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Publication numberUS3848366 A
Publication typeGrant
Publication dateNov 19, 1974
Filing dateJan 16, 1973
Priority dateJan 16, 1973
Publication numberUS 3848366 A, US 3848366A, US-A-3848366, US3848366 A, US3848366A
InventorsDavid J
Original AssigneeDavid J
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Means to assure uniform flow of an abrasive solution
US 3848366 A
Abstract
A means of supplying an abrasive solution to a lapping machine having a rotating lapping plate, and which solution comprises a liquid having an abrasive in suspension. The solution is supplied under pressure to a tubular member having a rod freely rotatable therein, permitting the solution to flow axially along the rod and to be deposited upon the lapping plate. A plurality of arms extend normal to the axis of the rod and integral therewith are periodically engaged to rotate the rod and assure breaking up of any concentration of particles in the solution that would interfere with the uniform flow of the solution.
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Description  (OCR text may contain errors)

United States Patent [1191 David m1 3 3,848,366 [451 Nov. 19, 1974 MEANS TO ASSURE UNIFORM FLOW OF AN ABRASIVE SOLUTION [76] Inventor: .lohn David, 1017 Indiana St.,

Racine, Wis. 53405 [22] Filed: Jan. 16, 1973 [21] Appl. No.: 324,179

[52] US. Cl. 51/129, 51/263 [51] Int. Cl B24b 37/04, B24b 57/00 [58] Field of Search 51/263, 292, 129, 131;

[56] References Cited UNITED STATES PATENTS 288,809 11/1883 Hooper 222/410 X 3,028,711 4/1962 Campbell 51/263 Primary Examiner-A1Lawrence Smith Assistant Examiner-Nicholas P. Godici Attorney, Agent, or Firm-Axel Johnson 57 ABSTRACT A means of supplying an abrasive solution to a lapping machine having a rotating lapping plate, and which solution comprises a liquid having an abrasive in suspension. The solution is supplied under pressure to a tubular member having a rod freely rotatable therein, permitting the solution to flow axially along the rod and to be deposited upon the lapping plate. A plurality of arms extend normal to the axis of the rod and integral therewith are periodically engaged to rotate the rod and assure breaking up of any concentration of particles in the solution that would interfere with the uniform flow of the solution.

3 Claims, 9 Drawing Figures PATENTEL rm 1 SIM 3,848,366

, SHEET 30F 3 MEANS TO ASSURE UNIFORM FLOW OF AN ABRASIVE SOLUTION BACKGROUND OF THE INVENTION 1. Field of the Invention This invention concerns devices employed to supply abrasive solutions to lapping machines during the process of lapping.

2. Description of the Prior Art The prior art includes a means of supplying an abrasive solution in which the flow is periodically interrupted to assure dislodgement of grit that would tend to clog the orifices and affect the uniform flow of the lapping solution.

SUMMARY OF THE INVENTION This invention concerns a means of providing constant and uniform flow of an abrasive solution to a lapping plate which solution comprises a fluid having abrasive particles suspended therein. The solution is supplied under pressure to a rotating rod member confined freely within a bore; the solution flowing axially along the rod, and then deposited upon the lapping plate. The rotating rod member is provided with radial arms extending normally thereto. A rotatable work-confining ring member rests upon the plate for free rotation thereon and has an indexing pin extending upwardly so as to periodically engage one of the arms to rotate the rod member. An object of this invention is to dislodge concentrated particles of the abrasive to permit uniform flow of the solution axially of the rod.

Referring to the drawings:

FIG. 1 is a fragmentary plan view of a portion of lapping machine embracing the invention.

FIG. 2 is an elevational view of the machine of FIG. 1.

FIG. 3 is an enlarged plan view of a portion of FIG. 1.

FIG. 4 is an elevational view of FIG. 3 with parts broken away.

FIG. 5 is an axial view of a portion of FIG. 4taken at 5-5 of FIG. 4.

FIG. 6 is an enlargement showing a modification of FIG. 3.

FIG. 7 is an elevational view of FIG. 6.

FIG. 8 is an enlarged view of a portion of FIG. 7 with parts broken away.

FIG. 9 is a section taken at 99 of FIG. 7.

A typical lapping machine embracing this invention is shown in FIGS. 1 and 2, in which the lapping machine comprises a frame 10 on which a lapping plate 12 rotates about an axis 14, in the direction of arrow 16, and having a lapping surface 18.

A conditioning ring rests freely upon the surface 18 of lapping plate 12. A cradle 22 partially embraces ring 20 and limits the rotation thereof about its axis 24 by means of rollers 26 and 28, and in the direction indicated by the arrow 30.

Cradle 22 is supported on frame 10 by' a post 32 and a nut 34. Ring 20 has a concentric opening 36. Work pieces to be lapped (not shown) are freely confined within the opening 36 and rest freely upon the surface 18 of plate 12.

The angular position of rollers 26 and 28 with respect to line 38 in such that ring 20 will rotate about axis 24 in the direction of arrow at a rate proportional to the rotation of plate 12 about the axis 14; and considerably less.

The abrasive supply means 40 comprises an upright tubular portion 42 having an axis normal to the surface of plate 12. Tubularportion 42 terminates upwardly in a tubular support member 44 which is of the shape shown. Portion 44extends downwardly for connection with a pump and reservoir 46 which supplies the abrasive solution under pressure. Portion 44 comprises a loop having terminal portions 45 and 48; the solution flowing from reservoir 46 in the direction of arrow 50 and returning to the reservoir in the direction of arrow 52; thus supplying a continuous flow of the solution to the lapping operation. a

Tubular portion 42is integrally fixed in supply member 44 in an opening, and has an axial bore 54 in fluid connection with member 44. A rod member 56 extends axially through bore 54 and is of a diameter substantially smaller than that of bore 54, to permit flow of the abrasive solution axially along the rod.

