US20110310922A1 - Laser resonator - Google Patents
Laser resonator Download PDFInfo
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- US20110310922A1 US20110310922A1 US13/141,294 US200913141294A US2011310922A1 US 20110310922 A1 US20110310922 A1 US 20110310922A1 US 200913141294 A US200913141294 A US 200913141294A US 2011310922 A1 US2011310922 A1 US 2011310922A1
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- laser
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
- H01S3/0941—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
- H01S3/109—Frequency multiplication, e.g. harmonic generation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/025—Constructional details of solid state lasers, e.g. housings or mountings
- H01S3/027—Constructional details of solid state lasers, e.g. housings or mountings comprising a special atmosphere inside the housing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
- H01S3/0346—Protection of windows or mirrors against deleterious effects
Definitions
- Embodiments of the present invention generally relate to laser resonators and, more specifically, to an enclosed laser resonator having a controlled environment.
- Laser systems such as high power laser systems, have a broad range of applications throughout the scientific, industrial and medical fields.
- Laser systems generally include a pump module, a gain medium and a laser resonator.
- the pump module includes laser diodes or bars that generate pump energy.
- the gain medium absorbs the pump energy and emits laser light responsive to the absorbed energy.
- the resonator is at the heart of the laser system. The resonator operates to generate a harmonic of the laser light output by the gain medium. It is this harmonic of the laser light that is output by the system.
- Embodiments of the invention are directed to a laser resonator for use in a laser system.
- One embodiment of the laser resonator comprises one or more laser resonator components, a container and a gas release system.
- the laser resonator components include a non-linear crystal, a beam polarization combiner, an optical lens, a mirror and/or an optical grating.
- the container encloses the one or more laser resonator components.
- the gas release system is configured to release a gas mixture into the container.
- the gas mixture includes an inert gas and/or an oxidative gas.
- the laser resonator comprises one or more laser resonator components, a container and an ozone generator.
- the laser resonator components include a non-linear crystal, a beam polarization combiner, an optical lens, a minor and/or an optical grating.
- the container encloses the one or more laser resonator components.
- the ozone generator is configure to introduce ozone gas into the container.
- FIGS. 1 and 2 are schematic illustrations of a laser system in accordance with embodiments of the invention.
- FIG. 3 is a schematic diagram of a laser resonator in accordance with embodiments of the invention.
- Embodiments of the invention are directed to a laser resonator, a laser system that includes the laser resonator and a method of operating a laser resonator.
- a detailed description of these embodiments is provided below with reference to the drawings. Elements depicted in the drawings that have the same or similar labels generally correspond to the same or similar elements.
- FIG. 1 is a schematic illustration of a laser system 100 in accordance with embodiments of the invention.
- the laser system 100 generally includes a pump module 102 , a gain medium 104 and a laser resonator 106 that is formed in accordance with embodiments described herein.
- the pump module 102 is configured to produce pump energy 108 .
- the gain medium 104 absorbs the pump energy 108 and responsively outputs light 112 .
- the laser resonator 106 receives the light 112 and generates a second harmonic of the light 112 , which forms the output laser 114 .
- the system 100 produces a high power output laser 114 of greater than 80 watts.
- FIG. 1 illustrates exemplary components 115 that are conventionally used in the laser resonator 106 to generate the output laser 114 .
- Embodiments of the laser resonator 106 include one or more of these exemplary components and other conventional laser resonator components.
- the exemplary laser resonator components include a non-linear crystal 116 , one or more minors 118 , a Q-switch 120 , one or more lenses 122 , a beam polarization combiner (e.g., PMUX) 124 and one or more optical gratings 126 .
- the non-linear crystal 116 generally operates to double the frequency of the input light 112 .
- Minors 118 can operate to reflect or transmit light in the resonator 106 .
- the Q-switch 120 operates to change the input light 112 into a train of short pulses with high peak power to increase the conversion efficiency of the second harmonic laser beam within the resonator 106 .
- the one or more lenses 122 , the beam polarization combiner 124 and the one or more optical gratings 126 can be used to manage the input light 112 and/or the second harmonic output laser 114 .
