US20110199667A1 - Method and apparatus for lighting a display device - Google Patents

Method and apparatus for lighting a display device Download PDF

Info

Publication number
US20110199667A1
US20110199667A1 US13/092,827 US201113092827A US2011199667A1 US 20110199667 A1 US20110199667 A1 US 20110199667A1 US 201113092827 A US201113092827 A US 201113092827A US 2011199667 A1 US2011199667 A1 US 2011199667A1
Authority
US
United States
Prior art keywords
display
light
display elements
waveguides
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US13/092,827
Inventor
Chun-Ming Wang
Ming-Hau Tung
Surya Prakash Ganti
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SnapTrack Inc
Original Assignee
Qualcomm MEMS Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualcomm MEMS Technologies Inc filed Critical Qualcomm MEMS Technologies Inc
Priority to US13/092,827 priority Critical patent/US20110199667A1/en
Publication of US20110199667A1 publication Critical patent/US20110199667A1/en
Assigned to SNAPTRACK, INC. reassignment SNAPTRACK, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: QUALCOMM MEMS TECHNOLOGIES, INC.
Abandoned legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity

Definitions

  • the present invention relates generally to display devices, and more particularly to interferometric modulator display devices.
  • Microelectromechanical systems include micromechanical elements, actuators, and electronics. Micromechanical elements may be created using deposition, etching, and/or other micromachining processes that etch away parts of substrates and/or deposited material layers or that add layers to form electrical and electromechanical devices.
  • MEMS device One type of MEMS device is called an interferometric modulator.
  • interferometric modulator or interferometric light modulator refers to a device that selectively absorbs and/or reflects light using the principles of optical interference.
  • an interferometric modulator may comprise a pair of conductive plates, one or both of which may be transparent and/or reflective in whole or part and capable of relative motion upon application of an appropriate electrical signal.
  • one plate may comprise a stationary layer deposited on a substrate and the other plate may comprise a metallic membrane separated from the stationary layer by a transparent medium (e.g., an air gap).
  • a transparent medium e.g., an air gap
  • the position of one plate in relation to the other plate can change the optical interference of light incident on the interferometric modulator.
  • Conventional interferometric modulator display devices typically implement front-lighting that provides light for viewing images, for example, in the dark.
  • the front-lighting is typically provided by a light strip that surrounds the perimeter of an interferometric modulator display. While such a front-lighting scheme does provide light for viewing images in the dark, there is generally an intrinsic (lighting) uniformity issue as the middle portion of the interferometric modulator display remains darker than the outer edges. As interferometric modulator displays increase in size, this non-uniform effect of light caused by front-lighting increases, which can lead to poor visibility of images in the dark.
  • this specification describes a microelectromechanical system (MEMS) including a transparent substrate, and a plurality of interferometric modulators.
  • the plurality of interferometric modulators include an optical stack coupled to the transparent substrate, a reflective layer over the optical stack, and one or more posts to support the reflective layer and to provide a path for light from a backlight for lighting the interferometric modulators.
  • the MEMS can further include a glass layer between the transparent substrate and the optical stack.
  • the glass layer can include a plurality of scatterers to disperse the light.
  • the glass layer can comprise first spin-on glass (SOG) including the plurality of scatterers.
  • the one or more posts can be composed of a transparent polymer or second spin-on glass (SOG). Each of the one or more posts can further be configured to direct the light to the glass layer.
  • the scatterers can be configured to disperse the light to the interferometric modulators.
  • Each of the one or more posts can further comprise a mirror.
  • the one or more posts can extend from the optical stack through the reflective layer.
  • the MEMS as a display device, can further include a display including the MEMS, and a processor that is in electrical communication with the display, the processor being configured to process image data, and a memory device in electrical communication with the processor.
  • the display system can further include a backlight coupled to the display for providing light to the interferometric modulators.
  • the display system can further include a first controller configured to send at least one signal to the display, and a second controller configured to send at least a portion of the image data to the first controller.
  • the display system can further include an image source module configured to send the image data to the processor.
  • the image source module can comprise at least one of a receiver, transceiver, and transmitter.
  • the display system can further include an input device configured to receive input data and to communicate the input data to the processor.
  • this specification describes a micromechanical system (MEMS) including a transparent substrate means, and a plurality of interferometric modulator means.
  • the plurality of interferometric modulator means includes an optical stack means coupled to the transparent substrate means, a reflective layer means over the optical stack means, and one or more post means to support the reflective layer means and to provide a path for light from a backlight means for lighting the interferometric modulator means.
  • this specification describes a method for providing light in a microelectromechanical system (MEMS).
  • the method includes providing a transparent substrate, and forming a plurality of interferometric modulators.
  • Forming a plurality of interferometric modulators includes coupling an optical stack to the transparent substrate, forming a reflective layer over the optical stack, and forming one or more posts to support the reflective layer and to provide a path for light from a backlight for lighting the interferometric modulators.
  • An interferometric modulator display that has an improved lighting scheme for an interferometric display device to having a higher lighting uniformity relative to conventional interferometric modulator displays devices that implement a front-lighting scheme.
  • uniform lighting is provided through posts (or rails) that are integrated within the interferometric display device.
  • Such a design may be more power-efficient relative to conventional techniques in illuminating a central area of an interferometric display.
  • the brightness of an interferometric display may be enhanced even with ambient light.
  • FIG. 1 is an isometric view depicting a portion of one embodiment of an interferometric modulator display in which a movable reflective layer of a first interferometric modulator is in a relaxed position and a movable reflective layer of a second interferometric modulator is in an actuated position.
  • FIG. 2 is a system block diagram illustrating one embodiment of an electronic device incorporating a 3 ⁇ 3 interferometric modulator display.
  • FIG. 3 is a diagram of movable mirror position versus applied voltage for one exemplary embodiment of an interferometric modulator of FIG. 1 .
  • FIG. 4 is an illustration of a set of row and column voltages that may be used to drive an interferometric modulator display.
  • FIGS. 5A and 5B illustrate one exemplary timing diagram for row and column signals that may be used to write a frame of display data to the 3 ⁇ 3 interferometric modulator display of FIG. 2 .
  • FIG. 6A is a cross section of an interferometric modulator of FIG. 1 .
  • FIGS. 6B-E are alternative embodiments of an interferometric modulator.
  • FIGS. 7A-7B illustrate cross-sectional views of an interferometric modulator display.
  • FIGS. 8A-8B illustrate a flow diagram illustrating a process for manufacturing an interferometric modulator display according to one embodiment.
  • FIGS. 9A-9N illustrate the process of manufacturing an interferometric modulator display according to the process of FIGS. 8A-8B .
  • FIGS. 10A and 10B are system block diagrams illustrating an embodiment of a visual display device comprising a plurality of interferometric modulators.
  • the embodiments may be implemented in or associated with a variety of electronic devices such as, but not limited to, mobile telephones, wireless devices, personal data assistants (PDAs), hand-held or portable computers, GPS receivers/navigators, cameras, MP3 players, camcorders, game consoles, wrist watches, clocks, calculators, television monitors, flat panel displays, computer monitors, auto displays (e.g., odometer display, etc.), cockpit controls and/or displays, display of camera views (e.g., display of a rear view camera in a vehicle), electronic photographs, electronic billboards or signs, projectors, architectural structures, packaging, and aesthetic structures (e.g., display of images on a piece of jewelry).
  • MEMS devices of similar structure to those described herein can also be used in non-display applications such as in electronic switching devices.
  • an interferometric modulator display typically implement front-lighting that provides light for viewing images, for example, in the dark. While such a front-lighting scheme does provide light for viewing images in the dark, there is generally an intrinsic lighting uniformity issue as the middle portion of the interferometric modulator display remains darker than the outer edges. As interferometric modulator displays increase in size, this non-uniform effect of light caused by front-lighting increases, which can lead to poor visibility of images in the dark. Accordingly, this specification describes an improved lighting scheme for an interferometric display device to reduce non-uniformity of light.
  • an interferometric modulator display is provided that includes a transparent substrate, and an optical stack is formed on the transparent substrate. A reflective layer is formed over the optical stack, and one or more posts to support the reflective layer are formed over the optical stack. The one or more posts provide a path for light from a backlight for lighting the interferometric modulator display.
  • FIG. 1 One interferometric modulator display embodiment comprising an interferometric MEMS display element is illustrated in FIG. 1 .
  • the pixels are in either a bright or dark state.
  • the display element In the bright (“on” or “open”) state, the display element reflects a large portion of incident visible light to a user.
  • the dark (“off” or “closed”) state When in the dark (“off” or “closed”) state, the display element reflects little incident visible light to the user.
  • the light reflectance properties of the “on” and “off” states may be reversed.
  • MEMS pixels can be configured to reflect predominantly at selected colors, allowing for a color display in addition to black and white.
  • FIG. 1 is an isometric view depicting two adjacent pixels in a series of pixels of a visual display, wherein each pixel comprises a MEMS interferometric modulator.
  • an interferometric modulator display comprises a row/column array of these interferometric modulators.
  • Each interferometric modulator includes a pair of reflective layers positioned at a variable and controllable distance from each other to form a resonant optical cavity with at least one variable dimension.
  • one of the reflective layers may be moved between two positions. In the first position, referred to herein as the relaxed position, the movable reflective layer is positioned at a relatively large distance from a fixed partially reflective layer.
  • the movable reflective layer In the second position, referred to herein as the actuated position, the movable reflective layer is positioned more closely adjacent to the fixed partially reflective layer. Incident light that reflects from the two layers interferes constructively or destructively depending on the position of the movable reflective layer, producing either an overall reflective or non-reflective state for each pixel.
  • the depicted portion of the pixel array in FIG. 1 includes two adjacent interferometric modulators 12 a and 12 b .
  • a movable reflective layer 14 a is illustrated in a relaxed position at a predetermined distance from an optical stack 16 a , which includes a partially reflective layer.
  • the movable reflective layer 14 b is illustrated in an actuated position adjacent to the optical stack 16 b.
  • optical stack 16 typically comprise of several fused layers, which can include an electrode layer, such as indium tin oxide (ITO), a partially reflective layer, such as chromium, and a transparent dielectric.
  • ITO indium tin oxide
  • the optical stack 16 is thus electrically conductive, partially transparent and partially reflective, and may be fabricated, for example, by depositing one or more of the above layers onto a transparent substrate 20 .
  • the partially reflective layer can be formed from a variety of materials that are partially reflective such as various metals, semiconductors, and dielectrics.
  • the partially reflective layer can be formed of one or more layers of materials, and each of the layers can be formed of a single material or a combination of materials.
  • the layers of the optical stack 16 are patterned into parallel strips, and may form row electrodes in a display device as described further below.
  • the movable reflective layers 14 a , 14 b may be formed as a series of parallel strips of a deposited metal layer or layers (orthogonal to the row electrodes of 16 a , 16 b ) deposited on top of posts 18 and an intervening sacrificial material deposited between the posts 18 . When the sacrificial material is etched away, the movable reflective layers 14 a , 14 b are separated from the optical stacks 16 a , 16 b by a defined gap 19 .
  • a highly conductive and reflective material such as aluminum may be used for the reflective layers 14 , and these strips may form column electrodes in a display device.
  • the cavity 19 remains between the movable reflective layer 14 a and optical stack 16 a , with the movable reflective layer 14 a in a mechanically relaxed state, as illustrated by the pixel 12 a in FIG. 1 .
  • the capacitor formed at the intersection of the row and column electrodes at the corresponding pixel becomes charged, and electrostatic forces pull the electrodes together.
  • the movable reflective layer 14 is deformed and is forced against the optical stack 16 .
  • a dielectric layer (not shown) within the optical stack 16 may prevent shorting and control the separation distance between layers 14 and 16 , as illustrated by pixel 12 b on the right in FIG. 1 .
  • the behavior is the same regardless of the polarity of the applied potential difference. In this way, row/column actuation that can control the reflective vs. non-reflective pixel states is analogous in many ways to that used in conventional LCD and other display technologies.
  • FIGS. 2 through 5 illustrate one exemplary process and system for using an array of interferometric modulators in a display application.
  • FIG. 2 is a system block diagram illustrating one embodiment of an electronic device that may incorporate aspects of the invention.
  • the electronic device includes a processor 21 which may be any general purpose single-chip or multi-chip microprocessor such as an ARM (Advanced RISC Machine), Pentium®, Pentium II®, Pentium III®, Pentium IV®, Pentium® Pro, an 8051, a MIPS®, a Power PC®, an ALPHA®, or any special purpose microprocessor such as a digital signal processor, microcontroller, or a programmable gate array.
  • the processor 21 may be configured to execute one or more software modules.
  • the processor may be configured to execute one or more software applications, including a web browser, a telephone application, an email program, or any other software application.
  • the processor 21 is also configured to communicate with an array driver 22 .
  • the array driver 22 includes a row driver circuit 24 and a column driver circuit 26 that provide signals to a display array or panel 30 .
  • the cross section of the array illustrated in FIG. 1 is shown by the lines 1 - 1 in FIG. 2 .
  • the row/column actuation protocol may take advantage of a hysteresis property of these devices illustrated in FIG. 3 . It may require, for example, a 10 volt potential difference to cause a movable layer to deform from the relaxed state to the actuated state. However, when the voltage is reduced from that value, the movable layer maintains its state as the voltage drops back below 10 volts.
  • the movable layer does not relax completely until the voltage drops below 2 volts.
  • There is thus a range of voltage, about 3 to 7 V in the example illustrated in FIG. 3 where there exists a window of applied voltage within which the device is stable in either the relaxed or actuated state. This is referred to herein as the “hysteresis window” or “stability window.”
  • the row/column actuation protocol can be designed such that during row strobing, pixels in the strobed row that are to be actuated are exposed to a voltage difference of about 10 volts, and pixels that are to be relaxed are exposed to a voltage difference of close to zero volts. After the strobe, the pixels are exposed to a steady state voltage difference of about 5 volts such that they remain in whatever state the row strobe put them in. After being written, each pixel sees a potential difference within the “stability window” of 3-7 volts in this example. This feature makes the pixel design illustrated in FIG.
  • each pixel of the interferometric modulator is essentially a capacitor formed by the fixed and moving reflective layers, this stable state can be held at a voltage within the hysteresis window with almost no power dissipation. Essentially no current flows into the pixel if the applied potential is fixed.
  • a display frame may be created by asserting the set of column electrodes in accordance with the desired set of actuated pixels in the first row.
  • a row pulse is then applied to the row 1 electrode, actuating the pixels corresponding to the asserted column lines.
  • the asserted set of column electrodes is then changed to correspond to the desired set of actuated pixels in the second row.
  • a pulse is then applied to the row 2 electrode, actuating the appropriate pixels in row 2 in accordance with the asserted column electrodes.
  • the row 1 pixels are unaffected by the row 2 pulse, and remain in the state they were set to during the row 1 pulse. This may be repeated for the entire series of rows in a sequential fashion to produce the frame.
  • the frames are refreshed and/or updated with new display data by continually repeating this process at some desired number of frames per second.
  • protocols for driving row and column electrodes of pixel arrays to produce display frames are also well known and may be used in conjunction with the present invention.
  • FIGS. 4 and 5 A- 5 B illustrate one possible actuation protocol for creating a display frame on the 3 ⁇ 3 array of FIG. 2 .
  • FIG. 4 illustrates a possible set of column and row voltage levels that may be used for pixels exhibiting the hysteresis curves of FIG. 3 .
  • actuating a pixel involves setting the appropriate column to ⁇ V bias , and the appropriate row to + ⁇ V, which may correspond to ⁇ 5 volts and +5 volts, respectively. Relaxing the pixel is accomplished by setting the appropriate column to +V bias , and the appropriate row to the same + ⁇ V, producing a zero volt potential difference across the pixel.
  • the pixels are stable in whatever state they were originally in, regardless of whether the column is at +V bias , or ⁇ V bias .
  • voltages of opposite polarity than those described above can be used, e.g., actuating a pixel can involve setting the appropriate column to +V bias , and the appropriate row to ⁇ V.
  • releasing the pixel is accomplished by setting the appropriate column to ⁇ V bias , and the appropriate row to the same ⁇ V, producing a zero volt potential difference across the pixel.
  • FIG. 5B is a timing diagram showing a series of row and column signals applied to the 3 ⁇ 3 array of FIG. 2 which will result in the display arrangement illustrated in FIG. 5A , where actuated pixels are non-reflective.
  • the pixels Prior to writing the frame illustrated in FIG. 5A , the pixels can be in any state, and in this example, all the rows are at 0 volts, and all the columns are at +5 volts. With these applied voltages, all pixels are stable in their existing actuated or relaxed states.
  • pixels (1,1), (1,2), (2,2), (3,2) and (3,3) are actuated.
  • columns 1 and 2 are set to ⁇ 5 volts
  • column 3 is set to +5 volts. This does not change the state of any pixels, because all the pixels remain in the 3-7 volt stability window.
  • Row 1 is then strobed with a pulse that goes from 0, up to 5 volts, and back to zero. This actuates the (1,1) and (1,2) pixels and relaxes the (1,3) pixel. No other pixels in the array are affected.
  • row 2 is set to ⁇ 5 volts, and columns 1 and 3 are set to +5 volts.
  • the same strobe applied to row 2 will then actuate pixel (2,2) and relax pixels (2,1) and (2,3). Again, no other pixels of the array are affected.
  • Row 3 is similarly set by setting columns 2 and 3 to ⁇ 5 volts, and column 1 to +5 volts.
  • the row 3 strobe sets the row 3 pixels as shown in FIG. 5A . After writing the frame, the row potentials are zero, and the column potentials can remain at either +5 or ⁇ 5 volts, and the display is then stable in the arrangement of FIG. 5A .
  • FIG. 6A is a cross section of the embodiment of FIG. 1 , where a strip of metal material 14 is deposited on orthogonally extending supports 18 .
  • the moveable reflective layer 14 is attached to supports at the corners only, on tethers 32 .
  • the moveable reflective layer 14 is suspended from a deformable layer 34 , which may comprise a flexible metal.
  • the deformable layer 34 connects, directly or indirectly, to the substrate 20 around the perimeter of the deformable layer 34 . These connections are referred to herein as support posts.
  • the embodiment illustrated in FIG. 6D has support post plugs 42 upon which the deformable layer 34 rests.
  • the movable reflective layer 14 remains suspended over the cavity, as in FIGS.
  • the deformable layer 34 does not form the support posts by filling holes between the deformable layer 34 and the optical stack 16 . Rather, the support posts are formed of a planarization material, which is used to form support post plugs 42 .
  • the embodiment illustrated in FIG. 6E is based on the embodiment shown in FIG. 6D , but may also be adapted to work with any of the embodiments illustrated in FIGS. 6A-6C as well as additional embodiments not shown. In the embodiment shown in FIG. 6E , an extra layer of metal or other conductive material has been used to form a bus structure 44 . This allows signal routing along the back of the interferometric modulators, eliminating a number of electrodes that may otherwise have had to be formed on the substrate 20 .
  • FIG. 7A and FIG. 7B respectively illustrate cross-section and an exploded view of an embodiment of an interferometric modulator display 700 .
  • the interferometric modulator display 700 includes a substrate 702 , and an interferometric modulator array comprising a plurality of interferometric modulators 704 .
  • the interferometric modulator display 700 further includes a mechanical layer 706 and a plurality of support posts 708 to support the mechanical layer 706 .
  • the plurality of support posts 708 are also operable to act as a waveguide (e.g., to provide a path) to propagate light 710 from a backlight (not shown) through the mechanical layer 706 to the substrate 702 . Accordingly, the light 710 can be uniformly dispersed across a viewable area of the interferometric modulator display 700 .
  • FIG. 7B shows an exploded view of the interferometric modulator display 700 according to one embodiment.
  • the substrate 702 comprises two layers—a first substrate layer 712 and a second substrate layer 714 .
  • both the first substrate layer 712 and the second substrate layer are substantially transparent and/or translucent.
  • the first substrate layer 712 can be glass, silica, and/or alumina
  • the second substrate layer 714 can comprise spin-on glass (SOG).
  • the second substrate layer 714 includes scatterers (or reflectors) 716 to further disperse light 710 (from a backlight (not shown)) more uniformly through the substrate 702 .
  • the interferometric modulator display 700 further includes an optical stack 718 .
  • the optical stack 718 comprises several fused layers, including an electrode layer (e.g., indium tin oxide (ITO)), a partially reflective layer (e.g., chromium), and a transparent dielectric.
  • ITO indium tin oxide
  • the partially reflective layer can be formed from a variety of materials that are partially reflective such as various metals, semiconductors, and dielectrics.
  • the partially reflective layer can be formed of one or more layers of materials, and each of the layers can be formed of a single material or a combination of materials.
  • the support posts 708 support the mechanical layer 706 over the optical stack 718 such that the mechanical layer 706 is separated from the optical stack by a transparent medium 720 (e.g., an air gap).
  • the support posts 708 also provide a path for light 710 from a backlight (not shown) to pass through the mechanical layer 706 and the optical stack 718 to the substrate 702 .
  • a mirror 722 e.g., an aluminum mirror deflects the light 710 throughout the substrate 702 .
  • the mirror 722 may include a light pipe or any other optical pathway for directing light.
  • the interferometric modulator display 700 implements a backlighting scheme to more uniformly distribute light across an interferometric modulator display.
  • FIGS. 8A-8B illustrates a process 800 of fabricating an interferometric modulator display (e.g., interferometric modulator 700 ) in accordance with one embodiment.
  • an interferometric modulator display e.g., interferometric modulator 700
  • the process 800 begins with providing a substrate (step 802 ).
  • a substrate 902 is provided.
  • the substrate 902 can be transparent or not transparent.
  • the substrate 1102 comprises glass.
  • a glass layer is deposited (step 804 ).
  • a glass layer 904 is deposited over the substrate 902 .
  • the glass layer 904 includes a plurality of scatterers (or reflectors) 906 for dispersing light, as discussed in greater detail above.
  • the glass layer 904 can comprise spin-on glass (SOG) or any other transparent dielectric material.
  • a conductive layer is formed (step 806 ). As shown in FIG.
  • a conductive layer 908 is formed over the glass layer 904 .
  • the conductive layer 908 comprises one or more layers and/or films.
  • the conductive layer 908 comprises a conductive layer (e.g., indium tin oxide (ITO)) and a partially reflective layer (e.g., chromium).
  • An oxide layer is deposited (step 808 ).
  • an oxide layer 910 is deposited over the conductive layer 908 .
  • the oxide layer 910 comprises a silicon oxide compound (Si X O Y ).
  • a sacrificial layer is deposited (step 810 ). Referring to FIG.
  • a sacrificial layer 912 is deposited over the oxide layer 910 .
  • the sacrificial layer 912 comprises molybdenum.
  • the height of the sacrificial layer 912 determines the amount of spacing between the first conductive layer 908 (or conductive plate) and a second conductive plate (e.g., a mechanical layer discussed below). In one embodiment, the height of the sacrificial layer 912 is substantially (1800 ⁇ -2100 ⁇ ).
  • a mechanical layer is formed (step 812 ).
  • a mechanical layer 914 is formed over the sacrificial layer 912 .
  • the mechanical layer 914 comprises a movable reflective layer as discussed above.
  • the mechanical layer 914 comprises aluminum/nickel, and has a height substantially in the range of 1100 ⁇ -1300 ⁇ .
  • the mechanical layer is etched (step 812 ).
  • the mechanical layer 914 is etched at locations where support posts are desired.
  • the sacrificial layer is etched (step 816 ). As shown in FIG.
  • a greater portion of the sacrificial layer 912 is etched relative to the portion of the mechanical layer 914 that was etched (or removed).
  • the sacrificial layer 912 is etched a distance d of approximately 0.5-1 ⁇ m greater than the mechanical layer 914 .
  • the oxide layer is etched (step 818 ).
  • the oxide layer 910 is etched.
  • the conductive layer is etched (step 820 ).
  • the conductive layer 908 is etched.
  • the glass layer is etched (step 822 ).
  • the glass layer 904 is etched to reveal the substrate 902 .
  • a mirror is formed (step 824 ).
  • a mirror 916 is formed on the substrate 902 .
  • the mirror 916 is formed by deposition of a (thin) metal layer 918 over the mechanical layer 914 .
  • a thickness (or height) of the metal layer 918 is substantially in the range of 50-150 ⁇ .
  • the deposition of the thin metal layer 918 can be implemented through sputtering to achieve a pyramid-like structure for the mirror 916 so that the mirror 916 can deflect a light from a backlight throughout the glass layer 904 and the substrate 902 .
  • the mirror 916 comprises aluminum or other reflective material.
  • a plurality of posts are formed (step 826 ). As shown by FIG.
  • posts 920 are formed within the etched portions of the layers of the interferometric modulator display.
  • the posts 920 are formed using a planarization technique followed by photolithography to remove unwanted portions of the material that comprise the posts 920 .
  • the posts 920 can comprise spin-on glass (SOG) or a transparent polymer.
  • the sacrificial layer is released (step 828 ).
  • the sacrificial layer 912 is released to form an air gap 922 between the mechanical layer 914 and the oxide layer 910 .
  • the sacrificial layer 912 can be released through one or more etch holes formed through the metal layer 918 and the mechanical layer 914 .
  • the one or more etch holes can be created after formation of the posts 920 .
  • FIGS. 10A and 10B are system block diagrams illustrating an embodiment of a display device 40 .
  • the display device 40 can be, for example, a cellular or mobile telephone.
  • the same components of display device 40 or slight variations thereof are also illustrative of various types of display devices such as televisions and portable media players.
  • the display device 40 includes a housing 41 , a display 30 , an antenna 43 , a speaker 44 , an input device 48 , and a microphone 46 .
  • the housing 41 is generally formed from any of a variety of manufacturing processes as are well known to those of skill in the art, including injection molding, and vacuum forming.
  • the housing 41 may be made from any of a variety of materials, including but not limited to plastic, metal, glass, rubber, and ceramic, or a combination thereof.
  • the housing 41 includes removable portions (not shown) that may be interchanged with other removable portions of different color, or containing different logos, pictures, or symbols.
  • the display 30 of exemplary display device 40 may be any of a variety of displays, including a bi-stable display, as described herein.
  • the display 30 includes a flat-panel display, such as plasma, EL, OLED, STN LCD, or TFT LCD as described above, or a non-flat-panel display, such as a CRT or other tube device, as is well known to those of skill in the art.
  • the display 30 includes an interferometric modulator display, as described herein.
  • the components of one embodiment of exemplary display device 40 are schematically illustrated in FIG. 10B .
  • the illustrated exemplary display device 40 includes a housing 41 and can include additional components at least partially enclosed therein.
  • the exemplary display device 40 includes a network interface 27 that includes an antenna 43 which is coupled to a transceiver 47 .
  • the transceiver 47 is connected to a processor 21 , which is connected to conditioning hardware 52 .
  • the conditioning hardware 52 may be configured to condition a signal (e.g. filter a signal).
  • the conditioning hardware 52 is connected to a speaker 45 and a microphone 46 .
  • the processor 21 is also connected to an input device 48 and a driver controller 29 .
  • the driver controller 29 is coupled to a frame buffer 28 , and to an array driver 22 , which in turn is coupled to a display array 30 .
  • a power supply 50 provides power to all components as required by the particular exemplary display device 40 design.
  • the network interface 27 includes the antenna 43 and the transceiver 47 so that the exemplary display device 40 can communicate with one or more devices over a network. In one embodiment the network interface 27 may also have some processing capabilities to relieve requirements of the processor 21 .
  • the antenna 43 is any antenna known to those of skill in the art for transmitting and receiving signals. In one embodiment, the antenna transmits and receives RF signals according to the IEEE 802.11 standard, including IEEE 802.11(a), (b), or (g). In another embodiment, the antenna transmits and receives RF signals according to the BLUETOOTH standard. In the case of a cellular telephone, the antenna is designed to receive CDMA, GSM, AMPS or other known signals that are used to communicate within a wireless cell phone network.
  • the transceiver 47 pre-processes the signals received from the antenna 43 so that they may be received by and further manipulated by the processor 21 .
  • the transceiver 47 also processes signals received from the processor 21 so that they may be transmitted from the exemplary display device 40 via the antenna 43 .
  • the transceiver 47 can be replaced by a receiver.
  • network interface 27 can be replaced by an image source, which can store or generate image data to be sent to the processor 21 .
  • the image source can be a digital video disc (DVD) or a hard-disc drive that contains image data, or a software module that generates image data.
  • Processor 21 generally controls the overall operation of the exemplary display device 40 .
  • the processor 21 receives data, such as compressed image data from the network interface 27 or an image source, and processes the data into raw image data or into a format that is readily processed into raw image data.
  • the processor 21 then sends the processed data to the driver controller 29 or to frame buffer 28 for storage.
  • Raw data typically refers to the information that identifies the image characteristics at each location within an image. For example, such image characteristics can include color, saturation, and gray-scale level.
  • the processor 21 includes a microcontroller, CPU, or logic unit to control operation of the exemplary display device 40 .
  • Conditioning hardware 52 generally includes amplifiers and filters for transmitting signals to the speaker 45 , and for receiving signals from the microphone 46 .
  • Conditioning hardware 52 may be discrete components within the exemplary display device 40 , or may be incorporated within the processor 21 or other components.
  • the driver controller 29 takes the raw image data generated by the processor 21 either directly from the processor 21 or from the frame buffer 28 and reformats the raw image data appropriately for high speed transmission to the array driver 22 . Specifically, the driver controller 29 reformats the raw image data into a data flow having a raster-like format, such that it has a time order suitable for scanning across the display array 30 . Then the driver controller 29 sends the formatted information to the array driver 22 .
  • a driver controller 29 such as a LCD controller, is often associated with the system processor 21 as a stand-alone Integrated Circuit (IC), such controllers may be implemented in many ways. They may be embedded in the processor 21 as hardware, embedded in the processor 21 as software, or fully integrated in hardware with the array driver 22 .
  • the array driver 22 receives the formatted information from the driver controller 29 and reformats the video data into a parallel set of waveforms that are applied many times per second to the hundreds and sometimes thousands of leads coming from the display's x-y matrix of pixels.
  • driver controller 29 is a conventional display controller or a bi-stable display controller (e.g., an interferometric modulator controller).
  • array driver 22 is a conventional driver or a bi-stable display driver (e.g., an interferometric modulator display driver).
  • a driver controller 29 is integrated with the array driver 22 .
  • display array 30 is a typical display array or a bi-stable display array (e.g., a display including an array of interferometric modulators).
  • the input device 48 allows a user to control the operation of the exemplary display device 40 .
  • input device 48 includes a keypad, such as a QWERTY keyboard or a telephone keypad, a button, a switch, a touch-sensitive screen, a pressure- or heat-sensitive membrane.
  • the microphone 46 is an input device for the exemplary display device 40 . When the microphone 46 is used to input data to the device, voice commands may be provided by a user for controlling operations of the exemplary display device 40 .
  • Power supply 50 can include a variety of energy storage devices as are well known in the art.
  • power supply 50 is a rechargeable battery, such as a nickel-cadmium battery or a lithium ion battery.
  • power supply 50 is a renewable energy source, a capacitor, or a solar cell, including a plastic solar cell, and solar-cell paint.
  • power supply 50 is configured to receive power from a wall outlet.
  • control programmability resides, as described above, in a driver controller which can be located in several places in the electronic display system. In some cases control programmability resides in the array driver 22 . Those of skill in the art will recognize that the above-described optimization may be implemented in any number of hardware and/or software components and in various configurations.

