|Publication number||US20080285044 A1|
|Application number||US 12/009,889|
|Publication date||Nov 20, 2008|
|Filing date||Jan 23, 2008|
|Priority date||Jan 23, 2007|
|Also published as||US7710574|
|Publication number||009889, 12009889, US 2008/0285044 A1, US 2008/285044 A1, US 20080285044 A1, US 20080285044A1, US 2008285044 A1, US 2008285044A1, US-A1-20080285044, US-A1-2008285044, US2008/0285044A1, US2008/285044A1, US20080285044 A1, US20080285044A1, US2008285044 A1, US2008285044A1|
|Inventors||Jeongsik Sin, Woo Ho Lee|
|Original Assignee||Board Of Regents, The University Of Texas System|
|Export Citation||BiBTeX, EndNote, RefMan|
|Referenced by (6), Classifications (15), Legal Events (2)|
|External Links: USPTO, USPTO Assignment, Espacenet|
This application claims the benefit for priority from U.S. Provisional Application No. 60/881,939 filed Jan. 23, 2007.
The invention described relates to the field of electronics and optics, and more specifically to miniaturized electronic devices and fabrication of such a device, such as micro-opto-electro-mechanical systems (MOEMS).
Most current interferometers using a Fourier transform (FT) principle are heavy and bulky. While various micro-fabrication approaches have been tried in order to create smaller-sized devices, when preparing such a device in miniature, the characteristics of a scanning mirror are challenging (e.g., in terms of stroke, position sensing, and mirror assembly) and have not been suitably met because micro-machined actuators do not generate sufficient stroke and precision position control has not matured sufficiently.
The invention described solves many current problems associated with the miniaturization of optic devices that are currently heavy and bulky.
Generally, and in one form, is provided a device for interferometric use based on FT assembled in miniature using a micro-machined optical bench that typically comprises an actuator, a lever mechanism, and one or more mirrors. Optical components for the device are assembled from micro-parts, including one or more light sources, detectors, mirrors, beam splitters, ball lens, and combinations thereof.
Those skilled in the art will further appreciate the above-noted features and advantages of the invention together with other important aspects thereof upon reading the detailed description that follows in conjunction with the drawings.
For more complete understanding of the features and advantages of the present invention, reference is now made to the detailed description of the invention along with the accompanying figures, wherein:
Although making and using various embodiments of the present invention are discussed in detail below, it should be appreciated that the present invention provides many inventive concepts that may be embodied in a wide variety of contexts. The specific aspects and embodiments discussed herein are merely illustrative of ways to make and use the invention, and do not limit the scope of the invention.
In the description which follows like parts may be marked throughout the specification and drawing with the same reference numerals, respectively. The drawing figures are not necessarily to scale and certain features may be shown exaggerated in scale or in somewhat generalized or schematic form in the interest of clarity and conciseness.
Optical components such as mirrors and a beam splitter that must be machined and assembled into the smaller device are typically problematic due to misalignments from assembly tolerances that then degrade the quality of spectrum. Previously, when preparing a smaller-sized optical device, characteristics of components, such as a scanning mirror have proven very challenging in terms of stroke, position sensing, and mirror assembly because micro-machined actuators do not generate sufficient stroke, in general. Moreover precision position control has not matured due primarily to a lack of sensory information. Such devices, such as interferometers and spectrometers, in miniature have thus proven difficult; those available are bulky and neither economical nor often efficient.
Described herein is a device for interferometric use in miniature that is assembled without such problems as described above yet still providing high spectral resolution. As described herein such improvements and fabrication of such devices that provide miniaturized microsystems with high spectral resolution for identification of materials and chemicals. The miniaturization of the described optical devices allow for new application areas with real-time and on-site measurements.
The principle of a device described herein is Fourier transform and is based on a Michelson interferometer, in which a scanning mirror mechanism is involved in creating an interferogram, and the recorded interferogram is converted to a spectrum by numerical Fourier transform with respect to an optical path difference (OPD). Spectral resolution is determined by a maximum OPD and its accuracy is affected by positioning accuracy of a mirror that produces OPD. For this reason, a high precision and a long stroke are two independent factors that provide improved performance of a scanning mirror in an FT spectrometer described herein.
In general, OPD is a difference between two traveling light paths reflected from fixed and moving mirrors. Each wavelength in an interferometer produces its own characteristic interference pattern as OPD changes. Recording of a detected signal versus an optical path difference is the interferogram; Fourier transform is used to convert the interferogram into a spectrum.
A mathematical interpretation of the principle is described as the superposition of multiple monochromatic, coherent waves of amplitude
where, I(x) is a measured interferogram, B(σ) is spectral radiance, σ is wave number, x is optical path difference. A theoretical spectral resolution is defined as δσ=1/(2L) or resolving power R=2L/λ. A longer recorded distance (L) achieves a better resolving power. A discrete sampling also imposes sampling condition. To avoid overlapping, a Nyquist sampling condition
may be applied.
As shown in
In one or more embodiments, device for interferometric use in miniature is provided herein that adopts a concept of an FT interferometry. A representative schematic is shown in
An optical bench is provided on the substrate using a DRIE process or other suitable micromachining method to make such a structure as further described. The optical bench typically includes a moving stage 120 driven by one or more actuators 130, such as a thermal or electrothermal actuator or electrostatic actuators, which are used for the scanning motion of one or more mirrors 140. The optical bench also has registration and assembly socket structures (e.g., flexure structures) that facilitate addition and assembly of optical components, such as one or more of the following: light source 150, detector 160, mirrors 140 and 145, and one or more beam splitters 170. Hence, such optical components are typically assembled directly on the miniaturized optical bench.
A microassembly technique is used to provide a device in miniature that, in one or more forms, behaves similar to that of a Fourier transform spectrometer. The microassembly method provides for a self-alignment of a mirror in a socket. Should a slope be formed after DRIE or other such micromachining process, a mirror may slightly tilt after assembly. The exemplified assembly provides a device having micromirrors, a ball lens, and beam splitter selectively positioned on a micro-machined optical bench. The optical bench is further provided with a scanning stage and a number of sockets.
Thus, an optical bench includes several components, such as a moving stage, mechanical assembly socket structures, at least one beam splitter, and one or more assembled mirrors. The moving stage includes an assembly socket where a mirror is picked and placed for positioning. Sockets serve as mating locations for a part; assembly may be reinforced with gluing or soldering and the like. Multiple registration and assembly socket structures of the optical bench further facilitate assembly and alignment of optical components.
When the optical bench is further provided with an actuator (generally having one or more stroke amplification mechanisms), the combination provides amplified scanning motion of a scanning mirror. In one or more embodiments, an actuator is in contact with or embedded in the optical bench and comprises a couple of V-beam shaped structures. The V-beam shape structures respond to heat, such that thermal expansion of V-shaped ribs pull (or push) an embedded actuation bar depending on its configuration. The actuation mechanism may further comprise a comb structure for capacitance measurement. During scanning motion of the stage, a capacitance change from the comb structure may be measured and used for position sensing.
As shown in
Example of a micromachined mirrors is shown in
In several embodiments, one or more mirrors are fabricated by a micromachining method, such as DRIE, and a metal deposition process.
A suitable dimension for an optical bench is about 1 cm2. A beam length of a V-beam structure of an embedded thermal actuator is typically about 1 mm. A suitable mirror may have a reflection area of about 1×1 mm2 and one or more flexure structures for pick and place assembly. Other reflective areas (e.g., arrays) are possible and may be desired as needed. A flexure structure is provided for a large deflection so that a microgripper can pick up the mirror by inserting the gripper tip into the flexure structure, followed by snap-fitting it into a mechanical socket of the optical bench. In an optical bench having a dimension of about 1 cm2, flexure structures may be at or about 500-1000 μm long. Typically several flexure structures are positioned at one or more locations, such as those embodied in
A light source may be optionally provided with a device described herein. A detector is used to measure light power with respect to input voltage. The relationship between light power changes versus displacement of a scanning mirror represents an interferogram.
Assembly of a device in miniature implements a miniaturized snap connector mechanism to reduce uncertainties and lack of sensory feedback information. The snap connector mechanism joins one or more parts to the optical bench, such as mirrors. An example of an assembly method includes using a force-fit assembly for high precision self-alignment.
A micro-machined passive gripper as exemplified in
A microgripper positions a mirror onto a connector socket of a substrate. When the mirror is inserted into the socket, the mechanical connector and socket deform to provide a snap-fit assembly. Upon completion of assembly, the gripper is released from the flexure structure.
Beamsplitters may be in a shape of a cube or plate or other similar shape. When desired and or when appropriate (e.g., infrared applications), a silicon micro-machined beamsplitter may be provided because silicon itself has good reflection and transmission characteristic, such as in the infrared wavelength range. In one embodiment, a beamsplitter in the shape of a cube has dimensions at or about 1.5×1.5×1.5 mm3. In another embodiment, a beamsplitter in the shape of a cube has dimensions at or about 3×3×3 mm3
Micro ball lenses are used for collimation of an output signal of a laser diode. The ball lens also collimates incoming light when a device as described herein is integrated with a diverging light source, such as a fiber light source. A ball lens 310 having a micro fixture 320 is depicted in schematic in
Devices described include a scanning mirror mechanism using an actuator. In one embodiment, the displacement of the actuator is a function of the conductivity of the material (in many examples, silicon) and its mechanical stiffness. The inventors have further found that conductivity of an etched side wall and/or the top surface of the substrate when silicon, for example, improves with doping after DRIE; hence, doping significantly increased conductivity. A number of features were found that may be added and/or modified as desired (or when appropriate), such as a longer stroke of a scanning stage, one or more embedded positional sensors, and/or precision alignment of mirrors.
Accordingly, an optical bench is provided as a substrate for embedding scanning mechanisms and/or sockets and for adding and assembling one or more optical components. Connector or assembly sockets are specifically placed in position and identify locations for separate optical component by a pick and place assembly process. The optical bench is generally micro-machined.
Optical components are generally assembled from micro-parts and include one or more light sources, detectors, mirrors, beam splitters, ball lens, and combinations thereof. Preferably, optical components are provided to the optical bench by snap fitting into connector sockets. To simplify snap fitting, preferably an optical component includes a flexure structure for snap fitting into a connector socket.
An optical bench will also include at least one actuator and lever mechanism. The actuator typically comprises one or more v-beam shaped structures, each v-beam shaped structure in contact with at least one lever mechanism and at least one actuation bar. The actuator may further comprise a comb structure for measuring capacitance and/or for position sensing. The actuator increases driving force and eliminates rotational motion of the moving stage. The actuator, such as an electrothermal actuator, is used to drive scanning motion of the miniature device. A lever mechanism is used to amplify scanning stroke. As such, the moving stage is driven by an actuator.
The moving stage is typically combined with one or more optical components to create an interferogram upon transmission of light from a light source. The recorded interferogram is converted to a spectrum by numerical Fourier transform with respect to an optical path difference.
Fabrication of devices described herein combines silicon micromachining and microassembly techniques. One or more mirrors are micro-machined and assembled on the optical bench. Mirrors may be provided (e.g., manipulated and assembled) by a microgripper. Preferably, the optical bench includes silicon structures having a mechanical connecting mechanism.
Fabrication of devices in miniature as described herein preferably includes providing at least one deep reactive ion etching structure on at least one surface of a silicon substrate to form an optical bench, in which the optical bench preferably includes a moving stage, at least one actuator, one or more connector sockets and one or more optical components. The actuator is fabricated by deep reactive ion etching and preferably includes at least one v-beam shaped structure, actuator bar and lever mechanism. An actuator may include two working in symmetry.
In other embodiments, a device as described herein may be fabricated for detection and/or analysis of gas or a gas mixture using a mirror array. As depicted in
A interferometric device as described herein was fabricated using micro-parts, snap connectors and pick and place assembly. Assembly and packaging began with forming a DRIE processed microoptical bench on a 1 cm2 silicon die bonded to a ceramic package. Either epoxy or solder could be used as the bonding material. Electrical pads on the microoptical bench were then interconnected by wirebonding to the electrical lead array of the ceramic package. Mirrors and lens fixtures were assembled using snap-fit flexure structures, and mating joints were reinforced by applying a small amount of epoxy. The beamsplitter was in the shape of a cube having dimensions of about 1.5×1.5×1.5 mm3. Mirrors included a scanning mirror and fixed mirror positioned on two sides of the beamsplitter cube. A ball lens was pick and place assembled into a lens fixture by using a snap-fit flexure structure and positioned on a third side of the beamsplitter cube. Joints of the ball lens were reinforced by applying small amount of epoxy. A laser diode and detector chips were also assembled on the microoptical bench using chip fixtures. One detector chip was positioned on the fourth side of the beamsplitter cube.
A second detector chip was aligned with the ball lens at an elevated height off the substrate allowing for 3-dimensional structure. The detector chip was assembled on a chip fixture by dispensing small amount of epoxy. The chip fixture had patterned electrical paths that allowed wirebonding from the detector chip to the fixture. Each detector assembly was picked and placed on the microoptical bench. Conductive epoxy or soldering was used for reinforcement and electrically interconnected the joint of the fixture with the microoptical bench. As described, such an assembly process allowed the detector chip to be properly alignment with the lens at an elevated height above the surface of the substrate. Examples of detector chip assemblies are shown in
Characterization of a fabricated optical device was performed using another assembled miniature spectrometer with mirrors and beamsplitters. A microassembly technique as described was used to fabricate a representative miniature Michelson interferometer based on a Fourier transform spectrometer. Micromirrors, a ball lens, and beam splitter were assembled onto a silicon micromachined optical bench that had a scanning stage, sockets, and fixtures. The dimension of the die was 1×1 cm2. The beamsplitter was a commercially available one with a dimension of 3×3×3 mm3. The tilt angles of the two assembled mirrors were measured and ranged from −1.6° and 2.9° toward the beamsplitter. The dimension of the optical bench was 1 cm2; its embedded thermal actuator had a couple of V-beam structures whose beam length was 1 mm. The mirrors were DRIE micromachined structures with a reflection area of 1×1 mm2 and 750 μm long flexure structures for pick and place assembly.
Static and dynamic responses of the scanning mirror mechanism were measured using a high speed machine vision system.
With the microspectrometer described, a He—Ne laser was used as a light source to create an interferogram. A lens was used to make the collimated beam diverge, and a stripe shaped fringe pattern as evidenced in
Sinusoidal voltage input was applied to the scanning mechanism described at a frequency of 0.1 Hz and an amplitude of 22V. An interferogram was measured using a detector focused at one of the patterns.
The Fourier transform of the interferogram is shown in
While specific alternatives to steps of the invention have been described herein, additional alternatives not specifically disclosed but known in the art are intended to fall within the scope of the invention. Thus, it is understood that other applications of the present invention will be apparent to those skilled in the art upon reading the described embodiment and after consideration of the appended claims and drawing.
|Citing Patent||Filing date||Publication date||Applicant||Title|
|US8320035 *||Jul 16, 2009||Nov 27, 2012||Fujitsu Limited||Micro-movable device|
|US8933406 *||Dec 21, 2012||Jan 13, 2015||Agilent Technologies, Inc.||Interferometer having multiple scan carriages|
|US9007784 *||Feb 17, 2009||Apr 14, 2015||Bayer Intellectual Property Gmbh||Device for self-aligning and affixing of a microchannel plate in a micro-system and method the same|
|US20100067083 *||Mar 18, 2010||Fujitsu Limited||Micro-movable device|
|US20110002109 *||Feb 17, 2009||Jan 6, 2011||Bayer Technology Services Gmbh||Micro fixture|
|US20140175288 *||Dec 21, 2012||Jun 26, 2014||Agilent Technologies, Inc.||Interferometer having multiple scan carriages|
|U.S. Classification||356/452, 359/198.1, 29/525|
|International Classification||G01M11/04, B23P19/02, G01J3/45, G02B26/10|
|Cooperative Classification||Y10T29/49945, G01J3/02, G01J3/0256, G01J3/4532, G02B26/0833|
|European Classification||G01J3/02C, G01J3/02, G01J3/453C|
|Mar 18, 2008||AS||Assignment|
Owner name: BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM,T
Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:SIN, JEONGSIK;LEE, WOO HO;REEL/FRAME:020667/0369
Effective date: 20080311
|Oct 9, 2013||FPAY||Fee payment|
Year of fee payment: 4