure of the nozzle downstream.
  • a method of removing a polymeric coating from sidewalls of an etched trench defined in a silicon wafer comprising etching said wafer in a biased plasma etching chamber using an O 2 plasma, wherein said chamber temperature is in the range of 90 to 180 ° C.
  • a method of etching a trench in a silicon wafer comprising the steps of:
  • the present invention provides a process for facilitating modification of an etched trench, the process comprising:
  • the present invention provides a method of fabricating an inkjet printhead integrated circuit comprising a plurality of nozzles, ejection actuators, associated drive circuitry and ink supply channels, the method comprising the steps of:
  • the present invention provides an inkjet printhead integrated circuit fabricated by the method described above.
  • the method according to the first and second aspects of the present application advantageously allow a hydrophobic polymeric sidewall residue (e.g. ‘Bosch polymer’) to be removed from a trench, without overheating the silicon wafer.
  • a hydrophobic polymeric sidewall residue e.g. ‘Bosch polymer’
  • Overheating of the silicon wafer may cause damage of sensitive MEMS structures already formed on the wafer by stresses exerted, for example, by photoresist expansion.
  • overheating typically causes delimination of the wafer from a handle wafer to which the silicon wafer is usually attached. Accordingly, it is as advantage of the present invention that polymeric residues can be removed without using potentially damaging EKCTM cleaning or O 2 plasma ashing.
  • the polymeric coating is generally replaced by more hydrophilic silicon oxide layer.
  • the O 2 plasma has sufficient energy to remove polymeric residues in deep (e.g. over 100 micron deep) trenches at a temperature lower than the release temperature of standard thermal release tape.
  • the present invention provides a method for facilitating its removal in a post-etching step.
  • a portion of the photoresist plug is removed so as to expose the circumferential rim formed around the plug during deep or ultradeep etching. Once exposed, the circumferential rim may be smoothed or rounded by ion milling.
  • printheads made by the process of the present invention generally exhibit improved ink flow through their ink supply channels and minimize the risk of nozzle failure caused by slivers of wafer blocking or damaging the nozzles.
  • the oxygen plasma etch is typically performed in a plasma etching reactor, such as an inductively coupled plasma (ICP) etching reactor.
  • a plasma etching reactor such as an inductively coupled plasma (ICP) etching reactor.
  • ICP inductively coupled plasma
  • plasma etching reactor and “plasma etching chamber” are entirely equivalent terms of art.
  • Plasma etching reactors are well known in the art and are commercially available from various sources (e.g. Surface Technology Systems, PLC).
  • the etching reactor comprises a chamber formed from aluminium, glass or quartz, which contains a pair of parallel electrode plates.
  • the present invention is suitable for use with any type of plasma etching reactor.
  • a radiofrequency (RF) energy source is used to ionize a gas mixture introduced into the chamber.
  • the resultant ionized gas plasma is accelerated towards a substrate disposed on a lower electrode (also referred to as an electrostatic chuck or a platen) by a biasing voltage.
  • the plasma etching chamber can be used for biased etches in which a gas plasma is directed towards a substrate.
  • control means are provided for controlling the ICP power, bias power, RF ionizing energy, substrate temperature, chamber pressure, chamber temperature etc.
  • the plasma etching chamber parameters may be optimized in order to achieve complete removal of polymer coatings from trench sidewalls.
  • the bias power is in the range of 10 to 100 W (preferably 30 to 70 W)
  • the ICP power is optionally in the range of 1000 to 3000 W (or 2000 to 3000 W)
  • the chamber temperature is optionally in the range of 90 to 180° C. (or 90 to 150° C., or 120 to 150° C.)
  • the O 2 flow rate is optionally in the range of 20 to 200 sccm (preferably 60 to 100 sccm)
  • the chamber pressure is optionally in the range of 5 to 200 mTorr (optionally 20 to 140 mTorr, or optionally 60 to 100 mTorr).
  • Etching times are typically in the range of 20 to 200 minutes, 30 to 200 minutes or 40 to 80 minutes.
  • the process removes a depth of about 1 to 15 ⁇ m, or optionally a depth of about 2 to 7 ⁇ m, from an exposed back surface of the photoresist plug.
  • the removed portion may be up to 10%, up to 20%, or up to 50% of the total plug volume.
  • the amount of photoresist removed by the process of the present invention will be sufficient to expose an inner surface of a circumferential rim formed around at least part of the original intact plug by a prior etching process.
  • the process of the invention includes the further step of ion milling exposed angular features, such as the circumferential rim described above.
  • angular surface features are tapered, smoothed and/or rounded by the ion milling.
  • ink flowing past these features approaches a curved surface rather than an angular surface, meaning that the ink can flow smoothly past, without generating excessive turbulence and/or air bubbles.
  • the resultant rounded, smoothed and/or tapered features are less frangible and are therefore less likely to cause nozzle failure by slivers breaking off and entering the nozzle chamber.
  • the ion milling is usually performed in a plasma etching reactor, such as the inductively coupled plasma etching reactor described above.
  • the ion milling is performed using a heavy inert gas selected from argon, krypton or xenon.
  • the inert gas is argon since this is widely available at relatively low cost, and, because of its relatively high mass, has excellent sputtering properties.
  • an argon ion plasma is generated in a plasma etching reactor, and the argon ions accelerated perpendicularly towards a silicon wafer having ink supply channels etched therein.
  • Plasma reactor parameters may be varied in order to achieve optimal ion milling of the wafer.
  • the bias power is in the range of 100 to 500 W (preferably 200 to 400 W)
  • the ICP power is in the range of 1000 to 3000 W (preferably about 2500 W)
  • the chamber temperature is in the range of 90 to 150° C. (preferably about 120° C.)
  • the Ar flow rate is in the range of 20 to 200 sccm (preferably 80 to 120 sccm). Milling times are typically in the range of 5 to 100 minutes, 10 to 60 minutes or 10 to 30 minutes.
  • the ion milling may be performed at any suitable pressure. Typically, the pressure will be in the range of 2 to 2000 mTorr. In other words, ion milling may be performed at low pressure (about 2 to 250 mTorr) or high pressure (about 250 to 2000 mTorr).
  • Low pressure ion milling has the advantage that most commercially available plasma etching reactors are configured for low pressure etching. Hence, low pressure ion milling does not require any special apparatus.
  • ion milling may also be performed at high pressure.
  • High pressure ion milling has the advantage that steeper tapering is usually obtainable.
  • the principle of using high pressure ion milling to produce steep taper angles may be understood as follows. Normally, sputter etching is performed at relatively low pressures (e.g. about 5 to 250 mTorr) to achieve high sputter etching efficiency. Such a low pressure produces a nearly collision-free path for silicon atoms sputtered from the surface, thereby optimizing etching efficiency.
  • U.S. Pat. No. 5,888,901 which is incorporated herein by reference, describes high pressure ion milling of a SiO 2 dielectric surface using argon as the sputtering gas. Whilst the method described in U.S. Pat. No. 5,888,901 is used for tapering a SiO 2 dielectric surface layer, rather than tapering angular surface features on the sidewalls of ultradeep channels etched into silicon, this method may be readily modified and applied to the process of the present invention.
  • Low pressure ion milling (e.g. 5 to 50 mTorr) is generally preferred in the present invention, because it is usually only necessary to round off angular sidewall features in order to achieve improved ink flow, rather than taper the whole sidewall feature. Moreover, low pressure ion milling does not require any special apparatus and can therefore be easily incorporated into a typical printhead fabrication process.
  • each ink supply channel has a depth in the range of 100 to 300 ⁇ m, optionally 150 to 250 ⁇ m, or optionally about 200 ⁇ m.
  • the width/length dimensions of the ink supply channel may vary considerably.
  • each ink supply is substantially cylindrical having a diameter in the range of 5 to 30 ⁇ m, optionally 14 to 28 ⁇ m, or optionally 17 to 25 ⁇ m. With such designs, etch flaring is usually significant as the etch front meets the frontside photoresist plug.
  • each ink supply channel has a width of 40 to 120 ⁇ m (or 60 to 100 ⁇ m), and a length of over 200 ⁇ m or over 500 ⁇ m.
  • etch flaring is usually insignificant due to dispersion of charge away from the etch front. Notwithstanding this avoidance of etch flaring, the present invention is still used to remove polymeric coatings from trench sidewalls by biased oxygen plasma etching.
  • each nozzle inlet has a depth in the range of 5 to 40 ⁇ m, optionally 10 to 30 ⁇ m, or optionally 15 to 25 ⁇ m.
  • each nozzle inlet is substantially cylindrical having a diameter in the range of 3 to 28 ⁇ m, optionally 8 to 24 ⁇ m, or optionally 12 to 20 ⁇ m.
  • each nozzle inlet is substantially cuboid having width/length dimensions in the range of 5 to 40 ⁇ m.
  • each ink supply channel has a larger diameter than its corresponding nozzle inlet, and the process of the present invention may be used to taper, smooth and/or round off shoulders defined by the junction of the inlet and the ink supply channel.
  • the present invention provides a process for facilitating modification of an etched trench, the process comprising:
