|Publication number||US4989031 A|
|Application number||US 07/471,375|
|Publication date||Jan 29, 1991|
|Filing date||Jan 29, 1990|
|Priority date||Jan 29, 1990|
|Publication number||07471375, 471375, US 4989031 A, US 4989031A, US-A-4989031, US4989031 A, US4989031A|
|Original Assignee||Nikon Corporation|
|Export Citation||BiBTeX, EndNote, RefMan|
|Patent Citations (13), Referenced by (57), Classifications (12), Legal Events (4)|
|External Links: USPTO, USPTO Assignment, Espacenet|
1. Field of the Invention
The present invention relates to a projection exposure apparatus used in the production of extremely fine patterns such as semiconductor integrated circuits.
2. Description of the Prior Art
With the recent trend toward increasing the level of integration of semiconductor integrated circuits, projection exposure apparatus heretofore used for projecting and transcribing the pattern of a reticle onto a wafer have predominatly consisted of so-called steppers so designed that a high-resolution reduction projection lens is mounted and a wafer is moved in a step and repeat manner, thereby projecting and transcribing patterns sequentially on the plurality of exposure areas of the wafer.
The stepper is required to meet a degree of accuracy of alignment (registration of the projection image of a reticle with the patterns formed on a wafer by the preceding wafer process) corresponding to the resolution of the projection lens. Generally, an alignment accuracy of 1/5 to 1/10 of the minimum resolution linewidth of the projection lens is required. Therefore, an alignment accuracy of 0.08 to 0.16 μm is required for a lens which for example resolves patterns of 0.8 μm width for VLSI manufacturing purposes.
In order to realize such a highly accurate alignment, it is important to adjust the various parts of the apparatus in temperature and the usual practice in the past has been such that as shown in FIG. 4, the whole apparatus is arranged inside a temperature adjusting chamber 120 and the internal air temperature of the chamber 120 is controlled. In FIG. 4, a reticle 102 is illuminated by an illuminating optical system 101 so that the image of the pattern formed on the reticle 102 is projected and transcribed through a projection lens 103 on an exposure area of a wafer 104 which is positioned just below the projection lens 103.
The wafer 104 is movable by a Z-stage 105 in a vertical direction (the direction of the optical axis of the projecting lens) and it is also movable in X and Y directions (the directions perpendicular to the optical axis of the projection lens) by an X-stage 106 and a Y-stage 107, respectively. Then, the X-direction and Y-direction positions of the wafer 104 are monitored by means of a laser interferometer-type linear scale 110 and the wafer 104 is positioned in a desired position by the X-stage 106 and the Y-stage 107. Also, the height of the surface of the wafer 104 is detected by a height sensor which is not shown and its height is adjusted by the Z-stage 105.
This apparatus on the whole is mounted on a surface table 108 subjected to vibration damping by a plurality of vibration damping bases 109 and in this condition the apparatus is installed within the temperature adjusting chamber 120. The air adjusted to a preset temperature by a heat exchanger 121 is blown into the temperature adjusting chamber 120 through a blowing duct 122 and the blown air is discharged through a return duct 123. Although not shown in the Figure, the air delivered from the blowing duct 122 flows into the surroundings of the reticle 102 as well as the surroundings of the projection lens 103 and the wafer stages (105, 106 and 107).
In the case of the conventional technique described above, however, the whole apparatus is enclosed by the partition wall of the single chamber thereby air conditioning the apparatus as a whole and therefore the apparatus is affected considerably by the heat generated from such heat sources as various electronic component parts, motor and laser, thereby making it difficult to maintain the temporal and spatial uniformity of the refractive index of the air in the space containing the projection optical system between the reticle and the wafer. In other words, the refractive index of the air varies in dependence on the temperature and thus the image forming position is varied or the image is distorted, thereby giving rise to a major cause of deteriorating the alignment accuracy.
