US20150309425A1 - Planar Motor System With Increased Efficiency - Google Patents
Planar Motor System With Increased Efficiency Download PDFInfo
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- US20150309425A1 US20150309425A1 US14/432,912 US201314432912A US2015309425A1 US 20150309425 A1 US20150309425 A1 US 20150309425A1 US 201314432912 A US201314432912 A US 201314432912A US 2015309425 A1 US2015309425 A1 US 2015309425A1
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
- H02K2201/18—Machines moving with multiple degrees of freedom
Abstract
Description
- This application claims the benefit of U.S. Provisional Application No. 61/710,529, filed Oct. 5, 2012, which is incorporated herein by reference in its entirety.
- The present invention relates generally to motors, and more particularly to a planar motor system.
- Planar motors are used in a variety of commercial and industrial applications. For example, planar motors are used to control the position of substrates in lithographic projection systems, since a planar motor has the desirable combination of fine resolution for positioning control and large translation distances to accommodate a wide range of substrate shapes and sizes. Compact, light-weight, and efficient drive systems for planar motors are advantageous.
- In an embodiment of the invention, a planar motor system comprises a platen and a stage. The platen has a planar surface and includes a first planar motor component; the stage includes a second planar motor component. When the stage is driven, it moves parallel to the planar surface of the platen along a first cardinal axis or along a second cardinal axis. The planar motor system further comprises a drive system. When the drive system is energized in a first drive configuration, it applies a first force and a second force to the stage. The first force and the second force are not parallel to the first cardinal axis and are not parallel to the second cardinal axis. A vector sum of the first force and the second force is parallel to the first cardinal axis.
- When the drive system is energized in a second drive configuration, it applies a third force and a fourth force to the stage. The third force and the fourth force are not parallel to the first cardinal axis and are not parallel to the second cardinal axis. A vector sum of the third force and the fourth force is parallel to the second cardinal axis. The planar motor system can be configured such that the net force along the first cardinal axis is equal to the net force along the second cardinal axis. The planar motor system can also be configured such that the net force along the first cardinal axis is greater than the net force along the second cardinal axis.
- In another embodiment of the invention, a planar motor system comprises a platen and a stage. When the stage is driven, it moves parallel to the planar surface of the platen along a first cardinal axis or along a second cardinal axis. The platen has a planar surface, partitioned into multiple planar regions. In each specific planar region, there is a specific array of ferromagnetic ridges aligned along a specific regional array axis. The stage includes multiple drive units; each specific drive corresponds to a specific planar region. When a specific drive unit is energized, it applies a specific force to the stage; the specific force has a specific force magnitude and a specific force direction orthogonal to the specific regional array axis in the corresponding specific planar region. The net force lies along the first cardinal axis or along the second cardinal axis.
- These and other advantages of the invention will be apparent to those of ordinary skill in the art by reference to the following detailed description and the accompanying drawings.
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FIG. 1A-FIG . 1D show schematics of a reference Cartesian coordinate system; -
FIG. 2A andFIG. 2B show schematics of a planar motor; -
FIG. 3 shows a schematic of a prior-art planar motor; -
FIG. 4A-FIG . 4D show schematics of a prior-art platen; -
FIG. 5A-FIG . 5C show schematics of a prior-art stage; -
FIG. 6A-FIG . 6D show schematics of a prior-art drive unit; -
FIG. 7A-FIG . 7D show prior-art force-vector diagrams; -
FIG. 8 shows a schematic of a planar motor according to an embodiment of the invention; -
FIG. 9A-FIG . 9C show schematics of a platen, according to an embodiment of the invention; -
FIG. 10 shows a schematic of a stage and controller, according to an embodiment of the invention; -
FIG. 11A-FIG . 11H show force-vector diagrams, according to embodiments of the invention; -
FIG. 12A andFIG. 12B show force-vector diagrams, according to embodiments of the invention; -
FIG. 13A andFIG. 13B show an example of boustrophedonic writing; -
FIG. 14A-FIG . 14C show schematics of a multi-region platen, according to an embodiment of the invention; -
FIG. 15 shows a schematic of a planar motor with a multi-region platen, according to an embodiment of the invention; -
FIG. 16 shows a schematic of a planar motor with a multi-region platen, according to an embodiment of the invention; -
FIG. 17 shows a schematic of a multi-region platen, according to an embodiment of the invention; -
FIG. 18 shows a schematic of a multi-region platen, according to an embodiment of the invention; -
FIG. 19A-FIG . 19C show force-vector diagrams and reference axes, according to an embodiment of the invention; -
FIG. 20 shows a schematic of a lithographic projection system; -
FIG. 21 shows a schematic of a controller implemented with a computational system; and -
FIG. 22A-FIG . 22C show a comparison between a ridge and a row of teeth. - In the descriptions of planar motors below, a three-dimensional (3-D) Cartesian coordinate reference system is used.