  • the wafer comprises a plurality of etched trenches.
  • the biased oxygen plasma etch removes a depth of 1 to 15 ⁇ m from an exposed surface of the photoresist plug.
  • trench sidewalls are concomitantly hydrophilized by the biased oxygen plasma etch.
  • Optionally concomitant hydrophilization includes removal of a polymeric layer from the trench sidewalls.
  • the biased oxygen plasma etch is performed in a plasma etching reactor
  • the plasma etching reactor has a bias power in the range of 10 to 100 W.
  • the plasma etching reactor has a chamber pressure in the range of 20 to 140 mTorr.
  • Optionally forms part of a printhead fabrication process.
  • the etched trench is an ink supply channel for a printhead.
  • the ink supply channel has a depth in the range of 100 to 300 ⁇ m.
  • the present invention provides a method of fabricating an inkjet printhead integrated circuit comprising a plurality of nozzles, ejection actuators, associated drive circuitry and ink supply channels, the method comprising the steps of:
  • the angular sidewall features include a circumferential rim around at least a part of the photoresist plug, the circumferential rim being exposed by removing a portion of each plug.
  • the exposed angular sidewall features are modified by argon ion milling.
  • the argon ion milling smoothes and/or rounds the exposed angular sidewall features.
  • the argon ion milling is performed in a plasma etching reactor.
  • ink supply channel sidewalls are concomitantly hydrophilized by the biased oxygen plasma etch.
  • an inkjet printhead integrated circuit fabricated by the above-mentioned method.
  • a method of removing a polymeric coating from sidewalls of an etched trench defined in a silicon wafer comprising etching said wafer in a biased plasma etching chamber using an O 2 plasma, wherein a chamber temperature is in the range of 90 to 180° C.
  • said etching chamber is an inductively coupled plasma (ICP) etching chamber.
  • ICP inductively coupled plasma
  • an ICP power is in the range of 2000 to 3000 W.
  • said wafer is attached to a platen, and a biasing platen power is in the range of 10 to 100 W.
  • said chamber temperature is in the range of 120 to 150° C.
  • a chamber pressure is in the range of 30 to 120 mTorr.
  • a chamber pressure is in the range of 60 to 100 mTorr.
  • said platen has a temperature in the range of 5 to 20° C.
  • said platen is cooled using backside helium cooling.
  • an oxygen flow rate to said chamber is in the range of 20 to 200 sccm.
  • an etching time is in the range of 40 to 80 minutes.
  • said polymeric coating is a hydrophobic fluoropolymer.
  • said trench is an ink supply channel for an inkjet printhead.
  • said ink supply channel has a width in the range of 20 to 120 microns
  • said ink supply channel has a depth of at least 100 microns.
  • a frontside of said silicon wafer is attached to a handle wafer using adhesive tape, said etched trench being defined in a backside of said wafer.
  • said adhesive tape is thermal release tape.
  • said adhesive tape is unaffected by said oxygen plasma etching.
  • said oxygen plasma etching does not cause delamination of said handle wafer from said silicon wafer.
  • a method of etching a trench in a silicon wafer comprising the steps of:
  • FIG. 1 is a perspective view of a printhead nozzle arrangement for a printhead
  • FIG. 2 is cutaway perspective view of an idealized, partially fabricated printhead nozzle arrangement, with the actuator assembly removed and the ink supply channel exposed;
  • FIG. 3 is a cutaway perspective view of the printhead nozzle arrangement shown in FIG. 2 after stripping away the photoresist plug;
  • FIG. 4 is a cutaway perspective view of a partially fabricated prior art printhead nozzle arrangement, with the actuator assembly removed and the ink supply channel exposed;
  • FIG. 5 is a cutaway perspective view of the prior art printhead nozzle arrangement shown in FIG. 4 after stripping away the photoresist plug;
  • FIG. 6 is a cutaway perspective view of a partially fabricated printhead nozzle arrangement according to the present invention, with the actuator assembly removed and the ink supply channel exposed;
  • FIG. 7 is a cutaway perspective view of the partially fabricated printhead nozzle arrangement shown in FIG. 6 , after ion milling the circumferential rim;
  • FIG. 8 is a cutaway perspective view of the partially fabricated printhead nozzle arrangement shown in FIG. 6 , after stripping away the photoresist;
  • FIG. 9 is an SEM micrograph of a silicon wafer having 12 trenches back-etched to within 5 ⁇ m of corresponding front plugs;
  • FIG. 10 is a magnified SEM micrograph of a silicon wafer showing a trench back-etched 5 ⁇ m beyond a front plug;
  • FIG. 11 is an SEM micrograph of a trench after biased oxygen plasma etching according to the invention.
  • FIG. 12 is a magnified view of FIG. 11 ;
  • FIG. 13 is an SEM micrograph of a trench after argon ion milling.
  • FIG. 14 is a side view of a silicon wafer attached to glass handle wafer.
  • the frontside is coated with a protective layer of photoresist 51 and attached to a glass handle wafer 52 .
  • the glass handle wafer 52 is attached using a thermal release tape 53 having a permanent adhesive layer 54 bonded to the glass handle wafer 52 , and a thermal release adhesive layer 55 bonded to the protective photoresist 50 .
  • An outermost surface of the glass handle wafer 52 is metallized for attachment to an electrotstatic platen in a plasma etching chamber.
  • the wafer 5 is back-etched in a plasma etching chamber to define backside ink supply channels.
  • Any standard anisotropic DIRE process e.g. Bosch etch may be used for backside etching.
  • FIG. 4 there is shown a partially fabricated printhead integrated circuit after back-etching from the ink supply side 30 (backside) of the wafer 5 to and past the photoresist plug 10 .
  • the etch flares radially outwards to give a radially flared etch terminus 12 and a corresponding circumferential rim 13 around part of the plug.
  • the back-etched wafer shown in FIG. 4 is subjected to a biased oxygen plasma etch.
  • the biased oxygen plasma etch is performed in a plasma etching chamber using suitably controlled gas flow, biasing power, ICP power, chamber pressure and etching time.
  • the biased oxygen plasma etch removes a portion of the photoresist plug 10 . The portion removed is sufficient to expose the spiked circumferential rim 13 .
  • the biased oxygen plasma etch removes any hydrophobic fluorocarbon polymer from the sidewalls of the ink supply channel 6 , replacing it with a hydrophilic layer of SiO 2 .
  • the fluorocarbon polymer coating on the sidewalls of the ink supply channel 6 is typically formed during the anisotropic DIRE process.
  • the surface properties of the ink supply channel 6 are generally improved, without affecting the thermal release tape which secures the wafer 5 to the handle wafer 52 .
  • delamination is avoided.
  • the wafer 5 shown in FIG. 6 is subjected to argon ion milling in a plasma etching reactor.
  • argon ion milling the exposed circumferential rim 13 is smoothed down, which improves the robustness and surface profile of the ink supply channel 6 .
  • the extent to which the circumferential rim 13 is smoothed, rounded and/or tapered will depend on the pressure, bias power and/or the milling time in the plasma etching reactor.
  • the rim 13 may be either rounded down (as shown in FIG. 7 ) or fully tapered by argon ion milling. In either case, the removal of this spiked projection generally improves ink flow through the channel 6 and minimizes the likelihood of slivers breaking off and blocking the nozzle downstream.
  • the wafer shown in FIG. 7 is ashed, which completely strips away the photoresist plug 10 and provides fluid connection between the inlet 8 and the ink supply channel 6 .
  • a silicon wafer having a thickness of 200 ⁇ m was prepared as follows. Using a standard anisotropic DRIE process a trench, having a diameter of 14 ⁇ m and a depth of 28 ⁇ m, was etched into a frontside of the wafer. The trench was filled with photoresist to form a front plug. With the frontside of the wafer attached to a glass handle wafer, the backside is then etched to within 5 ⁇ m of the back surface of the front plug. Again, a standard anisotropic DRIE process is used for backside etching. The back-etched main trench had a depth of about 170 ⁇ m and a diameter of about 21 ⁇ m.
  • FIG. 9 is an SEM micrograph of the silicon wafer after back-etching to within 5 ⁇ m of the front plug.
  • FIG. 10 is an SEM micrograph of part of the trench after back-etching past the front plug. As shown in FIG. 10 , a spiked circumferential rim extends around the front plug, where the back-etch did not etch completely flush against the front plug.
  • a standard inductively coupled plasma DRIE reactor (“HRM Pro” tool, supplied by Surface Technology Systems) was configured as follows: ICP top power: 2500 W Bias power 50 W Plasma gas: O 2 Chamber temperature: 120° C. Cooling: Backside helium cooling, 9.5 Torr, 10° C. Chamber pressure: 80 mTorr O 2 flow rate: 80 sccm
  • FIGS. 11 and 12 are SEM micrographs of part of the silicon wafer, showing in detail the 7 ⁇ m portion of front plug removed by the oxygen plasma etch.
  • FIG. 12 also shows a spiked circumferential projection (formerly a rim around the front plug), having a thickness of 1.7 ⁇ m, extending towards the back side of the wafer.
  • the plasma reactor was reconfigured as follows: ICP top power: 2500 W Bias power 300 W Plasma gas: Ar Chamber temperature: 120° C. Cooling: Backside helium cooling, 9.5 Torr, 10° C. Chamber pressure: 10 mTorr O 2 flow rate: 100 sccm
  • FIG. 13 is an SEM micrograph of the resultant trench, which shows the spiked circumferential projection rounded down to a smooth surface.
  • the absence of spiked projections at the junctions of the front-etched and back-etched trenches significantly improves the surface profile of the resultant channel, once the photoresist has been stripped away.