It is the primary object of the present invention to provide a projection exposure apparatus which is capable of minimizing the variation in the refractive index of the air in the spaces forming the optical paths for the exposure light and ensuring a satisfactory alignment accuracy.
In accordance with the present invention, there is provided a projection exposure apparatus including an illuminating optical system for irradiating the light emitted from a light source on a first object (reticle) and a projection optical system for projecting the image of the first object onto a second object (wafer), and the projection exposure apparatus on the whole is enclosed in a first chamber which in turn includes a second chamber enclosing a space containing the optical path of the exposure light between the projection optical system and the second object (wafer) that is an object to be exposed and means for separately adjusting the temperature of the air in the first and second chambers, respectively, thereby accomplishing the previously mentioned object.
Further, it is preferable from the image distortion and fluctuation preventing point of view to provide a third chamber enclosing a space containing the optical path of the exposure light between the first object (reticle) formed with a given pattern to be projected onto the second object (wafer) and the projection optical system and to separately adjust the temperature of the air in the first, second and third chambers, respectively.
A major cause of such distortion and fluctuation of the projected image is variation in the refractive index of the air in the spaces forming the optical paths of the exposure light. Each of the first and second chambers encloseing such space includes no heat source therein and the capacity of the chamber is small, thus reducing the heat load in the chamber and thereby making it possible to control the air temperature with a very high degree of accuracy.
While these second and third chambers should preferably be provided so as to minimize their capacities, if it is arranged so that the second chamber encloses the wafer stage surrounding space containing the optical paths of the interferometer-type linear scale for detecting the positions of the wafer stages so far as the capacity of the second chamber is not increased so much, there is the effect of decreasing the wafer position detecting error and this is advantageous from the standpoint of enhancing the alignment accuracy.
It is to be noted that the third chamber is not always required in cases where the reduction projection is performed by the projection optical system. The reason is that if the reduction ratio of the reduction projection optical system is m times, the effect of the variation in the refractive index of the air between the reticle and the projection optical system is inceased by 1/m times and thus the effect of the variation in the refractive index of the air between the reticle and the projection optical system is small as compared with the spaces between the projection optical system and the wafer.
FIG. 1 is a schematic diagram showing the construction of a projection exposure apparatus according to an embodiment of the present invention.
FIGS. 2 and 3 are sectional views showing respectively the constructions of the partition walls of chambers according to the present invention.
FIG. 4/is a schematic diagram showing the construction of a conventional apparatus.
FIG. 1 is a schematic diagram showing the construction of a projection exposure apparatus according to the present invention. In the Figure, a reticle 2 is illuminated by an illuminating optical system 1 so that the pattern formed on the reticle 2 is projected and transcribed through a projection lens 3 on an exposure area of a wafer 4 which is positioned just below the projection lens 3.
The wafer 4 is movable in a vertical direction (the direction of the optical axis of the projection lens) by a Z-stage 5 and it is also movable in X and Y directions (the directions perpendicular to the optical axis of the projection lens) by an X-stage 6 and a Y-stage 7, respectively. Then, the X-direction and Y-direction positions of the wafer 4 are monitored by a laser interferometer-type linear scale 10 so that the wafer 4 is positioned in a desired position by the X-stage 6 and the Y stage 7. Also, the height of the surface of the wafer 4 is detected by a height sensor which is not shown and its height position is adjusted by the Z-stage 5.
The above-described apparatus on the whole is mounted on a surface table 8 subjected to vibration damping by a plurality of vibration damping bases 9 and the apparatus on the whole is arranged in a first chamber I enclosed by a housing 20. The first chamber itself is of the same construction as the one included in the conventional exposure apparatus so that the air adjusted to a given temperature by a heat exchanger 21 is blown into the first chamber through a blowing duct 22 and the blown air is discharged through a return duct 23. It is to be noted that light source 24 (e.g., a lamp) for supplying the illuminating light to the illuminating optical system 1 is arranged outside the first chamber and the illuminating light is transmitted into the chamber through a light transmission window 25.