FIG. 1A shows a perspective view (View P) of the Cartesian coordinatereference system 100, defined by theX-axis 101, the Y-axis 103, and the Z-axis 105.FIG. 1B shows View A, sighted along the axis, of the X-Y plane;FIG. 1C shows View B, sighted along the +Y-axis, of the X-Z plane; andFIG. 1D shows View C, sighted along the −X-axis, of the Y-Z plane. Unless otherwise stated, the origin is arbitrary: in the figures below, reference axes are placed such that they do not interfere with other elements of the figures. -
FIG. 2A (View A) andFIG. 2B (View B) show schematics of aplanar motor 200, which includes afirst component 202 and asecond component 212. The first component and the second component can move with respect to each other. In some configurations, the first component and the second component can both move. In typical applications, the first component is referred to as the fixed component 202 (the fixed component is also referred to as a stator), and the second component is referred to as themovable component 212. - For simplicity, the fixed
component 202 and themovable component 212 are shown with rectangular geometries; in general, the geometry of each component is arbitrary. Typically, the fixed component is larger than the movable component. In some instances, the fixed component is substantially larger than the movable component; for example, the fixed component can span the floor of a room. In general, however, the relative sizes of the fixed component and the movable component are arbitrary. - The fixed
component 202 has a planar (flat) top surface 204 (FIG. 2A andFIG. 2B ), and themovable component 212 has a planar bottom surface 214 (FIG. 2B ). As described below, however, thetop surface 204 of the fixedcomponent 202 and the bottom surface 214 of themovable component 212 can have surface features. Herein, when geometrical conditions are specified, ideal mathematical conditions are not implied. A geometrical condition is satisfied if it is satisfied within a specified tolerance, which can depend, for example, on available manufacturing tolerances, requirements for specific applications, and trade-offs between performance and cost. The tolerance is specified, for example, by a design engineer. For example, a surface is planar (flat) if it is flat within a specified tolerance; two surfaces are parallel if they are parallel within a specified tolerance; and two lines are orthogonal if the angle between them is 90 deg within a specified tolerance. - Refer to
FIG. 2B . Themovable component 212 is shown above the fixedcomponent 202, separated by agap 220 between the bottom surface 214 of themovable component 212 and thetop surface 204 of the fixedcomponent 202. For example, the movable component can be magnetically or electromagnetically levitated above the fixed component. The movable component can also be supported by a fluid bearing; the fluid can be a gas (such as air or nitrogen) or a liquid (such as water or silicone fluid). In other instances, the movable component can have mechanical contact with the fixed component. For example, the bottom surface 214 of themovable component 212 and thetop surface 204 of the fixedcomponent 202 can be coated with a material with a low coefficient of friction (such as a fluoropolymer). In another example, the movable component can be supported on the fixed component by ball bearings. For simplicity, the gap is not shown in the figures below. - Refer to
FIG. 2A . Themovable component 212 can be moved across thetop surface 204 of the fixedcomponent 202. In some configurations of planar motors, the movable component is positioned below the fixed component. For example, the fixed component is supported above a base platform. The fixed component has a planar bottom surface, and the base platform has a planar top surface parallel to the planar bottom surface of the fixed component. The movable component is positioned between the bottom surface of the fixed component and the top surface of the base platform; the movable component is supported above or on the top surface of the base platform. In general, therefore, in a planar motor, the movable component moves along a surface parallel to a planar surface of the fixed component. - The movable component moves in response to a motive force provided by a drive system (not shown). The drive system can be mounted on the movable component, on the fixed component, or on both the movable component and the fixed component. A specific example of a drive system is described below.
- The drive system typically moves the movable component along two orthogonal principal axes (principal axes are also referred to as cardinal axes, specified directions of motion, or preferred directions of motion). For example, the principal axes can be the X-axis and the Y-axis. When the movable component moves from a first position to a second position, for example, it can move a first interval along the X-axis, followed by a second interval along the Y-axis; alternatively, it can move a first interval along the Y-axis, followed by a second interval along the X-axis.
-
FIG. 3 (View A) shows a schematic of a prior-artplanar motor 300 used in a lithographic projection system. Details are given in U.S. Pat. No. 5,828,142, which is herein incorporated by reference; a summary is first presented to expedite descriptions of embodiments of the invention below. Theplanar motor 300 includes a fixed component, referred to as theplaten 302, and a movable component, referred to as thestage 312. Thestage 312 is supported above theplaten 302 by an air bearing. -