Abstract

A method of removing a polymeric coating from sidewalls of an etched trench defined in a silicon wafer is provided. The method comprises etching the wafer in a biased plasma etching chamber using an O2 plasma. The chamber temperature is in the range of 90 to 180° C.

Description

    FIELD OF THE INVENTION
  • This invention relates to a process for modifying sidewalls of a trench etched into a semiconductor wafer. It has been developed primarily for incorporation into a printhead integrated circuit manufacturing process in order to provide an ink channel having improved surface properties and/or improved surface profile. However, it may equally be incorporated into any etching process.
    • COPENDING APPLICATIONS
  • The following application has been filed by the applicant simultaneously with the present application:
  • MEMS26US
  • The disclosure of this copending application is incorporated herein by reference. The above application has been identified by its filing docket number, which will be substituted with the corresponding application number once assigned.
    • CROSS REFERENCES TO RELATED APPLICATIONS
  • Various methods, systems and apparatus relating to the present invention are disclosed in the following US Patents/Patent Applications filed by the applicant or assignee of the present invention:
    09/517539 6566858 09/112762 6331946 6246970 6442525 09/517384
    09/505951 6374354 09/517608 09/505147 10/203564 6757832 6334190
    6745331 09/517541 10/203559 10/203560 10/636263 10/636283 10/866608
    10/902889 10/902833 10/940653 10/942858 10/727181 10/727162 10/727163
    10/727245 10/727204 10/727233 10/727280 10/727157 10/727178 10/727210
    10/727257 10/727238 10/727251 10/727159 10/727180 10/727179 10/727192
    10/727274 10/727164 10/727161 10/727198 10/727158 10/754536 10/754938
    10/727227 10/727160 10/934720 11/212,702 10/296522 6795215 10/296535
    09/575109 10/296525 09/575110 09/607985 6398332 6394573 6622923
    6747760 10/189459 10/884881 10/943941 10/949294 11/039866 11/123011
    11/123010 11/144769 11/148237 10/922846 10/922845 10/854521 10/854522
    10/854488 10/854487 10/854503 10/854504 10/854509 10/854510 10/854496
    10/854497 10/854495 10/854498 10/854511 10/854512 10/854525 10/854526
    10/854516 10/854508 10/854507 10/854515 10/854506 10/854505 10/854493
    10/854494 10/854489 10/854490 10/854492 10/854491 10/854528 10/854523
    10/854527 10/854524 10/854520 10/854514 10/854519 10/854513 10/854499
    10/854501 10/854500 10/854502 10/854518 10/854517 10/934628 PLT046US
    10/728804 10/728952 10/728806 10/728834 10/729790 10/728884 10/728970
    10/728784 10/728783 10/728925 10/728842 10/728803 10/728780 10/728779
    10/773189 10/773204 10/773198 10/773199 10/773190 10/773201 10/773191
    10/773183 10/773195 10/773196 10/773186 10/773200 10/773185 10/773192
    10/773197 10/773203 10/773187 10/773202 10/773188 10/773194 10/773193
    10/773184 11/008118 11/060751 11/060805 11/188017 6623101 6406129
    6505916 6457809 6550895 6457812 10/296434 6428133 6746105
    10/407212 10/407207 10/683064 10/683041 6750901 6476863 6788336
    11/097308 11/097309 11/097335 11/097299 11/097310 11/097213 11/210687
    11/097212 11/212637 10/760272 10/760273 10/760187 10/760182 10/760188
    10/760218 10/760217 10/760216 10/760233 10/760246 10/760212 10/760243
    10/760201 10/760185 10/760253 10/760255 10/760209 10/760208 10/760194
    10/760238 10/760234 10/760235 10/760183 10/760189 10/760262 10/760232
    10/760231 10/760200 10/760190 10/760191 10/760227 10/760207 10/760181
    10/815625 10/815624 10/815628 10/913375 10/913373 10/913374 10/913372
    10/913377 10/913378 10/913380 10/913379 10/913376 10/913381 10/986402
    11/172816 11/172815 11/172814 11/003786 11/003354 11/003616 11/003418
    11/003334 11/003600 11/003404 11/003419 11/003700 11/003601 11/003618
    11/003615 11/003337 11/003698 11/003420 11/003682 11/003699 11/071473
    11/003463 11/003701 11/003683 11/003614 11/003702 11/003684 11/003619
    11/003617 10/760254 10/760210 10/760202 10/760197 10/760198 10/760249
    10/760263 10/760196 10/760247 10/760223 10/760264 10/760244 10/760245
    10/760222 10/760248 10/760236 10/760192 10/760203 10/760204 10/760205
    10/760206 10/760267 10/760270 10/760259 10/760271 10/760275 10/760274
    10/760268 10/760184 10/760195 10/760186 10/760261 10/760258 11/014764
    11/014763 11/014748 11/014747 11/014761 11/014760 11/014757 11/014714
    11/014713 11/014762 11/014724 11/014723 11/014756 11/014736 11/014759
    11/014758 11/014725 11/014739 11/014738 11/014737 11/014726 11/014745
    11/014712 11/014715 11/014751 11/014735 11/014734 11/014719 11/014750
    11/014749 11/014746 11/014769 11/014729 11/014743 11/014733 11/014754
    11/014755 11/014765 11/014766 11/014740 11/014720 11/014753 11/014752
    11/014744 11/014741 11/014768 11/014767 11/014718 11/014717 11/014716
    11/014732 11/014742 11/097268 11/097185 11/097184 09/575197 09/575195
    09/575159 09/575132 09/575123 09/575148 09/575130 09/575165 09/575153
    09/575118 09/575131 09/575116 09/575144 09/575139 09/575186 6681045
    6728000 09/575145 09/575192 09/575181 09/575193 09/575156 09/575183
    6789194 09/575150 6789191 6644642 6502614 6622999 6669385
    6549935 09/575187 6727996 6591884 6439706 6760119 09/575198
    6290349 6428155 6785016 09/575174 09/575163 6737591 09/575154
    09/575129 09/575124 09/575188 09/575189 09/575162 09/575172 09/575170
    09/575171 09/575161
  • The disclosures of these applications and patents are incorporated herein by reference.
    • BACKGROUND OF THE INVENTION
  • The impact of MEMS (Microelectromechanical Systems) devices on the microelectronics industry has been extremely significant in recent years. Indeed, MEMS is one of the fastest growing areas of microelectronics. The growth of MEMS has been enabled, to a large extent, by the extension of silicon-based photolithography to the manufacture of micro-scale mechanical devices and structures. Photolithographic techniques, of course, rely on reliable etching techniques, which allow accurate etching of a silicon substrate revealed beneath a mask.
  • MEMS devices have found applications in a wide variety of fields, such as in physical, chemical and biological sensing devices. One important application of MEMS devices is in inkjet printheads, where micro-scale actuators for inkjet nozzles may be manufactured using MEMS techniques. The present Applicant has developed printheads incorporating MEMS ink ejection devices and these are the subject of a number of patents and patent applications listed in the Cross References section above and all of which are incorporated herein by reference.
  • Typically a MEMS inkjet printhead (“MEMJET printhead”) is comprised of a plurality of integrated circuits, with each integrated circuit having several thousand nozzles. Each nozzle comprises an actuator for ejecting ink, which may be, for example, a thermal bend actuator (e.g. U.S. Pat. No. 6,322,195) or a bubble-forming heater element actuator (e.g. U.S. Pat. No. 6,672,709). The integrated circuits are manufactured using MEMS techniques, meaning that a high nozzle density and, hence, high resolution printheads can be mass-produced at relatively low cost.
  • In the manufacture of MEMS printhead integrated circuits, it is often required to perform deep or ultradeep etches. Etch depths of about 3 □m to 10 □m may be termed “deep etches”, whereas etch depths of more than about 10 □m may be termed “ultradeep etches.
  • MEMS printhead integrated circuits typically require delivery of ink to each nozzle through individual ink supply channels having a diameter of about 20 □m. These ink channels are typically etched through wafers having a thickness of about 200 □m, and therefore place considerable demands on the etching method employed. It is especially important that each ink channel is perpendicular to the wafer surface and does not contain kinks, sidewall projections (e.g. grassing) or angular junctions, which can interfere with the flow of ink.
  • In the Applicant's U.S. patent application Ser. No. 10/728,784 (Applicant Ref: MTB08) and U.S. patent application Ser. No. 10/728,970 (Applicant Ref: MTB07), both of which are incorporated herein by reference, there is described a method of fabricating inkjet printheads from a wafer 5 having a drop ejection side and an ink supply side. Referring to FIG. 1, there is shown a typical MEMS nozzle arrangement 1 comprising a bubble-forming heater element actuator assembly 2. The actuator assembly 2 is formed in a nozzle chamber 3 on the passivation layer 4 of a silicon wafer 5. The wafer typically has a thickness “B” of about 200 □m, whilst the nozzle chamber typically occupies a thickness “A” of about 20 □m. The nozzle chamber 3 has an inlet 8, which joins an ink supply channel (not shown in FIG. 1) in the silicon wafer 5.
  • Referring to FIG. 2, an ink supply channel 6 is formed in the wafer 5 by first etching a trench through the CMOS metallization layer of a TEOS interconnect 7 and partially through the wafer 5 from the ink ejection side 20 of the wafer. Once formed, the trench is plugged with photoresist 10 whilst nozzle structures are formed on the ink ejection side 20 of the wafer. After formation of the nozzle arrangement 1, the ink supply channel 6 is formed by ultradeep etching from the ink supply side 30 of the wafer to and past the photresist plug 10.
  • Referring to FIG. 3, the photoresist plug 10 is finally stripped away to form the inlet 8. The inlet 8 provides fluid connection between the ink supply channel 6 and the nozzle chamber 3. FIGS. 2 and 3 also shows the CMOS drive circuitry 9, which is provided between the wafer 5 and the interconnect 7.
  • The “back-etching” of the ink supply channel avoids filling and removing an entire 200 □m long ink supply channel with resist whilst nozzle structures in the wafer are being lithographically formed. However, there are a number of problems associated with back-etching the ink supply channels in this way. Firstly, the mask on the ink supply side needs to be carefully aligned so that the etched channels meet the trenches plugged with photoresist, and do not damage the drive circuitry 9. Secondly, the etching needs to be perpendicular and anisotropic to a depth of about 200 □m.
  • Several methods for etching ultradeep trenches into silicon are known in the art. All these methods involve deep reactive ion etching (DRIE) using a gas plasma. The semiconductor substrate, with a suitable mask disposed thereon, is placed on a lower electrode in a plasma reactor, and exposed to an ionized gas plasma formed from a mixture of gases. The ionized plasma gases (usually positively charged) are accelerated towards the substrate by a biasing voltage applied to the electrode. The plasma gases etch the substrate either by physical bombardment, chemical reaction or a combination of both. Etching of silicon is usually ultimately achieved by formation of volatile silicon halides, such as SiF4, which are carried away from the etch front by a light inert carrier gas, such as helium.
  • Anisotropic etching is usually achieved by depositing a passivation layer onto the base and sidewalls of the trench as it is being formed, and selectively etching the base of the trench using the gas plasma.