The space forming the optical path of the exposure light between the projection lens 3 and the wafer 4 inside the first chamber I is enclosed by an internal housing 33. This space forms a second chamber II. In this embodiment, the second chamber II contains the space around the wafer stages (the Z-stage 5, the X-stage 6 and the Y-stage 7) which includes the optical paths of the interferometer-type linear scale 10. In this case, a laser light source 11 of the linear scale 10, which forms a heat source, is arranged outside the second chamber II and the laser beam is introduced into the second chamber II through an induction optical system covered with a pipe 12.
Also, in the present embodiment a third chamber III is formed by another internal housing 34 which encloses the space containing the optical path of the exposure light between the reticle 2 and the projection lens 3.
Then, the air adjusted to a given temperature and delivered by a heat exchanger 30 is supplied into the second and third chambers II and III through blowing pipes 31 and 32. It is to be noted that a gap is formed between the projection lens 3 and each of the housings 33 and 34 of the second and third chambers II and III so as to prevent the vibrations due to the blowing from being transmitted to the projection lens 3, it is also desirable that the pipes 31 and 32 are made from a material capable of absorbing the vibrations of the heat exchanger 30.
The air blown into the second and third chambers II and III is allowed to flow out from the holes (not shown) fromed through the respective housings and it is possible to prevent the air from flowing backward by adjusting the amount of air blown in such a manner that the internal pressures of the chambers II and III are slightly higher than the external pressure. Of course, return ducts may be provided so as to return the air to the heat exchanger 30. Also, thought not shown in the Figure, the housing 33 is provided with a door to permit the wafer 4 to be moved in and out and the door is constructed so as to be opened and closed only when a wafer is moved in and out.
It is to be noted that where the projection lens 3 is a reduction projection lens, as mentioned previously, the detrimental effect due to variation in the refractive index of the air between the reticle 2 and the projection lens 3 is reduced and therefore the internal chamber III need not always be provided.
As shown in FIG. 2, the partition wall of the internal housing 33 has a structure such that a heat insulating material 42 is filled between an inner metal plate 41 and an outer plate member 43. By so doing, it is possible to reduce the effect of the heat generated externally of the chamber on the interior of the chamber, and also the selection of a highly heat conductive material for the metal plate 42 has the effect of causing the whole inner surface of the housing partition wall to rapidly attain substantially the same temperature as the air blown through the pipe 32, thereby accurately controlling the temperature of the air in the chamber.
FIG. 3 is a sectional view showing a modification of the partition wall of the internal housing 33. While the modification of FIG. 3 is the same with FIG. 2 in that the inner side of the partition wall of the internal husing 33 is composed of the metal plate 41 and the outer side is composed of the plate member 43, the interior of the partition wall has a two-layer structure in the modification. In the Figure, the inner layer of the partition wall is formed with a fluid path 44 for supplying a temperature controlled fluid so that fluid is introduced through a fluid inlet 45 and it is discharged through a fluid outlet 46. Also, the heat insulating material 42 is filled on the outer side of the fluid path 44 between it and the plate member 43.
By using the above-mentioned partition wall structure so as to effect a temperature control such taht the temperature of the fluid coincides with the temperature of the air blown through the pipe 32, the inner temperature of the chamber can be more uniformly and accurately maintained at a given temperature and the variation in the refractive index distribution of the air inside the chamber can be reduced considerably.