FIG. 4A-FIG . 4D show details of theplaten 302.FIG. 4A shows View A;FIG. 4B shows a cross-sectional view (View X-X′);FIG. 4C shows a close-up view of a portion ofFIG. 4A ; andFIG. 4D shows a close-up view of a portion ofFIG. 4B . Refer toFIG. 4A andFIG. 4B . Theplaten 302 includes thebase plate 402 and thesurface layer 410. Thebase plate 402 is fabricated from a ferromagnetic material. Thesurface layer 410 includes an array ofteeth 412, fabricated from a ferromagnetic material. The spaces between the teeth are filled with thefiller 414, fabricated from a non-magnetic material, such as epoxy resin. In some designs (such as when capacitive position sensors are incorporated into platen), the filler material is also non-conductive. - Refer to
FIG. 4C andFIG. 4D . Each tooth in the array ofteeth 412 is a square, with sides parallel to the X-axis and the Y-axis. The teeth form a rectangular array with rows and columns parallel to the X-axis and the Y-axis, respectively. The spacing 413 between teeth is equal to thewidth 411 of a tooth; the spacing between teeth along the X-axis is equal to the spacing between teeth along the Y-axis. -
FIG. 5A-FIG . 5C show details of thestage 312.FIG. 5A shows View A;FIG. 5B shows View B; andFIG. 5C shows View C. Thestage 312 includes theplatform 502. Mounted on the underside of theplatform 502 are four drive units, also referred to as forcers, referenced as drive unit 510,drive unit 512,drive unit 520, and driveunit 522. Further details of the drive units are described below. - Refer to
FIG. 5A . When the drive units are energized, they provide a motive force that propels thestage 312 across the surface of the platen 302 (FIG. 3 ). Each drive unit is bidirectional and exerts a force with a magnitude F. For the drive unit 510, theforce 511 acts along the X-axis; for thedrive unit 512, theforce 513 acts along the X-axis; for thedrive unit 520, theforce 521 acts along the Y-axis; and for thedrive unit 522, theforce 523 acts along the Y-axis. - Details of a representative drive unit,
drive unit 512, are shown inFIG. 6A-FIG . 6D.FIG. 6A shows View A;FIG. 6B shows View B;FIG. 6C shows View C, andFIG. 6D shows View D. View D is a bottom view, sighted along the +Z-axis. Thedrive unit 512 includes thebase plate 602 and thesurface layer 610. Thebase plate 602 is fabricated from a ferromagnetic material. Thesurface layer 610 includes an array ofridges 612, fabricated from a ferromagnetic material. The spaces between the ridges are filled with thefiller 614, fabricated from a non-magnetic material, such as epoxy resin. In some designs, the filler material is also non-conductive. Instead of an array of ridges, an array of teeth can be used. - An array of electromagnetic coils (not shown) is embedded in the
drive unit 512. When the electromagnetic coils are energized, there is electromagnetic coupling between the array ofridges 610 on thedrive unit 512 and the array ofteeth 412 on the platen 302 (FIG. 4A ). The array of ridges is aligned along the Y-axis and couple to columns of teeth aligned along the Y-axis. Thenet force 513 is orthogonal to the orientation of the ridges and teeth; that is, thenet force 513 is along the X-axis. - Similarly, for the
drive unit 520, the array of ridges on the drive unit is aligned along the X-axis and couple to rows of teeth aligned along the X-axis. Thenet force 521 is orthogonal to the orientation of the ridges and teeth; that is thenet force 521 is along the Y-axis. - Refer to the force-vector diagrams shown in
FIG. 7A-FIG . 7D. For simplicity, thestage 312 is represented by a filled circle. The cardinal axes are the X-axis and the Y-axis, and the force vectors are optimally oriented with respect to the cardinal axes: that is, the motive force provided by each drive unit is aligned along one of the cardinal axes. The net force vectors are obtained by appropriate switching configurations of the drive units (FIG. 5A ). Herein the net force vector refers to the vector sum (also referred to as the resultant) of individual force vectors. - In
FIG. 7A ,drive unit 520 and driveunit 522 are switched off; drive unit 510 and driveunit 512 are switched on, each providing a motive force with a magnitude F in the +X direction. Thenet force 701, with amagnitude 2F, is applied to thestage 312 for a specified time interval, causing it to translate aninterval ΔX 711. InFIG. 7B ,drive unit 520 and driveunit 522 are switched off; drive unit 510 and driveunit 512 are switched on, each providing a motive force with a magnitude F in the −X direction. Thenet force 703, with amagnitude 2F, is applied to thestage 312 for a specified time interval, causing it to translate aninterval ΔX 713. [Note: In some instances, an applied force can cause a braking action to retard motion; and, in some instances, an applied force can be used to hold a stage stationary. For the examples described herein, a motive force applied over a specified time interval causes a net translation of the stage.] - In
