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Publication numberUS3673981 A
Publication typeGrant
Publication dateJul 4, 1972
Filing dateMay 13, 1969
Priority dateMay 13, 1969
Publication numberUS 3673981 A, US 3673981A, US-A-3673981, US3673981 A, US3673981A
InventorsBeckham Robert R, Brown Jack G, Rose Kenneth M De, Ryan Joseph D, Walters Emmett L
Original AssigneeLibbey Owens Ford Co
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Filming apparatus
US 3673981 A
Abstract  available in
Previous page
Next page
Claims  available in
Description  (OCR text may contain errors)

I United States Patent [I51 3,673,981 Beckham et al. July 4, 1972 [s41 FILMING APPARATUS 3,262,420 7/1966 Bossi et al .1 l8/S7 [72] Inventors: Robert R. Bcckham; Emmett L. Walters; 349l'720 1/1970 Hams 118/495 izg f g'm i g t y g FOREIGN PATENTS OR APPLICATIONS o e l 9,024 1912 Great Britain ,266/4 B [731 Asi'gmZ gg zf m! 56l,408 5/1944 Great Britain ..266/4 8 22 l d; May 13 1969 Primary Examiner-Morris Kaplan [211 A l N 862 998 Attorney-Collins & Oberlin Related [1.8. Application Data [57] ABSTRACT [60] Division of Ser No 664 440 Au 1967 Pat No System for the vacuum deposition of thin films on sheet 3 495 724 whi'ch a fi an material including a plurality of vacuum chambers arranged in 2 1 29 I966 abandoned p end-to-end relation to one another, one of the chambers cony stituting a filming chamber, valve compartments disposed between adjacent chambers for placing them in communica- C l lllllllllllllllllllllllllllllll "us/6 I 36 tion when open and separating them when closed together [58] Field 8 4849 5 with similar compartments located at the respective entry and b h exit ends of the plurality of chambers, conveying means for moving sheet material through successive chambers and including carriers for clamping individual sheets along their [56] References Cited upper edges and maintaining same in a substantially vertical UNITED STATES PATENTS position, means responsive to the positioning of the material in the chambers to pennit opening and closing of the valve com- 1,876,960 9/1932 Kenworthy ..266/4 B UX panmems in predetermined Sequence. and means outwardly is 5/1934 Owen B UX of the entry and exit valve compartments for aligning and posi gran: tioning the sheet material for travel through the chambers and i y bs u ntu lo d'n the eof, 3,l97,328 7/1965 Jung etal ..m/107.2 eq c n a g r 3,206,322 9/1965 Morgan ..l l8/49 X 68 Claims, 16] Drawing Figures p a-io sen u kit PATENTEBJUL 4:972 3.673.981

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Referenced by
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US4274936 *Apr 30, 1979Jun 23, 1981Advanced Coating Technology, Inc.Vacuum deposition system and method
US5887210 *Nov 29, 1994Mar 23, 1999Asahi Kogaku Kogyo Kabushiki KaishaCamera having motor driven mechanism
US5961798 *Aug 8, 1996Oct 5, 1999Diamond Black Technologies, Inc.System and method for vacuum coating of articles having precise and reproducible positioning of articles
US6231992Sep 4, 1998May 15, 2001Yazaki CorporationPartial reflector
US8360225 *May 9, 2008Jan 29, 2013Caterpillar Inc.Modular manufacturing chain including a utility transfer module and method of operation therefor
US8998606 *Jan 4, 2012Apr 7, 2015Stion CorporationApparatus and method utilizing forced convection for uniform thermal treatment of thin film devices
US9028613 *Apr 10, 2012May 12, 2015Samsung Display Co., Ltd.Rotating type thin film deposition apparatus and thin film deposition method used by the same
US20040069836 *Jul 30, 2003Apr 15, 2004Kurt SagerMethod of manufacturing heat insulating structural and/or light elements and installation for carrying out the method
US20040261709 *Jun 21, 2004Dec 30, 2004Semiconductor Energy Laboratory Co., Ltd.Manufacturing apparatus
US20090277745 *Nov 12, 2009Caterpillar IncModular manufacturing chain including a utility transfer module and method of operation therefor
US20090277748 *Jan 9, 2009Nov 12, 2009Caterpillar Inc.Modular manufacturing line including a buffer and methods of operation therefor
US20120187269 *Jan 13, 2012Jul 26, 2012Wmf Wuerttembergische Metallwarenfabrik AgBeverage machine
US20120237885 *Jan 4, 2012Sep 20, 2012Stion CorporationApparatus and Method Utilizing Forced Convection for Uniform Thermal Treatment of Thin Film Devices
US20130115373 *May 9, 2013Samsung Mobile Display Co., Ltd.Rotating type thin film deposition apparatus and thin film deposition method used by the same
U.S. Classification118/676, 118/733, 118/686, 118/503, 118/729, 118/708, 118/719
International ClassificationC23C14/56
Cooperative ClassificationC23C14/56
European ClassificationC23C14/56
Legal Events
Oct 27, 1986ASAssignment
Owner name: LOF GLASS, INC., 811 MADISON AVE., TOLEDO, OH 4369
Effective date: 19860320
Owner name: LOF GLASS, INC.,OHIO