- the resonator 106 may comprise other components that are not described herein while remaining within the spirit and scope of the invention.
- the laser system 100 includes a pump module 102 , a gain medium 104 , and a laser resonator 106 .
- the gain medium 104 is a doped crystalline host that is configured to absorb the pump energy 108 generated by the pump module 102 having a wavelength that is within an operating wavelength range (i.e., absorption spectra) of the gain medium 104 .
- the gain medium 104 may be end-pumped (as shown) or side-pumped by the pump energy 108 .
- the pump energy 108 can be transmitted through a folding mirror 122 that is transmissive at the wavelength of the pump energy 108 .
- the gain medium 104 absorbs the pump energy 108 and responsively outputs the light 112 .
- the gain medium 104 is water cooled in exemplary embodiments, along the sides of the host.
- the gain medium 104 includes an undoped end cap 124 bonded on a first end 126 of the gain medium 104 , and/or an undoped end cap 128 bonded on a second end 130 of the gain medium 104 .
- the end 130 is coated so that it is reflective at the pump energy wavelength, while transmissive at a resonant mode of the system 100 . In this manner, the pump energy that is unabsorbed at the second end 120 is redirected back through the gain medium 104 to be absorbed.
- the laser resonator 106 is configured to generate an output laser 114 , which is a harmonic of the laser light 112 output from the gain medium 104 .
- the non-linear crystal (NLC) 116 is selected based on the gain medium 104 and the output light 112 .
- the laser resonator 106 includes a Q-switch 120 that operates to change the laser beam 112 into a train of short pulses with high peak power to increase the conversion efficiency of the second harmonic laser beam.
- the gain medium 104 comprises a yttrium-aluminum-garnet crystal (YAG) rod with neodymium atoms dispersed in the YAG rod to form a Nd:YAG gain medium 104 .
- the Nd:YAG gain medium 104 converts the pump light into the laser light 112 having a primary wavelength of 1064 nm.
- the non-linear crystal 116 of the laser resonator 106 is a lithium tri borate (LBO) crystal or a potassium titanyl phosphate crystal (KTP), for generating the second harmonic of the 1064 nm laser light 112 having a wavelength of 532 nm.
- LBO lithium tri borate
- KTP potassium titanyl phosphate crystal
- the laser resonator 106 includes reflecting mirrors 118 A, 118 B and 118 C.
- the mirrors 118 A, 118 B and 118 C are highly reflective at the primary wavelength (e.g., 1064 nm) of the input light 112 .
- the mirror 118 C is highly transmissive at the second harmonic output wavelength (e.g., 532 nm) of the output laser 114 .
- the primary wavelength laser beam 112 bounces back and forth along the path between the mirror 118 B and a mirror 132 , passing through the gain medium 104 and the non-linear crystal 116 to be frequency doubled to the second harmonic output wavelength (e.g., 532 nm) beam, which can be discharged through an output coupler 134 as the output laser light 114 .
- the second harmonic output wavelength e.g., 532 nm
- the Z-shaped resonant cavity can be configured as discussed in U.S. Pat. No. 5,025,446 by Kuizenga, imaging the resonant mode at one end of the gain medium 104 at the non-linear crystal 116 .
- the configuration described is stable and highly efficient for frequency conversion.
- the configuration shown in FIG. 2 using the Nd:YAG gain medium 104 and a LBO non-linear crystal 116 produces a frequency converted output laser 114 having a wavelength of 532 nm, as indicated above.
- the optical coupler 134 couples the output laser 114 to a waveguide, such as an optical fiber 136 .
- the system 100 includes an optical device 138 that discharges the output laser 114 as desired.
- the optical device 138 is a laser probe for use in surgical procedures.
- FIG. 3 is a schematic diagram of a laser resonator 106 in accordance with embodiments of the invention.
- the laser resonator 106 includes one or more of the resonator components 115 described above. These components are generally active in converting the input light 112 into the output laser 114 , as illustrated in FIG. 3 .