FIG. 7C , drive unit 510 and driveunit 512 are switched off;drive unit 520 and driveunit 522 are switched on, each providing a motive force with a magnitude F in the +Y direction. Thenet force 705, with amagnitude 2F, is applied to thestage 312 for a specified time interval, causing it to translate an interval ΔY 715. InFIG. 7D , drive unit 510 and driveunit 512 are switched off;drive unit 520 and driveunit 522 are switched on, each providing a motive force with a magnitude F in the −Y direction. Thenet force 707, with amagnitude 2F, is applied to thestage 312 for a specified time interval, causing it to translate aninterval ΔY 717. -
FIG. 8 (View A) shows a schematic of aplanar motor 800 according to an embodiment of the invention. Theplanar motor 800 includes a fixed component, referred to as theplaten 802, and a movable component, referred to as thestage 812. Thestage 812 is supported above theplaten 802 by an air bearing. -
FIG. 9A-FIG . 9C show details of theplaten 802.FIG. 9A shows View A;FIG. 9B shows a close-up view of a portion ofFIG. 9A ;FIG. 9C shows a close-up view of a portion of a cross-sectional view (View X1-X1′). Refer toFIG. 9C . Theplaten 802 includes thebase plate 902 and thesurface layer 910. Thebase plate 902 is fabricated from a ferromagnetic material. Thesurface layer 910 includes an array ofteeth 912, fabricated from a ferromagnetic material. The spaces between the teeth are filled with thefiller 914, fabricated from a non-magnetic material, such as epoxy resin. In some designs, the filler material is also non-conductive. - Refer to
FIG. 9B andFIG. 9C . The array ofteeth 912 is oriented with respect to a Cartesian coordinate system defined by the X1-axis 901, the Y1-axis 903, and the Z1-axis 905. The Z1-axis is parallel to the Z-axis, and the X1-Y1 axes (referred to as the array axes) are rotated with respect to the X-Y axes by +45 deg (counter-clockwise). Each tooth in the array ofteeth 912 is a square, with sides parallel to the X1-axis and the Y1-axis. The teeth form a rectangular array with rows and columns parallel to the X1-axis and the Y1-axis, respectively. The spacing 913 between teeth is equal to thewidth 911 of a tooth. In the example shown, the spacing between teeth along the X1-axis is equal to the spacing between teeth along the Y1-axis. In general, the shape and size of a tooth, the geometrical configuration of the array, and the spacing between teeth can vary. -
FIG. 10 (View A) show details of thestage 812. Thestage 812 includes theplatform 1002. Mounted on the underside of theplatform 1002 are four drive units, also referred to as forcers, referenced asdrive unit 1010,drive unit 1012,drive unit 1020, and driveunit 1022. Each drive unit is similar to thedrive unit 512 described above; however, they are oriented differently. When the drive units are energized, they provide a motive force that propels thestage 812 across the surface of the platen 802 (FIG. 8 ). Each drive unit is bidirectional and exerts a force with a magnitude F. In general, the magnitude of the force exerted by each drive unit can be different. For thedrive unit 1010, theforce 1011 acts along the X1-axis; for thedrive unit 1012, theforce 1013 acts along the X1-axis; for thedrive unit 1020, theforce 1021 acts along the Y1-axis; and for thedrive unit 1022, theforce 1023 acts along the Y1-axis. The drive units are controlled by thecontroller 1050, details of which are described below. The drive units and controller are part of a drive system, which can be energized in various drive configurations in response to commands from the controller. - Refer to the force-vector diagrams shown in
FIG. 11A-FIG . 11H. For simplicity, thestage 812 is represented by a filled circle. The cardinal axes are the X-axis and the Y-axis, but the force vectors are not optimally oriented with respect to the cardinal axes: that is, the motive force provided by each drive unit is not aligned along one of the cardinal axes. The net force vectors are obtained by appropriate switching configurations of the drive units under the control of the controller 1050 (FIG. 10 ). - Refer to
FIG. 11A andFIG. 11B .Drive unit 1010 and driveunit 1012 are switched on, each providing a motive force with a magnitude F in the +X1 direction; anddrive unit 1020 and driveunit 1022 are switched on, each providing a motive force with a magnitude F in the −Y1 direction. Consequently, theforce 1101, with amagnitude 2F, is applied along the +X1 direction; and theforce 1103, with amagnitude 2F, is applied along the −Y1 direction. Thenet force 1105, with a magnitude 4F) cos(45°)=2.83F, is applied to thestage 812 along the +X direction for a specified time interval, causing it to translate aninterval ΔX 1109. - Refer to
FIG. 11C andFIG. 11D .Drive unit 1010 and driveunit 1012 are switched on, each providing a motive force with a magnitude F in the −X1 direction; anddrive unit 1020 and driveunit 1022 are switched on, each providing a motive force with a magnitude F in the +Y1 direction. Consequently, theforce 1121, with amagnitude 2F, is applied along the −X1 direction; and theforce 1123, with amagnitude 2F, is applied along the +Y1 direction. Thenet force 1125, with a magnitude 4F cos(45°)=2.83F, is applied to thestage 812 along the −X direction for a specified time interval, causing it to translate aninterval ΔX 1129. - Refer to
FIG. 11E andFIG. 11F .Drive unit 1010 and driveunit 1012 are switched on, each providing a motive force with a magnitude F in the +X1 direction; anddrive unit 1020 and driveunit 1022 are switched on, each providing a motive force with a magnitude F in the +Y1 direction. Consequently, theforce 1141, with amagnitude 2F, is applied along the +X1 direction; and theforce 1143, with amagnitude 2F, is applied along the +Y1 direction. Thenet force 1145, with a magnitude 4F cos(45°)=2.83F, is applied to thestage 812 along the +Y direction for a specified time interval, causing it to translate aninterval ΔY 1149. - Refer to
