|Publication number||US3869292 A|
|Publication date||Mar 4, 1975|
|Filing date||May 3, 1973|
|Priority date||May 5, 1972|
|Also published as||DE2322230A1, DE2322230C2|
|Publication number||US 3869292 A, US 3869292A, US-A-3869292, US3869292 A, US3869292A|
|Inventors||Peters Martinus T J|
|Original Assignee||Oce Van Der Grinten Nv|
|Export Citation||BiBTeX, EndNote, RefMan|
|Patent Citations (11), Referenced by (92), Classifications (26), Legal Events (2)|
|External Links: USPTO, USPTO Assignment, Espacenet|
United States Patent 11 1 1111 3,869,292 Peters Mar. 4, 1975  LIGHT-SENSITIVE COMPOSITIONS AND 3,502,470 3/1970 Delzenne et al. 96/91 D LIGH'LSENSITIVE MATERIALS S AS 3,589,898 6/1971 Fry et a1. 96/91 D PRINTING PLATES 3,615,532 10/1971 S|lver 96/75 3,625,919 12/1971 Kamogawa et a1 96/91 R  Inventor; Martinus T. J, Peters, Venlo, 3,647,443 3/1972 Rauner et al. 96/91 D Netherla d 3,666,473 5/1972 Colom et a1. 96/91 D 3,669,658 6/1972 Yonezawa et a1. 96/91 D  Assigneez Oce-van der G mten, e lo 3,778,270 12/1973 R005 96/115 R Netherlands 2 Filed: May 3 1973 Primary Examiner-Charles L. Bowers, Jr.
Attorney, Agent, or Firm-Albert C. Johnston  Appl. No.: 357,025
 ABSTRACT  Forelgn Apphcanon Pnomy Dam Mixtures of light-sensitive compounds with vinyl- M 5 197 G B"' 21191/7 phenol resins consntute new light-sensitive composi- 7 tions which are especially valuable for use as light- Cl 96/115 96/33 sensitive coatings of materials such as printing plates. 96/363 96/75 96/86 96/91 6 2 The resin advantageously is a polymer or copolymer of ortho-vinylphenol, and the light-sensitive com-  Int. Cl. G03f 7/08, G03c 1/52 pound an aromatic ester or amide of an Onh0  held of Search 96/91 91 91 naphthoquinone diazide sulfonic or carboxylic acid. 96/115 115 75 Aluminum foil offset plates coated with the compositions give remarkably long printing runs, due to the  References Clted exceptional wear resistance and good adhesion exhib- UNITED ST S PATENTS ited by image areas which contain a vinylphenol resin. 3,230,087 l/l966 Sus et a1. 96/33 3,396,019 8/1968 Uhlig 96/75 10 N0 Drawmgs 3,396,020 8/1968 Borchers 96/75 LIGHT-SENSITIVE COMPOSITIONS AND LIGHT-SENSITIVE MATERIALS SUCH AS PRINTING PLATES The present invention relates to light-sensitive compositions for use in the light-sensitive coatings of materials such as printing plates, to the resulting lightsensitive materials, and to processes for producing images on them.
British Pat. Specification No. 699,412 describes printing plates coated with a light-sensitive mixture of a water-insoluble ester or amide of an orthonaphthoquinone diazide sulphonic or carboxylic acid and an alkali-soluble resin such as novolak, colophony or shellac.
Light-sensitive materials containing aromatic azides and phenolformaldehyde resins, shellac or colophony are disclosed in British Pat. Specification No. 745,886.
British Pat. Specification No. 1,110,017 relates to printing plates coated with novolak or another alkalisoluble resin, such as styrene copolymer containing carboxyl groups, and a condensation product of paradiazo diphenylamine.
According to the present invention there are provided light-sensitive compositions containing a lightsensitive constituent and a vinyl-phenol resin, Le, a polymer or copolymer of a vinylphenol. The invention also provides light-sensitive materials such as printing plates which comprise suitable base materials coated with such light-sensitive compositions.
The poly-vinylphenols which have been found effective for use according to the invention are homopolymers and copolymers of ortho-, meta and paravinylphenols. The vinylphenols polymerized may be non-substituted or may carry any of various substituents that do not markedly affect the properties of the corresponding polymers. For example, such substituents may be alkoxy groups such as methoxy or ethoxy groups or alkyl groups such as methyl or isopropyl groups. The homopolymers of ortho-vinylphenol are particularly advantageous, but the poly-vinylphenols may be used also in the form of other homopolymers, of copolymers with one another, or of copolymers with other vinyl compounds such as styrene, acrylic acid, acrylic acid esters, methacrylic acid and methacrylic acid esters.