- One embodiment of the invention is directed toward maintaining a clean and dry environment for the laser resonator components 115 to produce a high quality output laser and improve the reliability of the system 100 relative to those of the prior art.
- This clean and dry environment is particularly important in high power laser systems, such as those generating output lasers 114 of 80 watts or more.
- the laser resonator 106 includes a container 140 that encloses the laser components 115 .
- the container 140 has a volume of greater than 10,000 cubic centimeters (cm 3 ). In one embodiment, the container has a volume of 15,000-20,000 cm 3 .
- the container 140 can be formed of any suitable material.
- the container 140 is formed of metal, such as aluminum with a surface layer of nickel plating.
- the container 140 is sealed or substantially sealed using, for example, adhesive tape, elastomeric gaskets, brazing, welding, flange sealant, and other sealing materials.
- One embodiment of the laser resonator 106 includes a gas release system 142 that is configured to release a gas mixture 144 into the container 140 and fill the interior chamber 143 with the gas mixture 144 .
- the release of the gas mixture 144 pressurizes the interior of the container 140 relative to the ambient pressure and prevents external contaminants from entering the container 140 .
- the container is not perfectly sealed and the slight pressurization of the container 140 may be bled through small openings in the container 140 .
- a valve 146 such as a bleed valve, may be used to discharge the gas mixture 144 out of the container when the pressure within the container 140 reaches a threshold value.
- Embodiments of the gas mixture 144 include substantially one gas and a plurality of gases.
- the gas mixture comprises one or more inert and/or noble gases.
- the inert and/or noble gas helps to maintain the environment within the container 140 , in which the resonator components 115 operate, clean and dry.
- Embodiments of the one or more inert gases for use in the gas mixture 144 include helium (He), nitrogen (N 2 ), neon (Ne), argon (Ar), krypton (Kr) and xenon (Xe). Other inert and/or noble gases may also be used in the mixture 144 .
- the gas mixture 144 comprises one or more oxidative gases.
- the one or more oxidative gases for use in the gas mixture 144 include oxygen (O 2 ), nitrogen trifluoride (NF 3 ), nitric oxide (NO) and ozone (O 3 ).
- Other oxidative gases may also be used in the mixture 144 .
- the one or more oxidative gases react to the light 112 and/or laser 114 to produce active oxygen atom free radicals that attack and decompose hydrocarbon contaminants as shown by the following reaction.
- hydrocarbons that typically produce films on the components 115 are removed from within the container 140 due to the one or more oxidative gases.
- This elimination, or at least reduction relative to resonators of the prior art, of such hydrocarbon films increases the lifespan of the laser resonator by reducing laser burn of the components 115 impacted by the laser 112 or 114 .
- the elimination or reduction of the formation of hydrocarbon films on the resonator components 115 is particularly important in high power laser systems 100 .
- Embodiments of the gas mixture 144 includes combinations of one or more of the inert gases with one or more of the oxidative gases.
- the gas mixture comprises a combination of helium and oxygen.
- the gas release system 142 includes a pressurized supply 148 of the gas mixture 146 , from which the gas mixture 144 is fed into the container 140 through, for example, a metering valve 150 .
- the pressurized supply comprises a tank 152 containing the pressurized gas mixture 144 .
- one or more of the gas components of the gas mixture 144 are contained in separate tanks, such as tank 152 and tank 152 ′. Gas flows from the multiple tanks 152 and 152 ′ are either mixed together or individually fed into the container 140 through separate control valves.
- the tank 152 contains an inert gas and the tank 152 ′ contains an oxidative gas.
- the gas release system 142 is contained within the container 140 .
- the laser resonator 106 includes an ozone generator 154 that generates ozone gas 156 and introduces the ozone gas 156 into the container 140 .
- Embodiments of the ozone generator include a device 158 that is configured to produce an arc 160 of electricity or corona discharge in ambient air or oxygen-enriched air. Conventional ozone generators may be used.