Abstract

Methods and apparatus for providing lighting in a display are provided. In one embodiment, a microelectromechanical system (MEMS) is provided that includes a transparent substrate and a plurality of interferometric modulators. The interferometric modulators include an optical stack coupled to the transparent substrate, a reflective layer over the optical stack, and one or more posts to support the reflective layer and to provide a path for light from a backlight for lighting the display.

Description

    CROSS-REFERENCE TO RELATED APPLICATIONS
  • This application is a continuation application of U.S. patent application Ser. No. 12/544,184, filed Aug. 19, 2009, and titled METHOD AND APPARATUS FOR PROVIDING BACK-LIGHTING IN A DISPLAY DEVICE, which is a continuation application of U.S. application Ser. No. 11/357,702, filed Feb. 17, 2006, and titled METHOD AND APPARATUS FOR PROVIDING BACK-LIGHTING IN AN INTERFEROMETRIC MODULATOR DISPLAY DEVICE, each of which is hereby incorporated by reference herein in its entirety.
  • BACKGROUND
  • 1. Field
  • The present invention relates generally to display devices, and more particularly to interferometric modulator display devices.
  • 2. Description of the Related Art
  • Microelectromechanical systems (MEMS) include micromechanical elements, actuators, and electronics. Micromechanical elements may be created using deposition, etching, and/or other micromachining processes that etch away parts of substrates and/or deposited material layers or that add layers to form electrical and electromechanical devices. One type of MEMS device is called an interferometric modulator. As used herein, the term interferometric modulator or interferometric light modulator refers to a device that selectively absorbs and/or reflects light using the principles of optical interference. In certain embodiments, an interferometric modulator may comprise a pair of conductive plates, one or both of which may be transparent and/or reflective in whole or part and capable of relative motion upon application of an appropriate electrical signal. In a particular embodiment, one plate may comprise a stationary layer deposited on a substrate and the other plate may comprise a metallic membrane separated from the stationary layer by a transparent medium (e.g., an air gap). As described herein in more detail, the position of one plate in relation to the other plate can change the optical interference of light incident on the interferometric modulator. Such devices have a wide range of applications, and it would be beneficial in the art to utilize and/or modify the characteristics of these types of devices so that their features can be exploited in improving existing products and creating new products that have not yet been developed.
  • Conventional interferometric modulator display devices typically implement front-lighting that provides light for viewing images, for example, in the dark. The front-lighting is typically provided by a light strip that surrounds the perimeter of an interferometric modulator display. While such a front-lighting scheme does provide light for viewing images in the dark, there is generally an intrinsic (lighting) uniformity issue as the middle portion of the interferometric modulator display remains darker than the outer edges. As interferometric modulator displays increase in size, this non-uniform effect of light caused by front-lighting increases, which can lead to poor visibility of images in the dark.
  • Accordingly, what is needed is an improved lighting scheme for an interferometric display device to reduce non-uniformity of light. The present invention addresses such a need.
  • SUMMARY
  • In general, in one aspect, this specification describes a microelectromechanical system (MEMS) including a transparent substrate, and a plurality of interferometric modulators. The plurality of interferometric modulators include an optical stack coupled to the transparent substrate, a reflective layer over the optical stack, and one or more posts to support the reflective layer and to provide a path for light from a backlight for lighting the interferometric modulators.
  • Particular features can include one or more of the following features. The MEMS can further include a glass layer between the transparent substrate and the optical stack. The glass layer can include a plurality of scatterers to disperse the light. The glass layer can comprise first spin-on glass (SOG) including the plurality of scatterers. The one or more posts can be composed of a transparent polymer or second spin-on glass (SOG). Each of the one or more posts can further be configured to direct the light to the glass layer. The scatterers can be configured to disperse the light to the interferometric modulators. Each of the one or more posts can further comprise a mirror. The one or more posts can extend from the optical stack through the reflective layer.
  • The MEMS, as a display device, can further include a display including the MEMS, and a processor that is in electrical communication with the display, the processor being configured to process image data, and a memory device in electrical communication with the processor. The display system can further include a backlight coupled to the display for providing light to the interferometric modulators. The display system can further include a first controller configured to send at least one signal to the display, and a second controller configured to send at least a portion of the image data to the first controller. The display system can further include an image source module configured to send the image data to the processor. The image source module can comprise at least one of a receiver, transceiver, and transmitter. The display system can further include an input device configured to receive input data and to communicate the input data to the processor.
  • In general in another aspect, this specification describes a micromechanical system (MEMS) including a transparent substrate means, and a plurality of interferometric modulator means. The plurality of interferometric modulator means includes an optical stack means coupled to the transparent substrate means, a reflective layer means over the optical stack means, and one or more post means to support the reflective layer means and to provide a path for light from a backlight means for lighting the interferometric modulator means.
  • In general in another aspect, this specification describes a method for providing light in a microelectromechanical system (MEMS). The method includes providing a transparent substrate, and forming a plurality of interferometric modulators. Forming a plurality of interferometric modulators includes coupling an optical stack to the transparent substrate, forming a reflective layer over the optical stack, and forming one or more posts to support the reflective layer and to provide a path for light from a backlight for lighting the interferometric modulators.
  • Implementations may provide one or more of the following advantages. An interferometric modulator display that has an improved lighting scheme for an interferometric display device to having a higher lighting uniformity relative to conventional interferometric modulator displays devices that implement a front-lighting scheme. In one embodiment, uniform lighting is provided through posts (or rails) that are integrated within the interferometric display device. Such a design may be more power-efficient relative to conventional techniques in illuminating a central area of an interferometric display. Moreover, the brightness of an interferometric display may be enhanced even with ambient light.
  • The details of one or more implementations are set forth in the accompanying drawings and the description below. Other features and advantages will be apparent from the description and drawings, and from the claims.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1 is an isometric view depicting a portion of one embodiment of an interferometric modulator display in which a movable reflective layer of a first interferometric modulator is in a relaxed position and a movable reflective layer of a second interferometric modulator is in an actuated position.
  • FIG. 2 is a system block diagram illustrating one embodiment of an electronic device incorporating a 3×3 interferometric modulator display.
  • FIG. 3 is a diagram of movable mirror position versus applied voltage for one exemplary embodiment of an interferometric modulator of FIG. 1.
  • FIG. 4 is an illustration of a set of row and column voltages that may be used to drive an interferometric modulator display.
  • FIGS. 5A and 5B illustrate one exemplary timing diagram for row and column signals that may be used to write a frame of display data to the 3×3 interferometric modulator display of FIG. 2.
  • FIG. 6A is a cross section of an interferometric modulator of FIG. 1. FIGS. 6B-E are alternative embodiments of an interferometric modulator.
  • FIGS. 7A-7B illustrate cross-sectional views of an interferometric modulator display.
  • FIGS. 8A-8B illustrate a flow diagram illustrating a process for manufacturing an interferometric modulator display according to one embodiment.
  • FIGS. 9A-9N illustrate the process of manufacturing an interferometric modulator display according to the process of FIGS. 8A-8B.
  • FIGS. 10A and 10B are system block diagrams illustrating an embodiment of a visual display device comprising a plurality of interferometric modulators.
  • Like reference symbols in the various drawings indicate like elements.
  • DETAILED DESCRIPTION OF PREFERRED EMBODIMENT
  • The following detailed description is directed to certain specific embodiments of the invention. However, the invention can be embodied in a multitude of different ways. In this description, reference is made to the drawings wherein like parts are designated with like numerals throughout. As will be apparent from the following description, the embodiments may be implemented in any device that is configured to display an image, whether in motion (e.g., video) or stationary (e.g., still image), and whether textual or pictorial. More particularly, it is contemplated that the embodiments may be implemented in or associated with a variety of electronic devices such as, but not limited to, mobile telephones, wireless devices, personal data assistants (PDAs), hand-held or portable computers, GPS receivers/navigators, cameras, MP3 players, camcorders, game consoles, wrist watches, clocks, calculators, television monitors, flat panel displays, computer monitors, auto displays (e.g., odometer display, etc.), cockpit controls and/or displays, display of camera views (e.g., display of a rear view camera in a vehicle), electronic photographs, electronic billboards or signs, projectors, architectural structures, packaging, and aesthetic structures (e.g., display of images on a piece of jewelry). MEMS devices of similar structure to those described herein can also be used in non-display applications such as in electronic switching devices.
  • As discussed above, conventional interferometric modulator display devices typically implement front-lighting that provides light for viewing images, for example, in the dark. While such a front-lighting scheme does provide light for viewing images in the dark, there is generally an intrinsic lighting uniformity issue as the middle portion of the interferometric modulator display remains darker than the outer edges. As interferometric modulator displays increase in size, this non-uniform effect of light caused by front-lighting increases, which can lead to poor visibility of images in the dark. Accordingly, this specification describes an improved lighting scheme for an interferometric display device to reduce non-uniformity of light. In one embodiment, an interferometric modulator display is provided that includes a transparent substrate, and an optical stack is formed on the transparent substrate. A reflective layer is formed over the optical stack, and one or more posts to support the reflective layer are formed over the optical stack. The one or more posts provide a path for light from a backlight for lighting the interferometric modulator display.
  • One interferometric modulator display embodiment comprising an interferometric MEMS display element is illustrated in FIG. 1. In these devices, the pixels are in either a bright or dark state. In the bright (“on” or “open”) state, the display element reflects a large portion of incident visible light to a user. When in the dark (“off” or “closed”) state, the display element reflects little incident visible light to the user. Depending on the embodiment, the light reflectance properties of the “on” and “off” states may be reversed. MEMS pixels can be configured to reflect predominantly at selected colors, allowing for a color display in addition to black and white.
  • FIG. 1 is an isometric view depicting two adjacent pixels in a series of pixels of a visual display, wherein each pixel comprises a MEMS interferometric modulator. In some embodiments, an interferometric modulator display comprises a row/column array of these interferometric modulators. Each interferometric modulator includes a pair of reflective layers positioned at a variable and controllable distance from each other to form a resonant optical cavity with at least one variable dimension. In one embodiment, one of the reflective layers may be moved between two positions. In the first position, referred to herein as the relaxed position, the movable reflective layer is positioned at a relatively large distance from a fixed partially reflective layer. In the second position, referred to herein as the actuated position, the movable reflective layer is positioned more closely adjacent to the fixed partially reflective layer. Incident light that reflects from the two layers interferes constructively or destructively depending on the position of the movable reflective layer, producing either an overall reflective or non-reflective state for each pixel.
  • The depicted portion of the pixel array in FIG. 1 includes two adjacent interferometric modulators 12 a and 12 b. In the interferometric modulator 12 a on the left, a movable reflective layer 14 a is illustrated in a relaxed position at a predetermined distance from an optical stack 16 a, which includes a partially reflective layer. In the interferometric modulator 12 b on the right, the movable reflective layer 14 b is illustrated in an actuated position adjacent to the optical stack 16 b.
  • The optical stacks 16 a and 16 b (collectively referred to as optical stack 16), as referenced herein, typically comprise of several fused layers, which can include an electrode layer, such as indium tin oxide (ITO), a partially reflective layer, such as chromium, and a transparent dielectric. The optical stack 16 is thus electrically conductive, partially transparent and partially reflective, and may be fabricated, for example, by depositing one or more of the above layers onto a transparent substrate 20. The partially reflective layer can be formed from a variety of materials that are partially reflective such as various metals, semiconductors, and dielectrics. The partially reflective layer can be formed of one or more layers of materials, and each of the layers can be formed of a single material or a combination of materials.
  • In some embodiments, the layers of the optical stack 16 are patterned into parallel strips, and may form row electrodes in a display device as described further below. The movable reflective layers 14 a, 14 b may be formed as a series of parallel strips of a deposited metal layer or layers (orthogonal to the row electrodes of 16 a, 16 b) deposited on top of posts 18 and an intervening sacrificial material deposited between the posts 18. When the sacrificial material is etched away, the movable reflective layers 14 a, 14 b are separated from the optical stacks 16 a, 16 b by a defined gap 19. A highly conductive and reflective material such as aluminum may be used for the reflective layers 14, and these strips may form column electrodes in a display device.
  • With no applied voltage, the cavity 19 remains between the movable reflective layer 14 a and optical stack 16 a, with the movable reflective layer 14 a in a mechanically relaxed state, as illustrated by the pixel 12 a in FIG. 1. However, when a potential difference is applied to a selected row and column, the capacitor formed at the intersection of the row and column electrodes at the corresponding pixel becomes charged, and electrostatic forces pull the electrodes together. If the voltage is high enough, the movable reflective layer 14 is deformed and is forced against the optical stack 16. A dielectric layer (not shown) within the optical stack 16 may prevent shorting and control the separation distance between layers 14 and 16, as illustrated by pixel 12 b on the right in FIG. 1. The behavior is the same regardless of the polarity of the applied potential difference. In this way, row/column actuation that can control the reflective vs. non-reflective pixel states is analogous in many ways to that used in conventional LCD and other display technologies.
  • FIGS. 2 through 5 illustrate one exemplary process and system for using an array of interferometric modulators in a display application.
  • FIG. 2 is a system block diagram illustrating one embodiment of an electronic device that may incorporate aspects of the invention. In the exemplary embodiment, the electronic device includes a processor 21 which may be any general purpose single-chip or multi-chip microprocessor such as an ARM (Advanced RISC Machine), Pentium®, Pentium II®, Pentium III®, Pentium IV®, Pentium® Pro, an 8051, a MIPS®, a Power PC®, an ALPHA®, or any special purpose microprocessor such as a digital signal processor, microcontroller, or a programmable gate array. As is conventional in the art, the processor 21 may be configured to execute one or more software modules. In addition to executing an operating system, the processor may be configured to execute one or more software applications, including a web browser, a telephone application, an email program, or any other software application.
  • In one embodiment, the processor 21 is also configured to communicate with an array driver 22. In one embodiment, the array driver 22 includes a row driver circuit 24 and a column driver circuit 26 that provide signals to a display array or panel 30. The cross section of the array illustrated in FIG. 1 is shown by the lines 1-1 in FIG. 2. For MEMS interferometric modulators, the row/column actuation protocol may take advantage of a hysteresis property of these devices illustrated in FIG. 3. It may require, for example, a 10 volt potential difference to cause a movable layer to deform from the relaxed state to the actuated state. However, when the voltage is reduced from that value, the movable layer maintains its state as the voltage drops back below 10 volts. In the exemplary embodiment of FIG. 3, the movable layer does not relax completely until the voltage drops below 2 volts. There is thus a range of voltage, about 3 to 7 V in the example illustrated in FIG. 3, where there exists a window of applied voltage within which the device is stable in either the relaxed or actuated state. This is referred to herein as the “hysteresis window” or “stability window.”
  • For a display array having the hysteresis characteristics of FIG. 3, the row/column actuation protocol can be designed such that during row strobing, pixels in the strobed row that are to be actuated are exposed to a voltage difference of about 10 volts, and pixels that are to be relaxed are exposed to a voltage difference of close to zero volts. After the strobe, the pixels are exposed to a steady state voltage difference of about 5 volts such that they remain in whatever state the row strobe put them in. After being written, each pixel sees a potential difference within the “stability window” of 3-7 volts in this example. This feature makes the pixel design illustrated in FIG. 1 stable under the same applied voltage conditions in either an actuated or relaxed pre-existing state. Since each pixel of the interferometric modulator, whether in the actuated or relaxed state, is essentially a capacitor formed by the fixed and moving reflective layers, this stable state can be held at a voltage within the hysteresis window with almost no power dissipation. Essentially no current flows into the pixel if the applied potential is fixed.
  • In typical applications, a display frame may be created by asserting the set of column electrodes in accordance with the desired set of actuated pixels in the first row. A row pulse is then applied to the row 1 electrode, actuating the pixels corresponding to the asserted column lines. The asserted set of column electrodes is then changed to correspond to the desired set of actuated pixels in the second row. A pulse is then applied to the row 2 electrode, actuating the appropriate pixels in row 2 in accordance with the asserted column electrodes. The row 1 pixels are unaffected by the row 2 pulse, and remain in the state they were set to during the row 1 pulse. This may be repeated for the entire series of rows in a sequential fashion to produce the frame. Generally, the frames are refreshed and/or updated with new display data by continually repeating this process at some desired number of frames per second. A wide variety of protocols for driving row and column electrodes of pixel arrays to produce display frames are also well known and may be used in conjunction with the present invention.