  • The most widely used method for achieving ultradeep anisotropic etching is the “Bosch process”, described in U.S. Pat. No. 5,501,893 and U.S. Pat. No. 6,284,148. This method involves alternating polymer deposition and etching steps. After formation of a shallow trench, a first polymer deposition step deposits a polymer onto the base and sidewalls of the trench. The polymer is deposited by a gas plasma formed from a fluorocarbon gas (e.g. CHF3, C4F8 or C2F4) in the presence or in the absence of an inert gas. In the subsequent etching step, the plasma gas mix is changed to SF6/Ar. The polymer deposited on the base of the trench is quickly broken up by ion assistance in the etching step, while the sidewalls remain protected. Hence, anisotropic etching may be achieved.
  • However, a major disadvantage of the Bosch process is that polymer deposition and etching steps need to be alternated, which means continuously alternating the gas composition of the plasma, thereby slowing etch rates. This alternation, in turn, leads to uneven trench sidewalls, characterized by scalloped surface formations.
  • A further disadvantage of the Bosch process is that it leaves a hydrophobic fluorocarbon polymer coating (‘Bosch polymer’) on the trench sidewalls. In ink channels for inkjet printheads, it is desirable to provide hydrophilic sidewalls so that ink is drawn into ink supply channels by a capillary action.
  • Hitherto, such polymeric coatings were removed by either O2 ashing or a ‘wet’ clean. The standard industry method for removing ‘Bosch polymer’ residues is to use an EKC™ wet clean, followed by DI rinse(s) and spin drying. However, both O2 ashing and EKC™ cleans suffer from serious problems during MEMS processing of a silicon wafer. Usually, a silicon wafer being processed in a MEMS foundry is attached to a handle wafer, such as a glass handle wafer, using a release tape such as Revalpha™ thermal release tape. The handle wafer is necessary so that the silicon wafer can be handled during backside processing steps, without damaging any sensitive structures (e.g. inkjet nozzles) already fabricated the frontside of the wafer. As described above, typically, during MEMS manufacture of an inkjet printhead, nozzles are first formed on a frontside of wafer and then ink supply channels are etched from a backside of the wafer. Before performing backside processing steps (e.g. wafer grinding, etching), the frontside of the wafer, having a protective photoresist coating, is usually attached to a handle wafer using a thermal release tape. The thermal release tape comprises a film having a thermal release adhesive on one side. The thermal release adhesive conveniently allows the silicon wafer to be detached from the handle wafer by controlled heating after the completion of backside processing steps.
  • However, standard O2 ashing ovens are run out about 220-240° C., which is well above the release temperature of standard thermal release tape (about 160-180° C.). Consequently, the silicon wafer delaminates from the handle wafer during O2 ashing in a standard ashing oven. Lowering the temperature of ashing oven produces unacceptably low ashing rates and does not ensure complete removal of any polymeric residues coated on sidewalls of etched features.
  • Moreover, standard EKC™ cleans tend to attack thermal release tape chemically, also causing highly undesirable delamination.
  • An additional problem with ultradeep anisotropic etching is that anisotropy tends to be lost when the etch front meets the photoresist plug 10. FIGS. 2 and 3 show an idealized fabrication process in which the etch front continues to etch anistropically and flush against the photoresist plug 10 when the etch front meets the photoresist. In practice however, and referring to FIG. 4, when the etch front meets the photoresist plug 10, the etch flares radially outwards, leaving a spiked circumferential rim 13 around the photoresist plug. Radial flaring where the etch front meets the photoresist plug is believed to be due to mutual charge repulsion between a charge built up on the photoresist and the charged ions in the plasma. The radially flared etch terminus 12 and the corresponding spiked circumferential rim 13 are shown in FIG. 4.
  • The radially flared etch terminus 12 is undesirable in the final printhead integrated circuit when the photoresist is removed (FIG. 5). The flared etch terminus 12 acts as a pocket, which can trap slow-moving ink or gas bubbles. This can lead to disruption of the flow of ink from the ink channel 6 to the inlet 8 and the nozzle downstream.
  • Moreover, the spiked rim 13, which faces the flow of oncoming ink, is relatively weakly supported by the bulk wafer 5 and can easily break off into one or more slivers. The creation of slivers in the ink flow is highly undesirable and will typically result in failure of the nozzle downstream.
  • It would be desirable to provide a process, which exposes angular or spiked surface features in an etched trench, thereby facilitating modification of such features. It would further be desirable to provide a process for manufacturing a printhead integrated circuit, whereby ink channels formed in the process have improved surface profiles.
  • It would be also be desirable to provide an alternative process for removing a hydrophobic polymeric layer deposited on the sidewalls of a trench during etching. It would further be desirable to provide a process for removing such polymers, which is compatible with industry standard thermal release tape, and does not cause delamination. It would further be desirable to provide a process for manufacturing a printhead integrated circuit, whereby ink channels formed in the process have improved surface properties.
    • SUMMARY OF THE INVENTION
  • In a first aspect, there is provided a method of removing a polymeric coating from sidewalls of an etched trench defined in a silicon wafer, said method comprising etching said wafer in a biased plasma etching chamber using an O2 plasma, wherein said chamber temperature is in the range of 90 to 180 ° C.
  • In a second aspect, there is provided a method of etching a trench in a silicon wafer, said method comprising the steps of:
      • (a) attaching a frontside of said silicon wafer to a handle wafer;
      • (b) etching a backside of wafer using an anisotropic DRIE process to form a trench, said DRIE process including alternating etching and passivation steps, said passivation steps depositing a polymeric coating on sidewalls of said trench;
      • (c) removing said polymeric coating by etching said wafer in a biased plasma etching chamber using an O2 plasma,
        wherein said chamber temperature is in the range of 100 to 180° C.
  • In a third aspect, the present invention provides a process for facilitating modification of an etched trench, the process comprising:
      • (a) providing a wafer comprising at least one etched trench, the at least one trench having a photoresist plug at its base; and
      • (b) removing a portion of the photoresist by subjecting the wafer to a biased oxygen plasma etch.
  • In a fourth aspect, the present invention provides a method of fabricating an inkjet printhead integrated circuit comprising a plurality of nozzles, ejection actuators, associated drive circuitry and ink supply channels, the method comprising the steps of:
      • (i) providing a wafer having a front drop ejection side and a back ink supply side;
      • (ii) etching a plurality of trenches partially into the drop ejection side of the wafer;
      • (iii) filling each of the trenches with a photoresist plug;
      • (iv) forming a plurality of corresponding nozzles, ejection actuators and associated drive circuitry on the drop ejection side of the wafer using lithographically masked etching techniques;
      • (v) back-etching a plurality of corresponding ink supply channels from the ink supply side of the wafer to and past the photoresist plugs;
      • (vi) removing a portion of each photoresist plug by subjecting the wafer to a biased oxygen plasma etch, thereby exposing angular sidewall features in the ink supply channels;
      • (vii) modifying the exposed angular sidewall features; and
      • (viii) stripping the photoresist plugs from the trenches to form nozzle inlets, thereby providing fluid connection between the ink supply side and the nozzles.
  • In a fifth aspect, the present invention provides an inkjet printhead integrated circuit fabricated by the method described above.
  • The method according to the first and second aspects of the present application advantageously allow a hydrophobic polymeric sidewall residue (e.g. ‘Bosch polymer’) to be removed from a trench, without overheating the silicon wafer. Overheating of the silicon wafer may cause damage of sensitive MEMS structures already formed on the wafer by stresses exerted, for example, by photoresist expansion. Moreover, overheating typically causes delimination of the wafer from a handle wafer to which the silicon wafer is usually attached. Accordingly, it is as advantage of the present invention that polymeric residues can be removed without using potentially damaging EKC™ cleaning or O2 plasma ashing. The polymeric coating is generally replaced by more hydrophilic silicon oxide layer.
  • By using a source of O2 plasma, which is biased in a plasma etching chamber, the O2 plasma has sufficient energy to remove polymeric residues in deep (e.g. over 100 micron deep) trenches at a temperature lower than the release temperature of standard thermal release tape.
  • With reference to the third, fourth and fifth aspects of the present application, hitherto, the importance of the surface profile of ink supply channels in printheads fabricated by MEMS techniques had not been fully appreciated. Whilst several ultradeep etching techniques have become available in recent years, none of these addresses the problems described above when back-etching towards (and beyond) a photoresist plug. In particular, the problem of a sharp, potentially frangible, circumferential rim being formed in the sidewalls had not been addressed. As discussed above, this rim is formed during back-etching as the etch front radially flares around the photoresist plug (see FIGS. 4 and 5).
  • The problem of an etch front radially flaring around a photoresist plug can be addressed, to some extent, by special etching techniques. An example of one such special etching technique is described in U.S. Pat. No. 6,187,685 (assigned to Surface Technology Systems). However, whilst the technique described in U.S. Pat. No. 6,187,685 can reduce the angle of flaring relative to the perpendicular, it still does not completely eliminate the formation of a circumferential rim around the photoresist plug. Indeed, since the resultant rim is made thinner by reducing the degree of flaring, the frangibility of the rim may actually be increased, thereby increasing the likelihood of slivers breaking off from the sidewalls and blocking the nozzle.
  • Rather than attempting to eliminate formation of this circumferential rim, the present invention provides a method for facilitating its removal in a post-etching step. In the method of the present invention, a portion of the photoresist plug is removed so as to expose the circumferential rim formed around the plug during deep or ultradeep etching. Once exposed, the circumferential rim may be smoothed or rounded by ion milling. Hence, printheads made by the process of the present invention generally exhibit improved ink flow through their ink supply channels and minimize the risk of nozzle failure caused by slivers of wafer blocking or damaging the nozzles.