The molecular weight of the polymer does not appear to be a critical factor. Those having a number averaged molecular weight of between 2,000 and 60,000 are preferred, but the polymers having molecular weights lower or higher than this range may also be used.
The poly-vinylphenols may be prepared by block polymerization, emulsion polymerization or solution polymerization of the corresponding monomers in the presence of a cationic catalyst such as boron trifiuoride etherate. Radical polymerization processes induced by heat, by radiation or by catalysts such as azobisisobutyronitrile may also be employed. Such polymerization processes are described in detail, for example, in Journal of Polymer Science, Part Al, Vol. 7 (1969), pages 2175-2184 and 2405-2410, in Journal of Organic Chemistry, Vol. 24 (1959), pages 1345-1347, and in La Chimica e llndustria, Vol. 50 1968), pages 742-745.
vinylphenols useful for the production of the polymers may be prepared, for example, by hydrolysis of commercially available coumarin or substituted coumarins, followed by decarboxylation of the resulting hydroxy cinnamic acids. Useful vinylphenols may also be prepared by dehydration of the corresponding hydroxy-alkylphenols or by decarboxylation of hydroxy cinnamic acids resulting from the reaction of substituted or non-substituted hydroxy benzaldehydes with malonic acid. Various processes suitable for production of the vinylphenol are described in detail, for example, in Journal of Organic Chemistry, Vol. 23 1958), pages 544-549, in Arkiv foer Kemi, Mineralogi och Geologi, Vol. 16A (1943) No. 12, pages l-20, and in Annalen der Chemie, Vol. 413 (1919), pages 287-309.
Compounds particularly useful as the light-sensitive constituent of the new compositions are orthoquinonediazides such as the aromatic esters or amides of ortho-naphthoquinonediazide sulphonic or carboxylic acids.
The light-sensitive constituent, however, may be any of the various light-sensitive compounds which are known to be suitable for sensitizing materials such as light-sensitive printing plates. Examples of such compounds include: para-quinonediazides such as the B-naphthyl amide of a para-benzoquinonediazide sulphonic acid; para-iminoquinonediazides such as described in British Pat. Specification Nos. 723,382 and 942,404; organic solvent soluble: condensation products of diazonium salts with formaldehyde such as described in British Pat. Specification 1,110,017 and French Pat. Specification No. 2,022,413; cocondensation products of aromatic diazonium salts and other aromatic products with formaldehyde, such as the co-condensation product of a salt of para-diazo diphenyl-amine and 4,4'-bis-methoxymethyl diphenylether with formaldehyde; and aromatic azides such as the azido compounds described in British Pat. Specification No. 745,886.
Other light-sensitive substances that may be used include low molecular aromatic diazonium salts, diaz o sulphonates of aromatic and heterocyclic amines and polymeric products containing quinonediazide, diazo, azido, or other light-sensitive groups. When a polyethylene oxide is used in admixture with the polyvinylphenol, an organic halogen compound such as bromoform may be used for sensitizing the composition.
1n addition to the light-sensitive constituent, other constituents such as dyes, softeners and other resins such as novolak may be used in admixture with the poly-vinylphenol in the light-sensitive compositions according to the invention.
The light-sensitive materials made by use of these compositions may be printing plates, color proofing materials or oter materials of kinds used in the graphic art. Depending upon the particular use, the support may be selected from among commonly used materials such as plastic or metallic foils or plates. For printing plates according to the invention, bimetallic, trimetallic and aluminum foils and plates are preferred. 1n the use of foils and plates having an aluminum surface to be coated with the light-sensitive composition, the aluminum surface is usually roughened by a mechanical, chemical or electrochemical treatment, and it may be anodised or precoated by treatment with a hot solution of sodium silicate, potassium zirconium'fluoride, ammonia, polyvinylphosphonic acid, polyacrylic acid or other substances that will produce a protective hydrophilic layer on the surface. An aluminum support may also be used without a precoat if the light-sensitive constituent of the composition is one which is compatible with, or not adversely affected by, the metal surface.
Printing plates according to the invention may be prepared by coating a metallic support with a solution of the light-sensitive constituent and the polymer in an organic solvent. Solvents such as alcohol, 2-ethoxy ethanol, 2-methoxy ethanol, methyl ethyl ketone, dioxane or dimethyl formamide, or mixtures of such solvents, may be used. The ratio of the resin to the light-sensitive substance is not critical but usually 0.2 to 20 parts by weight of polymer are used for each part of lightsensitive substance. The polymer containing layer may have the usual thickness; for example, a coating weight of between 0.25 and 25 g per m is quite satisfactory. After exposure under a transparent original the plate may be developed with organic solvents or with alkaline solutions containing one or more alkaline substances such as sodium hydroxide, sodium carbonate, trisodium phosphate and sodium silicate. If the support surface consists of treated or untreated aluminum, the plates may be subjected to an aftertreatment with a dilute acid solution, such as a 2% phosphoric acid solution, to improve the hydrophilic properties of the image background.