  • FIGS. 4 and 5A-5B illustrate one possible actuation protocol for creating a display frame on the 3×3 array of FIG. 2. FIG. 4 illustrates a possible set of column and row voltage levels that may be used for pixels exhibiting the hysteresis curves of FIG. 3. In the embodiment shown in FIG. 4, actuating a pixel involves setting the appropriate column to −Vbias, and the appropriate row to +ΔV, which may correspond to −5 volts and +5 volts, respectively. Relaxing the pixel is accomplished by setting the appropriate column to +Vbias, and the appropriate row to the same +ΔV, producing a zero volt potential difference across the pixel. In those rows where the row voltage is held at zero volts, the pixels are stable in whatever state they were originally in, regardless of whether the column is at +Vbias, or −Vbias. As is also illustrated in FIG. 4, it will be appreciated that voltages of opposite polarity than those described above can be used, e.g., actuating a pixel can involve setting the appropriate column to +Vbias, and the appropriate row to −ΔV. In this embodiment, releasing the pixel is accomplished by setting the appropriate column to −Vbias, and the appropriate row to the same −ΔV, producing a zero volt potential difference across the pixel.
  • FIG. 5B is a timing diagram showing a series of row and column signals applied to the 3×3 array of FIG. 2 which will result in the display arrangement illustrated in FIG. 5A, where actuated pixels are non-reflective. Prior to writing the frame illustrated in FIG. 5A, the pixels can be in any state, and in this example, all the rows are at 0 volts, and all the columns are at +5 volts. With these applied voltages, all pixels are stable in their existing actuated or relaxed states.
  • In the frame shown in FIG. 5A, pixels (1,1), (1,2), (2,2), (3,2) and (3,3) are actuated. To accomplish this, during a “line time” for row 1, columns 1 and 2 are set to −5 volts, and column 3 is set to +5 volts. This does not change the state of any pixels, because all the pixels remain in the 3-7 volt stability window. Row 1 is then strobed with a pulse that goes from 0, up to 5 volts, and back to zero. This actuates the (1,1) and (1,2) pixels and relaxes the (1,3) pixel. No other pixels in the array are affected. To set row 2 as desired, column 2 is set to −5 volts, and columns 1 and 3 are set to +5 volts. The same strobe applied to row 2 will then actuate pixel (2,2) and relax pixels (2,1) and (2,3). Again, no other pixels of the array are affected. Row 3 is similarly set by setting columns 2 and 3 to −5 volts, and column 1 to +5 volts. The row 3 strobe sets the row 3 pixels as shown in FIG. 5A. After writing the frame, the row potentials are zero, and the column potentials can remain at either +5 or −5 volts, and the display is then stable in the arrangement of FIG. 5A. It will be appreciated that the same procedure can be employed for arrays of dozens or hundreds of rows and columns. It will also be appreciated that the timing, sequence, and levels of voltages used to perform row and column actuation can be varied widely within the general principles outlined above, and the above example is exemplary only, and any actuation voltage method can be used with the systems and methods described herein.
  • FIG. 6A is a cross section of the embodiment of FIG. 1, where a strip of metal material 14 is deposited on orthogonally extending supports 18. In FIG. 6B, the moveable reflective layer 14 is attached to supports at the corners only, on tethers 32. In FIG. 6C, the moveable reflective layer 14 is suspended from a deformable layer 34, which may comprise a flexible metal. The deformable layer 34 connects, directly or indirectly, to the substrate 20 around the perimeter of the deformable layer 34. These connections are referred to herein as support posts. The embodiment illustrated in FIG. 6D has support post plugs 42 upon which the deformable layer 34 rests. The movable reflective layer 14 remains suspended over the cavity, as in FIGS. 6A-6C, but the deformable layer 34 does not form the support posts by filling holes between the deformable layer 34 and the optical stack 16. Rather, the support posts are formed of a planarization material, which is used to form support post plugs 42. The embodiment illustrated in FIG. 6E is based on the embodiment shown in FIG. 6D, but may also be adapted to work with any of the embodiments illustrated in FIGS. 6A-6C as well as additional embodiments not shown. In the embodiment shown in FIG. 6E, an extra layer of metal or other conductive material has been used to form a bus structure 44. This allows signal routing along the back of the interferometric modulators, eliminating a number of electrodes that may otherwise have had to be formed on the substrate 20.
  • FIG. 7A and FIG. 7B respectively illustrate cross-section and an exploded view of an embodiment of an interferometric modulator display 700. Referring to FIG. 7A, the interferometric modulator display 700 includes a substrate 702, and an interferometric modulator array comprising a plurality of interferometric modulators 704. The interferometric modulator display 700 further includes a mechanical layer 706 and a plurality of support posts 708 to support the mechanical layer 706. In accordance with the present invention, the plurality of support posts 708 are also operable to act as a waveguide (e.g., to provide a path) to propagate light 710 from a backlight (not shown) through the mechanical layer 706 to the substrate 702. Accordingly, the light 710 can be uniformly dispersed across a viewable area of the interferometric modulator display 700.
  • FIG. 7B shows an exploded view of the interferometric modulator display 700 according to one embodiment. As shown in FIG. 7B, in one embodiment, the substrate 702 comprises two layers—a first substrate layer 712 and a second substrate layer 714. In one embodiment, both the first substrate layer 712 and the second substrate layer are substantially transparent and/or translucent. For example, the first substrate layer 712 can be glass, silica, and/or alumina, and the second substrate layer 714 can comprise spin-on glass (SOG). In one embodiment, the second substrate layer 714 includes scatterers (or reflectors) 716 to further disperse light 710 (from a backlight (not shown)) more uniformly through the substrate 702. Although scatterers 716 are illustrated as circular, one of skill in the art will recognize that any shape or surface suitable for reflecting, directing or scattering light may be used in the invention, including prisms and thin-film layers for redirecting light. The interferometric modulator display 700 further includes an optical stack 718. In one embodiment, the optical stack 718 comprises several fused layers, including an electrode layer (e.g., indium tin oxide (ITO)), a partially reflective layer (e.g., chromium), and a transparent dielectric. The partially reflective layer can be formed from a variety of materials that are partially reflective such as various metals, semiconductors, and dielectrics. The partially reflective layer can be formed of one or more layers of materials, and each of the layers can be formed of a single material or a combination of materials.
  • As shown in FIG. 7B, the support posts 708 support the mechanical layer 706 over the optical stack 718 such that the mechanical layer 706 is separated from the optical stack by a transparent medium 720 (e.g., an air gap). In addition, as discussed above, the support posts 708 also provide a path for light 710 from a backlight (not shown) to pass through the mechanical layer 706 and the optical stack 718 to the substrate 702. In one embodiment, a mirror 722 (e.g., an aluminum mirror) deflects the light 710 throughout the substrate 702. The mirror 722 may include a light pipe or any other optical pathway for directing light. Thus, unlike a conventional interferometric modulator display that may have poor lighting uniformity due to a front-lighting scheme, the interferometric modulator display 700 implements a backlighting scheme to more uniformly distribute light across an interferometric modulator display.
  • FIGS. 8A-8B illustrates a process 800 of fabricating an interferometric modulator display (e.g., interferometric modulator 700) in accordance with one embodiment.
  • Referring first to FIG. 8A, the process 800 begins with providing a substrate (step 802). Referring to the example of FIG. 9A, a substrate 902 is provided. The substrate 902 can be transparent or not transparent. In one embodiment, the substrate 1102 comprises glass. A glass layer is deposited (step 804). As shown in FIG. 9B, a glass layer 904 is deposited over the substrate 902. In one embodiment, the glass layer 904 includes a plurality of scatterers (or reflectors) 906 for dispersing light, as discussed in greater detail above. The glass layer 904 can comprise spin-on glass (SOG) or any other transparent dielectric material. A conductive layer is formed (step 806). As shown in FIG. 9C, a conductive layer 908 is formed over the glass layer 904. In one embodiment the conductive layer 908 comprises one or more layers and/or films. For example, in one embodiment the conductive layer 908 comprises a conductive layer (e.g., indium tin oxide (ITO)) and a partially reflective layer (e.g., chromium). An oxide layer is deposited (step 808). As shown in FIG. 9D, an oxide layer 910 is deposited over the conductive layer 908. In one embodiment, the oxide layer 910 comprises a silicon oxide compound (SiXOY). A sacrificial layer is deposited (step 810). Referring to FIG. 9E, a sacrificial layer 912 is deposited over the oxide layer 910. In one embodiment, the sacrificial layer 912 comprises molybdenum. In one embodiment, the height of the sacrificial layer 912 determines the amount of spacing between the first conductive layer 908 (or conductive plate) and a second conductive plate (e.g., a mechanical layer discussed below). In one embodiment, the height of the sacrificial layer 912 is substantially (1800 Å-2100 Å).
  • A mechanical layer is formed (step 812). Referring to the example of FIG. 9F, a mechanical layer 914 is formed over the sacrificial layer 912. In one embodiment, the mechanical layer 914 comprises a movable reflective layer as discussed above. In one embodiment, the mechanical layer 914 comprises aluminum/nickel, and has a height substantially in the range of 1100 Å-1300 Å. After formation of the mechanical layer, the process of forming the support posts for the mechanical layer begins. Accordingly, the mechanical layer is etched (step 812). Referring to the example of FIG. 9G, the mechanical layer 914 is etched at locations where support posts are desired. The sacrificial layer is etched (step 816). As shown in FIG. 9H, (in one embodiment) a greater portion of the sacrificial layer 912 is etched relative to the portion of the mechanical layer 914 that was etched (or removed). In this embodiment, the sacrificial layer 912 is etched a distance d of approximately 0.5-1 μm greater than the mechanical layer 914. The oxide layer is etched (step 818). As shown in FIG. 9I, the oxide layer 910 is etched. The conductive layer is etched (step 820). Referring to FIG. 9J, the conductive layer 908 is etched. The glass layer is etched (step 822). As shown in FIG. 9K, the glass layer 904 is etched to reveal the substrate 902.
  • A mirror is formed (step 824). As shown in FIG. 9L, a mirror 916 is formed on the substrate 902. In one embodiment, the mirror 916 is formed by deposition of a (thin) metal layer 918 over the mechanical layer 914. In one embodiment, a thickness (or height) of the metal layer 918 is substantially in the range of 50-150 Å. The deposition of the thin metal layer 918 can be implemented through sputtering to achieve a pyramid-like structure for the mirror 916 so that the mirror 916 can deflect a light from a backlight throughout the glass layer 904 and the substrate 902. In one embodiment, the mirror 916 comprises aluminum or other reflective material. A plurality of posts are formed (step 826). As shown by FIG. 9M, posts 920 are formed within the etched portions of the layers of the interferometric modulator display. In one embodiment, the posts 920 are formed using a planarization technique followed by photolithography to remove unwanted portions of the material that comprise the posts 920. The posts 920 can comprise spin-on glass (SOG) or a transparent polymer. The sacrificial layer is released (step 828). Referring to FIG. 9N, the sacrificial layer 912 is released to form an air gap 922 between the mechanical layer 914 and the oxide layer 910. The sacrificial layer 912 can be released through one or more etch holes formed through the metal layer 918 and the mechanical layer 914. The one or more etch holes can be created after formation of the posts 920.
  • FIGS. 10A and 10B are system block diagrams illustrating an embodiment of a display device 40. The display device 40 can be, for example, a cellular or mobile telephone. However, the same components of display device 40 or slight variations thereof are also illustrative of various types of display devices such as televisions and portable media players.
  • The display device 40 includes a housing 41, a display 30, an antenna 43, a speaker 44, an input device 48, and a microphone 46. The housing 41 is generally formed from any of a variety of manufacturing processes as are well known to those of skill in the art, including injection molding, and vacuum forming. In addition, the housing 41 may be made from any of a variety of materials, including but not limited to plastic, metal, glass, rubber, and ceramic, or a combination thereof. In one embodiment the housing 41 includes removable portions (not shown) that may be interchanged with other removable portions of different color, or containing different logos, pictures, or symbols.
  • The display 30 of exemplary display device 40 may be any of a variety of displays, including a bi-stable display, as described herein. In other embodiments, the display 30 includes a flat-panel display, such as plasma, EL, OLED, STN LCD, or TFT LCD as described above, or a non-flat-panel display, such as a CRT or other tube device, as is well known to those of skill in the art. However, for purposes of describing the present embodiment, the display 30 includes an interferometric modulator display, as described herein.
  • The components of one embodiment of exemplary display device 40 are schematically illustrated in FIG. 10B. The illustrated exemplary display device 40 includes a housing 41 and can include additional components at least partially enclosed therein. For example, in one embodiment, the exemplary display device 40 includes a network interface 27 that includes an antenna 43 which is coupled to a transceiver 47. The transceiver 47 is connected to a processor 21, which is connected to conditioning hardware 52. The conditioning hardware 52 may be configured to condition a signal (e.g. filter a signal). The conditioning hardware 52 is connected to a speaker 45 and a microphone 46. The processor 21 is also connected to an input device 48 and a driver controller 29. The driver controller 29 is coupled to a frame buffer 28, and to an array driver 22, which in turn is coupled to a display array 30. A power supply 50 provides power to all components as required by the particular exemplary display device 40 design.
  • The network interface 27 includes the antenna 43 and the transceiver 47 so that the exemplary display device 40 can communicate with one or more devices over a network. In one embodiment the network interface 27 may also have some processing capabilities to relieve requirements of the processor 21. The antenna 43 is any antenna known to those of skill in the art for transmitting and receiving signals. In one embodiment, the antenna transmits and receives RF signals according to the IEEE 802.11 standard, including IEEE 802.11(a), (b), or (g). In another embodiment, the antenna transmits and receives RF signals according to the BLUETOOTH standard. In the case of a cellular telephone, the antenna is designed to receive CDMA, GSM, AMPS or other known signals that are used to communicate within a wireless cell phone network. The transceiver 47 pre-processes the signals received from the antenna 43 so that they may be received by and further manipulated by the processor 21. The transceiver 47 also processes signals received from the processor 21 so that they may be transmitted from the exemplary display device 40 via the antenna 43.
  • In an alternative embodiment, the transceiver 47 can be replaced by a receiver. In yet another alternative embodiment, network interface 27 can be replaced by an image source, which can store or generate image data to be sent to the processor 21. For example, the image source can be a digital video disc (DVD) or a hard-disc drive that contains image data, or a software module that generates image data.
  • Processor 21 generally controls the overall operation of the exemplary display device 40. The processor 21 receives data, such as compressed image data from the network interface 27 or an image source, and processes the data into raw image data or into a format that is readily processed into raw image data. The processor 21 then sends the processed data to the driver controller 29 or to frame buffer 28 for storage. Raw data typically refers to the information that identifies the image characteristics at each location within an image. For example, such image characteristics can include color, saturation, and gray-scale level.
  • In one embodiment, the processor 21 includes a microcontroller, CPU, or logic unit to control operation of the exemplary display device 40. Conditioning hardware 52 generally includes amplifiers and filters for transmitting signals to the speaker 45, and for receiving signals from the microphone 46. Conditioning hardware 52 may be discrete components within the exemplary display device 40, or may be incorporated within the processor 21 or other components.
  • The driver controller 29 takes the raw image data generated by the processor 21 either directly from the processor 21 or from the frame buffer 28 and reformats the raw image data appropriately for high speed transmission to the array driver 22. Specifically, the driver controller 29 reformats the raw image data into a data flow having a raster-like format, such that it has a time order suitable for scanning across the display array 30. Then the driver controller 29 sends the formatted information to the array driver 22. Although a driver controller 29, such as a LCD controller, is often associated with the system processor 21 as a stand-alone Integrated Circuit (IC), such controllers may be implemented in many ways. They may be embedded in the processor 21 as hardware, embedded in the processor 21 as software, or fully integrated in hardware with the array driver 22.
  • Typically, the array driver 22 receives the formatted information from the driver controller 29 and reformats the video data into a parallel set of waveforms that are applied many times per second to the hundreds and sometimes thousands of leads coming from the display's x-y matrix of pixels.
  • In one embodiment, the driver controller 29, array driver 22, and display array 30 are appropriate for any of the types of displays described herein. For example, in one embodiment, driver controller 29 is a conventional display controller or a bi-stable display controller (e.g., an interferometric modulator controller). In another embodiment, array driver 22 is a conventional driver or a bi-stable display driver (e.g., an interferometric modulator display driver). In one embodiment, a driver controller 29 is integrated with the array driver 22. Such an embodiment is common in highly integrated systems such as cellular phones, watches, and other small area displays. In yet another embodiment, display array 30 is a typical display array or a bi-stable display array (e.g., a display including an array of interferometric modulators).
  • The input device 48 allows a user to control the operation of the exemplary display device 40. In one embodiment, input device 48 includes a keypad, such as a QWERTY keyboard or a telephone keypad, a button, a switch, a touch-sensitive screen, a pressure- or heat-sensitive membrane. In one embodiment, the microphone 46 is an input device for the exemplary display device 40. When the microphone 46 is used to input data to the device, voice commands may be provided by a user for controlling operations of the exemplary display device 40.
  • Power supply 50 can include a variety of energy storage devices as are well known in the art. For example, in one embodiment, power supply 50 is a rechargeable battery, such as a nickel-cadmium battery or a lithium ion battery. In another embodiment, power supply 50 is a renewable energy source, a capacitor, or a solar cell, including a plastic solar cell, and solar-cell paint. In another embodiment, power supply 50 is configured to receive power from a wall outlet.
  • In some embodiments control programmability resides, as described above, in a driver controller which can be located in several places in the electronic display system. In some cases control programmability resides in the array driver 22. Those of skill in the art will recognize that the above-described optimization may be implemented in any number of hardware and/or software components and in various configurations.
  • Various implementations of an interferometric modulator display have been described. Nevertheless, one of ordinary skill in the art will readily recognize that there that various modifications may be made to the implementations, and any variation would be within the spirit and scope of the present invention. For example, the process steps described above in connection with FIGS. 8A-8B may be performed in a different order and still achieve desirable results. In addition, the substrate can be treated so that scatterers are embedded within the substrate. Further, processes for creating etch hole (e.g., to release a sacrificial layer) are compatible with process steps discussed above. Accordingly, many modifications may be made by one of ordinary skill in the art without de parting from the spirit can scope of the following claims.