- the ozone generator 154 is located within the container 140 , as shown in FIG. 3 . In accordance with another embodiment, the ozone generator 154 is positioned outside of the container 140 and the generated ozone is fed into the container 140 through appropriate tubing. In one embodiment, the ozone generator 154 includes a valve, such as a metering valve, to control the volumetric flow rate of the ozone into the container 140 .
- the container 140 is hermetically sealed. In one embodiment, the sealed container 140 is filled with a gas mixture 144 in accordance with the embodiments described above. The sealed container 140 locks in the gas mixture making it unnecessary to continuously purge the container 140 .
- the resonator 106 includes a getter in the container 140 to absorb residual gases. In one embodiment, the resonator 106 includes a desiccant in the container 140 to absorb moisture.
Abstract
Description
- Embodiments of the present invention generally relate to laser resonators and, more specifically, to an enclosed laser resonator having a controlled environment.
- Laser systems, such as high power laser systems, have a broad range of applications throughout the scientific, industrial and medical fields. Laser systems generally include a pump module, a gain medium and a laser resonator. The pump module includes laser diodes or bars that generate pump energy. The gain medium absorbs the pump energy and emits laser light responsive to the absorbed energy. The resonator is at the heart of the laser system. The resonator operates to generate a harmonic of the laser light output by the gain medium. It is this harmonic of the laser light that is output by the system.
- Embodiments of the invention are directed to a laser resonator for use in a laser system. One embodiment of the laser resonator comprises one or more laser resonator components, a container and a gas release system. The laser resonator components include a non-linear crystal, a beam polarization combiner, an optical lens, a mirror and/or an optical grating. The container encloses the one or more laser resonator components. The gas release system is configured to release a gas mixture into the container. The gas mixture includes an inert gas and/or an oxidative gas.
- Another embodiment of the laser resonator comprises one or more laser resonator components, a container and an ozone generator. The laser resonator components include a non-linear crystal, a beam polarization combiner, an optical lens, a minor and/or an optical grating. The container encloses the one or more laser resonator components. The ozone generator is configure to introduce ozone gas into the container.
- This Summary is provided to introduce a selection of concepts in a simplified form that are further described below in the Detailed Description. This Summary is not indented to identify key features or essential features of the claimed subject matter, nor is it intended to be used as an aid in determining the scope of the claimed subject matter.
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FIGS. 1 and 2 are schematic illustrations of a laser system in accordance with embodiments of the invention. -
FIG. 3 is a schematic diagram of a laser resonator in accordance with embodiments of the invention. - Embodiments of the invention are directed to a laser resonator, a laser system that includes the laser resonator and a method of operating a laser resonator. A detailed description of these embodiments is provided below with reference to the drawings. Elements depicted in the drawings that have the same or similar labels generally correspond to the same or similar elements.
-
FIG. 1 is a schematic illustration of alaser system 100 in accordance with embodiments of the invention. Thelaser system 100 generally includes apump module 102, again medium 104 and alaser resonator 106 that is formed in accordance with embodiments described herein. Thepump module 102 is configured to producepump energy 108. Thegain medium 104 absorbs thepump energy 108 and responsively outputslight 112. Thelaser resonator 106 receives thelight 112 and generates a second harmonic of thelight 112, which forms theoutput laser 114. In one embodiment, thesystem 100 produces a highpower output laser 114 of greater than 80 watts. -
