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Publication numberUS3629776 A
Publication typeGrant
Publication dateDec 21, 1971
Filing dateOct 18, 1968
Priority dateOct 24, 1967
Also published asDE1804911A1
Publication numberUS 3629776 A, US 3629776A, US-A-3629776, US3629776 A, US3629776A
InventorsWatano Yutaka
Original AssigneeNippon Kogaku Kk
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Sliding thin film resistance for measuring instruments
US 3629776 A
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Description  (OCR text may contain errors)

United States Patent [72] Inventor Yutah Wlteno 3,252,831 5/1966 Ragan Q 117/227 X Tokyo, Japan 3,274,022 9/1966 Rhoda.. 117/227 X [21] Appl. No. 768,716 3,415,679 12/1968 Chuss... 117/217 X 1 Flled 1968 2,734,976 2/1956 Strege 338/196X [45] Patented 0621, 1 3,106,489 10/1963 Leaselter 29/195 UX 8 pp 8 3,290,127 12/1966 Kahng et al...... 29/195 e 1 11 3,339,267 9/1967 Bronnes 6151... 29/195 x [32] Priority Oct-24,1967 3,353,134 11/1967 Elarde 338/308 x hi 3,458,847 7/1969 Watts 338/308 x 42/6803! 3,495,959 2/1970 J0hnson,Jr 29/195 1 OTHER REFERENCES [54] SLIDING THIN FILM RESISTANCE FOR W. H. Nebergall, F. C. Schmidt, H. F. Holtzclaw, .lr.,

I MEASURING INSTRUMENTS General Chemistry D. C. Heath & Co., Boston, 1963, p. 706

2 Claims 3 Drum! Figs Primary Examiner-Alfred L. Leavitt [52] U.S.Cl 338/140, Assistant Ex min r-C. K- W iff n h 117/217, 117/212, 117/221, 117/227, 338/142 Mummy-Anton 1 wine [51] Int-Cl l-l0lc 5/06 29/195;

W212, 217 221 227; 33 30 309 19 200 ABSTRACT: A variable resistor is pl'OVldCd wherein a thln 185 186, 190, 194, 140 142 metallic film is deposited as by sputtering on a base of insulating material. The thin film consists of at least two layers; the [56] References Cited bottom layer being of a base metal selected from the group UNITED STATES PATENTS consisting of manganese, titanium beryllium, tantalum, nickel 2,632,831 3/1953 Pritikin etal. 338/140 "'3 :l '9" the upper layer bemg 2,897,584 8/1959 Schumpelt 117/21-7 ux, a

7 6 4' 3 1 .1 I 1 ,5 ,1 k 9 F 7 g I: 4; .J: IJQ Q 71/- -7 7'1 L L 4 Q Z A PATENTED 051221 m1 FIG.

FIG.2

SLIDING TIIIN FILM RESISTANCE FOR MEASURING INSTRUMENTS This invention relates to a variable resistor in which a thin film having electrical resistive characteristics is deposited on a baseplate of insulating material, a sliding contact engaging the deposited film. The variable resistor is particularly useful for measuring instruments such as exposure meters.

In conventional resistor units for measuring instruments, and the like, the resistance elements are formed of a carbon film, a nickel-chrome alloy film, or a chrome-gold double layer film.

With the conventional carbon film, the resistance value of the elements changed considerably with use and wear. The nickel-chrome elements had similar drawbacks, the resistance value changing in various positions of the sliding contact as abrasion took place with use.

It was found that by increasing the pressure of the sliding contact that the differences in the resistance values thus obtained from those values obtained by sliding the contact over the nickel-chrome elements could be reduced, but this increase in contact pressure also increased the abrasion of the elements. The chrome-gold resistance elements where the gold film formed the upper layer, the same difficulties due to wear are also encountered.

ln measuring instruments such as an exposure meter used for photography, a carbon film resistor is used for the most part, a nickel-chrome film'element being used in conjunction therewith as a film-sensitivity-adjusting element. In such instruments, the variable resistors are quite small and very little force is available for moving the sliding contact. It is thus desirable to have a variable resistor in which the resistance element surface has a high wear resistance and in which very little pressure is required to engage the sliding contact with the resistance element and in which a very small force is required to move the sliding contact so that stability of the resistance values is obtained.

The object of the present invention is to provide a variable resistor for measuring instruments wherein a small force is required to move the sliding contact, the sliding contact firmly engaging the resistance element or elements with a slight pressure, and wherein the resistance element or elements comprising a thin film has a high resistance to abrasion.

In accordance with the present invention,a variable resistor for measuring instruments is provided wherein a thin film of electrical resistive characteristics are deposited on a baseplate of insulating material, the thin film comprising of at least two layers; the lower layer being of a base metal selected from the group consisting of manganese, titanium, beryllium, tantalum, nickel and chrome, or alloys thereof, the upper layer being of palladium and engaged by the sliding contact.