Exposed bimetallic plates coated with the lightsensitive compositions according to the invention may be etched with the common etching solutions. These compositions show excellent etch-resisting properties.
Remarkably long printing runs can be obtained with the printing plates provided according to the invention. These runs are attributable to the fact that the image parts of the plates, which contain a vinylphenol resin, have a very high wear resistance and good adhesion. Printing plates sensitized with a light-sensitive composition containing an ortho-quinonediazide and a polyvinylphenol are especially suitable for very long printing runs. For example, the printing run obtainable with an aluminum plate coated with an orthonaphthoquinonediazide sulphonic acid ester and a polyvinylphenol is more than two times longer than the printing run obtainable with the corresponding printing plate containing a novolak instead of the polyvinylphenol in the light-sensitive coating.
Further particulars of preferred ways of carrying out the invention will be evident from the following illustrative examples.
EXAMPLE 1 Three printing plates designated a, b and were prepared by coating three sheets of mechanically roughened aluminum foil respectively with the following solutions:
g of the condensation product of naphthoquinone-(l,2)diazide-(2)-5-sulphochloride with 3,5- dimethylphenol g of a polymer of ortho-vinylphenol having a number averaged molar weight of 10,000
50 ml of methyl ethyl ketone 50 ml of dioxane.
5 g of the same condensation product 10 g of a polymer of ortho-vinylphenol having a number averaged molar weight of 3,800 50 ml of methyl ethyl ketone 50 ml of dioxane.
5 g of the same condensation product 10 g of a novolak (Alnovol PN429, registered trademark of Reichhold Albert Chemie A.G.) 50 ml of methyl ethyl ketone 50 ml of dioxane.
The coating weight of each of the plates was 2.2 g per m after drying at a temperature of C.
The coated foils were exposed under a positive original and developed by treatment with a cotton wool pad soaked in an aqueous solution containing 2.5% by weight of trisodium phosphate (0 aq.) and 2% by weight of sodium silicate (o aq.).
The developed and rinsed plates were treated with a 2% aqueous solution of phosphoric acid and inked up with a greasy printing ink. The resulting plates were used in an offset printing machine. No wear was observed on plates a and b even after 50,000 prints had been run, whereas plate 0 showed the first traces of wear on the prints after a printing run of 22,000.
EXAMPLE 2 Two printing plates designated a and b were prepared by coating two sheets of mechanically roughened aluminum foil respectively with the following solutions:
5 g of l-azido-2,5-dimethoxy 4 -(p-tolylthio)- benzene 10 g of a polymer of ortho-vinylphenol having a number averaged molar weight of 3,800 50 ml of methyl ethyl ketone 50 ml of dioxane.
5 g of l-azido-2,5-dimethoxy 4 -(p-tolylthio)- benzene 10 g of a novolak (Alnovol PN429, registered trademark of Reichhold Albert Chemie A.G.)
50 ml of methyl ethyl ketone 50 ml of dioxane.
After drying at a temperature of 80C, the coating weight of each of the plates was 2.2 g per m The coated foils were exposed under a negative original and developed by treatment with a cotton wool pad soaked in a developer solution. The developer solution used for plate b was an aqueous solution containing 2.5% by weight of trisodium phosphate (0. aq.) and 2% by weight of sodium silicate (o. aq.). As plate a could not be developed with the same solution, it was developed with a mixture of 8 parts of volume of ethylene glycol, 1 part by volume of diethylene glycol monomethyl ether and 0.09 parts by volume of concentrated sulphuric acid.
The developed and rinsed plates were treated with a 2% aqueous solution of phosphoric acid and inked up with a greasy printing ink. The resulting plates were used in an offset printing machine. Plate a showed the first traces of wear on the prints after a printing run of 35,000, and plate b after a printing run of 18,000.
EXAMPLE 3 Four printing plates designated a, b, c and d were prepared by coating four sheets of mechanically roughened aluminum foil respectively with the following solutions:
13 g of l-(p-tolyl sulphonylimino)-2-(2',3'- dimethyl phenyl aminosulphonyl)- benzoquinone-( l,4)-diazide-(4) 3 g of a polymer or ortho-vinylphenol having a number averaged molar weight of 10,000 100 ml of ethylene glycol monomethyl ether. b.
g of the amide of benzoquinone-( l,4)-diazide- (4)-2-sulphonic acid and 2-naphtylamine 2 g of a polymer of ortho-vinylphenol having a number averaged molar weight of 10,000
100 ml of ethylene glycol monomethyl ether.