  • Optional Features of the Invention
  • The oxygen plasma etch is typically performed in a plasma etching reactor, such as an inductively coupled plasma (ICP) etching reactor. The terms “plasma etching reactor” and “plasma etching chamber” are entirely equivalent terms of art.
  • Plasma etching reactors are well known in the art and are commercially available from various sources (e.g. Surface Technology Systems, PLC). Typically, the etching reactor comprises a chamber formed from aluminium, glass or quartz, which contains a pair of parallel electrode plates. However, other designs of reactor are available and the present invention is suitable for use with any type of plasma etching reactor.
  • A radiofrequency (RF) energy source is used to ionize a gas mixture introduced into the chamber. The resultant ionized gas plasma is accelerated towards a substrate disposed on a lower electrode (also referred to as an electrostatic chuck or a platen) by a biasing voltage. According, the plasma etching chamber can be used for biased etches in which a gas plasma is directed towards a substrate. Various control means are provided for controlling the ICP power, bias power, RF ionizing energy, substrate temperature, chamber pressure, chamber temperature etc.
  • In the present invention, the plasma etching chamber parameters may be optimized in order to achieve complete removal of polymer coatings from trench sidewalls. Optionally, the bias power is in the range of 10 to 100 W (preferably 30 to 70 W), the ICP power is optionally in the range of 1000 to 3000 W (or 2000 to 3000 W), the chamber temperature is optionally in the range of 90 to 180° C. (or 90 to 150° C., or 120 to 150° C.), the O2 flow rate is optionally in the range of 20 to 200 sccm (preferably 60 to 100 sccm), and the chamber pressure is optionally in the range of 5 to 200 mTorr (optionally 20 to 140 mTorr, or optionally 60 to 100 mTorr). Etching times are typically in the range of 20 to 200 minutes, 30 to 200 minutes or 40 to 80 minutes.
  • Optionally, the process removes a depth of about 1 to 15 □m, or optionally a depth of about 2 to 7 □m, from an exposed back surface of the photoresist plug. The removed portion may be up to 10%, up to 20%, or up to 50% of the total plug volume. Typically, the amount of photoresist removed by the process of the present invention will be sufficient to expose an inner surface of a circumferential rim formed around at least part of the original intact plug by a prior etching process.
  • Optionally, the process of the invention includes the further step of ion milling exposed angular features, such as the circumferential rim described above. Typically, angular surface features are tapered, smoothed and/or rounded by the ion milling. Hence, ink flowing past these features approaches a curved surface rather than an angular surface, meaning that the ink can flow smoothly past, without generating excessive turbulence and/or air bubbles. Furthermore, the resultant rounded, smoothed and/or tapered features are less frangible and are therefore less likely to cause nozzle failure by slivers breaking off and entering the nozzle chamber.
  • The ion milling is usually performed in a plasma etching reactor, such as the inductively coupled plasma etching reactor described above.
  • Optionally, the ion milling is performed using a heavy inert gas selected from argon, krypton or xenon. Preferably, the inert gas is argon since this is widely available at relatively low cost, and, because of its relatively high mass, has excellent sputtering properties. Typically, an argon ion plasma is generated in a plasma etching reactor, and the argon ions accelerated perpendicularly towards a silicon wafer having ink supply channels etched therein.
  • Plasma reactor parameters may be varied in order to achieve optimal ion milling of the wafer. Optionally, the bias power is in the range of 100 to 500 W (preferably 200 to 400 W), the ICP power is in the range of 1000 to 3000 W (preferably about 2500 W), the chamber temperature is in the range of 90 to 150° C. (preferably about 120° C.), and the Ar flow rate is in the range of 20 to 200 sccm (preferably 80 to 120 sccm). Milling times are typically in the range of 5 to 100 minutes, 10 to 60 minutes or 10 to 30 minutes.
  • The ion milling may be performed at any suitable pressure. Typically, the pressure will be in the range of 2 to 2000 mTorr. In other words, ion milling may be performed at low pressure (about 2 to 250 mTorr) or high pressure (about 250 to 2000 mTorr).
  • Low pressure ion milling has the advantage that most commercially available plasma etching reactors are configured for low pressure etching. Hence, low pressure ion milling does not require any special apparatus.
  • However, ion milling may also be performed at high pressure. High pressure ion milling has the advantage that steeper tapering is usually obtainable. The principle of using high pressure ion milling to produce steep taper angles may be understood as follows. Normally, sputter etching is performed at relatively low pressures (e.g. about 5 to 250 mTorr) to achieve high sputter etching efficiency. Such a low pressure produces a nearly collision-free path for silicon atoms sputtered from the surface, thereby optimizing etching efficiency.
  • By sputter etching at high pressure rather than low pressure, the mean free path of sputtered silicon atoms is reduced, because sputtered (reflected) silicon atoms have a greater chance of colliding with incoming argon ions in the plasma gas. The result is that a gaseous cloud is formed above the substrate surface, which redeposits reflected silicon atoms back onto the silicon surface. There is an increasing net deposition of reflected silicon atoms at greater depths, which results in angular surface features in the sidewalls becoming more tapered.
  • U.S. Pat. No. 5,888,901, which is incorporated herein by reference, describes high pressure ion milling of a SiO2 dielectric surface using argon as the sputtering gas. Whilst the method described in U.S. Pat. No. 5,888,901 is used for tapering a SiO2 dielectric surface layer, rather than tapering angular surface features on the sidewalls of ultradeep channels etched into silicon, this method may be readily modified and applied to the process of the present invention.
  • Low pressure ion milling (e.g. 5 to 50 mTorr) is generally preferred in the present invention, because it is usually only necessary to round off angular sidewall features in order to achieve improved ink flow, rather than taper the whole sidewall feature. Moreover, low pressure ion milling does not require any special apparatus and can therefore be easily incorporated into a typical printhead fabrication process.
  • Optionally, each ink supply channel has a depth in the range of 100 to 300 □m, optionally 150 to 250 □m, or optionally about 200 □m. The width/length dimensions of the ink supply channel may vary considerably. Optionally, each ink supply is substantially cylindrical having a diameter in the range of 5 to 30 □m, optionally 14 to 28 □m, or optionally 17 to 25 □m. With such designs, etch flaring is usually significant as the etch front meets the frontside photoresist plug. Alternatively, each ink supply channel has a width of 40 to 120 □m (or 60 to 100 □m), and a length of over 200 □m or over 500 □m. With these wider channel designs, etch flaring is usually insignificant due to dispersion of charge away from the etch front. Notwithstanding this avoidance of etch flaring, the present invention is still used to remove polymeric coatings from trench sidewalls by biased oxygen plasma etching.
  • Optionally, each nozzle inlet has a depth in the range of 5 to 40 □m, optionally 10 to 30 □m, or optionally 15 to 25 □m. Optionally, each nozzle inlet is substantially cylindrical having a diameter in the range of 3 to 28 □m, optionally 8 to 24 □m, or optionally 12 to 20 □m. Alternatively, each nozzle inlet is substantially cuboid having width/length dimensions in the range of 5 to 40 □m.
  • Usually, each ink supply channel has a larger diameter than its corresponding nozzle inlet, and the process of the present invention may be used to taper, smooth and/or round off shoulders defined by the junction of the inlet and the ink supply channel.
  • In a further aspect the present invention provides a process for facilitating modification of an etched trench, the process comprising:
      • (a) providing a wafer comprising at least one etched trench, the at least one trench having a photoresist plug at its base; and
      • (b) removing a portion of the photoresist by subjecting the wafer to a biased oxygen plasma etch.
  • Optionally the wafer comprises a plurality of etched trenches.
  • Optionally the biased oxygen plasma etch removes a depth of 1 to 15 □m from an exposed surface of the photoresist plug.
  • Optionally removal of a portion of the photoresist exposes angular features in sidewalls of the trench.
  • Optionally the process further comprising the step of:
      • (c) ion milling the exposed angular features.
  • Optionally trench sidewalls are concomitantly hydrophilized by the biased oxygen plasma etch.
  • Optionally concomitant hydrophilization includes removal of a polymeric layer from the trench sidewalls.
  • Optionally the biased oxygen plasma etch is performed in a plasma etching reactor
  • Optionally the plasma etching reactor has a bias power in the range of 10 to 100 W.
  • Optionally the plasma etching reactor has a chamber pressure in the range of 20 to 140 mTorr.
  • Optionally forms part of a printhead fabrication process.
  • Optionally the etched trench is an ink supply channel for a printhead.
  • Optionally the ink supply channel has a depth in the range of 100 to 300 □m.
  • In a further aspect the present invention provides a method of fabricating an inkjet printhead integrated circuit comprising a plurality of nozzles, ejection actuators, associated drive circuitry and ink supply channels, the method comprising the steps of:
      • (i) providing a wafer having a front drop ejection side and a back ink supply side;
      • (ii) etching a plurality of trenches partially into the drop ejection side of the wafer;
      • (iii) filling each of the trenches with a photoresist plug;
      • (iv) forming a plurality of corresponding nozzles, ejection actuators and associated drive circuitry on the drop ejection side of the wafer using lithographically masked etching techniques;
      • (v) back-etching a plurality of corresponding ink supply channels from the ink supply side of the wafer to and past the photoresist plugs;
      • (vi) removing a portion of each photoresist plug by subjecting the wafer to a biased oxygen plasma etch, thereby exposing angular sidewall features in the ink supply channels;
      • (vii) modifying the exposed angular sidewall features; and
      • (viii) stripping the photoresist plugs from the trenches to form nozzle inlets, thereby providing fluid connection between the ink supply side and the nozzles.