FIG. 1 illustratesexemplary components 115 that are conventionally used in thelaser resonator 106 to generate theoutput laser 114. Embodiments of thelaser resonator 106 include one or more of these exemplary components and other conventional laser resonator components. The exemplary laser resonator components include anon-linear crystal 116, one ormore minors 118, a Q-switch 120, one ormore lenses 122, a beam polarization combiner (e.g., PMUX) 124 and one or moreoptical gratings 126. Thenon-linear crystal 116 generally operates to double the frequency of theinput light 112.Minors 118 can operate to reflect or transmit light in theresonator 106. The Q-switch 120 operates to change theinput light 112 into a train of short pulses with high peak power to increase the conversion efficiency of the second harmonic laser beam within theresonator 106. The one ormore lenses 122, the beam polarization combiner 124 and the one or moreoptical gratings 126 can be used to manage theinput light 112 and/or the secondharmonic output laser 114. Those skilled in the art understand that theresonator 106 may comprise other components that are not described herein while remaining within the spirit and scope of the invention. - A more detailed description of an
exemplary laser system 100, which is formed in accordance with embodiments of the invention, will be described with reference to the schematic diagram ofFIG. 2 . As mentioned above, thelaser system 100 includes apump module 102, again medium 104, and alaser resonator 106. In one embodiment, thegain medium 104 is a doped crystalline host that is configured to absorb thepump energy 108 generated by thepump module 102 having a wavelength that is within an operating wavelength range (i.e., absorption spectra) of thegain medium 104. Thegain medium 104 may be end-pumped (as shown) or side-pumped by thepump energy 108. Thepump energy 108 can be transmitted through a foldingmirror 122 that is transmissive at the wavelength of thepump energy 108. Thegain medium 104 absorbs thepump energy 108 and responsively outputs thelight 112. - The
gain medium 104 is water cooled in exemplary embodiments, along the sides of the host. In one embodiment, thegain medium 104 includes anundoped end cap 124 bonded on afirst end 126 of thegain medium 104, and/or anundoped end cap 128 bonded on asecond end 130 of thegain medium 104. In one embodiment, theend 130 is coated so that it is reflective at the pump energy wavelength, while transmissive at a resonant mode of thesystem 100. In this manner, the pump energy that is unabsorbed at thesecond end 120 is redirected back through thegain medium 104 to be absorbed. - As discussed above, the
laser resonator 106 is configured to generate anoutput laser 114, which is a harmonic of thelaser light 112 output from thegain medium 104. The non-linear crystal (NLC) 116 is selected based on thegain medium 104 and theoutput light 112. In one embodiment, thelaser resonator 106 includes a Q-switch 120 that operates to change thelaser beam 112 into a train of short pulses with high peak power to increase the conversion efficiency of the second harmonic laser beam. - In one embodiment, the
gain medium 104 comprises a yttrium-aluminum-garnet crystal (YAG) rod with neodymium atoms dispersed in the YAG rod to form a Nd:YAG gain medium 104. The Nd:YAG gain medium 104 converts the pump light into thelaser light 112 having a primary wavelength of 1064 nm. In one embodiment, thenon-linear crystal 116 of thelaser resonator 106 is a lithium tri borate (LBO) crystal or a potassium titanyl phosphate crystal (KTP), for generating the second harmonic of the 1064nm laser light 112 having a wavelength of 532 nm. One advantage of the 532 nm wavelength of such anoutput laser 114 is that it is strongly absorbed by hemoglobin in blood and, therefore, is useful in medical procedures to cut, vaporize and coagulate vascular tissue. - In one embodiment, the
laser resonator 106 includes reflectingmirrors mirrors input light 112. Themirror 118C is highly transmissive at the second harmonic output wavelength (e.g., 532 nm) of theoutput laser 114. The primarywavelength laser beam 112 bounces back and forth along the path between themirror 118B and amirror 132, passing through thegain medium 104 and thenon-linear crystal 116 to be frequency doubled to the second harmonic output wavelength (e.g., 532 nm) beam, which can be discharged through anoutput coupler 134 as theoutput laser light 114. - The Z-shaped resonant cavity can be configured as discussed in U.S. Pat. No. 5,025,446 by Kuizenga, imaging the resonant mode at one end of the