10 g of the 2-naphthyl sulphonate of a polycondensate of p-diazo diphenyl amine and formaldehyde 2 g of a polymer of ortho-vinylphenol having a number averaged molar weight of 10,000 100 ml of ethylene glycol monomethyl ether. d
5 g of the condensation product of naphthoquinone-(l,2)-diazide-(2)-5-sulphochloride with a 3,5- dimethylphenol 10 g of a polymer of para-vinylphenol having a number averaged molar weight of 7,500 50 ml of methyl ethyl ketone 50 ml of dioxane. The coating weight of the plates was 2.2 g per m after drying at a temperature of 80C.
The coated foils were exposed under an original and developed by treatment with a cotton wool pad soaked in a developer solution. The following developer solutions a to a" were used for the plates a to d respective] a. an aqueous solution containing 1.5% by weight of Na PO .12H- O b. an aqueous solution containing 0.5% by weight of Na PO 1 c'. a solution containing 1 part by volume of concentrated sulphuric acid, 30 parts by volume of propyl alcohol and 70 parts by volume of water d. an aqueous solution containing 5% by weight of Na PO .l2H O and 5% by weight of Na SiO .9- H O.
The developed and rinsed plates were treated with a 2% aqueous solution of phosphoric acidand inked up with a greasy printing ink. The resulting plates were used in an offset printing machine. They delivered printing runs which were twice the printing runs obtainable with corresponding printing plates in which the vinylphenol resin had been replaced by a novolak.
1. A light-sensitive composition for graphic arts such as for sensitizing printing plates, comprising a mixture of a light-sensitive diazo or azido compound and, per part of said compound, about 0.2 to 20 parts by weight of a vinyl phenol resin produced by normal vinyl polymerization and selected from the group consisting of homopolymers and copolymers of ortho-, meta-, and para-vinyl phenols and wherein, when said resin is a copolymer, the comonomer of the copolymer is another vinyl compound.
2. A light-sensitive composition according to claim 1, said resin being a polymer or copolymer of orthovinylphenol.
3. A light-sensitive composition according to claim 1, said light-sensitive compound being an ortho-quinone diazide.
4. A light-sensitive composition according to claim 1, said light-sensitive compound being an aromatic ester or amide of an ortho-naphthoquinone diazide sulphonic or carboxylic acid.
5. A light-sensitive composition for graphic arts such as for sensitizing printing plates, comprising a mixture of a light-sensitive aromatic ester or amide of an orthonaphtho-quinone diazide sulfonic or carboxylic acid and, per part of said light-sensitive compound, about 0.2 to 20 parts by weight of a vinylphenol resin selected from the group consisting of homopolymers and copolymers of ortho-vinyl phenol and wherein, when said resin is a copolymer, the comonomer of the copolymer is another vinyl compound.
6. A light-sensitive printing plate comprising a support coated with a light-sensitive composition according to claim 1.
7. A light-sensitive printing plate comprising a support coated with a light-sensitive composition according to claim 2.
8. A light-sensitive printing plate comprising a sup port coated with a light-sensitive composition accord-' ing to claim 3.
9. A light-sensitive printing plate comprising a support coated with alight-sensitive composition according to claim 4-.
10. A light-sensitive printing plate comprising a support coated with a light-sensitive composition according to claim 5.