Claims (20)

1. A display comprising:
a plurality of display elements having a viewing side;
a backlight positioned on a side of the plurality of display elements opposite the viewing side; and
one or more waveguides positioned between the display elements, the one or more waveguides configured to provide a path for light emitted by the backlight to illuminate the display elements.
2. The display of claim 1, wherein the one or more waveguides comprises one or more posts configured to support at least a portion of the display elements.
3. The display of claim 1, wherein the one or more waveguides are configured to direct the light emitted by the backlight to the viewing side of the display elements.
4. The display of claim 1, wherein the display elements are reflective display elements.
5. The display of claim 1, where in the display elements are micro electromechanical display elements.
6. The display of claim 5, wherein the display elements comprise interferometric modulators.
7. The display of claim 6, wherein the interferometric modulators comprise:
an optical stack coupled to a transparent substrate;
a reflective layer over the optical stack; and
one or more posts to support the reflective layer, the one or more posts comprising the one or more waveguides.
8. The display of claim 1, further comprising a plurality of light scatterers or reflectors configured to redirect the light passing through the one or more waveguides to the display elements.
9. The display of claim 8, further comprising one or more reflecting surfaces arranged to direct light emitted by the one or more waveguides to the plurality of light scatterers or reflectors.
10. The display of claim 8, further comprising a glass layer on the viewing side of the display elements, the glass layer including the plurality of light scatterers or reflectors.
11. The display of claim 1, further comprising:
a processor in electrical communication with the display elements, the processor configured to process image data; and
a memory device in electrical communication with the processor.
12. A display comprising:
a plurality of means for modulating light, the plurality of light modulating means having a viewing side;
a means for emitting light positioned on a side of the plurality of light modulating means opposite the viewing side; and
one or more means for guiding light positioned between the plurality of light modulating means, the one or more light guiding means configured to provide a path for light emitted by the light emitting means to illuminate the plurality of light modulating means.
13. The display of claim 12, wherein the one or more light guiding means comprise one or more means for supporting at least a portion of the light modulating means.
14. The display of claim 12, wherein the one or more light guiding means are configured to direct the light emitted by the light emitting means to the viewing side of the plurality of light modulating means.
15. The display of claim 12, wherein the plurality of light modulating means comprise:
an first means for reflecting coupled to a transparent substrate means;
a second means for reflecting, said second reflecting means being movable and positioned over the first reflecting means; and
means for supporting the second reflecting means, wherein the supporting means comprises the light guiding means.
16. The display of claim 12, further comprising a plurality of means for scattering or reflecting light configured to redirect the light passing through the light guiding means to the light modulating means.
17. The display of claim 16, further comprising a third means for reflecting arranged to direct light from the light guiding means to the plurality of light scattering or reflecting means.
18. The display of claim 12, wherein the plurality of light modulating means comprises a plurality of display elements, or wherein the light emitting means comprises a backlight, or wherein the one or more light guiding means comprises one or more light guides.
19. A method for providing a display, the method comprising:
providing a plurality of display elements having a viewing side;
positioning a backlight on a side of the plurality of display elements opposite the viewing side; and
forming one or more waveguides between the display elements, wherein the one or more waveguides are configured to provide a path for light emitted by the backlight to illuminate the display elements.
20. The method of claim 19, wherein providing a plurality of display elements comprises:
providing a transparent substrate; and
forming a plurality of interferometric modulators including:
coupling an optical stack to the transparent substrate;
forming a reflective layer over the optical stack; and
forming one or more posts to support the reflective layer, the one or more posts comprising the one or more waveguides.
US13/092,827 2006-02-17 2011-04-22 Method and apparatus for lighting a display device Abandoned US20110199667A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US13/092,827 US20110199667A1 (en) 2006-02-17 2011-04-22 Method and apparatus for lighting a display device

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/357,702 US7603001B2 (en) 2006-02-17 2006-02-17 Method and apparatus for providing back-lighting in an interferometric modulator display device
US12/544,184 US7933475B2 (en) 2006-02-17 2009-08-19 Method and apparatus for providing back-lighting in a display device
US13/092,827 US20110199667A1 (en) 2006-02-17 2011-04-22 Method and apparatus for lighting a display device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US12/544,184 Continuation US7933475B2 (en) 2006-02-17 2009-08-19 Method and apparatus for providing back-lighting in a display device

Publications (1)

Publication Number Publication Date
US20110199667A1 true US20110199667A1 (en) 2011-08-18

Family

ID=38428254

Family Applications (3)

Application Number Title Priority Date Filing Date
US11/357,702 Expired - Fee Related US7603001B2 (en) 2006-02-17 2006-02-17 Method and apparatus for providing back-lighting in an interferometric modulator display device
US12/544,184 Expired - Fee Related US7933475B2 (en) 2006-02-17 2009-08-19 Method and apparatus for providing back-lighting in a display device
US13/092,827 Abandoned US20110199667A1 (en) 2006-02-17 2011-04-22 Method and apparatus for lighting a display device

Family Applications Before (2)

Application Number Title Priority Date Filing Date
US11/357,702 Expired - Fee Related US7603001B2 (en) 2006-02-17 2006-02-17 Method and apparatus for providing back-lighting in an interferometric modulator display device
US12/544,184 Expired - Fee Related US7933475B2 (en) 2006-02-17 2009-08-19 Method and apparatus for providing back-lighting in a display device

Country Status (2)

Country Link
US (3) US7603001B2 (en)
WO (1) WO2008039229A2 (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090225394A1 (en) * 2004-09-27 2009-09-10 Idc, Llc System and method of illuminating interferometric modulators using backlighting
US8068710B2 (en) 2007-12-07 2011-11-29 Qualcomm Mems Technologies, Inc. Decoupled holographic film and diffuser
US8872085B2 (en) 2006-10-06 2014-10-28 Qualcomm Mems Technologies, Inc. Display device having front illuminator with turning features
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US8971675B2 (en) 2006-01-13 2015-03-03 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US8979349B2 (en) 2009-05-29 2015-03-17 Qualcomm Mems Technologies, Inc. Illumination devices and methods of fabrication thereof
US9019183B2 (en) 2006-10-06 2015-04-28 Qualcomm Mems Technologies, Inc. Optical loss structure integrated in an illumination apparatus
US9019590B2 (en) 2004-02-03 2015-04-28 Qualcomm Mems Technologies, Inc. Spatial light modulator with integrated optical compensation structure
US9025235B2 (en) 2002-12-25 2015-05-05 Qualcomm Mems Technologies, Inc. Optical interference type of color display having optical diffusion layer between substrate and electrode
US9110289B2 (en) 1998-04-08 2015-08-18 Qualcomm Mems Technologies, Inc. Device for modulating light with multiple electrodes

Families Citing this family (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6674562B1 (en) 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US7907319B2 (en) 1995-11-06 2011-03-15 Qualcomm Mems Technologies, Inc. Method and device for modulating light with optical compensation
WO2003007049A1 (en) 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US7706050B2 (en) 2004-03-05 2010-04-27 Qualcomm Mems Technologies, Inc. Integrated modulator illumination
US7855824B2 (en) * 2004-03-06 2010-12-21 Qualcomm Mems Technologies, Inc. Method and system for color optimization in a display
US7349141B2 (en) 2004-09-27 2008-03-25 Idc, Llc Method and post structures for interferometric modulation
US7813026B2 (en) 2004-09-27 2010-10-12 Qualcomm Mems Technologies, Inc. System and method of reducing color shift in a display
US7898521B2 (en) 2004-09-27 2011-03-01 Qualcomm Mems Technologies, Inc. Device and method for wavelength filtering
US7911428B2 (en) 2004-09-27 2011-03-22 Qualcomm Mems Technologies, Inc. Method and device for manipulating color in a display
US8362987B2 (en) 2004-09-27 2013-01-29 Qualcomm Mems Technologies, Inc. Method and device for manipulating color in a display
US7710632B2 (en) 2004-09-27 2010-05-04 Qualcomm Mems Technologies, Inc. Display device having an array of spatial light modulators with integrated color filters
US7710636B2 (en) 2004-09-27 2010-05-04 Qualcomm Mems Technologies, Inc. Systems and methods using interferometric optical modulators and diffusers
US7928928B2 (en) 2004-09-27 2011-04-19 Qualcomm Mems Technologies, Inc. Apparatus and method for reducing perceived color shift
US7630123B2 (en) 2004-09-27 2009-12-08 Qualcomm Mems Technologies, Inc. Method and device for compensating for color shift as a function of angle of view
US7508571B2 (en) 2004-09-27 2009-03-24 Idc, Llc Optical films for controlling angular characteristics of displays
US7750886B2 (en) * 2004-09-27 2010-07-06 Qualcomm Mems Technologies, Inc. Methods and devices for lighting displays
US7807488B2 (en) 2004-09-27 2010-10-05 Qualcomm Mems Technologies, Inc. Display element having filter material diffused in a substrate of the display element
US7561323B2 (en) 2004-09-27 2009-07-14 Idc, Llc Optical films for directing light towards active areas of displays
US7603001B2 (en) 2006-02-17 2009-10-13 Qualcomm Mems Technologies, Inc. Method and apparatus for providing back-lighting in an interferometric modulator display device
US8004743B2 (en) 2006-04-21 2011-08-23 Qualcomm Mems Technologies, Inc. Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display
US7766498B2 (en) 2006-06-21 2010-08-03 Qualcomm Mems Technologies, Inc. Linear solid state illuminator
US7845841B2 (en) 2006-08-28 2010-12-07 Qualcomm Mems Technologies, Inc. Angle sweeping holographic illuminator
US8107155B2 (en) 2006-10-06 2012-01-31 Qualcomm Mems Technologies, Inc. System and method for reducing visual artifacts in displays
US7855827B2 (en) 2006-10-06 2010-12-21 Qualcomm Mems Technologies, Inc. Internal optical isolation structure for integrated front or back lighting
EP1958010A2 (en) 2006-10-10 2008-08-20 Qualcomm Mems Technologies, Inc Display device with diffractive optics
US7864395B2 (en) 2006-10-27 2011-01-04 Qualcomm Mems Technologies, Inc. Light guide including optical scattering elements and a method of manufacture
US7777954B2 (en) 2007-01-30 2010-08-17 Qualcomm Mems Technologies, Inc. Systems and methods of providing a light guiding layer
US7733439B2 (en) 2007-04-30 2010-06-08 Qualcomm Mems Technologies, Inc. Dual film light guide for illuminating displays
US8058549B2 (en) * 2007-10-19 2011-11-15 Qualcomm Mems Technologies, Inc. Photovoltaic devices with integrated color interferometric film stacks
EP2212926A2 (en) 2007-10-19 2010-08-04 QUALCOMM MEMS Technologies, Inc. Display with integrated photovoltaics
US20090126792A1 (en) * 2007-11-16 2009-05-21 Qualcomm Incorporated Thin film solar concentrator/collector
WO2009065069A1 (en) * 2007-11-16 2009-05-22 Qualcomm Mems Technologies, Inc. Thin film planar sonar concentrator/ collector and diffusor used with an active display
US8941631B2 (en) * 2007-11-16 2015-01-27 Qualcomm Mems Technologies, Inc. Simultaneous light collection and illumination on an active display
US7949213B2 (en) 2007-12-07 2011-05-24 Qualcomm Mems Technologies, Inc. Light illumination of displays with front light guide and coupling elements
EP2232569A2 (en) 2007-12-17 2010-09-29 QUALCOMM MEMS Technologies, Inc. Photovoltaics with interferometric back side masks
WO2009102731A2 (en) 2008-02-12 2009-08-20 Qualcomm Mems Technologies, Inc. Devices and methods for enhancing brightness of displays using angle conversion layers
WO2009102733A2 (en) 2008-02-12 2009-08-20 Qualcomm Mems Technologies, Inc. Integrated front light diffuser for reflective displays
WO2009129264A1 (en) * 2008-04-15 2009-10-22 Qualcomm Mems Technologies, Inc. Light with bi-directional propagation
TWI382551B (en) * 2008-11-06 2013-01-11 Ind Tech Res Inst Solar concentrating module
KR20110113746A (en) * 2009-01-23 2011-10-18 퀄컴 엠이엠스 테크놀로지스, 인크. Integrated light emitting and light detecting device
US8172417B2 (en) 2009-03-06 2012-05-08 Qualcomm Mems Technologies, Inc. Shaped frontlight reflector for use with display
US20100195310A1 (en) * 2009-02-04 2010-08-05 Qualcomm Mems Technologies, Inc. Shaped frontlight reflector for use with display
WO2011130715A2 (en) 2010-04-16 2011-10-20 Flex Lighting Ii, Llc Illumination device comprising a film-based lightguide
MX2012012034A (en) 2010-04-16 2013-05-30 Flex Lighting Ii Llc Front illumination device comprising a film-based lightguide.
US8848294B2 (en) 2010-05-20 2014-09-30 Qualcomm Mems Technologies, Inc. Method and structure capable of changing color saturation
US8902484B2 (en) 2010-12-15 2014-12-02 Qualcomm Mems Technologies, Inc. Holographic brightness enhancement film
US9164219B2 (en) 2011-11-14 2015-10-20 Nano-Optic Devices, Llc Frontlight unit for reflective displays
US8596846B2 (en) 2012-03-16 2013-12-03 Nano-Optic Devices, Llc Frontlight unit for enhancing illumination of a reflective display

Citations (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6040937A (en) * 1994-05-05 2000-03-21 Etalon, Inc. Interferometric modulation
US20010012159A1 (en) * 2000-02-02 2001-08-09 Seiji Umemoto Optical film
US20020149584A1 (en) * 2001-04-13 2002-10-17 Simpson John T. Reflective coherent spatial light modulator
US6603520B2 (en) * 2000-12-21 2003-08-05 Nitto Denko Corporation Optical film and liquid-crystal display device
US6631998B2 (en) * 2000-09-05 2003-10-14 Minebea Co., Ltd. Spread illuminating apparatus
US6652109B2 (en) * 2000-12-14 2003-11-25 Alps Electric Co., Ltd. Surface light emission device, method of manufacturing the same, and liquid crystal display device
US6674119B2 (en) * 2001-07-02 2004-01-06 Fujitsu Limited Non-volatile semiconductor memory device and semiconductor integrated circuit
US20040188599A1 (en) * 2000-06-29 2004-09-30 Pierre Viktorovitch Optoelectronic device with integrated wavelength filtering
US20050120553A1 (en) * 2003-12-08 2005-06-09 Brown Dirk D. Method for forming MEMS grid array connector
US20060020553A1 (en) * 2004-07-26 2006-01-26 Septon Daven W License proxy process to facilitate license sharing between a plurality of applications
US20060132383A1 (en) * 2004-09-27 2006-06-22 Idc, Llc System and method for illuminating interferometric modulator display
US20060209012A1 (en) * 2005-02-23 2006-09-21 Pixtronix, Incorporated Devices having MEMS displays
US20060209385A1 (en) * 2005-03-15 2006-09-21 Motorola, Inc. Microelectromechanical system optical apparatus and method
US7123216B1 (en) * 1994-05-05 2006-10-17 Idc, Llc Photonic MEMS and structures
US20060291769A1 (en) * 2005-05-27 2006-12-28 Eastman Kodak Company Light emitting source incorporating vertical cavity lasers and other MEMS devices within an electro-optical addressing architecture
US20070036492A1 (en) * 2005-08-15 2007-02-15 Lee Yee C System and method for fiber optics based direct view giant screen flat panel display
US20070047887A1 (en) * 2005-08-30 2007-03-01 Uni-Pixel Displays, Inc. Reducing light leakage and improving contrast ratio performance in FTIR display devices
US20070116424A1 (en) * 2005-11-11 2007-05-24 Chunghwa Picture Tubes, Ltd Backlight module structure for LED chip holder
US7256922B2 (en) * 2004-07-02 2007-08-14 Idc, Llc Interferometric modulators with thin film transistors
US7327510B2 (en) * 2004-09-27 2008-02-05 Idc, Llc Process for modifying offset voltage characteristics of an interferometric modulator
US20080100900A1 (en) * 2006-10-27 2008-05-01 Clarence Chui Light guide including optical scattering elements and a method of manufacture
US7388706B2 (en) * 1995-05-01 2008-06-17 Idc, Llc Photonic MEMS and structures
US7603001B2 (en) * 2006-02-17 2009-10-13 Qualcomm Mems Technologies, Inc. Method and apparatus for providing back-lighting in an interferometric modulator display device
US20120120682A1 (en) * 2010-11-16 2012-05-17 Qualcomm Mems Technologies, Inc. Illumination device with light guide coating