A plurality of arms 58, 60 and 62, in this instance. extend radially and are positioned in a'plane below the end of portion 42. It is desirable to provide a dampening means to prevent excessive free rotation of the rod member 56 in the bore 54. A disk 64 is fixed integrally about portion 42. A dampening finger 66 is secured integrally to rod 56 and is of the shape shown. Finger 66 frictionally engages to upper surface of disk 64 with a pressure sufficient to' maintain contact between the upper end of rod member 56 and the inner surface of supply member 44, thus providing means to dampen free rotation of the rod member 56.

Conditioning ring 20 has provided in the rim thereof an upright index pin 68. The purpose of pin 68 is to periodieally engage one of the arms 58, 60 and 62 in turn as the ring 20 rotates in the direction of the arrow 30, thus rotating rod 56 in the direction of the arrow 70. Pin 68 is also shown by dotted lines in the position that it would appear when indexing the arm 62 to rotate the rod 56.

FIGS. 6 through 9 concern a modification of the showing of FIGS. 3 and 4. .Tubular portion 72 has a bore 74 surrounding the rod 76. Other details similar to those indicated in regard to FIGS. 3 through 5 are similar and need not be further described. The modifications concern the adjustment of the'flow of the abrasive solution axially along rod 76, which'can be of various diameters to permit control of the quantity of the abrasive solution being supplied to the lapping plate 12.

An auxiliary means to control the flow of thesolution is shown in FIGS. 7 and 8. The end of portion 72 has a plane normal to the axis thereof as at 78. Portion 72 has a thread extending upwardly from the end. A sleeve 82 is internally threaded to permit the sleeve to be adjusted axially relative to the portion 72. The thread in sleeve 82 terminates downwardly in an axial, upwardly-diverging cone-shaped seat '84. A resilient O ring 86 freely surrounds rod 76 and rests in seat 84. The purpose of ring 86 is to provide a means of controlling the quantity of abrasive solution flowing along rod 76. If it is desired to reduce the flow of the solution. sleeve 82 is threaded upwardly to compress the 0" ring 86 radially, thus causing a reduction in 'the passage of the solution along the rod 76. It is also the intention to vary the diameter of the rod 76 to accomplish a reduction or an increase in the flow of the solution along the rod 76, as an alternative.

The path of the abrasive solution follows the periphery of the rod 76, or 56 to be deposited on the lapping plate surface 18. In the event that an accumulation of abrasive particles tend to clog or otherwise obstruct the flow of the solution, the periodic rotation of the rods 56 or 76 will tend to disolve the obstruction and permit consistent flow of the solution.

The above being a complete description of an illustrative embodiment of the invention, what is claimed as new and desired to be secured by Letters Patent of the United States is:

1. In a lapping machine having a lap plate rotatable about a first axis, and a work-confining ring member having an opening, and in contact with, and freely rotatable on said plate about a second axis radially positioned relative to said first axis, in combination, a means to apply an abrasive solution to the surface of said plate, comprising an upright tubular dispensing member having an axial bore and terminating upwardly in a solution-supply member, said bore having fluid connection with said supply member, a rod freely rotatable in said bore and being of a diameter substantially less than the diameter of said bore and extending below said dispensing member, a plurality of radially extending circumferentially-spaced arms integral with said rod and lying in a plane below said dispensing member, normal thereto and above said ring, a means to index rotation of said rod comprising an upright index member integral with said ring, and successively engageable with each of said arms to rotate said rod upon rotation of said ring.

2. In a lapping machine as set forth in claim 1, in which means is provided to dampen the free rotation of said rod in said bore.

3. In a lapping machine as set forth in claim I, in which said upright tubular dispensing member terminates downwardly in a seat normal to the axis of said member and surrounding said rod, a resilient ring member freely surrounding said rod and in engagement with said seat, a sleeve surrounding said upright dispensing member and having an upwardly-diverging conical seat in engagement with said resilient member, and means to adjust said sleeve axially relative to said tubular dispensing member to radially contract said resilient memberto control the passage of said solution axially in said bore. l l

Patent Citations
Cited PatentFiling datePublication dateApplicantTitle
US288809 *Jul 19, 1883Nov 20, 1883 Feed mechanism for cotton-seed mills
US3028711 *May 16, 1960Apr 10, 1962Crane Packing CoGrit distributing apparatus
Referenced by
Citing PatentFiling datePublication dateApplicantTitle
US5709593 *Oct 27, 1995Jan 20, 1998Applied Materials, Inc.Apparatus and method for distribution of slurry in a chemical mechanical polishing system
US5868608 *Aug 13, 1996Feb 9, 1999Lsi Logic CorporationSubsonic to supersonic and ultrasonic conditioning of a polishing pad in a chemical mechanical polishing apparatus
US5997392 *Jul 22, 1997Dec 7, 1999International Business Machines CorporationSlurry injection technique for chemical-mechanical polishing
US6051499 *Dec 2, 1997Apr 18, 2000Applied Materials, Inc.Rotation
US6168502Dec 14, 1998Jan 2, 2001Lsi Logic CorporationSubsonic to supersonic and ultrasonic conditioning of a polishing pad in a chemical mechanical polishing apparatus
US6196907 *Oct 1, 1999Mar 6, 2001U.S. Dynamics CorporationSlurry delivery system for a metal polisher
US6280297Jan 11, 2000Aug 28, 2001Applied Materials, Inc.Apparatus and method for distribution of slurry in a chemical mechanical polishing system
Classifications
U.S. Classification451/286, 451/446
International ClassificationB24B57/00
Cooperative ClassificationB24B57/00
European ClassificationB24B57/00