|Cited Patent||Filing date||Publication date||Applicant||Title|
|US3230087 *||Jun 25, 1964||Jan 18, 1966||Azoplate Corp||Light-sensitive polymeric diazonium and azidoacrylamido reproduction materials and process for making plates therefrom|
|US3396019 *||Feb 1, 1965||Aug 6, 1968||Azoplate Corp||Planographic printing plates|
|US3396020 *||Nov 16, 1965||Aug 6, 1968||Azoplate Corp||Planographic printing plate|
|US3502470 *||Feb 8, 1967||Mar 24, 1970||Agfa Gevaert Nv||Composition and process for photochemical cross-linking of polymers|
|US3589898 *||Oct 8, 1968||Jun 29, 1971||Polychrome Corp||Litho plate|
|US3615532 *||Dec 9, 1963||Oct 26, 1971||Union Carbide Corp||Printing plate compositions|
|US3625919 *||Feb 8, 1968||Dec 7, 1971||Hiroyoshi Kamogawa||Process for the preparation of diazotized vinylphenol polymers having phototropic properties|
|US3647443 *||Sep 12, 1969||Mar 7, 1972||Eastman Kodak Co||Light-sensitive quinone diazide polymers and polymer compositions|
|US3666473 *||Oct 6, 1970||May 30, 1972||Ibm||Positive photoresists for projection exposure|
|US3669658 *||Jun 11, 1969||Jun 13, 1972||Fuji Photo Film Co Ltd||Photosensitive printing plate|
|US3778270 *||Nov 12, 1970||Dec 11, 1973||Du Pont||Photosensitive bis-diazonium salt compositions and elements|
|Citing Patent||Filing date||Publication date||Applicant||Title|
|US4009033 *||Sep 22, 1975||Feb 22, 1977||International Business Machines Corporation||High speed positive photoresist composition|
|US4177073 *||Nov 17, 1977||Dec 4, 1979||Oji Paper Co., Ltd.||Photosensitive resin composition comprising cellulose ether aromatic carboxylic ester|
|US4259434 *||Apr 30, 1980||Mar 31, 1981||Fuji Photo Film Co., Ltd.||Method for developing positive acting light-sensitive planographic printing plate|
|US4265999 *||Dec 17, 1979||May 5, 1981||Hoechst Aktiengesellschaft||Process for the preparation of planographic printing forms|
|US4349600 *||Oct 28, 1980||Sep 14, 1982||Mita Industrial Co., Ltd.||Color developer for leuco pigment and recording material comprising same|
|US4439516 *||Mar 15, 1982||Mar 27, 1984||Shipley Company Inc.||High temperature positive diazo photoresist processing using polyvinyl phenol|
|US4493884 *||May 23, 1983||Jan 15, 1985||Fuji Photo Film Co., Ltd.||Light-sensitive composition|
|US4551409 *||Nov 7, 1983||Nov 5, 1985||Shipley Company Inc.||Photoresist composition of cocondensed naphthol and phenol with formaldehyde in admixture with positive o-quinone diazide or negative azide|
|US4554237 *||Dec 22, 1982||Nov 19, 1985||Hitach, Ltd.||Photosensitive resin composition and method for forming fine patterns with said composition|
|US4569897 *||Jan 16, 1984||Feb 11, 1986||Rohm And Haas Company||Negative photoresist compositions with polyglutarimide polymer|
|US4600683 *||Apr 22, 1985||Jul 15, 1986||International Business Machines Corp.||Cross-linked polyalkenyl phenol based photoresist compositions|
|US4614706 *||May 2, 1984||Sep 30, 1986||Hitachi, Ltd.||Method of forming a microscopic pattern with far UV pattern exposure, alkaline solution development, and dry etching|
|US4631249 *||Nov 14, 1985||Dec 23, 1986||Rohm & Haas Company||Process for forming thermally stable negative images on surfaces utilizing polyglutarimide polymer in photoresist composition|
|US4678737 *||Nov 25, 1986||Jul 7, 1987||Hoechst Aktiengesellschaft||Radiation-sensitive composition and recording material based on compounds which can be split by acid|
|US4692398 *||Oct 28, 1985||Sep 8, 1987||American Hoechst Corporation||Process of using photoresist treating composition containing a mixture of a hexa-alkyl disilazane, propylene glycol alkyl ether and propylene glycol alkyl ether acetate|
|US4696886 *||Jun 24, 1985||Sep 29, 1987||Sumitomo Chemical Company, Limited||Positive photoresist composition with m-hydroxy-α-methylstyrene homopolymer and quinonediazide compound|
|US4698291 *||Jul 17, 1986||Oct 6, 1987||Hitachi Chemical Co., Ltd.||Photosensitive composition with 4-azido-2'-methoxychalcone|
|US4702992 *||Mar 6, 1985||Oct 27, 1987||Tokyo Ohka Kogyo Co., Ltd.||Method of preparing photoresist material with undercoating of photoextinction agent and condensation product|