This invention will be described more clearly referring to the illustrative embodiments shown in the attached drawings, in which:

FIG. 1 is a plan view of an embodiment of this invention;

FIG. 2 is a side view thereof; and

FIG. 3 is a plan view of another embodiment of this invention.

Referring to FIGS. 1 and 2 of the drawing in which one embodiment of the invention is illustrated, the variable resistor comprises a baseplate 1 of insulating material having deposited thereon a film 2 of electrical resistive material. Provided at one end of the triangular shaped film 2 is an electrode 3 serving as an electrical connection for the variable resistor. A sliding contact 4 is provided for engaging the surface of the film 2, the contact being movably (by means not shown) along a straight line from the apex of the triangular film to the electrode 3. The film 2 is in two layers, the lower layer being in this instance chrome and the upper layer being palladium. The sliding contact 4 is preferably made of phosphor bronze wire about 0.3 mm. in diameter and engages the palladium layer with a pressure of several grams. The triangular shape of the film 2 provides a functional change in the resistance values as the sliding contact is moved along its straight line path between the apex and base of the film.

The film 2 as previously mentioned is a double-layer film of chrome and palladium. The chrome layer is deposited first on the baseplate l and may be deposited by sputtering or any other well-known process. The palladium layer is similarly deposited on the chrome layer. It has been found that palladium is not subject to changes in resistivity when the sliding contact is being moved over or remains stationary on a particular position regardless of the material comprising the sliding contact and even though only slight contact pressure is applied. Palladium also has excellent wear resistance to that there is very little change in the resistance values obtainable even after many movements of the sliding contact. When the thickness of chrome film is from A. to I000 A. and the thickness of palladium film is from 200 A. to 2000 A. the resistivity ranging from 20 (In to 1 O can be obtained, but when the thickness of the respective films is adjusted, the range of the resistivity can be further increased.

On the other hand, when the intermediate portion of the double-layer film is made into the mixture film of chrome and palladium at an appropriate mixing ration, and when the mixing ratio is gradually changed in the direction of thickness, it is possible to reduce the temperature coefficient or resistivity. The chrome film improves the adhereability to the baseplate, and therefore when other than chrome such as nickel-chrome or chrome alloy, 'or other base metals such as manganese, titanium, beryllium, tantalum or nickel are used, the effectiveness of this invention is not impaired. It is possible to prepare a strongest film when it is prepared under such conditions wherein the temperature of the baseplate is above 200 C. and the degree of vacuum is below 5X10 Torr. In regard to the formation of this film, it is needless to mention here that it can be performed by means of conventional sputtering process, moreover palladium film has excellent wear resistance and antioxidation property which are indispensable factors as the sliding resistance, and at the same time palladium film has such an advantage that it has excellent stability for a high temperature above 200' C., and excellent stability for moisture and overloading.

Referring now to F IG. 3 in which a second embodiment of the invention is disclosed, the chrome-palladium film 2' is deposited in stripe form of increasing lengths from left to right and engaged by a sliding contact 4', the contact having a width slightly greater than the spacing between two adjacent stripes 2. A second resistance film 5 of higher sheet resistance is deposited on the baseplate which may either be deposited under or over the stripes 2'. The form of the second film 5 is also triangular. The sliding contact 4' may be moved within the path between the lines 6 and 7 or within the path between the phantom lines 6' and 7'. In the latter case, the second film 5 should be deposited under the film stripes 2'. It is further possible in the second embodiment to provide a protective film such as a silicon oxide film, on the exposed portions of the second film 5 after the films 2' and 5 have been deposited.

In the embodiment as illustrated in FIG. 3, it will be apparent that the change in the resistance values of the resistor will be stepwise. The width of step changes can be made very small by conventional techniques so that the stepwise changes in resistance values are of no technical disadvantages.

What is claimed is:

l. A variable resistor for measuring instruments comprising a sliding contact,

and insulating plate, and

a thin film resistance of at least two layers including a lower layer which is a tapered resistance layer deposited on said insulating plate and an upper layer deposited on said lower layer, said lower layer being made of a base metal selected from the group consisting of manganese, titanium, beryllium, tantalum, nickel and chrome, said supper layer being made of palladium and being multiple stripes overlaid on said lower layer and extending on said insulating plate, said sliding contact engaging the extending end portions of said stripes.

2. A variable resistor according to claim 1, wherein said lower layerv has a higher sheet resistance than that of said upper layer.