  • Optionally the angular sidewall features include a circumferential rim around at least a part of the photoresist plug, the circumferential rim being exposed by removing a portion of each plug.
  • Optionally the exposed angular sidewall features are modified by argon ion milling.
  • Optionally the argon ion milling smoothes and/or rounds the exposed angular sidewall features.
  • Optionally the argon ion milling is performed in a plasma etching reactor.
  • Optionally ink supply channel sidewalls are concomitantly hydrophilized by the biased oxygen plasma etch.
  • In a further aspect there is provided an inkjet printhead integrated circuit fabricated by the above-mentioned method.
  • In a further aspect there is provided a method of removing a polymeric coating from sidewalls of an etched trench defined in a silicon wafer, said method comprising etching said wafer in a biased plasma etching chamber using an O2 plasma, wherein a chamber temperature is in the range of 90 to 180° C.
  • Optionally said etching chamber is an inductively coupled plasma (ICP) etching chamber.
  • Optionally an ICP power is in the range of 2000 to 3000 W.
  • Optionally said wafer is attached to a platen, and a biasing platen power is in the range of 10 to 100 W.
  • Optionally said chamber temperature is in the range of 120 to 150° C.
  • Optionally a chamber pressure is in the range of 30 to 120 mTorr.
  • Optionally a chamber pressure is in the range of 60 to 100 mTorr.
  • Optionally said platen has a temperature in the range of 5 to 20° C.
  • Optionally said platen is cooled using backside helium cooling.
  • Optionally an oxygen flow rate to said chamber is in the range of 20 to 200 sccm.
  • Optionally an etching time is in the range of 40 to 80 minutes.
  • Optionally said polymeric coating is a hydrophobic fluoropolymer.
  • Optionally said trench is an ink supply channel for an inkjet printhead.
  • Optionally said ink supply channel has a width in the range of 20 to 120 microns
  • Optionally said ink supply channel has a depth of at least 100 microns.
  • Optionally a frontside of said silicon wafer is attached to a handle wafer using adhesive tape, said etched trench being defined in a backside of said wafer.
  • Optionally said adhesive tape is thermal release tape.
  • Optionally said adhesive tape is unaffected by said oxygen plasma etching.
  • Optionally said oxygen plasma etching does not cause delamination of said handle wafer from said silicon wafer.
  • In a further aspect there is provided a method of etching a trench in a silicon wafer, said method comprising the steps of:
      • (a) attaching a frontside of said silicon wafer to a handle wafer;
      • (b) etching a backside of said wafer using an anisotropic DRIE process to form a trench, said DRIE process including alternating etching and passivation steps, said passivation steps depositing a polymeric coating on sidewalls of said trench;
      • (c) removing said polymeric coating by etching said wafer in a biased plasma etching chamber using an O2 plasma,
        wherein said chamber temperature is in the range of 90 to 180° C.
    BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1 is a perspective view of a printhead nozzle arrangement for a printhead;
  • FIG. 2 is cutaway perspective view of an idealized, partially fabricated printhead nozzle arrangement, with the actuator assembly removed and the ink supply channel exposed;
  • FIG. 3 is a cutaway perspective view of the printhead nozzle arrangement shown in FIG. 2 after stripping away the photoresist plug;
  • FIG. 4 is a cutaway perspective view of a partially fabricated prior art printhead nozzle arrangement, with the actuator assembly removed and the ink supply channel exposed;
  • FIG. 5 is a cutaway perspective view of the prior art printhead nozzle arrangement shown in FIG. 4 after stripping away the photoresist plug;
  • FIG. 6 is a cutaway perspective view of a partially fabricated printhead nozzle arrangement according to the present invention, with the actuator assembly removed and the ink supply channel exposed;
  • FIG. 7 is a cutaway perspective view of the partially fabricated printhead nozzle arrangement shown in FIG. 6, after ion milling the circumferential rim;
  • FIG. 8 is a cutaway perspective view of the partially fabricated printhead nozzle arrangement shown in FIG. 6, after stripping away the photoresist;
  • FIG. 9 is an SEM micrograph of a silicon wafer having 12 trenches back-etched to within 5 □m of corresponding front plugs;
  • FIG. 10 is a magnified SEM micrograph of a silicon wafer showing a trench back-etched 5 □m beyond a front plug;
  • FIG. 11 is an SEM micrograph of a trench after biased oxygen plasma etching according to the invention;
  • FIG. 12 is a magnified view of FIG. 11;
  • FIG. 13 is an SEM micrograph of a trench after argon ion milling; and
  • FIG. 14 is a side view of a silicon wafer attached to glass handle wafer.
    • DETAILED DESCRIPTION OF A PREFERRED EMBODIMENT
  • Referring to FIG. 14, after fabricating MEMS nozzle structures 50 on a frontside of wafer 5, the frontside is coated with a protective layer of photoresist 51 and attached to a glass handle wafer 52. The glass handle wafer 52 is attached using a thermal release tape 53 having a permanent adhesive layer 54 bonded to the glass handle wafer 52, and a thermal release adhesive layer 55 bonded to the protective photoresist 50. An outermost surface of the glass handle wafer 52 is metallized for attachment to an electrotstatic platen in a plasma etching chamber.
  • With the glass handle wafer 52 is secured thereto, the wafer 5 is back-etched in a plasma etching chamber to define backside ink supply channels. Any standard anisotropic DIRE process (e.g. Bosch etch) may be used for backside etching.
  • Referring to FIG. 4, there is shown a partially fabricated printhead integrated circuit after back-etching from the ink supply side 30 (backside) of the wafer 5 to and past the photoresist plug 10. As the etch front meets the plug 10 during backside etching, the etch flares radially outwards to give a radially flared etch terminus 12 and a corresponding circumferential rim 13 around part of the plug.
  • Referring to FIG. 6, the back-etched wafer shown in FIG. 4 is subjected to a biased oxygen plasma etch. The biased oxygen plasma etch is performed in a plasma etching chamber using suitably controlled gas flow, biasing power, ICP power, chamber pressure and etching time. The biased oxygen plasma etch removes a portion of the photoresist plug 10. The portion removed is sufficient to expose the spiked circumferential rim 13.
  • Additionally, the biased oxygen plasma etch removes any hydrophobic fluorocarbon polymer from the sidewalls of the ink supply channel 6, replacing it with a hydrophilic layer of SiO2. The fluorocarbon polymer coating on the sidewalls of the ink supply channel 6 is typically formed during the anisotropic DIRE process. By replacing the fluorocarbon layer with a hydrophilic SiO2 layer, the surface properties of the ink supply channel 6 are generally improved, without affecting the thermal release tape which secures the wafer 5 to the handle wafer 52. In particular, by avoiding conventional chemical wet cleaning processes and/or high-temperature ashing, delamination is avoided.
  • Referring to FIG. 7, the wafer 5 shown in FIG. 6 is subjected to argon ion milling in a plasma etching reactor. Optimal operating parameters of the plasma etching reactor may be readily determined by the person skilled in the art. During argon ion milling, the exposed circumferential rim 13 is smoothed down, which improves the robustness and surface profile of the ink supply channel 6.
  • The extent to which the circumferential rim 13 is smoothed, rounded and/or tapered will depend on the pressure, bias power and/or the milling time in the plasma etching reactor. The rim 13 may be either rounded down (as shown in FIG. 7) or fully tapered by argon ion milling. In either case, the removal of this spiked projection generally improves ink flow through the channel 6 and minimizes the likelihood of slivers breaking off and blocking the nozzle downstream.
  • Finally, and referring to FIG. 8, the wafer shown in FIG. 7 is ashed, which completely strips away the photoresist plug 10 and provides fluid connection between the inlet 8 and the ink supply channel 6.
    • EXAMPLE
  • A silicon wafer having a thickness of 200 □m was prepared as follows. Using a standard anisotropic DRIE process a trench, having a diameter of 14 □m and a depth of 28 □m, was etched into a frontside of the wafer. The trench was filled with photoresist to form a front plug. With the frontside of the wafer attached to a glass handle wafer, the backside is then etched to within 5 □m of the back surface of the front plug. Again, a standard anisotropic DRIE process is used for backside etching. The back-etched main trench had a depth of about 170 □m and a diameter of about 21 □m. FIG. 9 is an SEM micrograph of the silicon wafer after back-etching to within 5 □m of the front plug.
  • Back-etching was continued to the back surface of the front plug and about 5 □m past the front plug, under anisotropic etching conditions. FIG. 10 is an SEM micrograph of part of the trench after back-etching past the front plug. As shown in FIG. 10, a spiked circumferential rim extends around the front plug, where the back-etch did not etch completely flush against the front plug.
  • The silicon wafer, as prepared above, was then etched in accordance with the method of the present invention.
  • A standard inductively coupled plasma DRIE reactor (“HRM Pro” tool, supplied by Surface Technology Systems) was configured as follows:
    ICP top power: 2500 W
    Bias power 50 W
    Plasma gas: O2
    Chamber temperature: 120° C.
    Cooling: Backside helium cooling, 9.5 Torr, 10° C.
    Chamber pressure: 80 mTorr
    O2 flow rate: 80 sccm
  • The wafer was back-etched under these conditions for 60 minutes. The etch removed a portion having a depth of 7 □m from the back side of the front plug. During etching, a polymer layer deposited on the sidewalls of the main trench was also removed. FIGS. 11 and 12 are SEM micrographs of part of the silicon wafer, showing in detail the 7 □m portion of front plug removed by the oxygen plasma etch. FIG. 12 also shows a spiked circumferential projection (formerly a rim around the front plug), having a thickness of 1.7 □m, extending towards the back side of the wafer.
  • Following the oxygen plasma etch, the plasma reactor was reconfigured as follows:
    ICP top power: 2500 W
    Bias power 300 W
    Plasma gas: Ar
    Chamber temperature: 120° C.
    Cooling: Backside helium cooling, 9.5 Torr, 10° C.
    Chamber pressure: 10 mTorr
    O2 flow rate: 100 sccm
  • The wafer was back-etched (“ion milled”) under these conditions for 15-20 minutes. FIG. 13 is an SEM micrograph of the resultant trench, which shows the spiked circumferential projection rounded down to a smooth surface. The absence of spiked projections at the junctions of the front-etched and back-etched trenches significantly improves the surface profile of the resultant channel, once the photoresist has been stripped away.
  • It will, of course, be appreciated that the present invention has been described purely by way of example and that modifications of detail may be made within the scope of the invention, which is defined by the accompanying claims.