|US4717640 *||Dec 11, 1985||Jan 5, 1988||Hoechst Aktiengesellschaft||Light-sensitive mixture, recording material prepared therefrom and process for use thereof|
|US4720445 *||Feb 18, 1986||Jan 19, 1988||Allied Corporation||Copolymers from maleimide and aliphatic vinyl ethers and esters used in positive photoresist|
|US4722883 *||Aug 7, 1986||Feb 2, 1988||Hitachi, Ltd.||Process for producing fine patterns|
|US4737438 *||Oct 21, 1986||Apr 12, 1988||Tokyo Ohka Kogyo Co., Ltd.||Negative-working photosensitive composition comprising a diphenylamine-melamine condensate and an azide compound|
|US4740451 *||May 26, 1987||Apr 26, 1988||Tokyo Ohka Kogyo Co., Ltd.||Photosensitive compositions and a method of patterning using the same|
|US4758497 *||Apr 17, 1987||Jul 19, 1988||Polychrome Corporation||Photosensitive naphthoquinone diazide sulfonyl ester compounds for the fabrication of lithographic plates and photosensitive sheet construction with the compounds|
|US4788127 *||Nov 17, 1986||Nov 29, 1988||Eastman Kodak Company||Photoresist composition comprising an interpolymer of a silicon-containing monomer and an hydroxystyrene|
|US4806458 *||Aug 27, 1987||Feb 21, 1989||Hoechst Celanese Corporation||Composition containing a mixture of hexa-alkyl disilazane and propylene glycol alkyl ether and/or propylene glycol alkyl ether acetate|
|US4822719 *||Aug 13, 1986||Apr 18, 1989||Hoechst Aktiengesellschaft||Radiation-sensitive mixture, radiation-sensitive recording material containing said mixture, and process for preparing relief images|
|US4824758 *||Jan 25, 1988||Apr 25, 1989||Hoechst Celanese Corp||Photoresist compositions based on acetoxystyrene copolymers|
|US4828958 *||Mar 9, 1987||May 9, 1989||Kabushiki Kaisha Toshiba||Photosensitive composition and method of forming a resist pattern with copolymer of polyvinyl phenol|
|US4880722 *||Oct 8, 1987||Nov 14, 1989||International Business Machines Corporation||Diazoquinone sensitized polyamic acid based photoresist compositions having reduced dissolution rates in alkaline developers|
|US4902602 *||Apr 15, 1988||Feb 20, 1990||Fuji Photo Film Co., Ltd.||Light-sensitive composition and presensitized plate with light-sensitive diazo resin, acidic binder and compound with pivaloyl group|
|US4927956 *||Jun 2, 1989||May 22, 1990||Hoechst Celanese Corporation||3,5-disubstituted-4-acetoxystyrene and process for its production|
|US4929534 *||Aug 26, 1988||May 29, 1990||Hoechst Aktiengesellschaft||Positive-working photosensitive mixture and photolithographic copying material produced therefrom with o-quinone dialide sulfonyl ester and azo coupler|
|US4931381 *||Nov 8, 1988||Jun 5, 1990||Hoechst Celanese Corporation||Image reversal negative working O-quinone diazide and cross-linking compound containing photoresist process with thermal curing treatment|
|US4933248 *||Jan 11, 1989||Jun 12, 1990||Hoechst Aktiengesellschaft||Electrophotographic recording material|
|US4942108 *||Sep 8, 1989||Jul 17, 1990||International Business Machines Corporation||Process of making diazoquinone sensitized polyamic acid based photoresist compositions having reduced dissolution rates in alkaline developers|
|US4948697 *||Jul 5, 1989||Aug 14, 1990||Hoechst Celanese Corporation||Positive photoresist with a solvent mixture of propylene glycol alkyl ether and propylene glycol alkyl ether acetate|
|US4980260 *||Apr 25, 1988||Dec 25, 1990||Fuji Photo Film Co., Ltd.||Multi-color image-forming method with microcapsule positive diazotype color image formation and positive light-solubilizing color image formation|
|US4980264 *||Dec 17, 1985||Dec 25, 1990||International Business Machines Corporation||Photoresist compositions of controlled dissolution rate in alkaline developers|
|US4983490 *||May 15, 1989||Jan 8, 1991||Hoechst Celanese Corporation||Photoresist treating composition consisting of a mixture of propylene glycol alkyl ether and propylene glycol alkyl ether acetate|
|US4985344 *||Oct 13, 1989||Jan 15, 1991||Hitachi, Ltd.||Radiation imaging process for forming pattern without alkali-soluble polymer underlayer and water soluble radiation-sensitive diazonium salt overlayer|
|US5006443 *||Jan 7, 1988||Apr 9, 1991||Hoechst Aktiengesellschaft||Radiation sensitive reproduction composition and element with perfluoroalkyl group containing polymer|