|Cited Patent||Filing date||Publication date||Applicant||Title|
|US4202623 *||Jan 8, 1979||May 13, 1980||The Perkin-Elmer Corporation||Temperature compensated alignment system|
|US4432635 *||Mar 31, 1982||Feb 21, 1984||Censor Patent-Und Versuchs-Anstalt||Temperature-controlled support for semiconductor wafer|
|US4496239 *||Nov 9, 1982||Jan 29, 1985||Canon Kabushiki Kaisha||Projection exposure apparatus|
|US4540251 *||Dec 1, 1983||Sep 10, 1985||International Business Machines Corporation||Thermo-mechanical overlay signature tuning for Perkin-Elmer mask aligner|
|US4564284 *||Jun 5, 1985||Jan 14, 1986||Canon Kabushiki Kaisha||Semiconductor exposure apparatus|
|US4583840 *||Nov 18, 1983||Apr 22, 1986||Canon Kabushiki Kaisha||Exposure apparatus|
|US4668077 *||Jun 27, 1985||May 26, 1987||Nippon Kogaku K. K.||Projection optical apparatus|
|US4699505 *||Jun 10, 1985||Oct 13, 1987||Hitachi, Ltd.||Exposure method and exposure apparatus|
|US4704348 *||Sep 25, 1985||Nov 3, 1987||Hitachi, Ltd.||Exposure of uniform fine pattern on photoresist|
|US4730900 *||Jan 29, 1985||Mar 15, 1988||Nippon Kogaku K. K.||Projection optical apparatus|
|US4780747 *||Jan 30, 1987||Oct 25, 1988||Nippon Kogaku K.K.||Projection exposure apparatus|
|US4786947 *||May 4, 1987||Nov 22, 1988||Canon Kabushiki Kaisha||Projection exposure apparatus|
|US4825247 *||Feb 12, 1988||Apr 25, 1989||Canon Kabushiki Kaisha||Projection exposure apparatus|
|Citing Patent||Filing date||Publication date||Applicant||Title|
|US5550633 *||Nov 4, 1994||Aug 27, 1996||Nikon Corporation||Optical measuring apparatus having a partitioning wall for dividing gas flow in an environmental chamber|
|US5796469 *||Jul 14, 1997||Aug 18, 1998||Canon Kabushiki Kaisha||Exposure apparatus and device manufacturing method using the same|
|US5812242 *||Oct 1, 1996||Sep 22, 1998||Nikon Corporation||Projection exposure apparatus including a temperature control system for the lens elements of the optical system|
|US5864386 *||Jul 31, 1997||Jan 26, 1999||Nikon Corporation||Exposure apparatus|
|US5877843 *||Sep 3, 1996||Mar 2, 1999||Nikon Corporation||Exposure apparatus|
|US5892572 *||Jan 2, 1998||Apr 6, 1999||Nikon Corporation||Projection exposure apparatus and method|
|US6002987 *||Mar 26, 1997||Dec 14, 1999||Nikon Corporation||Methods to control the environment and exposure apparatus|
|US6208406 *||Mar 28, 1997||Mar 27, 2001||Nikon Corporation||Environmental control apparatus for exposure apparatus|
|US6388733||Mar 11, 1999||May 14, 2002||Nikon Corporation||Exposure apparatus with an anti-vibration structure|
|US6396562 *||Dec 1, 1999||May 28, 2002||Canon Kabushiki Kaisha||Microdevice manufacturing apparatus|
|US6450288||Jul 28, 2000||Sep 17, 2002||Nikon Corporation||Air-conditioning apparatus, partition and exposure apparatus|
|US6496248 *||Dec 15, 2000||Dec 17, 2002||Nikon Corporation||Stage device and exposure apparatus and method|
|US6509951 *||Feb 7, 2001||Jan 21, 2003||Asml Netherlands B.V.||Lithographic projection apparatus having a temperature controlled heat shield|
|US6545746 *||Nov 28, 2000||Apr 8, 2003||Nikon Corporation||Projection exposure apparatus|
|US6555834 *||Nov 3, 2000||Apr 29, 2003||Asml Netherlands B.V.||Gas flushing system for use in lithographic apparatus|