Claims (20)

1. A method of removing a polymeric coating from sidewalls of an etched trench defined in a silicon wafer, said method comprising etching said wafer in a biased plasma etching chamber using an O2 plasma, wherein a chamber temperature is in the range of 90 to 180° C.
2. The method of claim 1, wherein said etching chamber is an inductively coupled plasma (ICP) etching chamber.
3. The method of claim 2, wherein an ICP power is in the range of 2000 to 3000 W.
4. The method of claim 1, wherein said wafer is attached to a platen, and a biasing platen power is in the range of 10 to 100 W.
5. The method of claim 1, wherein said chamber temperature is in the range of 120 to 150° C.
6. The method of claim 1, wherein a chamber pressure is in the range of 30 to 120 mTorr.
7. The method of claim 1, wherein a chamber pressure is in the range of 60 to 100 mTorr.
8. The method of claim 1, where said platen has a temperature in the range of 5 to 20° C.
9. The method of claim 8, wherein said platen is cooled using backside helium cooling.
10. The method of claim 1, wherein an oxygen flow rate to said chamber is in the range of 20 to 200 sccm.
11. The method of claim 1, wherein an etching time is in the range of 40 to 80 minutes.
12. The method of claim 1, wherein said polymeric coating is a hydrophobic fluoropolymer.
13. The method of claim 1, wherein said trench is an ink supply channel for an inkjet printhead.
14. The method of claim 13, wherein said ink supply channel has a width in the range of 20 to 120 microns
15. The method of claim 13, wherein said ink supply channel has a depth of at least 100 microns.
16. The method of claim 1, wherein a frontside of said silicon wafer is attached to a handle wafer using adhesive tape, said etched trench being defined in a backside of said wafer.
17. The method of claim 16, wherein said adhesive tape is thermal release tape.
18. The method of claim 16, wherein said adhesive tape is unaffected by said oxygen plasma etching.
19. The method of claim 16, wherein said oxygen plasma etching does not cause delamination of said handle wafer from said silicon wafer.
20. A method of etching a trench in a silicon wafer, said method comprising the steps of:
(a) attaching a frontside of said silicon wafer to a handle wafer;
(b) etching a backside of said wafer using an anisotropic DRIE process to form a trench, said DRIE process including alternating etching and passivation steps, said passivation steps depositing a polymeric coating on sidewalls of said trench;
(c) removing said polymeric coating by etching said wafer in a biased plasma etching chamber using an O2 plasma,
wherein said chamber temperature is in the range of 90 to 180° C.
US11/242,917 2004-10-08 2005-10-05 Method of removing a polymer coating from an etched trench Abandoned US20060079095A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AU2004905800 2004-10-08
AU2004905800A AU2004905800A0 (en) 2004-10-08 Method and apparatus (MEMS26)

Publications (1)

Publication Number Publication Date
US20060079095A1 true US20060079095A1 (en) 2006-04-13

Family

ID=36142894

Family Applications (4)

Application Number Title Priority Date Filing Date
US11/242,916 Expired - Fee Related US7588693B2 (en) 2004-10-08 2005-10-05 Method of modifying an etched trench
US11/242,917 Abandoned US20060079095A1 (en) 2004-10-08 2005-10-05 Method of removing a polymer coating from an etched trench
US12/542,659 Expired - Fee Related US7837887B2 (en) 2004-10-08 2009-08-17 Method of forming an ink supply channel
US12/905,078 Abandoned US20110024389A1 (en) 2004-10-08 2010-10-15 Method of etching backside ink supply channels for an inkjet printhead

Family Applications Before (1)

Application Number Title Priority Date Filing Date
US11/242,916 Expired - Fee Related US7588693B2 (en) 2004-10-08 2005-10-05 Method of modifying an etched trench

Family Applications After (2)

Application Number Title Priority Date Filing Date
US12/542,659 Expired - Fee Related US7837887B2 (en) 2004-10-08 2009-08-17 Method of forming an ink supply channel
US12/905,078 Abandoned US20110024389A1 (en) 2004-10-08 2010-10-15 Method of etching backside ink supply channels for an inkjet printhead

Country Status (6)

Country Link
US (4) US7588693B2 (en)
EP (1) EP1800334A4 (en)
JP (1) JP4638499B2 (en)
KR (1) KR100857629B1 (en)
CN (1) CN100565815C (en)
WO (1) WO2006037151A2 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090203207A1 (en) * 2008-02-12 2009-08-13 Elpida Memory, Inc. Method for manufacturing semiconductor device
US20110024389A1 (en) * 2004-10-08 2011-02-03 Silverbrook Research Pty Ltd Method of etching backside ink supply channels for an inkjet printhead
US20110028072A1 (en) * 2006-06-13 2011-02-03 Advanced Cardiovascular Systems, Inc. Surface Treatment of a Polymeric Stent
US20110076853A1 (en) * 2009-09-28 2011-03-31 Magic Technologies, Inc. Novel process method for post plasma etch treatment
US9061091B2 (en) 2007-12-10 2015-06-23 Abbott Cardiovascular Systems Inc. Methods to improve adhesion of polymer coatings over stents
CN111834285A (en) * 2020-07-20 2020-10-27 武汉新芯集成电路制造有限公司 Semiconductor device and method for manufacturing the same
US11666918B2 (en) 2020-03-06 2023-06-06 Funai Electric Co., Ltd. Microfluidic chip, head, and dispensing device for dispensing fluids containing an acidic component
DE102013223490B4 (en) 2013-11-18 2023-07-06 Robert Bosch Gmbh Process for producing a structured surface

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200806567A (en) * 2006-07-26 2008-02-01 Touch Micro System Tech Method of deep etching
CA2675856C (en) * 2007-03-12 2013-02-19 Silverbrook Research Pty Ltd Method of fabricating printhead having hydrophobic ink ejection face
US8043933B2 (en) * 2008-11-24 2011-10-25 Applied Materials, Inc. Integration sequences with top surface profile modification
US8293647B2 (en) * 2008-11-24 2012-10-23 Applied Materials, Inc. Bottom up plating by organic surface passivation and differential plating retardation
CN102456545A (en) * 2010-10-21 2012-05-16 北京北方微电子基地设备工艺研究中心有限责任公司 Patterned substrate etching method
US9259932B2 (en) * 2011-05-27 2016-02-16 Hewlett-Packard Development Company, L.P. Assembly to selectively etch at inkjet printhead
US9000556B2 (en) 2011-10-07 2015-04-07 International Business Machines Corporation Lateral etch stop for NEMS release etch for high density NEMS/CMOS monolithic integration
US20130280831A1 (en) * 2012-04-24 2013-10-24 Kathleen M. Vaeth Permanently bonded fluid channel nozzle plate fabrication
CN103456623A (en) * 2012-05-29 2013-12-18 上海宏力半导体制造有限公司 Etching control method for reducing deposition of polymers at edges of wafers
JP6333055B2 (en) * 2014-05-13 2018-05-30 キヤノン株式会社 Substrate processing method and liquid discharge head substrate manufacturing method
JP6456049B2 (en) 2014-06-16 2019-01-23 キヤノン株式会社 Formation method of through-hole substrate
US9586400B2 (en) 2014-12-09 2017-03-07 Canon Kabushiki Kaisha Liquid discharge head, liquid discharge apparatus, and method of manufacturing liquid discharge head
JP6562789B2 (en) 2015-09-10 2019-08-21 キヤノン株式会社 Removal method of object to be removed
CN107271232A (en) * 2017-05-08 2017-10-20 上海大学 The preparation method of low temperature-sintered nano silver paste thermal conductivity test sample
TW202114873A (en) * 2019-06-03 2021-04-16 愛爾蘭商滿捷特科技公司 Process for handling mems wafers
CN115637432B (en) * 2022-09-30 2023-08-22 东莞赛诺高德蚀刻科技有限公司 Manufacturing method of workpiece with holes and high-aspect-ratio grooves and metal workpiece