FIG. 11G andFIG. 11H .Drive unit 1010 and driveunit 1012 are switched on, each providing a motive force with a magnitude F in the −X1 direction; anddrive unit 1020 and driveunit 1022 are switched on, each providing a motive force with a magnitude F in the −Y1 direction. Consequently, theforce 1161, with amagnitude 2F, is applied along the −X1 direction; and theforce 1163, with amagnitude 2F, is applied along the −Y1 direction. Thenet force 1165, with a magnitude 4F cos(45°)=2.83F, is applied to thestage 812 along the −Y direction for a specified time interval, causing it to translate an interval ΔY 1169. - The size, weight, and power consumption of a drive unit are important design parameters. Compare the
planar motor 800 with the prior-artplanar motor 300. In both instances, the stage includes four drive units, each providing a motive force with a magnitude F. In theplanar motor 300, the net force along each of the cardinal axes (X-axis and Y-axis) has amagnitude 2F. In theplanar motor 800, however, the net force along each of the cardinal axes (X-axis and Y-axis) is 2.83F. Therefore, the net force is increased without increasing the size, weight, or maximum power consumption of each drive unit (the total power consumption of all the drive units will increase, however, due to higher duty cycle). - In the
planar motor 800, the cardinal axes (X-axis and Y-axis) are symmetric, and the net force along the X-axis is equal to the net force along the Y-axis. In another embodiment of the invention, the cardinal axes are asymmetric, and the net force along the X-axis is not equal to the net force along the Y-axis. In some applications, an example of which is described below, the translation along one cardinal axis is substantially greater (in distance, in duty cycle, or in both distance and duty cycle) than along the other cardinal axis. The X-axis is designated as the primary cardinal axis, and the Y-axis is designated as the secondary cardinal axis. The X-axis and the Y-axis in the example below are orthogonal; in general, however, the primary cardinal axis and the secondary cardinal axis do not need to be orthogonal. - Refer to the reference coordinate diagram shown in
FIG. 12A . Shown are the primary cardinal axis 101 (X-axis) and the secondary cardinal axis 103 (Y-axis). Also shown are the reference axis 1201 (X2-axis) and the reference axis 1203 (Y2-axis); the X2 and Y2 reference axes are also referred to as array axes). The X2-axis is rotated by θ deg (counter-clockwise) from the X-axis. The Y2 axis is rotated by (180−2θ) deg from the X2-axis; in general, the X2-axis and the Y2-axis are not orthogonal. - Refer to the force-vector diagram shown in
FIG. 12B . Theforce 1221, with amagnitude 2F, is applied along the +X2 direction; and theforce 1223, with amagnitude 2F, is applied along the −Y2 direction. Thenet force 1225, with a magnitude FX=4F cos θ, is applied to the stage along the +X direction. - Refer to the force-vector diagram shown in
FIG. 12C . Theforce 1241, with amagnitude 2F, is applied along the +X2 direction; and theforce 1243, with amagnitude 2F, is applied along the +Y2 direction. Thenet force 1245, with a magnitude FY=4F sin θ, is applied to the stage along the +Y direction. - The ratio of FX/FY is therefore cot θ. Some representative values are shown in Table 1 below:
-
TABLE 1 FORCE VALUES AS A FUNCTION OF ANGLE ANGLE θ (deg) FX /F = 4cosθ FY/F = 4sinθ FX/FY = cotθ 10 3.94 0.69 5.67 20 3.76 1.37 2.75 30 3.46 2.00 1.73 45 2.83 2.83 1.00 -
FIG. 13A andFIG. 13B illustrate an example in which greater force along the primary cardinal axis is advantageous. Patterns are written onto the surface of asubstrate 1302 by an optical or electron beam. Refer toFIG. 13A . Thesubstrate 1302 is rectangular, with the dimension along the X-axis substantially greater than the dimension along the Y-axis. Writing proceeds according to a boustrophedonic sequence. Starting atpoint 1301, writing proceeds from left to right along the X-axis to point 1303. Refer toFIG. 13B . Thebeam 1321 is held stationary, and thesubstrate 1302, which is carried on a substrate stage (not shown), is moved from right to left. Thesubstrate 1302 is then stepped along the Y-axis, such thatpoint 1305 is positioned under thebeam 1321. Writing then proceeds from right to left frompoint 1305 to point 1307 by moving thesubstrate 1302 from left to right. Thesubstrate 1302 is then stepped along the Y-axis, such thatpoint 1309 is positioned under thebeam 1321. The writing sequence then continues. - Both the travel distance and the duty cycle along the X-axis are substantially greater than the travel distance and the duty cycle along the Y-axis. A greater motive force along the X-axis, relative to the motive force along the Y-axis, is therefore advantageous. [Note: Even when the dimension along the X-axis is comparable to or less than the dimension along the Y-axis, a greater motive force along the X-axis, relative to the motive force along the Y-axis, is advantageous if the duty cycle along the X-axis is greater than the duty cycle along the Y-axis; for example, if the stage moves at least two steps along the X-axis at each Y-position.]
- Refer back to
FIG. 9B andFIG. 10 . By changing the orientation of the array of teeth on the platen, and the corresponding orientation of the drive units, with respect to the cardinal axes (X-axis and Y-axis), the motive force along the X-axis can be increased, while maintaining, the size, weight, and maximum power consumption of each drive unit (the total power consumption of all the drive units will be greater, however, due to increased duty cycle). In the platen 802 (FIG. 9A ), the surface of the platen is uniform; that is, the array of teeth is uniform across the surface of the platen. In other embodiments of the invention, the surface of the platen is not uniform; instead, the surface of the platen includes multiple regions that allow the array of teeth to be replaced by arrays of ridges. Each region has an array of ridges oriented along a specific direction. - The advantage of a ridge over a row of teeth is shown in
FIG. 22A-FIG . 22D. A local Cartesian reference coordinate system with a-b-c axes is shown.FIG. 22A (View B, perspective view) andFIG. 22B (View A, sighted along the −c axis) show schematics of aridge 2202, which, in this example, has the geometry of a longitudinally extended (elongated) square prism. Theend face 2204, which lies parallel to the a-c plane, has the geometry of a square; the side of the square has adimension 2201. The longitudinal axis lies along the b-axis. Thelongitudinal dimension 2203 is substantially greater than thedimension 2201. In general, a ridge can have a longitudinally extended geometry, with an arbitrary cross-sectional shape. -
FIG. 22C (View P) andFIG. 22D (View C) show a corresponding row ofteeth 2212, separated by thegaps 2214. Each tooth is a cube, with theend face 2224 having the same dimensions as theend face 2204 of the ridge. Each gap is also a cube, with thesame edge dimension 2201. The total longitudinal length of the row of teeth is the same as that of the ridge 2202 (dimension 2203). - Comparison of the
ridge 2202 with the row ofteeth 2212 shows that theridge 2202 has more volume and more surface area of ferromagnetic material. The motive force generated by electromagnetic coupling between a drive unit and the platen is proportional to the volume and surface area of ferromagnetic structures on the surface of the platen. For the same drive unit operating under the same power consumption, the motive force will be greater for a platen with ridges than for a platen with teeth. Alternatively, to achieve the same motive force, a drive unit can be operated at lower power consumption for a platen with ridges than for a platen with teeth. - As discussed above in regard to the
platen 302 and theplaten 802, an array of teeth allows electromagnetic coupling with drive units oriented in different directions. An array of ridges on the platen, however, primarily provides electromagnetic coupling with a drive unit whose array of ridges is aligned with the array of ridges on the platen. In an embodiment of the invention, the platen includes multiple planar regions (unless otherwise stated, a planar region is also referred to simply as a region). The orientation of the array of ridges in each region can be independently specified; the array of ridges in each region is aligned along a regional array axis. A separate drive unit operates across a corresponding region; the drive unit can be positioned on, above, or below its corresponding region. The drive unit in each corresponding region is aligned with the array of ridges in the corresponding region to maximize the motive force. The direction of the motive force is orthogonal to the regional array axis of the corresponding region. - Refer to
FIG. 14A . Theplaten 1410 includes four regions, referenced asregion 1410A,region 1410B,region 1410C, andregion 1410D. For simplicity, the ridges are represented by line segments. In theregion 1410A, the ridges are oriented at −45 deg (clockwise) from the X-axis. Thedrive unit 1420A applies a force, with a magnitude G, orthogonal to the ridges. In theregion 1410B, the ridges are oriented at −45 deg from the X-axis. Thedrive unit 1420B applies a force, with a magnitude G, orthogonal to the ridges. In theregion 1410C, the ridges are oriented at +45 deg (counter-clockwise) from the X-axis. Thedrive unit 1420C applies a force, with a magnitude G, orthogonal to the ridges. In theregion 1410D, the ridges are oriented at +45 deg from the X-axis. Thedrive unit 1420D applies a force, with a magnitude G, orthogonal to the ridges. In general, the magnitude of the force applied by each drive unit can be different. -
FIG. 14B (View A) shows a close-up view of a portion ofregion 1410C.FIG. 14C (View H-H′) shows a cross-sectional view. Theregion 1410C includes abase plate 1440 and asurface layer 1430. Thebase plate 1440 is fabricated from a ferromagnetic material. Thesurface layer 1430 includes an array ofridges 1432 fabricated from a ferromagnetic material. The gaps between ridges are filled with thefiller 1434, fabricated from a non-magnetic material, such as epoxy resin. In some designs, the filler material is also non-conductive. -
FIG. 15 shows an embodiment of the invention, referred to as an on-board configuration, in which the drive units (1420A, 1420B, 1420B, and 1420C) are attached to the underside of theplatform 1502.FIG. 16 shows an embodiment of the invention, referred to as an outrigger configuration, in which the drive units (1420A, 1420B, 1420B, and 1420C) are attached to theplatform 1602 by arms (1620A, 1620B, 1620C, and 1620D, respectively). If the individual force vectors are summed, the force-vector diagrams are similar to those previously shown inFIG. 11A-FIG . 11H: the net force along each of the cardinal axes (X-axis and Y-axis) is 2.83G. -
FIG. 17 shows an embodiment in which theplaten 1710 includes four regions. In theregion 1710A, the ridges are oriented along the Y-axis. Thedrive unit 1720A applies a force, with a magnitude G, along the X-axis. In theregion 1710B, the ridges are oriented along the Y-axis. Thedrive unit 1720B applies a force, with a magnitude G, along the X-axis. In theregion 1710C, the ridges are oriented along the X-axis. Thedrive unit 1720C applies a force, with a magnitude G, along the Y-axis. In theregion 1710D, the ridges are oriented along the X-axis. Thedrive unit 1720D applies a force, with a magnitude G, along the Y-axis. A platform can be attached to the drive units in an on-board configuration or an outrigger configuration. The force-vector diagrams are therefore similar to those shown inFIG. 7A-FIG . 7D: the net force along each of the cardinal axes (X-axis and Y-axis) is 2G, where 2G>2F due to the use of ridges instead of teeth. -
FIG. 18 shows an embodiment in which theplaten 1810 includes four regions. In theregion 1810A, the ridges are oriented at −δ deg (clockwise) from the X-axis. Thedrive unit 1820A applies a force, with a magnitude G, orthogonal to the ridges. In theregion 1810B, the ridges are oriented at −δ deg from the X-axis. Thedrive unit 1820B applies a force, with a magnitude G, orthogonal to the ridges. In theregion 1810C, the ridges are oriented at +δ deg (counter-clockwise) from the X-axis. Thedrive unit 1820C applies a force, with a magnitude G, orthogonal to the ridges. In theregion 1810D, the ridges are oriented at +δ deg from the X-axis. Thedrive unit 1820D applies a force, with a magnitude G, orthogonal to the ridges. -
FIG. 19A-FIG . 19C show further details of the geometry. InFIG. 19A , theridge 1902 is oriented at +δ deg from the X-axis; theforce 1903, with a magnitude G, is orthogonal to theridge 1902. InFIG. 19B , theridge 1904 is oriented at −δ deg from the X-axis; the force 1905, with a magnitude G, is orthogonal to theridge 1904.FIG. 19C shows the axes along which forces are applied: the X3-axis 1911 and the Y3-axis 1913. The X3-axis is rotated by +ε deg from the X-axis. The Y3-axis rotated by +γ deg from the X3-axis. Consideration of the geometries inFIG. 19A andFIG. 19B shows that ε=90−δ and γ=2δ. - A platform can be attached to the drive units in an on-board configuration or an outrigger configuration. The force-vector diagrams are therefore similar to those shown in
FIG. 12A-FIG . 12C: with appropriate choice of the orientation angle δ, the net force along the X-axis can be greater than the net force along the Y-axis. - In the examples shown in
FIG. 14A ,FIG. 17 , andFIG. 18 , the platen has a rectangular geometry; and there are four regions, each with rectangular geometries, of the same size. In general, the shape and size of the platen can be user-specified, the number of regions can be user-specified, and the shape and size of each region can be user-specified. -
FIG. 20 shows a schematic block diagram of alithographic projection system 2000. Thelight source 2002 projects light 2001 through thereticle 2004, which is supported on thereticle holder 2006. Thereticle 2004 contains a pattern to be imaged. The light 2003 transmitted through thereticle 2004 is received by theprojection system 2008, which focusses the light 2005 onto the surface of asubstrate 2010 coated with photoresist. Examples of substrates include semiconductor wafers, liquid-crystal display (LCD) panels, and printed circuit boards (PCBs). Thesubstrate 2010 is held by thestage 2022, which can be moved with respect to theplaten 2024. Thestage 2022 and theplaten 2024 can be components of aplanar motor 2020, which can be implemented by embodiments of the invention described above. - An embodiment of the controller 1050 (
FIG. 10 ) is shown inFIG. 21 . One skilled in the art can construct thecontroller 1050 from various combinations of hardware, firmware, and software. One skilled in the art can construct thecontroller 1050 from various electronic components, including one or more general purpose processors (such as microprocessors), one or more digital signal processors, one or more application-specific integrated circuits (ASICs), and one or more field-programmable gate arrays (FPGAs). - The
controller 1050 includes acomputer 2102, which includes a processor [referred to as the central processing unit (CPU)] 2104,memory 2106, and adata storage device 2108. Thedata storage device 2108 includes at least one persistent, non-transitory, tangible computer readable medium, such as non-volatile semiconductor memory, a magnetic hard drive, or a compact disc read only memory. - The
controller 1050 further includes a user input/output interface 2120, which interfaces thecomputer 2102 to the user input/output devices 2140. Examples of the user input/output devices 2140 include a keyboard, a mouse, a local access terminal, and a video display. Data, including computer executable code, can be transferred to and from thecomputer 2102 via the user input/output interface 2120. - The
controller 1050 further includes acommunications network interface 2122, which interfaces thecomputer 2102 with acommunications network 2142. Examples of thecommunications network 2142 include a local area network and a wide area network. A user can access thecomputer 2102 via a remote access terminal (not shown) communicating with thecommunications network 2142. Data, including computer executable code, can be transferred to and from thecomputer 2102 via thecommunications network interface 2122. - The
controller 1050 further includes the following interfaces: -
- a
drive unit 1interface 2124, which interfaces thecomputer 2102 with the drive unit 1010 (FIG. 10 ); - a
drive unit 2interface 2126, which interfaces thecomputer 2102 with the drive unit 1012 (FIG. 10 ); - a
drive unit 3interface 2128, which interfaces thecomputer 2102 with the drive unit 1020 (FIG. 10 ); - a
drive unit 4interface 2130, which interfaces thecomputer 2102 with the drive unit 1022 (FIG. 10 ); - a
position sensors interface 2132, which interfaces thecomputer 2102 with theposition sensors 2152.
- a
- A planar motor can be operated in an open-loop or a closed-loop configuration. In an open-loop configuration, there is no feedback from position sensors. The position is computed from the direction and distance between steps and the number of steps. In a closed-loop configuration, there is feedback from position sensors, which can be placed on the platen, on the stage, or on both the platen and the stage. An example of position sensors is described in U.S. Pat. No. 5,828,142, previously cited.
