US3849906A - Rotary fluid applicator - Google Patents
Rotary fluid applicator Download PDFInfo
- Publication number
- US3849906A US3849906A US00413753A US41375373A US3849906A US 3849906 A US3849906 A US 3849906A US 00413753 A US00413753 A US 00413753A US 41375373 A US41375373 A US 41375373A US 3849906 A US3849906 A US 3849906A
- Authority
- US
- United States
- Prior art keywords
- disk
- workpiece
- fluid
- chamber
- flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012530 fluid Substances 0.000 title claims abstract description 62
- 241000237503 Pectinidae Species 0.000 claims abstract description 21
- 235000020637 scallop Nutrition 0.000 claims abstract description 21
- 230000000694 effects Effects 0.000 claims abstract description 14
- 235000012431 wafers Nutrition 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000001035 drying Methods 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005201 scrubbing Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Coating Apparatus (AREA)
- Drying Of Solid Materials (AREA)
- Spray Control Apparatus (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Apparatus for applying a fluid medium to a workpiece, the apparatus comprising a chamber and a pair of rotatably mounted disks in the chamber. A workpiece is suspended in the chamber and the disks are provided with a plurality of apertures therein to create a flow of fluid media from one surface of the disk at an oblique angle to the workpiece. The disks are provided with blade-like scallops or notches along their periphery so that a fluid medium applied thereto will effect rotation thereof to create relative movement between the disk and the workpiece. The purpose of this abstract is to enable the public and the Patent Office to determine rapidly the subject matter of the technical disclosure of the application. This abstract is neither intended to define the invention of the application nor is it intended to be limiting as to the scope thereof.
Description
United States Patent Hansen et al.
[ Nov. 26, 1974 ROTARY FLUID APPLICATOR International Business Machines Corporation, Armonk, NY.
Nov. 7, 1973 Inventors:
Assignee:
Filed:
Appl. No:
[56] References Cited UNITED STATES PATENTS l2/l950 Hensler 34/105 7/l952 Wellborn 34/229 Primary ExaminerKenneth W. Sprague Assistant Examiner.lames C. Yeung Attorney, Agent, or Firm William J. Dick [57] ABSTRACT Apparatus for applying a fluid medium to a workpiece, the apparatus comprising a chamber and a pair of rotatably mounted disks in the chamber. A workpiece is suspended in the chamber and the disks are provided with a plurality of apertures therein to create a flow of fluid media from one surface of the disk at an oblique angle to the workpiece. The disks are provided with blade-like scallops or notches along their periphery so that a fluid medium applied thereto will effect rotation thereof to create relative movement between the disk and the workpiece.
The purpose of this abstract is to enable the public and the Patent Office to determine rapidly the subject matter of the technical disclosure of the application. This abstract is neither intended to define the invention of the application nor is it intended to be limiting as to the scope thereof.
10 Claims, 2 Drawing Figures PATENTEL HUVZS I974 FIG. I
ROTARY FLUID APPLICATOR SUMMARY OF THE INVENTION AND STATE OF THE PRIOR ART The present invention relates to apparatus for applying a fluid medium to a workpiece, and more particu larly relates to a rotary drier.
Driers for small workpieces to dispel fluid or the like therefrom are old in the art, and range from the simple expedient of the application of heated air or nitrogen, depending upon the surface coating of the workpiece or the composition thereof, to very elaborate schemes for the application of a drying medium to the work piece.
In view of the above it is a principal object of the present invention to provide novel apparatus for applying a fluid to a workpiece in which the surface of the workpiece is treated uniformly by the fluid.
Another object of the present invention is to provide a novel drier for drying workpiece in which the flow of drying medium against the workpiece is oblique to the surface thereof.
Yet another object of the present invention is to provide a novel drier for semiconductor wafers which more efficiently and in less time is able to dispel liquids from the surface of the wafer by providing a flow of drying medium against the surface thereof oblique to the surface of the wafer.
Yet another object of the present invention is to pro vide novel apparatus for applying a fluid medium to a workpiece which apparatus may be oriented in either the vertical or horizontal plane so as to easily accommodate any desired placement of the article.