gain medium 104 at thenon-linear crystal 116. The configuration described is stable and highly efficient for frequency conversion. The configuration shown inFIG. 2 using the Nd:YAG gain medium 104 and a LBOnon-linear crystal 116 produces a frequency convertedoutput laser 114 having a wavelength of 532 nm, as indicated above. - In one embodiment, the
optical coupler 134 couples theoutput laser 114 to a waveguide, such as anoptical fiber 136. In one embodiment, thesystem 100 includes anoptical device 138 that discharges theoutput laser 114 as desired. In one embodiment, theoptical device 138 is a laser probe for use in surgical procedures. -
FIG. 3 is a schematic diagram of alaser resonator 106 in accordance with embodiments of the invention. Thelaser resonator 106 includes one or more of theresonator components 115 described above. These components are generally active in converting theinput light 112 into theoutput laser 114, as illustrated inFIG. 3 . - One embodiment of the invention is directed toward maintaining a clean and dry environment for the
laser resonator components 115 to produce a high quality output laser and improve the reliability of thesystem 100 relative to those of the prior art. This clean and dry environment is particularly important in high power laser systems, such as those generatingoutput lasers 114 of 80 watts or more. - One embodiment of the
laser resonator 106 includes acontainer 140 that encloses thelaser components 115. In one embodiment, thecontainer 140 has a volume of greater than 10,000 cubic centimeters (cm3). In one embodiment, the container has a volume of 15,000-20,000 cm3. Thecontainer 140 can be formed of any suitable material. In one embodiment, thecontainer 140 is formed of metal, such as aluminum with a surface layer of nickel plating. In one embodiment, thecontainer 140 is sealed or substantially sealed using, for example, adhesive tape, elastomeric gaskets, brazing, welding, flange sealant, and other sealing materials. - One embodiment of the
laser resonator 106 includes agas release system 142 that is configured to release agas mixture 144 into thecontainer 140 and fill theinterior chamber 143 with thegas mixture 144. The release of thegas mixture 144 pressurizes the interior of thecontainer 140 relative to the ambient pressure and prevents external contaminants from entering thecontainer 140. In one embodiment, the container is not perfectly sealed and the slight pressurization of thecontainer 140 may be bled through small openings in thecontainer 140. When thecontainer 140 is sealed or substantially sealed, avalve 146, such as a bleed valve, may be used to discharge thegas mixture 144 out of the container when the pressure within thecontainer 140 reaches a threshold value. - Embodiments of the
gas mixture 144 include substantially one gas and a plurality of gases. In one embodiment, the gas mixture comprises one or more inert and/or noble gases. The inert and/or noble gas helps to maintain the environment within thecontainer 140, in which theresonator components 115 operate, clean and dry. Embodiments of the one or more inert gases for use in thegas mixture 144 include helium (He), nitrogen (N2), neon (Ne), argon (Ar), krypton (Kr) and xenon (Xe). Other inert and/or noble gases may also be used in themixture 144. - In accordance with another embodiment, the
gas mixture 144 comprises one or more oxidative gases. Embodiments of the one or more oxidative gases for use in thegas mixture 144 include oxygen (O2), nitrogen trifluoride (NF3), nitric oxide (NO) and ozone (O3). Other oxidative gases may also be used in themixture 144. - During operation of the
laser resonator 106, the one or more oxidative gases react to the light 112 and/orlaser 114 to produce active oxygen atom free radicals that attack and decompose hydrocarbon contaminants as shown by the following reaction. -
Hydrocarbons+Active Oxygen→CO2+H2O - As a result, hydrocarbons that typically produce films on the
components 115, such as optical surfaces, are removed from within thecontainer 140 due to the one or more oxidative gases. This elimination, or at least reduction relative to resonators of the prior art, of such hydrocarbon films increases the lifespan of the laser resonator by reducing laser burn of thecomponents 115 impacted by thelaser resonator components 115 is particularly important in highpower laser systems 100. - Embodiments of the
gas mixture 144 includes combinations of one or more of the inert gases with one or more of the oxidative gases. In specific one embodiment, the gas mixture comprises a combination of helium and oxygen. - In one embodiment, the
