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Publication numberUS3650042 A
Publication typeGrant
Publication dateMar 21, 1972
Filing dateMay 19, 1969
Priority dateMay 19, 1969
Publication numberUS 3650042 A, US 3650042A, US-A-3650042, US3650042 A, US3650042A
InventorsFrank E Boerger, William H White
Original AssigneeIbm
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Gas barrier for interconnecting and isolating two atmospheres
US 3650042 A
Abstract
A transition or isolation zone for accommodating continuous free flow of a tier of articles between two distinct and isolated atmospheres. The transition zone includes a series of alternate inlet and outlet compartments for a non-reactive gas wherein the compartments contain inlet and outlet openings interconnecting with each other and the indicated atmospheres. The cross sections of the openings are complementary to the cross section of the tier of articles to provide a restricted orifice-size clearance therebetween, whereby the orifice phenomena can be employed by correlation of pressures to control the flow of gas and conversely to substantially completely isolate the indicated atmospheres without any measurable cross-migration therebetween.
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Description  (OCR text may contain errors)

United States Patent Boerger et al. 5] Mar. 21, 1972 54] GAS BARRIER FOR 2,963,001 12/1960 Alexander ..34 242 x INTERCONNECTING AND ISOLATING 3,067,602 l2/ 1962 Brunt ..68/5 E wo S E S 1 3,349,578 10/1967 Greer ..34/242 X [72] Inventors: Frank E. Boerger; William H. White, both Primary Examiner-Edward J. Michael of Poughkeepsie, NY. Attorney-Hanifin and Jancin and Henry Powers [73] Assignee: International Business Machines Corpora- ABSTRACT tion, Armonk, NY.

A transition or isolation zone for accommodating continuous free flow of a tier of articles between two distinct and isolated atmospheres. The transition zone includes a series of alternate inlet and outlet compartments for a non-reactive gas wherein the compartments contain inlet and outlet openings interconnecting with each other and the indicated atmospheres. The cross sections of the openings are complementary to the cross section of the tier of articles to provide a restricted orifice-size clearance therebetween, whereby the orifice phenomena can be employed by correlation of pressures to control the flow of gas and conversely to substantially completely isolate the indicated atmospheres without any measurable cross-migration therebetween.

38 Claims, 71 Drawing Figures SHEET 01UF46 PATENTEUHARZI I972 INVENTORS FRANK E. BOERGER WILLIAM H. mm

ATTORNEY FIG.2

PATENTEB MAR 2! i972 SHEET 02 0F 46 SHEET 030F 46 PAIENTEDHARZI m2 PAIENTEB MAR 21 m2 SHEET on or 46 PAIENIEUMAR21 m2 SHEET 080F 16 PATENTEBMAR21 I972 SHEET 07UF 46 PATENTEDIARZ'I I972 SHEET 080F 16 m. wE

PATENTEnMARm I972 SHEET 1UUF46 PAIENTEDMAR21 I972 SHEET 110F416 s l. :T 3 T f m 3 a a 5 NNdE NZ a 32221: a

PATENTEUHAREI I972 SHEET 120F 46 n. r I I! PATENTEDHARZI I972 SHEET 130F 16 PATENTEBMARZI I972 SHEET 1ROF46 SHEET 150F 56 g a m PATENTED MAR 21 I972 PATENTEUHARZI I972 SHEET 190F 46 w g ..l 5 o: M m g

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Classifications
U.S. Classification34/611, 34/242, 68/5.00R, 118/719
International ClassificationC30B31/10, C23F1/00, C23C14/56, C30B31/16, C23C16/54
Cooperative ClassificationH01L21/67173, C23F1/00, C30B31/16, H01L21/6719, H01L21/67109, C23C14/56, C30B31/106, C23C16/54
European ClassificationH01L21/67S2Z6, H01L21/67S2Z2L, H01L21/67S2H4, C30B31/10D, C30B31/16, C23C14/56, C23F1/00, C23C16/54