Yet another object of the present invention is to provide a novel apparatus which may be duplicated on the opposite side of the workpiece so as to uniformly dry or apply other fluid media to opposite sides of the workpiece.
Other objects and a more complete understanding of the invention may be had by referring to the following specification and claims taken in conjunction with the accompanying drawings in which:
FIG. 1 is a fragmentary sectional view in side elevation of apparatus constructed in accordance with the present invention; and
FIG. 2 is a fragmentary sectional view taken along line 2-2 of FIG. 1.
Referring now to the drawing and especially FIG. 1 thereof, apparatus for applying a fluid medium such as air or nitrogen to a workpiece is illustrated therein. As shown the apparatus comprises a chamber 11 having a workpiece entry port 12 at one end thereof and a fluid medium discharge port 13 at the other end thereof. Means 14, in the illustrated instance a three point holder, acts to suspend a workpiece 15, in the present instance a silicon wafer, within the chamber 11.
In accordance with the invention, means are provided for effecting a flow of fluid medium at an oblique angle onto at least one surface of the workpiece 15. To this end, and as best illustrated in FIG. 1, the means comprises a wheel or disk 16 having a first major surface 16A and second major surface 168 coupled to and mounted for rotation on an axle 17. As shown, the first major surface 16A of the wheel or disk 16 includes a plurality of angulated slots or apertures 17 therein which are connected through passageways 18 to a conduit 19 centrally located in the axle 17. The axle 17, as shown, is mounted for rotation :in the side wall of a housing 20 as by a sleeve bearing 21. A supply of fluid media, such as air or nitrogen, is applied to the conduit 19 by suitable piping 22 which passes through a conduit extension 23 located in a housing extension 24.
The coupling of the conduit extension 23 to the conduit 19 is such as to allow a small amount of the fluid media to escape and pass through and out a media drain 25, located in the housing extension 24.
In order to provide a scrubbing; or swirling action of the media being provided against the workpiece from the slots 17 in the disk 16, means are provided to effect rotation of the disk. To this end, the peripheral edge 16C of the second major surface 168 of the disk 16 is provided with spaced scallops 26 which are aligned for registration with a nozzle 27 through the housing 20, to permit impingement of a second source of fluid media (not shown) against the scallops 26 thereby effecting rotation of the disk 16. Thus the scallops in effect are small blades forming part of a turbine wheel thereby causing the necessary rotation to the disk. This struc ture also permits the wheel or disk 16 to be fitted into the chamber without elaborate labyrinth seals, and permits the discharge of the fluid media, after impingement upon the blade-like scallops, about the periphery of the wheel 16 and into the chamber.
In practice, if it is desired to apply a fluid medium to both sides of the workpiece 15, an identical structure including a wheel or disk 30 may be mounted on the opposite side of the workpiece, the disk including a rear major surface having scallops 31 thereon to impart rotation to the wheel, while providing a source of fluid media as described above against the rear surface of the workpiece 15. In this connection, it may be desirable to effect counter rotation between the two wheels and/or a differential fluid pressure of the fluid medium against opposite surfaces of the workpiece.
Additionally, it may be desirable to provide a differential pressure between the inlet or entry port 12 and the fluid discharge port 13 so as to create a natural flow of fluid media from the chamber 11.
Also, it may be desirable, under certain circumstances, to locate the housing in the horizontal plane as opposed to the vertical plane illustrated in FIG. 1. In this connection the workpiece holder 14 may take one of several forms, none of which are critical to the proper operation of the apparatus. When operated in horizontal plane the flow of media will aid in suspending the workpiece and thus only means to prevent inadvertent displacement along the axis of the chamber Ill is required.
As shown in FIG. 2, the holder for silicon wafers may comprise a pair of arms 14A and 148 which may be separated and brought together to clamp the wafer 15 along its periphery in the present instance at three points.
In operation, the rotation of one or more disks or wheels when used as a drier, effects rapid and uniform drying of the surface of a workpiece such as a semiconductor wafer inasmuch as the provision of a fluid source to create a flow of fluid against the workpiece oblique to the surface thereof tends to drive off any liquids or fluid on the workpiece surface.
Thus the apparatus of the present invention provides for a uniform and quick application of fluids to a workpiece.