|US5017453 *||Jan 31, 1989||May 21, 1991||Kabushiki Kaisha Toshiba||A silicone resist materials containing a polysiloxane and a photo-sensitive agent|
|US5039594 *||Jun 6, 1990||Aug 13, 1991||Hoechst Celanese Corporation||Positive photoresist containing a mixture of propylene glycol alkyl ethers and propylene glycol alkyl ether acetate|
|US5068163 *||Jun 7, 1989||Nov 26, 1991||Hoechst Aktiengesellschaft||Radiation-sensitive positive working composition and copying material|
|US5079129 *||Nov 30, 1989||Jan 7, 1992||Ciba-Geigy Corporation||Negative photoresist based on polyphenols and epoxy compounds or vinyl ethers|
|US5082932 *||Nov 3, 1989||Jan 21, 1992||Hoechst Aktiengesellschaft||Process for preparing substituted 1,2-naphthoquinone-(2)-diazide-4-sulfonic acid esters and their use in a radiation-sensitive mixture|
|US5084371 *||Apr 14, 1989||Jan 28, 1992||Basf Aktiengesellschaft||Positive-working, radiation-sensitive mixture based on acid-cleavable and photochemically acid-forming compounds, and the production of relief patterns and relief images|
|US5114816 *||Nov 3, 1989||May 19, 1992||Hoechst Aktiengesellschaft||Radiation-sensitive compounds, radiation-sensitive mixture prepared therewith and copying material|
|US5128230 *||Jan 23, 1991||Jul 7, 1992||Shipley Company Inc.||Quinone diazide containing photoresist composition utilizing mixed solvent of ethyl lactate, anisole and amyl acetate|
|US5200460 *||Apr 30, 1991||Apr 6, 1993||Shell Oil Company||Polyacetal polymer blends|
|US5210137 *||Nov 19, 1990||May 11, 1993||Shell Oil Company||Polyketone polymer blends|
|US5215857 *||Jul 3, 1991||Jun 1, 1993||Japan Synthetic Rubber Co., Ltd.||1,2-quinonediazide containing radiation-sensitive resin composition utilizing methyl 2-hydroxypropionate, ethyl 2-hydroxypropionate or methyl 3-methoxypropionate as the solvent|
|US5217840 *||May 25, 1990||Jun 8, 1993||Hoechst Celanese Corporation||Image reversal negative working o-quinone diazide and cross-linking compound containing photoresist process with thermal curing treatment and element produced therefrom|
|US5227281 *||Dec 11, 1990||Jul 13, 1993||Hoechst Aktiengesellschaft||Process for producing negative copies|
|US5238774 *||Jun 4, 1991||Aug 24, 1993||Japan Synthetic Rubber Co., Ltd.||Radiation-sensitive composition containing 1,2-quinonediazide compound, alkali-soluble resin and monooxymonocarboxylic acid ester solvent|
|US5238781 *||Feb 27, 1992||Aug 24, 1993||Ciba-Geigy Corporation||Photosensitive compositions based on polyphenols and acetals|
|US5256522 *||Dec 30, 1991||Oct 26, 1993||Hoechst Celanese Corporation||Image reversal negative working O-naphthoquinone diazide and cross-linking compound containing photoresist process with thermal curing|
|US5275908 *||Jan 28, 1991||Jan 4, 1994||Hoechst Aktiengesellschaft||Radiation-sensitive mixture and recording material comprising as a binder a copolymer having hydroxybenzyl(meth)acrylate groups or derivatives thereof|
|US5300380 *||Sep 17, 1992||Apr 5, 1994||Ciba-Geigy Corporation||Process for the production of relief structures using a negative photoresist based on polyphenols and epoxy compounds or vinyl ethers|
|US5340687 *||May 6, 1992||Aug 23, 1994||Ocg Microelectronic Materials, Inc.||Chemically modified hydroxy styrene polymer resins and their use in photoactive resist compositions wherein the modifying agent is monomethylol phenol|
|US5342727 *||Dec 20, 1991||Aug 30, 1994||Hoechst Celanese Corp.||Copolymers of 4-hydroxystyrene and alkyl substituted-4-hydroxystyrene in admixture with a photosensitizer to form a photosensitive composition|
|US5368975 *||Mar 26, 1993||Nov 29, 1994||Hoechst Aktiengesellschaft||Positive-working 1,2-quinone diazide radiation-sensitive mixture and recording material containing urethane compound to diminish developer solubility|
|US5376496 *||Jan 30, 1991||Dec 27, 1994||Hoechst Aktiengesellschaft||Radiation-sensitive mixture, radiation-sensitive recording material produced therewith containing halogenated methyl groups in the polymeric binder|
|US5399456 *||Nov 19, 1992||Mar 21, 1995||Hoechst Celanese Corporation||Image reversal negative working photoresist containing O-quinone diazide and cross-linking compound|