gas release system 142 includes apressurized supply 148 of thegas mixture 146, from which thegas mixture 144 is fed into thecontainer 140 through, for example, ametering valve 150. In one embodiment, the pressurized supply comprises atank 152 containing thepressurized gas mixture 144. In accordance with another embodiment, one or more of the gas components of thegas mixture 144 are contained in separate tanks, such astank 152 andtank 152′. Gas flows from themultiple tanks container 140 through separate control valves. In one embodiment, thetank 152 contains an inert gas and thetank 152′ contains an oxidative gas. In one embodiment, thegas release system 142 is contained within thecontainer 140. - In one embodiment, the
laser resonator 106 includes anozone generator 154 that generatesozone gas 156 and introduces theozone gas 156 into thecontainer 140. Embodiments of the ozone generator include adevice 158 that is configured to produce anarc 160 of electricity or corona discharge in ambient air or oxygen-enriched air. Conventional ozone generators may be used. - In one embodiment, the
ozone generator 154 is located within thecontainer 140, as shown inFIG. 3 . In accordance with another embodiment, theozone generator 154 is positioned outside of thecontainer 140 and the generated ozone is fed into thecontainer 140 through appropriate tubing. In one embodiment, theozone generator 154 includes a valve, such as a metering valve, to control the volumetric flow rate of the ozone into thecontainer 140. - In one embodiment, the
container 140 is hermetically sealed. In one embodiment, the sealedcontainer 140 is filled with agas mixture 144 in accordance with the embodiments described above. The sealedcontainer 140 locks in the gas mixture making it unnecessary to continuously purge thecontainer 140. - In one embodiment, the
resonator 106 includes a getter in thecontainer 140 to absorb residual gases. In one embodiment, theresonator 106 includes a desiccant in thecontainer 140 to absorb moisture. - Although the present invention has been described with reference to preferred embodiments, workers skilled in the art will recognize that changes may be made in form and detail without departing from the spirit and scope of the invention.
Claims (9)
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US13/141,294 US8428095B2 (en) | 2008-12-22 | 2009-12-21 | Laser resonator |
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US13981408P | 2008-12-22 | 2008-12-22 | |
US13/141,294 US8428095B2 (en) | 2008-12-22 | 2009-12-21 | Laser resonator |
PCT/US2009/068933 WO2010075254A2 (en) | 2008-12-22 | 2009-12-21 | Laser resonator |
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EP (1) | EP2377209B8 (en) |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014085339A1 (en) * | 2012-11-29 | 2014-06-05 | Kla-Tencor Corporation | Resonant cavity conditioning for improved nonlinear crystal performance |
KR20140131258A (en) * | 2013-05-03 | 2014-11-12 | 포토나 디.디. | Method for operating a Laser System |
WO2018036792A1 (en) * | 2016-08-25 | 2018-03-01 | Coherent Kaiserslautern GmbH | Modular ultraviolet pulsed laser-source |
WO2020046720A1 (en) * | 2018-08-27 | 2020-03-05 | Kla Corporation | Vapor as a protectant and lifetime extender in optical systems |
US11624904B2 (en) | 2019-08-06 | 2023-04-11 | Kla Corporation | Vapor as a protectant and lifetime extender in optical systems |
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WO2010075254A2 (en) | 2008-12-22 | 2010-07-01 | Ams Research Corporation | Laser resonator |
US8672929B2 (en) | 2010-12-15 | 2014-03-18 | Ams Research Corporation | Laser probe tip |
DE102011007730B4 (en) * | 2011-04-20 | 2017-03-30 | Trumpf Laser Gmbh | Laser device with a gas-purged laser resonator and associated flushing method |
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WO2014085339A1 (en) * | 2012-11-29 | 2014-06-05 | Kla-Tencor Corporation | Resonant cavity conditioning for improved nonlinear crystal performance |
US9116445B2 (en) | 2012-11-29 | 2015-08-25 | Kla-Tencor Corporation | Resonant cavity conditioning for improved nonlinear crystal performance |
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Also Published As
Publication number | Publication date |
---|---|
US8428095B2 (en) | 2013-04-23 |
CA2746793A1 (en) | 2010-07-01 |
EP2377209A2 (en) | 2011-10-19 |
AU2009330191B2 (en) | 2013-03-14 |
WO2010075254A2 (en) | 2010-07-01 |
AU2009330191A1 (en) | 2011-07-07 |
EP2377209B8 (en) | 2017-04-12 |
EP2377209B1 (en) | 2016-09-28 |
WO2010075254A3 (en) | 2011-03-24 |
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