Although the invention has been described with a certain degree of particularly, it is understood that the present disclosure has been made only by way of example and that numerous changes in the details of construction and the combination and arrangement of parts and the mode of operation may be made without departing from the spirit and the scope of the invention as hereinafter claimed.
What is claimed is:
1. Apparatus for applying a fluid medium to a workpiece, said apparatus comprising: a chamber; a rotatably mounted disk in said chamber; means for suspending a workpiece in said chamber adjacent said disk, a plurality of angulated slots in the surface of said disk to provide a flow of fluid media from one surface of said disk at an oblique angle to said workpiece, and scallops on said disk, and means to provide a flow of fluid me dium against said scallops to effect a rotation of said disk as said fluid is ejected from said one surface thereof.
2. Apparatus in accordance with claim 1 including internal passageways in said disk and connected to said slots, and conduit means connected to said passageways to provide said fluid medium to said slots.
3. Apparatus in accordance with claim 1 wherein said disk is mounted on one side of said workpiece, and a second disk mounted for rotation on the opposite side of said workpiece, said second disk including a plurality of angulated slots in one surface thereof for providing a flow of fluid media from said one surface thereof at an oblique angle to said workpiece.
4. Apparatus in accordance with claim 3 including scallops on said second disk, and means to provide a flow of fluid medium against said scallops to effect rotation of said second disk.
5. Apparatus for applying a fluid to a workpiece, said apparatus comprising: a chamber having a workpiece entry port and a fluid discharge port; means for suspending a workpiece in said chamber; a disk including an axle and mounted for rotation in said chamber; said disk'having a first major surface and a second major surface; a plurality of angulated slots in said first major surface thereof, and means providing a source of fluid medium through said slots directed towards said worpiece, nozzle means, and means on said disk in registry with said nozzle means whereby a flow of fluid through said nozzle means effects rotation of said wheel to thereby create a flow of fluid against said workpiece oblique to the surface thereof.
6. Apparatus in accordance with claim 5 including internal passageways in said disk and connected to said slots, and conduit means connected to said passageways to provide said fluid medium to said slots.
7. Apparatus in accordance with claim 6 wherein said conduit means extends into and through said axle.
8. Apparatus in accordance with claim 5 wherein said means on said disk includes scallops on said disk.
9. Apparatus in accordance with claim 5 wherein said disk is mounted on one side of said workpiece, and a second disk mounted for rotation on the opposite side of said workpiece, said second disk including means for providing a flow of fluid media from one surface thereof at an oblique angle to said workpiece.
10. Apparatus in accordance with claim 9 including scallops on said second disk, and means to provide a flow of fluid medium against said scallops to effect rotation of said second disk.
* a a l
Claims (10)
1. Apparatus for applying a fluid medium to a workpiece, said apparatus comprising: a chamber; a rotatably mounted disk in said chamber; means for suspending a workpiece in said chamber adjacent said disk, a plurality of angulated slots in the surface of said disk to provide a flow of fluid media from one surface of said disk at an oblique angle to said workpiece, and scallops on said disk, and means to provide a flow of fluid medium against said scallops to effect a rotation of said disk as said fluid is ejected from said one surface thereof.
2. Apparatus in accordance with claim 1 including internal passageways in said disk and connected to said slots, and conduit means connected to said passageways to provide said fluid medium to said slots.
3. Apparatus in accordance with claim 1 wherein said disk is mounted on one side of said workpiece, and a second disk mounted for rotation on the opposite side of said workpiece, said second disk including a plurality of angulated slots in one surface thereof for providing a flow of fluid media from said one surface thereof at an oblique angle to said workpiece.
4. Apparatus in accordance with claim 3 including scallops on said second disk, and means to provide a flow of fluid medium against said scallops to effect rotation of said second disk.
5. Apparatus for applying a fluid to a workpiece, said apparatus comprising: a chamber having a workpiece entry port and a fluid discharge port; means for suspending a workpiece in said chamber; a disk including an axle and mounted for rotation in said chamber; said disk having a first major surface and a second major surface; a plurality of angulated slots in said first major surface thereof, and means providing a source of fluid medium through said slots directed towards said worpiece, nozzle means, and means on said disk in registry with said nozzle means whereby a flow of fluid through said nozzle means effects rotation of said wheel to thereby create a flow of fluid against said workpiece oblique to the surface thereof.