|US5550004 *||Aug 19, 1994||Aug 27, 1996||Ocg Microelectronic Materials, Inc.||Chemically amplified radiation-sensitive composition|
|US5565304 *||Jun 5, 1995||Oct 15, 1996||Ocg Microelectronic Materials, Inc.||Chemically amplified radiation-sensitive composition used in a process for fabricating a semiconductor device|
|US5700621 *||Feb 28, 1996||Dec 23, 1997||Agfa-Gevaert Ag||Polymers and photosensitive mixture prepared therewith|
|US5719004 *||Aug 7, 1996||Feb 17, 1998||Clariant Finance (Bvi) Limited||Positive photoresist composition containing a 2,4-dinitro-1-naphthol|
|US5763135 *||Sep 30, 1996||Jun 9, 1998||Clariant Finance (Bvi) Limited||Light sensitive composition containing an arylhydrazo dye|
|US5853947 *||Dec 21, 1995||Dec 29, 1998||Clariant Finance (Bvi) Limited||Quinonediazide positive photoresist utilizing mixed solvent consisting essentially of 3-methyl-3-methoxy butanol and propylene glycol alkyl ether acetate|
|US6103443 *||Nov 21, 1997||Aug 15, 2000||Clariant Finance Lmited||Photoresist composition containing a novel polymer|
|US6190825||Jan 29, 1999||Feb 20, 2001||Agfa-Gevaert N.V.||Polymers containing N-substituted maleimide units and their use in radiation-sensitive mixtures|
|US6228554||Oct 8, 1999||May 8, 2001||Jsr Corporation||Radiation-sensitive resin composition|
|US6270939||Aug 16, 2000||Aug 7, 2001||Jsr Corporation||Radiation-sensitive resin composition|
|US6783914||Feb 25, 2000||Aug 31, 2004||Massachusetts Institute Of Technology||Encapsulated inorganic resists|
|US6913865||Feb 25, 2002||Jul 5, 2005||Massachusetts Institute Of Technology||Surface modified encapsulated inorganic resist|
|US6936398||May 9, 2001||Aug 30, 2005||Massachusetts Institute Of Technology||Resist with reduced line edge roughness|
|US7153630||Jun 7, 2005||Dec 26, 2006||Massachusetts Institute Of Technology||Resist with reduced line edge roughness|
|US8703385||Feb 10, 2012||Apr 22, 2014||3M Innovative Properties Company||Photoresist composition|
|US8715904||Apr 27, 2012||May 6, 2014||3M Innovative Properties Company||Photocurable composition|
|US8883402||Jun 19, 2013||Nov 11, 2014||3M Innovative Properties Company||Photocurable compositions|
|US20060078820 *||Jun 7, 2005||Apr 13, 2006||Mass Institute Of Technology (Mit)||Resist with reduced line edge roughness|
|EP0045639A2 *||Jul 31, 1981||Feb 10, 1982||Hitachi, Ltd.||Method of forming a microscopic pattern|
|EP0083078A2 *||Dec 23, 1982||Jul 6, 1983||Hitachi, Ltd.||Photosensitive resin composition and method for forming fine patterns with said composition|
|EP0095388A2 *||May 25, 1983||Nov 30, 1983||Sumitomo Chemical Company, Limited||Positive-type photoresist compositions|
|EP0135900A2 *||Sep 14, 1984||Apr 3, 1985||Olin Hunt Specialty Products, Inc.||Aqueous developable negative resist compositions|
|EP0212439A2 *||Aug 5, 1986||Mar 4, 1987||Hoechst Aktiengesellschaft||Polymers and radiosensitive compositions containing them|
|WO2012122022A1||Mar 2, 2012||Sep 13, 2012||3M Innovative Properties Company||Filtration media|
|WO2013119546A1||Feb 5, 2013||Aug 15, 2013||3M Innovative Properties Company||Photocurable composition|
|WO2014025498A1||Jul 16, 2013||Feb 13, 2014||3M Innovative Properties Company||Photocurable compositions|
|WO2014025716A1||Aug 6, 2013||Feb 13, 2014||3M Innovative Properties Company||Photocurable compositions|
|U.S. Classification||430/192, 430/176, 430/197, 430/300, 430/302, 430/170|
|International Classification||C08L33/02, G03F7/016, C08K5/17, G03F7/021, C08L33/00, G03F7/038, C08L25/00, G03C1/72, C08K5/00, G03F7/012, G03F7/008, G03F7/023|
|Cooperative Classification||G03F7/012, G03F7/0381, G03F7/0233, G03F7/0212|
|European Classification||G03F7/023P, G03F7/038A, G03F7/012, G03F7/021P|
|Jun 3, 1985||AS02||Assignment of assignor's interest|
Owner name: OCE-VAN DER GRINTEN N.V., A LIMITED LIABILITY COMP
Effective date: 19850501
Owner name: SHIPLEY COMPANY INC. NEWTON, MA
|Jun 3, 1985||AS||Assignment|
Owner name: SHIPLEY COMPANY INC. NEWTON, MA
Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNOR:OCE-VAN DER GRINTEN N.V., A LIMITED LIABILITY COMPANY;REEL/FRAME:004414/0012
Effective date: 19850501