Patent Citations
Cited PatentFiling datePublication dateApplicantTitle
US2632831 *May 9, 1951Mar 24, 1953PritikinVariable resistance element
US2734976 *Aug 7, 1953Feb 14, 1956 Variable wattage lamp socket
US2897584 *May 22, 1957Aug 4, 1959Sel Rex CorpGold plated electrical contact and similar elements
US3106489 *Dec 9, 1960Oct 8, 1963Bell Telephone Labor IncSemiconductor device fabrication
US3252831 *May 6, 1964May 24, 1966Electra Mfg CompanyElectrical resistor and method of producing the same
US3274022 *Mar 26, 1963Sep 20, 1966Int Nickel CoPalladium deposition
US3290127 *Mar 30, 1964Dec 6, 1966Bell Telephone Labor IncBarrier diode with metal contact and method of making
US3339267 *Dec 26, 1962Sep 5, 1967Philips CorpMetallizing non-metals
US3353134 *Aug 17, 1964Nov 14, 1967Amphenol CorpResistive element and variable resistor
US3415679 *Jul 9, 1965Dec 10, 1968Western Electric CoMetallization of selected regions of surfaces and products so formed
US3458847 *Sep 21, 1967Jul 29, 1969Fairchild Camera Instr CoThin-film resistors
US3495959 *Mar 9, 1967Feb 17, 1970Western Electric CoElectrical termination for a tantalum nitride film
Non-Patent Citations
Reference
1 *W. H. Nebergall, F. C. Schmidt, H. F. Holtzclaw, Jr., General Chemistry D. C. Heath & Co., Boston, 1963, p. 706
Referenced by
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US3838888 *Apr 2, 1973Oct 1, 1974Syncro CorpElectric brake controller
US3851150 *Nov 7, 1972Nov 26, 1974Foerderung Forschung GmbhElectrical resistance tubular heating conductor with axially varying power distribution
US3857689 *Dec 29, 1972Dec 31, 1974Nippon Selfoc Co LtdIon exchange process for manufacturing integrated optical circuits
US3921118 *Oct 1, 1973Nov 18, 1975Gen ElectricVariable resistor assembly
US4099071 *Dec 3, 1976Jul 4, 1978Xerox CorporationMonolithic electronic scanning device
US4137517 *May 17, 1977Jan 30, 1979Alfa Romeo S.P.A.Potentiometric regulator of a physical magnitude which is a function whatever of other two magnitudes
US4146957 *Jan 17, 1977Apr 3, 1979Engelhard Minerals & Chemicals CorporationThick film resistance thermometer
US4281041 *Feb 15, 1980Jul 28, 1981Degussa AktiengesellschaftPalladium cobalt iron alloy
US4311982 *Aug 1, 1980Jan 19, 1982The Yellow Springs Instrument Company, Inc.Trimmable wirewound resistance temperature transducer
US4338145 *Dec 15, 1980Jul 6, 1982Taisei Kohki Co., Ltd.Chrome-tantalum alloy thin film resistor and method of producing the same
US4949453 *Jun 15, 1989Aug 21, 1990Cray Research, Inc.Method of making a chip carrier with terminating resistive elements
US5122620 *Jun 25, 1991Jun 16, 1992Cray Research Inc.Chip carrier with terminating resistive elements
US5258576 *Jan 3, 1992Nov 2, 1993Cray Research, Inc.Integrated circuit chip carrier lid
US5364705 *Jun 25, 1992Nov 15, 1994Mcdonnell Douglas Helicopter Co.Hybrid resistance cards and methods for manufacturing same
US5494180 *Sep 26, 1994Feb 27, 1996Mcdonnell Douglas Helicopter CompanyHybrid resistance cards and methods for manufacturing same
US6518873 *Sep 13, 2001Feb 11, 2003Bourns, Inc.Variable resistive element
US6828898 *Apr 3, 2003Dec 7, 2004Cts CorporationFuel tank resistor card having improved corrosion resistance
USRE34395 *Dec 11, 1991Oct 5, 1993Cray Research, Inc.Method of making a chip carrier with terminating resistive elements
WO2007112527A2 *Mar 30, 2007Oct 11, 2007Baptistella Maria CeciliaDevices constructive arrangement and methods applied to thoraxic cirtometry
Classifications
U.S. Classification338/140, 427/102, 338/308, 338/142, 427/125, 427/103, 427/124, 204/192.22
International ClassificationH01C10/30, H01C10/00, H01C10/22, H01C10/46
Cooperative ClassificationH01C10/46, H01C10/308, H01C10/22
European ClassificationH01C10/30E, H01C10/22, H01C10/46
Legal Events
DateCodeEventDescription
Jun 17, 1988ASAssignment
Owner name: NIKON CORPORATION, 2-3, MARUNOUCHI 3-CHOME, CHIYOD
Free format text: CHANGE OF NAME;ASSIGNOR:NIPPON KOGAKU, K.K.;REEL/FRAME:004935/0584