6. Apparatus in accordance with claim 5 including internal passageways in said disk and connected to said slots, and conduit means connected to said passageways to provide said fluid medium to said slots.
7. Apparatus in accordance with claim 6 wherein said conduit means extends into and through said axle.
8. Apparatus in accordance with claim 5 wherein said means on said disk includes scallops on said disk.
9. Apparatus in accordance with claim 5 wherein said disk is mounted on one side of said workpiece, and a second disk mounted for rotation on the opposite side of said workpiece, said second disk including means for providing a flow of fluid media from one surface thereof at an oblique angle to said workpiece.
10. Apparatus in accordance with claim 9 including scallops on said second disk, and means to provide a flow of fluid medium against said scallops to effect rotation of said second disk.
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US00413753A US3849906A (en) | 1973-11-07 | 1973-11-07 | Rotary fluid applicator |
DE2442309A DE2442309A1 (en) | 1973-11-07 | 1974-09-04 | DEVICE FOR DRYING SMALL OBJECTS |
IT27459/74A IT1022104B (en) | 1973-11-07 | 1974-09-19 | EQUIPMENT FOR APPLYING A FLUID AGENT TO A WORKING PIECE |
FR7433122A FR2249717B1 (en) | 1973-11-07 | 1974-09-25 | |
JP49113971A JPS5074857A (en) | 1973-11-07 | 1974-10-04 | |
CA211,477A CA1035574A (en) | 1973-11-07 | 1974-10-16 | Rotary fluid applicator |
GB47076/74A GB1482106A (en) | 1973-11-07 | 1974-10-30 | Apparatus for applying fluid to a workpiece |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US00413753A US3849906A (en) | 1973-11-07 | 1973-11-07 | Rotary fluid applicator |
Publications (1)
Publication Number | Publication Date |
---|---|
US3849906A true US3849906A (en) | 1974-11-26 |
Family
ID=23638474
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US00413753A Expired - Lifetime US3849906A (en) | 1973-11-07 | 1973-11-07 | Rotary fluid applicator |
Country Status (7)
Country | Link |
---|---|
US (1) | US3849906A (en) |
JP (1) | JPS5074857A (en) |
CA (1) | CA1035574A (en) |
DE (1) | DE2442309A1 (en) |
FR (1) | FR2249717B1 (en) |
GB (1) | GB1482106A (en) |
IT (1) | IT1022104B (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4429983A (en) | 1982-03-22 | 1984-02-07 | International Business Machines Corporation | Developing apparatus for exposed photoresist coated wafers |
EP0189855A2 (en) * | 1985-01-30 | 1986-08-06 | Carl Prof.Dr.-Ing. Kramer | Apparatus for evenly directing a gas towards a flat surface |
US4767317A (en) * | 1985-01-26 | 1988-08-30 | Carl Kramer | Apparatus for mixing a gas main flow with at least one gas subflow |
CN110603628A (en) * | 2017-02-06 | 2019-12-20 | 平面半导体公司 | Removal of treated wastewater |
CN110603629A (en) * | 2017-02-06 | 2019-12-20 | 平面半导体公司 | Sub-nanometer optical-based substrate cleaning mechanism |
CN110622290A (en) * | 2017-02-06 | 2019-12-27 | 平面半导体公司 | Sub-nanometer substrate cleaning mechanism |
US20210402424A1 (en) * | 2020-06-30 | 2021-12-30 | Universal Circuit Board Equipment Co., Ltd. | Surface treatment device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5417640A (en) * | 1977-07-08 | 1979-02-09 | Mitsubishi Electric Corp | Malfunction preventive device for integrated circuit |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2532494A (en) * | 1946-11-23 | 1950-12-05 | Mcgraw Electric Co | Method of making paper tubes |
US2602003A (en) * | 1946-10-30 | 1952-07-01 | Willard Storage Battery Co | Rotating apparatus for blowing loose foreign material from articles |
-
1973
- 1973-11-07 US US00413753A patent/US3849906A/en not_active Expired - Lifetime
-
1974
- 1974-09-04 DE DE2442309A patent/DE2442309A1/en active Pending
- 1974-09-19 IT IT27459/74A patent/IT1022104B/en active
- 1974-09-25 FR FR7433122A patent/FR2249717B1/fr not_active Expired
- 1974-10-04 JP JP49113971A patent/JPS5074857A/ja active Pending
- 1974-10-16 CA CA211,477A patent/CA1035574A/en not_active Expired
- 1974-10-30 GB GB47076/74A patent/GB1482106A/en not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2602003A (en) * | 1946-10-30 | 1952-07-01 | Willard Storage Battery Co | Rotating apparatus for blowing loose foreign material from articles |
US2532494A (en) * | 1946-11-23 | 1950-12-05 | Mcgraw Electric Co | Method of making paper tubes |
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4429983A (en) | 1982-03-22 | 1984-02-07 | International Business Machines Corporation | Developing apparatus for exposed photoresist coated wafers |
US4767317A (en) * | 1985-01-26 | 1988-08-30 | Carl Kramer | Apparatus for mixing a gas main flow with at least one gas subflow |
EP0189855A2 (en) * | 1985-01-30 | 1986-08-06 | Carl Prof.Dr.-Ing. Kramer | Apparatus for evenly directing a gas towards a flat surface |
US4736529A (en) * | 1985-01-30 | 1988-04-12 | Carl Kramer | Device for the uniform application of gas on a plane surface |
EP0189855A3 (en) * | 1985-01-30 | 1988-09-21 | Carl Prof.Dr.-Ing. Kramer | Apparatus for evenly directing a gas towards a flat surface |
EP3577682A4 (en) * | 2017-02-06 | 2020-11-25 | Planar Semiconductor, Inc. | Subnanometer-level light-based substrate cleaning mechanism |
US11069521B2 (en) | 2017-02-06 | 2021-07-20 | Planar Semiconductor, Inc. | Subnanometer-level light-based substrate cleaning mechanism |
CN110622290A (en) * | 2017-02-06 | 2019-12-27 | 平面半导体公司 | Sub-nanometer substrate cleaning mechanism |
CN110603628A (en) * | 2017-02-06 | 2019-12-20 | 平面半导体公司 | Removal of treated wastewater |
EP3577681A4 (en) * | 2017-02-06 | 2020-11-25 | Planar Semiconductor, Inc. | Removal of process effluents |
US10892172B2 (en) * | 2017-02-06 | 2021-01-12 | Planar Semiconductor, Inc. | Removal of process effluents |
US10985039B2 (en) | 2017-02-06 | 2021-04-20 | Planar Semiconductor, Inc. | Sub-nanometer-level substrate cleaning mechanism |
CN110603629A (en) * | 2017-02-06 | 2019-12-20 | 平面半导体公司 | Sub-nanometer optical-based substrate cleaning mechanism |
US20210313173A1 (en) * | 2017-02-06 | 2021-10-07 | Planar Semiconductor Corporation Pte. Ltd. | Subnanometer-level light-based substrate cleaning mechanism |
US11830726B2 (en) * | 2017-02-06 | 2023-11-28 | Planar Semiconductor Corporation Pte. Ltd. | Subnanometer-level light-based substrate cleaning mechanism |
TWI770115B (en) * | 2017-02-06 | 2022-07-11 | 新加坡商平面半導體公司 | Removal of process effluents |
CN110603628B (en) * | 2017-02-06 | 2023-11-07 | 平面半导体公司 | Removal of treated sewage |
CN110622290B (en) * | 2017-02-06 | 2023-11-07 | 平面半导体公司 | Sub-nanometer substrate cleaning mechanism |
US20210402424A1 (en) * | 2020-06-30 | 2021-12-30 | Universal Circuit Board Equipment Co., Ltd. | Surface treatment device |
Also Published As
Publication number | Publication date |
---|---|
IT1022104B (en) | 1978-03-20 |
FR2249717A1 (en) | 1975-05-30 |
JPS5074857A (en) | 1975-06-19 |
GB1482106A (en) | 1977-08-03 |
DE2442309A1 (en) | 1975-05-22 |
FR2249717B1 (en) | 1976-12-31 |
CA1035574A (en) | 1978-08-01 |
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