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010002135A1 (en) * 1998-03-02 2001-05-31 Milligan Donald J. Micromachined ink feed channels for an inkjet printhead
US20010006245A1 (en) * 1999-12-28 2001-07-05 Takashi Yunogami Manufacturing method of semiconductor integrated circuit device
US6277756B1 (en) * 1999-02-12 2001-08-21 Denso Corporation Method for manufacturing semiconductor device
US20020088478A1 (en) * 1997-02-14 2002-07-11 Degendt Stefan Method for removing organic contaminants from a semiconductor surface
US6492276B1 (en) * 1998-05-29 2002-12-10 Taiwan Semiconductor Manufacturing Company Hard masking method for forming residue free oxygen containing plasma etched layer
US6569777B1 (en) * 2002-10-02 2003-05-27 Taiwan Semiconductor Manufacturing Co., Ltd Plasma etching method to form dual damascene with improved via profile
US6583065B1 (en) * 1999-08-03 2003-06-24 Applied Materials Inc. Sidewall polymer forming gas additives for etching processes
US20030116820A1 (en) * 1999-09-01 2003-06-26 Daubenspeck Timothy H. Post-fuse blow corrosion prevention structure for copper fuses
US20030211752A1 (en) * 2002-05-01 2003-11-13 Michael Rattner Method of smoothing a trench sidewall after a deep trench silicon etch process

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3057461B2 (en) * 1992-04-07 2000-06-26 日本プレシジョン・サーキッツ株式会社 Ashing equipment
US5453157A (en) * 1994-05-16 1995-09-26 Texas Instruments Incorporated Low temperature anisotropic ashing of resist for semiconductor fabrication
US6686292B1 (en) * 1998-12-28 2004-02-03 Taiwan Semiconductor Manufacturing Company Plasma etch method for forming uniform linewidth residue free patterned composite silicon containing dielectric layer/silicon stack layer
AUPP922399A0 (en) * 1999-03-16 1999-04-15 Silverbrook Research Pty Ltd A method and apparatus (ij46p2)
DE19945140B4 (en) * 1999-09-21 2006-02-02 Infineon Technologies Ag Method for producing a mask layer with openings of reduced width
JP2001212965A (en) * 2000-02-07 2001-08-07 Casio Comput Co Ltd Apparatus and method for machining hole
US6457477B1 (en) * 2000-07-24 2002-10-01 Taiwan Semiconductor Manufacturing Company Method of cleaning a copper/porous low-k dual damascene etch
US6677242B1 (en) * 2000-08-12 2004-01-13 Applied Materials Inc. Integrated shallow trench isolation approach
KR100743770B1 (en) * 2000-12-05 2007-07-30 주식회사 하이닉스반도체 Method of forming a copper metal wiring in a semiconductor device
JP3959710B2 (en) * 2002-02-01 2007-08-15 ソニー株式会社 Method for manufacturing solid-state imaging device
JP2003303808A (en) * 2002-04-08 2003-10-24 Nec Electronics Corp Method for manufacturing semiconductor device
KR100408847B1 (en) * 2002-04-09 2003-12-06 아남반도체 주식회사 Method for removing residence in process of semiconductor manufacture
US6764810B2 (en) * 2002-04-25 2004-07-20 Taiwan Semiconductor Manufacturing Co., Ltd Method for dual-damascene formation using a via plug
KR20040005380A (en) * 2002-07-10 2004-01-16 주식회사 하이닉스반도체 Method for forming contact hole in semiconductor device
US7074723B2 (en) * 2002-08-02 2006-07-11 Applied Materials, Inc. Method of plasma etching a deeply recessed feature in a substrate using a plasma source gas modulated etchant system
US7199712B2 (en) * 2004-06-17 2007-04-03 Tafas Triantafyllos P System for automatically locating and manipulating positions on an object
US20050280674A1 (en) * 2004-06-17 2005-12-22 Mcreynolds Darrell L Process for modifying the surface profile of an ink supply channel in a printhead
WO2006037151A2 (en) * 2004-10-08 2006-04-13 Silverbrook Research Pty Ltd Method of removing polymer coating from an etched trench
US20060199370A1 (en) * 2005-03-01 2006-09-07 Taiwan Semiconductor Manufacturing Co., Ltd. Method of in-situ ash strip to eliminate memory effect and reduce wafer damage

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020088478A1 (en) * 1997-02-14 2002-07-11 Degendt Stefan Method for removing organic contaminants from a semiconductor surface
US20010002135A1 (en) * 1998-03-02 2001-05-31 Milligan Donald J. Micromachined ink feed channels for an inkjet printhead
US6492276B1 (en) * 1998-05-29 2002-12-10 Taiwan Semiconductor Manufacturing Company Hard masking method for forming residue free oxygen containing plasma etched layer
US6277756B1 (en) * 1999-02-12 2001-08-21 Denso Corporation Method for manufacturing semiconductor device
US6583065B1 (en) * 1999-08-03 2003-06-24 Applied Materials Inc. Sidewall polymer forming gas additives for etching processes
US20030116820A1 (en) * 1999-09-01 2003-06-26 Daubenspeck Timothy H. Post-fuse blow corrosion prevention structure for copper fuses
US20010006245A1 (en) * 1999-12-28 2001-07-05 Takashi Yunogami Manufacturing method of semiconductor integrated circuit device
US20030211752A1 (en) * 2002-05-01 2003-11-13 Michael Rattner Method of smoothing a trench sidewall after a deep trench silicon etch process
US6569777B1 (en) * 2002-10-02 2003-05-27 Taiwan Semiconductor Manufacturing Co., Ltd Plasma etching method to form dual damascene with improved via profile

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110024389A1 (en) * 2004-10-08 2011-02-03 Silverbrook Research Pty Ltd Method of etching backside ink supply channels for an inkjet printhead
US20110028072A1 (en) * 2006-06-13 2011-02-03 Advanced Cardiovascular Systems, Inc. Surface Treatment of a Polymeric Stent
US8795030B2 (en) * 2006-06-13 2014-08-05 Advanced Cardiovascular Systems, Inc. Surface treatment of a polymeric stent
US20140252683A1 (en) * 2006-06-13 2014-09-11 Abbott Cardiovascular Systems Inc. Surface treatment of a polymeric stent
US8998679B2 (en) * 2006-06-13 2015-04-07 Abbott Cardiovascular Systems Inc. Surface treatment of a polymeric stent
US9061091B2 (en) 2007-12-10 2015-06-23 Abbott Cardiovascular Systems Inc. Methods to improve adhesion of polymer coatings over stents
US20090203207A1 (en) * 2008-02-12 2009-08-13 Elpida Memory, Inc. Method for manufacturing semiconductor device
US7829470B2 (en) * 2008-02-12 2010-11-09 Elpida Memory, Inc. Method for manufacturing semiconductor device
US20110076853A1 (en) * 2009-09-28 2011-03-31 Magic Technologies, Inc. Novel process method for post plasma etch treatment
DE102013223490B4 (en) 2013-11-18 2023-07-06 Robert Bosch Gmbh Process for producing a structured surface
US11666918B2 (en) 2020-03-06 2023-06-06 Funai Electric Co., Ltd. Microfluidic chip, head, and dispensing device for dispensing fluids containing an acidic component
CN111834285A (en) * 2020-07-20 2020-10-27 武汉新芯集成电路制造有限公司 Semiconductor device and method for manufacturing the same

Also Published As

Publication number Publication date
US20060076312A1 (en) 2006-04-13
WO2006037151A3 (en) 2006-10-19
KR100857629B1 (en) 2008-09-08
EP1800334A4 (en) 2012-07-04
JP4638499B2 (en) 2011-02-23
US20090301999A1 (en) 2009-12-10
US20110024389A1 (en) 2011-02-03
CN100565815C (en) 2009-12-02
US7588693B2 (en) 2009-09-15
WO2006037151A2 (en) 2006-04-13
US7837887B2 (en) 2010-11-23
KR20070088584A (en) 2007-08-29
CN101036218A (en) 2007-09-12
JP2008516429A (en) 2008-05-15
EP1800334A2 (en) 2007-06-27

Similar Documents

Publication Publication Date Title
US7588693B2 (en) Method of modifying an etched trench
US6555480B2 (en) Substrate with fluidic channel and method of manufacturing
McAuley et al. Silicon micromachining using a high-density plasma source
JP4533221B2 (en) Method for forming tantalum layer and apparatus using tantalum layer
AU2005254115B2 (en) Process for modifying the surface profile of an ink supply channel in a printhead
JP2017174985A (en) Processing method for silicon substrate
US7481943B2 (en) Method suitable for etching hydrophillic trenches in a substrate
JP6128972B2 (en) Manufacturing method of substrate for liquid discharge head
KR100925054B1 (en) Method of etching a wafer
JP2007160625A (en) Etching method for silicon substrate, inkjet recording head and its manufacturing method
WO2011022749A1 (en) Method of removing photoresist and etch-residues from vias
US8877605B1 (en) Silicon substrate fabrication
US20150024605A1 (en) Substrate processing method
JP2007136875A (en) Substrate for inkjet recording head
JP2007019174A (en) Plasma etching device
Bhardwaj et al. Advances in deep oxide etch processing for mems–mask selection
US7767103B2 (en) Micro-fluid ejection assemblies
CN115458392A (en) Method for etching polyimide sacrificial layer and application
US20110049091A1 (en) Method of removing photoresist and etch-residues from vias
LEA et al. ADVANCES IN DEEP OXIDE ETCH PROCESSING FOR MEMS-MASK SELECTION JK BHARDWAJ, C. WELCH, A. BARKER, R. GUNN
BHARDWAJ et al. ADVANCES IN DEEP OXIDE ETCH PROCESSING FOR MEMS–

Legal Events

Date Code Title Description
AS Assignment

Owner name: SILVERBROOK RESEARCH PTY LTD, AUSTRALIA

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:MCREYNOLDS, DARRELL LARUE;SILVERBROOK, KIA;REEL/FRAME:017071/0196

Effective date: 20050919

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION