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Publication numberUS3290567 A
Publication typeGrant
Publication dateDec 6, 1966
Filing dateNov 16, 1965
Priority dateSep 23, 1960
Publication numberUS 3290567 A, US 3290567A, US-A-3290567, US3290567 A, US3290567A
InventorsGowen Hammond E T
Original AssigneeTechnical Ind Inc
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Controlled deposition and growth of polycrystalline films in a vacuum
US 3290567 A
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Description  (OCR text may contain errors)

Dec. 6, 1966 H. E. T. GOWEN 3,290,557

CONTROLLED DEPOSITION AND GROWTH OF POLYCRYSTALLINE FILMS IN A VACUUM Original Filed Sept. 23, 1960 21 Sheets-$heet 1 I l ""KZO j \JUU INVENTOR. HAMMOND E. T. GOWEN Attorney Dec. 6, 1966 H. E T. GOWEN 3,290,567

CONTROLLED DEPOSITION AND GROWTH OF POLYCRYSTALLINE FILMS IN A VACUUM Original Filed Sept. 25, 1960 21 Sheets-Sheet 2 V 2|9 W x w 1| 2:8

2|? 1 i .2 222 1% 6/ P /T\",-I(I/ V I J); 2'5 I am :41; f

1 220 i y 5 M w 223 2l6 K i125 2|2 2|| V O 209 2.0 207 9 208 I I I 1 5 2607 LIGHT 2609 INVENTOR. HAMMOND E. T. GOWEN Dec. 6, 1955 -r GOWEN 3,290,567

CONTROLLED DEPOSITION AND GROWTH OF POLYCRYSTALLINE FILMS IN A VACUUM Original Filed Sept. 23. 1960 21 Sheets-Sheet 3 INVENTOR. HAMMOND E. T. GOWEN Attorney 1956 H. E. T. GOWEN CONTROLLED DEPOSITION AND GROWTH OF POLYCRYSTALLINE FILMS IN A VACUUM Original Filed Sept. 23, 1960 21 Sheets-$heet =2 INVENTOR. HAMMOND E. T. GOWEN AHomey Dec. 6, 1966 H. E. T. GOWEN 3, 0,

CONTROLLED DEPOSITION AND GROWTH OF POLYCRYSTALLINE FILMS IN A VACUUM Ongmal Filed Sept. 23, 1960 21 Sheets$heet 5 v M m SCI AVA r INVENTOR. HAMMOND E. T. GOWEN BY EX Attorney Dec. 6, 1966 H. E. T. GOWEN CONTROLLED DEPOSITION AND GROWTH O FOLYCRYSTALLINE FILMS IN A VACUUM Original Filed Sept. 25, 1960 HAMMO 21 Sheets-Sheet 6 INVENTOR. ND E. T GOWEN Dec. 6, 1966 GQWEN 3,290,567

CONTROLLED DEPOSITION AND GROWTH OF FOLYCRYSTALLINE FILMS IN A VACUUM Original Filed Sept. 25, 1960 21 sheets sheet 7 INVENTOR. HAMMOND E. T. GOWEN Attorney o 4 O 7 9 6 I m w M m M AU, MW 3 NW, N W 9 0 2 m N m W 3 m u H 1 m S n W m C. f w E 1 3 v D f 2 I I 6 1 N g 0 m o E 3 M Y 9 M O A B m H w o MM H. E. T. GOWEN CONTROLLED DEPOSITION AND GROWTH OF POLYCRYSTALLINE FILMS IN A VACUUM Original Filed Sept. 23. 1960 Attorney 1966 H E. T. GOWEN 3,290,567

CONTROLLED DEPOSITION AND GROWTH OF POLYCRYSTALLINE FILMS IN A VACUUM Origmal Filed Sept. 23, 1960 21 Sheets$heet ll INVENTOR. HAMMOND E. T. GOW E N Attorney Dec. 6, 1966 E gow 3,290,567

H. CONTROLLED DEPOSITION AND GROWTH OF POLYGRYSTALLINE FILMS IN A VACUUM Original Filed Sept. 23, 1960 21 Sheets-Sheet 12 "5k up INVENTOR.

HAMMOND E. T. GOWEN orney Dec. 6, 1966 H. E. "r. GOWEN 3,290,567

CONTROLLED DEPOSITION AND GROWTH OF POLYCRYSTALLINE FILMS IN A VACUUM Original Filed Sept. 23, 1960 21 Sheets-Sheet l3 IN V EN TOR.

HAMMOND E.T. GOWEN Attorney Dec. 6, 1966 H. E. T. GOWEN 3,290,567 CONTROLLED DEPOSITION AND GROWTH OF POLYCRYSTALLINE FILMS IN A VACUUM Original Filed Sept. 23. 1960 21 Sheets-Sheet 14 3508 z J I 1 I I I7- f I I I 'i X/g 350i I I I, I I 1 g I, I I i" I I INVENTOR.

HAMMOND E. T. GOWEN Attorney Dec. 6, 1966 H. E. GOWEN 3,290,567

CONTROLLED DEP TION AND GR H 0F LYCRYSTALLINE FILMS IN A UUM Ongmal Filed Sept. 1960 21 Sheets-$heet 15 7 ill INVENTOR.

HAMMOND E. T. GOWEN Attorney Dec. 6, 1966 H. E. T. GOWEN CONTROLLED DEPOSITION AND GROWTH OF POLYCRYSTALLINE FILMS IN A VACUUM Original Filed Sept. 23, 1960 21 Sheets-Sheet 16 INVENTOR.

HAMMOND E. T. GOWEN Attorney Dec. 6, 1966 H E. T. GOWEN 3,290,567

CONTROLLED DEPOSITION AND GROWTH OF POLYCRYSTALLINE FILMS IN A VACUUM Original Filed Sept. 25, 1960 21 Sheets*Sheet 17 5695 505 U U U 5601 F ME E :1 W 5612 5608 D sen H 2 2 mu '1 n i l NIH 56|4 ['ll I) m inn, T C

ii g jsil m hw mm. m n n M W 5609 INVENTOR. HAMMOND E. T. GOWEN Attorney 5, 1966 H. E. 'r. GOWEN CONTROLLED DEPOSITION AND GROWTH OF POLYCRYSTALLINE FILMS IN A VACUUM Original Filed Sept. 25. 1960 21 Sheets-Sheet 18 INVENTOR.

HAMMOND E. T. GOWEN Attorney 1965 H. E. T. GOWEN CONTROLLED DEPOSITION AND GROWTH POLYCRYSTALLINE FILMS IN A VAC-UH Original Filed Sept. 25, 1960 INVENTOR. HAMMOND E. T. GOWEN Attorney 7M- Dec. 6, 1966 H. E. T. GOWEN 3,290,567

CONTROLLED DEPOSITION AND GROWTH OF POLYCRYSTALLINE FILMS IN A VACUUM Original Filed Sept. 25, 1960 21 Sl1eets-$heet 20 INVENTOR. HAMMOND E. T. GOWEN Atiorney

Non-Patent Citations
Reference
1 *None
Referenced by
Citing PatentFiling datePublication dateApplicantTitle
US3467057 *Jul 25, 1967Sep 16, 1969Hitachi LtdElectron beam evaporator
US3472679 *Nov 27, 1968Oct 14, 1969Xerox CorpCoating surfaces
US3492152 *Jan 30, 1967Jan 27, 1970Gen Dynamics CorpMethod of vacuum vapor depositing a material on a substrate including reconstitution of decomposed portions of the material
US3575133 *Mar 19, 1969Apr 13, 1971EuratomApparatus for evaporation by levitation in an ultravacuum
US3651385 *Sep 16, 1969Mar 21, 1972Sony CorpSemiconductor device including a polycrystalline diode
US3776181 *Jul 28, 1972Dec 4, 1973Ransburg Electro Coating CorpDeposition apparatus for an organometallic material
US3912826 *Jan 14, 1974Oct 14, 1975Airco IncMethod of physical vapor deposition
US3953619 *Oct 3, 1973Apr 27, 1976Agency Of Industrial Science & TechnologyMethod for ionization electrostatic plating
US3968270 *Sep 19, 1974Jul 6, 1976Takashi HasegawaProcess for preparation of metal coatings
US4099969 *Aug 15, 1975Jul 11, 1978Xerox CorporationCoating method to improve adhesion of photoconductors
US5089426 *Jan 16, 1990Feb 18, 1992Semiconductor Energy Laboratory Co., Ltd.Method for manufacturing a semiconductor device free from electrical shortage due to pin-hole formation
US8046993 *Aug 27, 2008Nov 1, 2011National Yang-Ming UniversityMicro generator system
WO1981003669A1 *Jun 9, 1981Dec 24, 1981M RocheMethod for manufacturing a thin layer with orientated structure,device for implementing such method and products obtained thereby
Classifications
U.S. Classification136/205, 136/225, 338/202, 338/176, 338/295, 338/143, 338/308
International ClassificationH01C17/12, H01C17/10, H01C10/00, C23C14/32, H01C17/075
Cooperative ClassificationH01C17/12, C23C14/32, H01C10/00, H01C17/10
European ClassificationH01C17/12, H01C17/10, H01C10/00, C23C14/32