Family Cites Families (342)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2518647A (en) 1948-01-07 1950-08-15 Celanese Corp Interferometer means for thickness measurements
US3247392A (en) 1961-05-17 1966-04-19 Optical Coating Laboratory Inc Optical coating and assembly used as a band pass interference filter reflecting in the ultraviolet and infrared
DE1288651B (en) * 1963-06-28 1969-02-06 Siemens Ag Arrangement of electrical dipoles for wavelengths below 1 mm and method for producing such an arrangement
US3924929A (en) 1966-11-14 1975-12-09 Minnesota Mining & Mfg Retro-reflective sheet material
US3813265A (en) * 1970-02-16 1974-05-28 A Marks Electro-optical dipolar material
US3886310A (en) * 1973-08-22 1975-05-27 Westinghouse Electric Corp Electrostatically deflectable light valve with improved diffraction properties
US4287449A (en) 1978-02-03 1981-09-01 Sharp Kabushiki Kaisha Light-absorption film for rear electrodes of electroluminescent display panel
US4200472A (en) 1978-06-05 1980-04-29 The Regents Of The University Of California Solar power system and high efficiency photovoltaic cells used therein
US4228437A (en) 1979-06-26 1980-10-14 The United States Of America As Represented By The Secretary Of The Navy Wideband polarization-transforming electromagnetic mirror
DE3109653A1 (en) 1980-03-31 1982-01-28 Jenoptik Jena Gmbh, Ddr 6900 Jena "RESONANCE ABSORBER"
US4421381A (en) 1980-04-04 1983-12-20 Yokogawa Hokushin Electric Corp. Mechanical vibrating element
US4375312A (en) * 1980-08-07 1983-03-01 Hughes Aircraft Company Graded index waveguide structure and process for forming same
US4441791A (en) * 1980-09-02 1984-04-10 Texas Instruments Incorporated Deformable mirror light modulator
US4378567A (en) 1981-01-29 1983-03-29 Eastman Kodak Company Electronic imaging apparatus having means for reducing inter-pixel transmission nonuniformity
US4400577A (en) 1981-07-16 1983-08-23 Spear Reginald G Thin solar cells
US4633031A (en) 1982-09-24 1986-12-30 Todorof William J Multi-layer thin film, flexible silicon alloy photovoltaic cell
DE3402746A1 (en) 1984-01-27 1985-08-08 Robert Bosch Gmbh, 7000 Stuttgart Liquid crystal display
US4832459A (en) 1984-02-06 1989-05-23 Rogers Corporation Backlighting for electro-optical passive displays and transflective layer useful therewith
US5835255A (en) 1986-04-23 1998-11-10 Etalon, Inc. Visible spectrum modulator arrays
US4850682A (en) 1986-07-14 1989-07-25 Advanced Environmental Research Group Diffraction grating structures
IT1195125B (en) * 1986-08-07 1988-10-12 Fiat Auto Spa DOOR WITH SLIDING CRYSTAL FOR VEHICLES
EP0278038A1 (en) 1987-02-13 1988-08-17 Battelle-Institut e.V. Active flat type display panel
US5446479A (en) * 1989-02-27 1995-08-29 Texas Instruments Incorporated Multi-dimensional array video processor system
US4961617A (en) 1989-07-19 1990-10-09 Ferrydon Shahidi Fibre optic waveguide illuminating elements
JPH03170911A (en) 1989-11-30 1991-07-24 Pioneer Electron Corp Liquid crystal display device
US5164858A (en) 1990-03-07 1992-11-17 Deposition Sciences, Inc. Multi-spectral filter
FR2665270B1 (en) * 1990-07-27 1994-05-13 Etat Francais Cnet LIGHT SPACE MODULATOR DEVICE AND HIGH DYNAMIC CONOSCOPIC HOLOGRAPHY SYSTEM COMPRISING SUCH A MODULATOR DEVICE.
US5110370A (en) 1990-09-20 1992-05-05 United Solar Systems Corporation Photovoltaic device with decreased gridline shading and method for its manufacture
KR960002202B1 (en) 1991-02-04 1996-02-13 가부시끼가이샤 한도다이 에네르기 겐뀨쇼 Method of manufacturing liquid crystal electro-optical devices
US5142414A (en) 1991-04-22 1992-08-25 Koehler Dale R Electrically actuatable temporal tristimulus-color device
US5226099A (en) 1991-04-26 1993-07-06 Texas Instruments Incorporated Digital micromirror shutter device
US5221982A (en) 1991-07-05 1993-06-22 Faris Sadeg M Polarizing wavelength separator
US5515184A (en) 1991-11-12 1996-05-07 The University Of Alabama In Huntsville Waveguide hologram illuminators
US5326426A (en) 1991-11-14 1994-07-05 Tam Andrew C Undercut membrane mask for high energy photon patterning
US5356488A (en) 1991-12-27 1994-10-18 Rudolf Hezel Solar cell and method for its manufacture
US6381022B1 (en) * 1992-01-22 2002-04-30 Northeastern University Light modulating device
US5528720A (en) * 1992-03-23 1996-06-18 Minnesota Mining And Manufacturing Co. Tapered multilayer luminaire devices
US6002829A (en) 1992-03-23 1999-12-14 Minnesota Mining And Manufacturing Company Luminaire device
US5312513A (en) * 1992-04-03 1994-05-17 Texas Instruments Incorporated Methods of forming multiple phase light modulators
US5261970A (en) 1992-04-08 1993-11-16 Sverdrup Technology, Inc. Optoelectronic and photovoltaic devices with low-reflectance surfaces
US5638084A (en) * 1992-05-22 1997-06-10 Dielectric Systems International, Inc. Lighting-independent color video display
GB2269697A (en) 1992-08-11 1994-02-16 Sharp Kk Display device
JPH0695112A (en) 1992-09-16 1994-04-08 Hitachi Ltd Prism plate and information display device formed by using this plate
GB9219671D0 (en) 1992-09-17 1992-10-28 Canterbury Park Limited Ink
US5339179A (en) 1992-10-01 1994-08-16 International Business Machines Corp. Edge-lit transflective non-emissive display with angled interface means on both sides of light conducting panel
US5648860A (en) * 1992-10-09 1997-07-15 Ag Technology Co., Ltd. Projection type color liquid crystal optical apparatus
KR0168879B1 (en) * 1992-12-25 1999-04-15 기따지마 요시또시 Renticular lens, surface light source and liquid crystal display apparatus
US5671314A (en) 1993-01-15 1997-09-23 Sisters Of Prividence In Oregon Illuminator devices for ultraviolet light delivery and methods of making same
JP2823470B2 (en) 1993-03-09 1998-11-11 シャープ株式会社 Optical scanning device, display device using the same, and image information input / output device
US6674562B1 (en) * 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US5481385A (en) * 1993-07-01 1996-01-02 Alliedsignal Inc. Direct view display device with array of tapered waveguide on viewer side
US5673139A (en) 1993-07-19 1997-09-30 Medcom, Inc. Microelectromechanical television scanning device and method for making the same
FR2710161B1 (en) 1993-09-13 1995-11-24 Suisse Electronique Microtech Miniature array of light shutters.
CN1076125C (en) 1993-11-05 2001-12-12 时至准钟表股份有限公司 Solar battery device and its manufacture
NL9302091A (en) 1993-12-02 1995-07-03 R & S Renewable Energy Systems Photovoltaic solar panel and method for its manufacture.
US5659410A (en) 1993-12-28 1997-08-19 Enplas Corporation Surface light source device and liquid crystal display
TW334523B (en) 1994-03-02 1998-06-21 Toso Kk Back light
DE4407067C2 (en) * 1994-03-03 2003-06-18 Unaxis Balzers Ag Dielectric interference filter system, LCD display and CCD arrangement as well as method for producing a dielectric interference filter system
US5982540A (en) 1994-03-16 1999-11-09 Enplas Corporation Surface light source device with polarization function
US7460291B2 (en) * 1994-05-05 2008-12-02 Idc, Llc Separable modulator
US6680792B2 (en) * 1994-05-05 2004-01-20 Iridigm Display Corporation Interferometric modulation of radiation
US20010003487A1 (en) 1996-11-05 2001-06-14 Mark W. Miles Visible spectrum modulator arrays
US5805117A (en) 1994-05-12 1998-09-08 Samsung Electronics Co., Ltd. Large area tiled modular display system
US5671994A (en) 1994-06-08 1997-09-30 Clio Technologies, Inc. Flat and transparent front-lighting system using microprisms
US5892598A (en) 1994-07-15 1999-04-06 Matsushita Electric Industrial Co., Ltd. Head up display unit, liquid crystal display panel, and method of fabricating the liquid crystal display panel
US5647036A (en) 1994-09-09 1997-07-08 Deacon Research Projection display with electrically-controlled waveguide routing
US5544268A (en) * 1994-09-09 1996-08-06 Deacon Research Display panel with electrically-controlled waveguide-routing
JP3219943B2 (en) 1994-09-16 2001-10-15 株式会社東芝 Planar direct-view display device
JPH08136910A (en) 1994-11-07 1996-05-31 Hitachi Ltd Color liquid crystal display device and its production
US5815229A (en) 1994-11-21 1998-09-29 Proxima Corporation Microlens imbedded liquid crystal projection panel including thermal insulation layer
US5474865A (en) 1994-11-21 1995-12-12 Sematech, Inc. Globally planarized binary optical mask using buried absorbers
TW373116B (en) 1994-12-15 1999-11-01 Sharp Kk Lighting apparatus
US5550373A (en) 1994-12-30 1996-08-27 Honeywell Inc. Fabry-Perot micro filter-detector
JP3251452B2 (en) 1995-01-31 2002-01-28 シャープ株式会社 Backlight device for liquid crystal display device
JP3429384B2 (en) 1995-02-03 2003-07-22 株式会社エンプラス Sidelight type surface light source device
US5650865A (en) 1995-03-21 1997-07-22 Hughes Electronics Holographic backlight for flat panel displays
US5751388A (en) 1995-04-07 1998-05-12 Honeywell Inc. High efficiency polarized display
US5886688A (en) 1995-06-02 1999-03-23 National Semiconductor Corporation Integrated solar panel and liquid crystal display for portable computer or the like
US6046840A (en) * 1995-06-19 2000-04-04 Reflectivity, Inc. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US6712481B2 (en) 1995-06-27 2004-03-30 Solid State Opto Limited Light emitting panel assemblies
US5932309A (en) * 1995-09-28 1999-08-03 Alliedsignal Inc. Colored articles and compositions and methods for their fabrication
US6324192B1 (en) 1995-09-29 2001-11-27 Coretek, Inc. Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same
WO1997016765A1 (en) 1995-11-02 1997-05-09 Philips Electronics N.V. Picture display device
US5933183A (en) 1995-12-12 1999-08-03 Fuji Photo Film Co., Ltd. Color spatial light modulator and color printer using the same
US5771321A (en) 1996-01-04 1998-06-23 Massachusetts Institute Of Technology Micromechanical optical switch and flat panel display
GB2309609A (en) 1996-01-26 1997-07-30 Sharp Kk Observer tracking autostereoscopic directional display
JP2865618B2 (en) 1996-05-31 1999-03-08 嶋田プレシジョン株式会社 Light guide plate and light guide plate assembly
DE19622748A1 (en) 1996-06-05 1997-12-11 Forschungszentrum Juelich Gmbh Interference filter based on porous silicon
US5771124A (en) 1996-07-02 1998-06-23 Siliscape Compact display system with two stage magnification and immersed beam splitter
KR100213968B1 (en) 1996-07-15 1999-08-02 구자홍 Liquid crystal display device
FR2751398B1 (en) * 1996-07-16 1998-08-28 Thomson Csf LIGHTING DEVICE AND APPLICATION TO THE LIGHTING OF A TRANSMISSION SCREEN
WO1998013709A1 (en) 1996-09-24 1998-04-02 Seiko Epson Corporation Illuminating device and display using the device
JP3402138B2 (en) 1996-09-27 2003-04-28 株式会社日立製作所 Liquid crystal display
US5854872A (en) 1996-10-08 1998-12-29 Clio Technologies, Inc. Divergent angle rotator system and method for collimating light beams
US6486862B1 (en) * 1996-10-31 2002-11-26 Kopin Corporation Card reader display system
US5783614A (en) 1997-02-21 1998-07-21 Copytele, Inc. Polymeric-coated dielectric particles and formulation and method for preparing same
US5913594A (en) 1997-02-25 1999-06-22 Iimura; Keiji Flat panel light source device and passive display device utilizing the light source device
US6123431A (en) 1997-03-19 2000-09-26 Sanyo Electric Co., Ltd Backlight apparatus and light guide plate
EP0867747A3 (en) 1997-03-25 1999-03-03 Sony Corporation Reflective display device
JP3231655B2 (en) * 1997-03-28 2001-11-26 シャープ株式会社 Forward illumination device and reflection type liquid crystal display device having the same
US6879354B1 (en) * 1997-03-28 2005-04-12 Sharp Kabushiki Kaisha Front-illuminating device and a reflection-type liquid crystal display using such a device
EP0913721B1 (en) 1997-05-14 2004-04-28 Seiko Epson Corporation Display and electronic device comprising the same
GB9710062D0 (en) 1997-05-16 1997-07-09 British Tech Group Optical devices and methods of fabrication thereof
US5883684A (en) 1997-06-19 1999-03-16 Three-Five Systems, Inc. Diffusively reflecting shield optically, coupled to backlit lightguide, containing LED's completely surrounded by the shield
US6008449A (en) 1997-08-19 1999-12-28 Cole; Eric D. Reflective concentrating solar cell assembly
FR2769382B1 (en) 1997-10-03 2000-12-01 Thomson Multimedia Sa REAR LIGHTING SYSTEM FOR A TRANSMISSIBLE ELECTRO-OPTICAL MODULATOR USING THE LIGHT POLARIZATION EFFECT
US6273577B1 (en) 1997-10-31 2001-08-14 Sanyo Electric Co., Ltd. Light guide plate, surface light source using the light guide plate, and liquid crystal display using the surface light source
US6285424B1 (en) 1997-11-07 2001-09-04 Sumitomo Chemical Company, Limited Black mask, color filter and liquid crystal display
ATE272224T1 (en) 1997-11-17 2004-08-15 Max Planck Gesellschaft CONFOCAL SPECTROSCOPY SYSTEM AND METHOD
US6151089A (en) 1998-01-20 2000-11-21 Sony Corporation Reflection type display with light waveguide with inclined and planar surface sections
US5914804A (en) 1998-01-28 1999-06-22 Lucent Technologies Inc Double-cavity micromechanical optical modulator with plural multilayer mirrors
US6897855B1 (en) * 1998-02-17 2005-05-24 Sarnoff Corporation Tiled electronic display structure
US6195196B1 (en) * 1998-03-13 2001-02-27 Fuji Photo Film Co., Ltd. Array-type exposing device and flat type display incorporating light modulator and driving method thereof
WO1999049522A1 (en) 1998-03-25 1999-09-30 Tdk Corporation Solar cell module
JP2986773B2 (en) * 1998-04-01 1999-12-06 嶋田プレシジョン株式会社 Light guide plate for point light source
JP3644476B2 (en) 1998-04-30 2005-04-27 松下電器産業株式会社 Portable electronic devices
US6282010B1 (en) 1998-05-14 2001-08-28 Texas Instruments Incorporated Anti-reflective coatings for spatial light modulators
TW386175B (en) 1998-05-19 2000-04-01 Dainippon Printing Co Ltd Light reflective panel for reflective liquid crystal panel
US6900868B2 (en) 1998-07-07 2005-05-31 Fujitsu Display Technologies Corporation Liquid crystal display device
TW523627B (en) 1998-07-14 2003-03-11 Hitachi Ltd Liquid crystal display device
GB2340281A (en) 1998-08-04 2000-02-16 Sharp Kk A reflective liquid crystal display device
US6034813A (en) 1998-08-24 2000-03-07 Southwall Technologies, Inc. Wavelength selective applied films with glare control
JP2000075293A (en) 1998-09-02 2000-03-14 Matsushita Electric Ind Co Ltd Illuminator, touch panel with illumination and reflective liquid crystal display device
WO2000016136A1 (en) 1998-09-14 2000-03-23 Digilens, Inc. Holographic illumination system and holographic projection system
JP3119846B2 (en) 1998-09-17 2000-12-25 恵和株式会社 Light diffusion sheet and backlight unit using the same
JP3259692B2 (en) 1998-09-18 2002-02-25 株式会社日立製作所 Concentrating photovoltaic module, method of manufacturing the same, and concentrating photovoltaic system
EP0992837B1 (en) 1998-10-05 2010-06-16 Semiconductor Energy Laboratory Co, Ltd. Reflection type semiconductor display device
JP2000181367A (en) 1998-10-05 2000-06-30 Semiconductor Energy Lab Co Ltd Reflection type semiconductor display device
US6323834B1 (en) * 1998-10-08 2001-11-27 International Business Machines Corporation Micromechanical displays and fabrication method
US6199989B1 (en) 1998-10-29 2001-03-13 Sumitomo Chemical Company, Limited Optical plate having reflecting function and transmitting function
US6288824B1 (en) 1998-11-03 2001-09-11 Alex Kastalsky Display device based on grating electromechanical shutter
TW422346U (en) 1998-11-17 2001-02-11 Ind Tech Res Inst A reflector device with arc diffusion uint
JP3871176B2 (en) 1998-12-14 2007-01-24 シャープ株式会社 Backlight device and liquid crystal display device
JP2000193933A (en) 1998-12-25 2000-07-14 Matsushita Electric Works Ltd Display device
JP2000214804A (en) 1999-01-20 2000-08-04 Fuji Photo Film Co Ltd Light modulation element, aligner, and planar display
US6827456B2 (en) 1999-02-23 2004-12-07 Solid State Opto Limited Transreflectors, transreflector systems and displays and methods of making transreflectors
JP4377984B2 (en) 1999-03-10 2009-12-02 キヤノン株式会社 Color filter, manufacturing method thereof, and liquid crystal element using the color filter
US6292504B1 (en) 1999-03-16 2001-09-18 Raytheon Company Dual cavity laser resonator
JP3434465B2 (en) 1999-04-22 2003-08-11 三菱電機株式会社 Backlight for liquid crystal display
JP3657143B2 (en) 1999-04-27 2005-06-08 シャープ株式会社 Solar cell and manufacturing method thereof
TW477897B (en) 1999-05-07 2002-03-01 Sharp Kk Liquid crystal display device, method and device to measure cell thickness of liquid crystal display device, and phase difference plate using the method thereof
JP4328919B2 (en) * 1999-05-21 2009-09-09 株式会社トプコン Target device
US6428155B1 (en) 1999-05-25 2002-08-06 Silverbrook Research Pty Ltd Printer cartridge including machine readable ink
GB2350963A (en) 1999-06-09 2000-12-13 Secr Defence Holographic Displays
DE19927359A1 (en) * 1999-06-16 2000-12-21 Creavis Tech & Innovation Gmbh Electrophoretic displays made of light-scattering carrier materials
JP2001035222A (en) 1999-07-23 2001-02-09 Minebea Co Ltd Surface lighting system
US6448709B1 (en) 1999-09-15 2002-09-10 Industrial Technology Research Institute Field emission display panel having diode structure and method for fabricating
US7046905B1 (en) * 1999-10-08 2006-05-16 3M Innovative Properties Company Blacklight with structured surfaces
JP3457591B2 (en) 1999-10-08 2003-10-20 インターナショナル・ビジネス・マシーンズ・コーポレーション Liquid crystal display
US6421104B1 (en) 1999-10-22 2002-07-16 Motorola, Inc. Front illuminator for a liquid crystal display and method of making same
LT4842B (en) 1999-12-10 2001-09-25 Uab "Geola" Universal digital holographic printer and method
JP3524831B2 (en) 1999-12-15 2004-05-10 シャープ株式会社 Reflective and transmissive liquid crystal display
US6519073B1 (en) * 2000-01-10 2003-02-11 Lucent Technologies Inc. Micromechanical modulator and methods for fabricating the same
JP4442836B2 (en) 2000-02-02 2010-03-31 日東電工株式会社 Optical film
DE10004972A1 (en) * 2000-02-04 2001-08-16 Bosch Gmbh Robert Display device
JP4006918B2 (en) 2000-02-28 2007-11-14 オムロン株式会社 Surface light source device and manufacturing method thereof
JP4856805B2 (en) 2000-03-31 2012-01-18 スリーエム イノベイティブ プロパティズ カンパニー Optical laminate
WO2001081994A1 (en) 2000-04-21 2001-11-01 Seiko Epson Corporation Electrooptic device, projection type display and method for manufacturing electrooptic device
US20010055076A1 (en) 2000-04-28 2001-12-27 Keizou Ochi Reflective liquid crystal display apparatus
US6864882B2 (en) 2000-05-24 2005-03-08 Next Holdings Limited Protected touch panel display system
US6598987B1 (en) 2000-06-15 2003-07-29 Nokia Mobile Phones Limited Method and apparatus for distributing light to the user interface of an electronic device
JP3700078B2 (en) * 2000-07-11 2005-09-28 ミネベア株式会社 Surface lighting device
WO2002014740A1 (en) 2000-07-31 2002-02-21 Matsushita Electric Industrial Co., Ltd. Illuminator, image display, liquid crystal monitor, liquid crystal television, liquid crystal information terminal, and method for producing light guide plate
US6538813B1 (en) 2000-09-19 2003-03-25 Honeywell International Inc. Display screen with metallized tapered waveguides
US6466354B1 (en) 2000-09-19 2002-10-15 Silicon Light Machines Method and apparatus for interferometric modulation of light
JP3561685B2 (en) * 2000-09-20 2004-09-02 三洋電機株式会社 Linear light source device and lighting device using the same
US7072086B2 (en) * 2001-10-19 2006-07-04 Batchko Robert G Digital focus lens system
US6643067B2 (en) 2000-11-22 2003-11-04 Seiko Epson Corporation Electro-optical device and electronic apparatus
IL140318A0 (en) * 2000-12-14 2002-02-10 Planop Planar Optics Ltd Compact dynamic crossbar switch by means of planar optics
JP4266551B2 (en) 2000-12-14 2009-05-20 三菱レイヨン株式会社 Surface light source system and light deflection element used therefor
JP3551310B2 (en) 2000-12-20 2004-08-04 ミネベア株式会社 Touch panel for display device
US6925313B2 (en) 2001-02-07 2005-08-02 Hyundai Curitel Inc. Folder-type mobile communication terminal having double-sided LCD
JP2002245835A (en) 2001-02-15 2002-08-30 Minolta Co Ltd Illumination device, display device, and electronic equipment
US6700695B2 (en) 2001-03-14 2004-03-02 3M Innovative Properties Company Microstructured segmented electrode film for electronic displays
US6630786B2 (en) 2001-03-30 2003-10-07 Candescent Technologies Corporation Light-emitting device having light-reflective layer formed with, or/and adjacent to, material that enhances device performance
US6592234B2 (en) 2001-04-06 2003-07-15 3M Innovative Properties Company Frontlit display
JP2002333618A (en) 2001-05-07 2002-11-22 Nitto Denko Corp Reflection type liquid crystal display device
EP1397610B1 (en) 2001-06-01 2007-12-12 Philips Lumileds Lighting Company LLC Compact illumination system and display device
GB0114862D0 (en) 2001-06-19 2001-08-08 Secr Defence Image replication system
JP2003007114A (en) 2001-06-26 2003-01-10 Sharp Corp Front light and reflection type display device using the same
JP4526223B2 (en) 2001-06-29 2010-08-18 シャープ株式会社 Wiring member, solar cell module and manufacturing method thereof
KR100799156B1 (en) * 2001-07-13 2008-01-29 삼성전자주식회사 Light guided panel and method for fabricating thereof and liquid crystal display device using the same
JP2003031017A (en) * 2001-07-13 2003-01-31 Minebea Co Ltd Planar lighting device
JP3909812B2 (en) 2001-07-19 2007-04-25 富士フイルム株式会社 Display element and exposure element
TWI225916B (en) 2001-07-27 2005-01-01 Nissen Kagaku Kk Planar lighting device
JP4213897B2 (en) 2001-08-07 2009-01-21 株式会社日立製作所 Method of manufacturing transfer pattern of microlens array
JP2003057653A (en) 2001-08-21 2003-02-26 Citizen Watch Co Ltd Liquid crystal display device
JP4671562B2 (en) 2001-08-31 2011-04-20 富士通株式会社 Illumination device and liquid crystal display device
JP2005504413A (en) * 2001-09-26 2005-02-10 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Waveguide, edge illumination illumination device and display device having such a waveguide or device
JP4050119B2 (en) 2001-10-02 2008-02-20 シャープ株式会社 Liquid crystal display
JP2003131215A (en) 2001-10-29 2003-05-08 Optrex Corp Reflection type display device
JP2006502421A (en) 2001-11-06 2006-01-19 キーオティ Image projection device
CN1602451A (en) * 2001-11-07 2005-03-30 应用材料有限公司 Maskless photon-electron spot-grid array printer
KR100774256B1 (en) 2001-11-08 2007-11-08 엘지.필립스 엘시디 주식회사 liquid crystal display devices
US7128459B2 (en) * 2001-11-12 2006-10-31 Nidec Copal Corporation Light-guide plate and method for manufacturing the same
KR100440405B1 (en) 2001-11-19 2004-07-14 삼성전자주식회사 Device for controlling output of video data using double buffering
US20030095401A1 (en) * 2001-11-20 2003-05-22 Palm, Inc. Non-visible light display illumination system and method
JP3801032B2 (en) * 2001-11-29 2006-07-26 日本電気株式会社 Light source and liquid crystal display device using the light source
JP2003167500A (en) 2001-11-30 2003-06-13 Art Nau:Kk Method for making hologram
US7253853B2 (en) 2001-12-04 2007-08-07 Rohm Co., Ltd. Liquid crystal display and lighting unit having parabolic surface
JP2003173713A (en) 2001-12-04 2003-06-20 Rohm Co Ltd Illumination device and liquid crystal display device
JP2006504116A (en) * 2001-12-14 2006-02-02 ディジタル・オプティクス・インターナショナル・コーポレイション Uniform lighting system
JP2003186008A (en) 2001-12-14 2003-07-03 Dainippon Printing Co Ltd Sheet for front light and display device using the same
JP3683212B2 (en) 2001-12-14 2005-08-17 Necアクセステクニカ株式会社 Mobile phone
JP3893421B2 (en) 2001-12-27 2007-03-14 富士フイルム株式会社 Light modulation element, light modulation element array, and exposure apparatus using the same
US6577429B1 (en) 2002-01-15 2003-06-10 Eastman Kodak Company Laser projection display system
US6794119B2 (en) * 2002-02-12 2004-09-21 Iridigm Display Corporation Method for fabricating a structure for a microelectromechanical systems (MEMS) device
US7369735B2 (en) 2002-02-15 2008-05-06 Biosynergetics, Inc. Apparatus for the collection and transmission of electromagnetic radiation
US6574033B1 (en) 2002-02-27 2003-06-03 Iridigm Display Corporation Microelectromechanical systems device and method for fabricating same
CN100592837C (en) 2002-03-01 2010-02-24 夏普株式会社 Light emitting device and display unit using the light emitting device and reading device
WO2003075207A2 (en) 2002-03-01 2003-09-12 Planar Systems, Inc. Reflection resistant touch screens
WO2003075051A1 (en) 2002-03-05 2003-09-12 Koninklijke Philips Electronics N.V. Illumination system combining diffuse homogeneous lighting with direct spot illumination
CN101261339A (en) 2002-03-14 2008-09-10 日本电气株式会社 Optical modulating/display device, production method therefor and display apparatus equipped with the optical modulating/displaying device
US6965468B2 (en) * 2003-07-03 2005-11-15 Reflectivity, Inc Micromirror array having reduced gap between adjacent micromirrors of the micromirror array
KR20030081662A (en) 2002-04-12 2003-10-22 삼성에스디아이 주식회사 Solar cell with double layer antireflection coating
GB2388236A (en) * 2002-05-01 2003-11-05 Cambridge Display Tech Ltd Display and driver circuits
US6689949B2 (en) 2002-05-17 2004-02-10 United Innovations, Inc. Concentrating photovoltaic cavity converters for extreme solar-to-electric conversion efficiencies
JP4123415B2 (en) 2002-05-20 2008-07-23 ソニー株式会社 Solid-state imaging device
GB2389960A (en) 2002-06-20 2003-12-24 Suisse Electronique Microtech Four-tap demodulation pixel
DE10228946B4 (en) 2002-06-28 2004-08-26 Universität Bremen Optical modulator, display, use of an optical modulator and method for producing an optical modulator
US6741377B2 (en) * 2002-07-02 2004-05-25 Iridigm Display Corporation Device having a light-absorbing mask and a method for fabricating same
US7019734B2 (en) 2002-07-17 2006-03-28 3M Innovative Properties Company Resistive touch sensor having microstructured conductive layer
US6738194B1 (en) * 2002-07-22 2004-05-18 The United States Of America As Represented By The Secretary Of The Navy Resonance tunable optical filter
US7019876B2 (en) * 2002-07-29 2006-03-28 Hewlett-Packard Development Company, L.P. Micro-mirror with rotor structure
TWI266106B (en) * 2002-08-09 2006-11-11 Sanyo Electric Co Display device with a plurality of display panels
US7151532B2 (en) 2002-08-09 2006-12-19 3M Innovative Properties Company Multifunctional multilayer optical film
JP2004095390A (en) * 2002-08-30 2004-03-25 Fujitsu Display Technologies Corp Lighting device and display device
JP4057871B2 (en) * 2002-09-19 2008-03-05 東芝松下ディスプレイテクノロジー株式会社 Liquid crystal display
JP2004133430A (en) 2002-09-20 2004-04-30 Sony Corp Display element, display device, and micro lens array
US7406245B2 (en) * 2004-07-27 2008-07-29 Lumitex, Inc. Flat optical fiber light emitters
TW573170B (en) * 2002-10-11 2004-01-21 Toppoly Optoelectronics Corp Dual-sided display liquid crystal panel
JP4130115B2 (en) * 2002-10-16 2008-08-06 アルプス電気株式会社 Illumination device and liquid crystal display device
US6747785B2 (en) * 2002-10-24 2004-06-08 Hewlett-Packard Development Company, L.P. MEMS-actuated color light modulator and methods
US7370185B2 (en) 2003-04-30 2008-05-06 Hewlett-Packard Development Company, L.P. Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers
TW200413776A (en) 2002-11-05 2004-08-01 Matsushita Electric Ind Co Ltd Display element and display using the same
US7063449B2 (en) * 2002-11-21 2006-06-20 Element Labs, Inc. Light emitting diode (LED) picture element
JP4140499B2 (en) 2002-11-29 2008-08-27 カシオ計算機株式会社 Communication terminal and program
TWI289708B (en) * 2002-12-25 2007-11-11 Qualcomm Mems Technologies Inc Optical interference type color display
TW594155B (en) 2002-12-27 2004-06-21 Prime View Int Corp Ltd Optical interference type color display and optical interference modulator
JP2004219843A (en) 2003-01-16 2004-08-05 Seiko Epson Corp Optical modulator, and display device and their manufacturing methods
US7042444B2 (en) 2003-01-17 2006-05-09 Eastman Kodak Company OLED display and touch screen
US6871982B2 (en) 2003-01-24 2005-03-29 Digital Optics International Corporation High-density illumination system
US6844953B2 (en) * 2003-03-12 2005-01-18 Hewlett-Packard Development Company, L.P. Micro-mirror device including dielectrophoretic liquid
US20040188150A1 (en) 2003-03-25 2004-09-30 3M Innovative Properties Company High transparency touch screen
JP3829819B2 (en) 2003-05-08 2006-10-04 ソニー株式会社 Holographic stereogram creation device
WO2004106983A2 (en) 2003-05-22 2004-12-09 Optical Research Associates Illumination in optical systems
US7268840B2 (en) * 2003-06-18 2007-09-11 Citizen Holdings Co., Ltd. Display device employing light control member and display device manufacturing method
US20050024890A1 (en) 2003-06-19 2005-02-03 Alps Electric Co., Ltd. Light guide plate, surface light-emitting unit, and liquid crystal display device and method for manufacturing the same
US6917469B2 (en) 2003-06-27 2005-07-12 Japan Acryace Co., Ltd. Light diffusing laminated plate
DE10329917B4 (en) 2003-07-02 2005-12-22 Schott Ag Coated cover glass for photovoltaic modules
US7112885B2 (en) * 2003-07-07 2006-09-26 Board Of Regents, The University Of Texas System System, method and apparatus for improved electrical-to-optical transmitters disposed within printed circuit boards
DE10336352B4 (en) * 2003-08-08 2007-02-08 Schott Ag Method for producing scattered light structures on flat light guides
US6880959B2 (en) * 2003-08-25 2005-04-19 Timothy K. Houston Vehicle illumination guide
US7241220B2 (en) * 2003-09-10 2007-07-10 Igt Gaming device having pivoting symbol indicator
US20060279558A1 (en) 2003-09-22 2006-12-14 Koninklike Phillips Electronics N.V. Touc input screen using a light guide
US7218812B2 (en) 2003-10-27 2007-05-15 Rpo Pty Limited Planar waveguide with patterned cladding and method for producing the same
US7456805B2 (en) 2003-12-18 2008-11-25 3M Innovative Properties Company Display including a solid state light device and method using same
US6972827B2 (en) 2003-12-19 2005-12-06 Eastman Kodak Company Transflective film and display
US20050271325A1 (en) 2004-01-22 2005-12-08 Anderson Michael H Liquid crystal waveguide having refractive shapes for dynamically controlling light
US7342705B2 (en) 2004-02-03 2008-03-11 Idc, Llc Spatial light modulator with integrated optical compensation structure
US20060110090A1 (en) 2004-02-12 2006-05-25 Panorama Flat Ltd. Apparatus, method, and computer program product for substrated/componentized waveguided goggle system
TWI256941B (en) * 2004-02-18 2006-06-21 Qualcomm Mems Technologies Inc A micro electro mechanical system display cell and method for fabricating thereof
US7706050B2 (en) 2004-03-05 2010-04-27 Qualcomm Mems Technologies, Inc. Integrated modulator illumination
US7213958B2 (en) * 2004-06-30 2007-05-08 3M Innovative Properties Company Phosphor based illumination system having light guide and an interference reflector
KR20070043007A (en) 2004-08-18 2007-04-24 소니 가부시끼 가이샤 Backlight device and color liquid crystal display device
JP2006093104A (en) 2004-08-25 2006-04-06 Seiko Instruments Inc Lighting system, and display device using the same
US7561323B2 (en) 2004-09-27 2009-07-14 Idc, Llc Optical films for directing light towards active areas of displays
US7719500B2 (en) 2004-09-27 2010-05-18 Qualcomm Mems Technologies, Inc. Reflective display pixels arranged in non-rectangular arrays
US7710636B2 (en) * 2004-09-27 2010-05-04 Qualcomm Mems Technologies, Inc. Systems and methods using interferometric optical modulators and diffusers
US7161730B2 (en) * 2004-09-27 2007-01-09 Idc, Llc System and method for providing thermal compensation for an interferometric modulator display
US7417735B2 (en) 2004-09-27 2008-08-26 Idc, Llc Systems and methods for measuring color and contrast in specular reflective devices
US7750886B2 (en) * 2004-09-27 2010-07-06 Qualcomm Mems Technologies, Inc. Methods and devices for lighting displays
US7349141B2 (en) 2004-09-27 2008-03-25 Idc, Llc Method and post structures for interferometric modulation
US7355780B2 (en) 2004-09-27 2008-04-08 Idc, Llc System and method of illuminating interferometric modulators using backlighting
US20060066586A1 (en) * 2004-09-27 2006-03-30 Gally Brian J Touchscreens for displays
US7911428B2 (en) 2004-09-27 2011-03-22 Qualcomm Mems Technologies, Inc. Method and device for manipulating color in a display
US7508571B2 (en) * 2004-09-27 2009-03-24 Idc, Llc Optical films for controlling angular characteristics of displays
US7630123B2 (en) 2004-09-27 2009-12-08 Qualcomm Mems Technologies, Inc. Method and device for compensating for color shift as a function of angle of view
US8031133B2 (en) 2004-09-27 2011-10-04 Qualcomm Mems Technologies, Inc. Method and device for manipulating color in a display
US7807488B2 (en) 2004-09-27 2010-10-05 Qualcomm Mems Technologies, Inc. Display element having filter material diffused in a substrate of the display element
US7564612B2 (en) * 2004-09-27 2009-07-21 Idc, Llc Photonic MEMS and structures
JP4445827B2 (en) 2004-10-07 2010-04-07 大日本印刷株式会社 Condensing sheet, surface light source device, and manufacturing method of condensing sheet
JP2006120571A (en) 2004-10-25 2006-05-11 Fujikura Ltd Lighting system
KR100735148B1 (en) * 2004-11-22 2007-07-03 (주)케이디티 Backlight unit by phosphorescent diffusion sheet
US8130210B2 (en) 2004-11-30 2012-03-06 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Touch input system using light guides
US20060130889A1 (en) 2004-12-22 2006-06-22 Motorola, Inc. Solar panel with optical films
US7339635B2 (en) 2005-01-14 2008-03-04 3M Innovative Properties Company Pre-stacked optical films with adhesive layer
WO2006081633A1 (en) 2005-02-07 2006-08-10 Rpo Pty Limited Waveguide design incorporating reflective optics
US20060187676A1 (en) 2005-02-18 2006-08-24 Sharp Kabushiki Kaisha Light guide plate, light guide device, lighting device, light guide system, and drive circuit
JP2006270021A (en) 2005-02-28 2006-10-05 Fuji Photo Film Co Ltd Laminated photoelectric conversion element
US7352501B2 (en) 2005-03-31 2008-04-01 Xerox Corporation Electrophoretic caps prepared from encapsulated electrophoretic particles
KR100681521B1 (en) 2005-04-06 2007-02-09 (주)케이디티 Backlight unit
JP4743846B2 (en) 2005-05-10 2011-08-10 シチズン電子株式会社 Optical communication apparatus and information equipment using the same
EP1941342A1 (en) 2005-10-24 2008-07-09 Rpo Pty Limited Improved optical elements for waveguide-based optical touch screens
US7760197B2 (en) 2005-10-31 2010-07-20 Hewlett-Packard Development Company, L.P. Fabry-perot interferometric MEMS electromagnetic wave modulator with zero-electric field
CN101360948B (en) 2005-11-15 2011-01-19 松下电器产业株式会社 Surface illuminator and liquid crystal display using same
JP2006065360A (en) 2005-11-16 2006-03-09 Omron Corp Light guide and display apparatus
US20070125415A1 (en) 2005-12-05 2007-06-07 Massachusetts Institute Of Technology Light capture with patterned solar cell bus wires
US20070133226A1 (en) 2005-12-13 2007-06-14 Eastman Kodak Company Polarizing turning film with multiple operating orientations
WO2007073203A1 (en) 2005-12-19 2007-06-28 Renewable Energy Corporation Asa Solar cell module
CN101310351B (en) 2006-01-20 2011-04-13 日本写真印刷株式会社 Capacitive light emitting switch and light emitting switch element used therefor
KR100678067B1 (en) 2006-02-28 2007-02-02 삼성전자주식회사 Touch sensor apparatus
JP2007271865A (en) 2006-03-31 2007-10-18 Hitachi Displays Ltd Liquid crystal display device
US20070235072A1 (en) 2006-04-10 2007-10-11 Peter Bermel Solar cell efficiencies through periodicity
WO2007128039A1 (en) 2006-05-01 2007-11-15 Rpo Pty Limited Waveguide materials for optical touch screens
US20080232135A1 (en) 2006-05-31 2008-09-25 3M Innovative Properties Company Light guide
US7876489B2 (en) 2006-06-05 2011-01-25 Pixtronix, Inc. Display apparatus with optical cavities
US7766498B2 (en) 2006-06-21 2010-08-03 Qualcomm Mems Technologies, Inc. Linear solid state illuminator
TWI331231B (en) 2006-08-04 2010-10-01 Au Optronics Corp Color filter and frbricating method thereof
US7845841B2 (en) * 2006-08-28 2010-12-07 Qualcomm Mems Technologies, Inc. Angle sweeping holographic illuminator
WO2008034184A1 (en) 2006-09-22 2008-03-27 Rpo Pty Limited Waveguide configurations for optical touch systems
US7679610B2 (en) 2006-09-28 2010-03-16 Honeywell International Inc. LCD touchscreen panel with external optical path
US7855827B2 (en) * 2006-10-06 2010-12-21 Qualcomm Mems Technologies, Inc. Internal optical isolation structure for integrated front or back lighting
EP2366943B1 (en) 2006-10-06 2013-04-17 Qualcomm Mems Technologies, Inc. Optical loss structure integrated in an illumination apparatus of a display
EP1943551A2 (en) 2006-10-06 2008-07-16 Qualcomm Mems Technologies, Inc. Light guide
US8107155B2 (en) * 2006-10-06 2012-01-31 Qualcomm Mems Technologies, Inc. System and method for reducing visual artifacts in displays
EP1977275A2 (en) 2006-10-06 2008-10-08 Qualcomm Mems Technologies, Inc. Increasing collimation of light from light bar to light panel using tapering
EP1958010A2 (en) 2006-10-10 2008-08-20 Qualcomm Mems Technologies, Inc Display device with diffractive optics
US20080105298A1 (en) 2006-11-02 2008-05-08 Guardian Industries Corp. Front electrode for use in photovoltaic device and method of making same
KR100951723B1 (en) 2006-12-28 2010-04-07 제일모직주식회사 Optical sheet for back light unit
US7777954B2 (en) 2007-01-30 2010-08-17 Qualcomm Mems Technologies, Inc. Systems and methods of providing a light guiding layer
WO2008125130A1 (en) 2007-04-12 2008-10-23 Nokia Corporation Keypad
TW200912200A (en) 2007-05-11 2009-03-16 Rpo Pty Ltd A transmissive body
JP2010533976A (en) 2007-07-18 2010-10-28 キユーデイー・ビジヨン・インコーポレーテツド Quantum dot-based light sheet useful for solid-state lighting
US7477809B1 (en) 2007-07-31 2009-01-13 Hewlett-Packard Development Company, L.P. Photonic guiding device
JP4384214B2 (en) 2007-09-27 2009-12-16 株式会社 日立ディスプレイズ Surface light emitting device, image display device, and image display device using the same
PL2048779T3 (en) 2007-10-08 2012-05-31 Whirlpool Co Capacitive touch switch and domestic appliance provided with such switch
US8058549B2 (en) 2007-10-19 2011-11-15 Qualcomm Mems Technologies, Inc. Photovoltaic devices with integrated color interferometric film stacks
US20090293955A1 (en) 2007-11-07 2009-12-03 Qualcomm Incorporated Photovoltaics with interferometric masks
US8941631B2 (en) 2007-11-16 2015-01-27 Qualcomm Mems Technologies, Inc. Simultaneous light collection and illumination on an active display
US20090126792A1 (en) 2007-11-16 2009-05-21 Qualcomm Incorporated Thin film solar concentrator/collector
US7949213B2 (en) 2007-12-07 2011-05-24 Qualcomm Mems Technologies, Inc. Light illumination of displays with front light guide and coupling elements
US8068710B2 (en) 2007-12-07 2011-11-29 Qualcomm Mems Technologies, Inc. Decoupled holographic film and diffuser
EP2232567A2 (en) 2007-12-11 2010-09-29 Evergreen Solar, Inc. Photovoltaic panel and cell with fine fingers and method of manufacture of the same
EP2232569A2 (en) 2007-12-17 2010-09-29 QUALCOMM MEMS Technologies, Inc. Photovoltaics with interferometric back side masks
US20090168459A1 (en) 2007-12-27 2009-07-02 Qualcomm Incorporated Light guide including conjugate film
WO2009102733A2 (en) 2008-02-12 2009-08-20 Qualcomm Mems Technologies, Inc. Integrated front light diffuser for reflective displays
US8851734B2 (en) 2008-03-27 2014-10-07 Skc Haas Display Films Co., Ltd. Light guiding film having light extraction features
JP2011517118A (en) 2008-04-11 2011-05-26 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド Methods for improving PV aesthetics and efficiency
WO2009129264A1 (en) 2008-04-15 2009-10-22 Qualcomm Mems Technologies, Inc. Light with bi-directional propagation
US8023167B2 (en) 2008-06-25 2011-09-20 Qualcomm Mems Technologies, Inc. Backlight displays
US8979349B2 (en) 2009-05-29 2015-03-17 Qualcomm Mems Technologies, Inc. Illumination devices and methods of fabrication thereof

Patent Citations (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7123216B1 (en) * 1994-05-05 2006-10-17 Idc, Llc Photonic MEMS and structures
US6040937A (en) * 1994-05-05 2000-03-21 Etalon, Inc. Interferometric modulation
US7388706B2 (en) * 1995-05-01 2008-06-17 Idc, Llc Photonic MEMS and structures
US20010012159A1 (en) * 2000-02-02 2001-08-09 Seiji Umemoto Optical film
US20040188599A1 (en) * 2000-06-29 2004-09-30 Pierre Viktorovitch Optoelectronic device with integrated wavelength filtering
US6927387B2 (en) * 2000-06-29 2005-08-09 Centre National De La Recherche Scientifique Optoelectronic device with integrated wavelength filtering
US6631998B2 (en) * 2000-09-05 2003-10-14 Minebea Co., Ltd. Spread illuminating apparatus
US6652109B2 (en) * 2000-12-14 2003-11-25 Alps Electric Co., Ltd. Surface light emission device, method of manufacturing the same, and liquid crystal display device
US6603520B2 (en) * 2000-12-21 2003-08-05 Nitto Denko Corporation Optical film and liquid-crystal display device
US20020149584A1 (en) * 2001-04-13 2002-10-17 Simpson John T. Reflective coherent spatial light modulator
US6674119B2 (en) * 2001-07-02 2004-01-06 Fujitsu Limited Non-volatile semiconductor memory device and semiconductor integrated circuit
US20050120553A1 (en) * 2003-12-08 2005-06-09 Brown Dirk D. Method for forming MEMS grid array connector
US7256922B2 (en) * 2004-07-02 2007-08-14 Idc, Llc Interferometric modulators with thin film transistors
US20060020553A1 (en) * 2004-07-26 2006-01-26 Septon Daven W License proxy process to facilitate license sharing between a plurality of applications
US20060132383A1 (en) * 2004-09-27 2006-06-22 Idc, Llc System and method for illuminating interferometric modulator display
US7327510B2 (en) * 2004-09-27 2008-02-05 Idc, Llc Process for modifying offset voltage characteristics of an interferometric modulator
US20060209012A1 (en) * 2005-02-23 2006-09-21 Pixtronix, Incorporated Devices having MEMS displays
US20060209385A1 (en) * 2005-03-15 2006-09-21 Motorola, Inc. Microelectromechanical system optical apparatus and method
US20060291769A1 (en) * 2005-05-27 2006-12-28 Eastman Kodak Company Light emitting source incorporating vertical cavity lasers and other MEMS devices within an electro-optical addressing architecture
US20070036492A1 (en) * 2005-08-15 2007-02-15 Lee Yee C System and method for fiber optics based direct view giant screen flat panel display
US20070047887A1 (en) * 2005-08-30 2007-03-01 Uni-Pixel Displays, Inc. Reducing light leakage and improving contrast ratio performance in FTIR display devices
US20070116424A1 (en) * 2005-11-11 2007-05-24 Chunghwa Picture Tubes, Ltd Backlight module structure for LED chip holder
US7603001B2 (en) * 2006-02-17 2009-10-13 Qualcomm Mems Technologies, Inc. Method and apparatus for providing back-lighting in an interferometric modulator display device
US7933475B2 (en) * 2006-02-17 2011-04-26 Qualcomm Mems Technologies, Inc. Method and apparatus for providing back-lighting in a display device
US20080100900A1 (en) * 2006-10-27 2008-05-01 Clarence Chui Light guide including optical scattering elements and a method of manufacture
US20120120682A1 (en) * 2010-11-16 2012-05-17 Qualcomm Mems Technologies, Inc. Illumination device with light guide coating

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US9110289B2 (en) 1998-04-08 2015-08-18 Qualcomm Mems Technologies, Inc. Device for modulating light with multiple electrodes
US9025235B2 (en) 2002-12-25 2015-05-05 Qualcomm Mems Technologies, Inc. Optical interference type of color display having optical diffusion layer between substrate and electrode
US9019590B2 (en) 2004-02-03 2015-04-28 Qualcomm Mems Technologies, Inc. Spatial light modulator with integrated optical compensation structure
US20090225394A1 (en) * 2004-09-27 2009-09-10 Idc, Llc System and method of illuminating interferometric modulators using backlighting
US8971675B2 (en) 2006-01-13 2015-03-03 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US8872085B2 (en) 2006-10-06 2014-10-28 Qualcomm Mems Technologies, Inc. Display device having front illuminator with turning features
US9019183B2 (en) 2006-10-06 2015-04-28 Qualcomm Mems Technologies, Inc. Optical loss structure integrated in an illumination apparatus
US8068710B2 (en) 2007-12-07 2011-11-29 Qualcomm Mems Technologies, Inc. Decoupled holographic film and diffuser
US8798425B2 (en) 2007-12-07 2014-08-05 Qualcomm Mems Technologies, Inc. Decoupled holographic film and diffuser
US8979349B2 (en) 2009-05-29 2015-03-17 Qualcomm Mems Technologies, Inc. Illumination devices and methods of fabrication thereof
US9121979B2 (en) 2009-05-29 2015-09-01 Qualcomm Mems Technologies, Inc. Illumination devices and methods of fabrication thereof

Also Published As

Publication number Publication date
US20070196040A1 (en) 2007-08-23
WO2008039229A3 (en) 2008-06-05
US20090310208A1 (en) 2009-12-17
WO2008039229A2 (en) 2008-04-03
US7603001B2 (en) 2009-10-13
US7933475B2 (en) 2011-04-26

Similar Documents

Publication Publication Date Title
US7933475B2 (en) Method and apparatus for providing back-lighting in a display device
US7446927B2 (en) MEMS switch with set and latch electrodes
US7304784B2 (en) Reflective display device having viewable display on both sides
US8023167B2 (en) Backlight displays
US8077380B2 (en) Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display
US7768690B2 (en) Backlight displays
US7916378B2 (en) Method and apparatus for providing a light absorbing mask in an interferometric modulator display
US7499208B2 (en) Current mode display driver circuit realization feature
US7719500B2 (en) Reflective display pixels arranged in non-rectangular arrays
US7349136B2 (en) Method and device for a display having transparent components integrated therein
US8194056B2 (en) Method and system for writing data to MEMS display elements
EP1949165B1 (en) MEMS switch with set and latch electrodes
US20120320010A1 (en) Backlight utilizing desiccant light turning array
US7791783B2 (en) Backlight displays

Legal Events

Date Code Title Description
STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION

AS Assignment

Owner name: SNAPTRACK, INC., CALIFORNIA

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:QUALCOMM MEMS TECHNOLOGIES, INC.;REEL/FRAME:039891/0001

Effective date: 20160830