- As is well known, a computer operates under control of computer software, which defines the overall operation of the computer and applications. The
CPU 2104 controls the overall operation of the computer and applications by executing computer program instructions that define the overall operation and applications. The computer program instructions can be stored in thedata storage device 2108 and loaded into thememory 2106 when execution of the program instructions is desired. Control algorithms, such as control algorithms for controlling movement of the stage 812 (FIG. 10 ), can defined by computer program instructions stored in thememory 2106 or in the data storage device 2108 (or in a combination of thememory 2106 and the data storage device 2108) and controlled by theCPU 2104 executing the computer program instructions. For example, the computer program instructions can be implemented as computer executable code programmed by one skilled in the art to perform algorithms. Accordingly, by executing the computer program instructions, theCPU 2104 executes the control algorithms. - The foregoing Detailed Description is to be understood as being in every respect illustrative and exemplary, but not restrictive, and the scope of the invention disclosed herein is not to be determined from the Detailed Description, but rather from the claims as interpreted according to the full breadth permitted by the patent laws. It is to be understood that the embodiments shown and described herein are only illustrative of the principles of the present invention and that various modifications may be implemented by those skilled in the art without departing from the scope and spirit of the invention. Those skilled in the art could implement various other feature combinations without departing from the scope and spirit of the invention.
Claims (20)
Priority Applications (1)
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US14/432,912 US9625832B2 (en) | 2012-10-05 | 2013-09-27 | Planar motor system with increased efficiency |
Applications Claiming Priority (3)
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US201261710529P | 2012-10-05 | 2012-10-05 | |
PCT/US2013/062099 WO2014055335A1 (en) | 2012-10-05 | 2013-09-27 | Planar motor system with increased efficiency |
US14/432,912 US9625832B2 (en) | 2012-10-05 | 2013-09-27 | Planar motor system with increased efficiency |
Publications (2)
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US20150309425A1 true US20150309425A1 (en) | 2015-10-29 |
US9625832B2 US9625832B2 (en) | 2017-04-18 |
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US (1) | US9625832B2 (en) |
EP (1) | EP2904455A1 (en) |
TW (1) | TWI610520B (en) |
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EP3602759B1 (en) * | 2017-03-27 | 2023-06-07 | Planar Motor Incorporated | Robotic devices and methods for fabrication, use and control of same |
EP3844863A4 (en) | 2018-10-13 | 2021-11-03 | Planar Motor Incorporated | Systems and methods for identifying a magnetic mover |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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US6028376A (en) * | 1997-04-22 | 2000-02-22 | Canon Kabushiki Kaisha | Positioning apparatus and exposure apparatus using the same |
US7215095B2 (en) * | 2004-01-15 | 2007-05-08 | Canon Kabushiki Kaisha | Driving apparatus, exposure apparatus, and device manufacturing method |
US8140288B2 (en) * | 2007-04-18 | 2012-03-20 | Nikon Corporation | On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
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CA968019A (en) * | 1971-09-08 | 1975-05-20 | Walter E. Hinds | Positioning system using synchronous motor |
US4560911A (en) | 1982-06-01 | 1985-12-24 | Anorad Corporation | Positioning table and linear motor |
US4769680A (en) | 1987-10-22 | 1988-09-06 | Mrs Technology, Inc. | Apparatus and method for making large area electronic devices, such as flat panel displays and the like, using correlated, aligned dual optical systems |
USRE33836E (en) | 1987-10-22 | 1992-03-03 | Mrs Technology, Inc. | Apparatus and method for making large area electronic devices, such as flat panel displays and the like, using correlated, aligned dual optical systems |
US4893071A (en) | 1988-05-24 | 1990-01-09 | American Telephone And Telegraph Company, At&T Bell Laboratories | Capacitive incremental position measurement and motion control |
US4958115A (en) | 1988-11-28 | 1990-09-18 | At&T Bell Laboratories | Capacitively commutated brushless DC servomotors |
US5828142A (en) * | 1994-10-03 | 1998-10-27 | Mrs Technology, Inc. | Platen for use with lithographic stages and method of making same |
US6389702B1 (en) * | 2000-05-12 | 2002-05-21 | Electroglas, Inc. | Method and apparatus for motion control |
JP2008228406A (en) * | 2007-03-09 | 2008-09-25 | Canon Inc | Plane motor, positioning device, exposure device and method of manufacturing device |
JP2009136065A (en) | 2007-11-29 | 2009-06-18 | Canon Inc | Flat motor and stage using the same |
-
2013
- 2013-09-27 WO PCT/US2013/062099 patent/WO2014055335A1/en active Application Filing
- 2013-09-27 EP EP13774337.3A patent/EP2904455A1/en not_active Withdrawn
- 2013-09-27 US US14/432,912 patent/US9625832B2/en active Active
- 2013-10-04 TW TW102136033A patent/TWI610520B/en active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6028376A (en) * | 1997-04-22 | 2000-02-22 | Canon Kabushiki Kaisha | Positioning apparatus and exposure apparatus using the same |
US7215095B2 (en) * | 2004-01-15 | 2007-05-08 | Canon Kabushiki Kaisha | Driving apparatus, exposure apparatus, and device manufacturing method |
US8140288B2 (en) * | 2007-04-18 | 2012-03-20 | Nikon Corporation | On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage |
Also Published As
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TW201429124A (en) | 2014-07-16 |
US9625832B2 (en) | 2017-04-18 |
WO2014055335A1 (en) | 2014-04-10 |
TWI610520B (en) | 2018-01-01 |
EP2904455A1 (en) | 2015-08-12 |
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