|US6570644 *||Jun 5, 2001||May 27, 2003||Nikon Corporation||Connection assembly of wafer stage chamber|
|US6645701||Aug 1, 2000||Nov 11, 2003||Nikon Corporation||Exposure method and exposure apparatus|
|US6667796||Nov 15, 2000||Dec 23, 2003||Nikon Corporation||Exposure method and apparatus|
|US6690450 *||Jan 29, 2001||Feb 10, 2004||Nikon Corporation||Exposure method, exposure apparatus, method for producing exposure apparatus, and method for producing device|
|US6700641||Nov 2, 2001||Mar 2, 2004||Nikon Corporation||Temperature control method and exposure apparatus thereby|
|US6707528||Jul 6, 1999||Mar 16, 2004||Nikon Corporation||Exposure apparatus having independent chambers and methods of making the same|
|US6710846||Nov 21, 2001||Mar 23, 2004||Nikon Corporation||Environmental control apparatus for exposure apparatus|
|US6714278||Jul 19, 2001||Mar 30, 2004||Nikon Corporation||Exposure apparatus|
|US6725557 *||Feb 28, 2002||Apr 27, 2004||Jun-ichi Kushibiki||Thickness measuring apparatus and method|
|US6753942||Nov 7, 2002||Jun 22, 2004||Nikon Corporation||Environmental control chamber|
|US6847430||Jan 30, 2003||Jan 25, 2005||Asml Netherlands B.V.||Lithographic apparatus and device manufacturing method|
|US6870598||Mar 5, 2003||Mar 22, 2005||Nikon Corporation||Projection exposure apparatus|
|US6933513||May 8, 2002||Aug 23, 2005||Asml Netherlands B.V.||Gas flushing system for use in lithographic apparatus|
|US6961114 *||May 27, 2003||Nov 1, 2005||Nikon Corporation||Optical apparatus and exposure apparatus incorporating the apparatus|
|US6987278||Mar 3, 2003||Jan 17, 2006||Asml Netherlands B.V.||Gas flushing system with recovery system for use in lithographic apparatus|
|US7046330 *||Sep 20, 2005||May 16, 2006||Canon Kabushiki Kaisha||Exposure apparatus|
|US7126689 *||Feb 14, 2001||Oct 24, 2006||Nikon Corporation||Exposure method, exposure apparatus, and method for producing device|
|US7602563||Aug 4, 2008||Oct 13, 2009||Quality Vision International, Inc.||System and method for focal length stabilization using active temperature control|
|US8184261 *||Sep 24, 2008||May 22, 2012||Canon Kabushiki Kaisha||Exposure apparatus|
|US20010028456 *||Feb 14, 2001||Oct 11, 2001||Nikon Corporation||Exposure method, exposure apparatus, and method for producing device|
|US20020027645 *||Nov 2, 2001||Mar 7, 2002||Nikon Corporation||Temperature control method and exposure apparatus thereby|
|US20020148981 *||Feb 13, 2002||Oct 17, 2002||Ryuji Biro||Optical element for use in exposure apparatus and rinsing method therefor|
|US20020152625 *||Feb 28, 2002||Oct 24, 2002||Kushibiki Jun-Ichi||Thickness measuring apparatus and method|
|US20030038929 *||Sep 18, 2002||Feb 27, 2003||Nikon Corporation||Exposure system, exposure apparatus and coating and developing exposure apparatus|
|US20030058417 *||Nov 7, 2002||Mar 27, 2003||Nikon Corporation||Environmental control chamber|
|US20030151728 *||Mar 5, 2003||Aug 14, 2003||Nikon Corporation||Projection exposure apparatus|
|US20030197844 *||Jan 30, 2003||Oct 23, 2003||Mertens Jeroen Johannes Sophia Maria||Lithographic apparatus and device manufacturing method|
|US20030206280 *||May 27, 2003||Nov 6, 2003||Nikon Corporation||Optical apparatus and exposure apparatus incorporating the apparatus|
|US20040156026 *||Jun 26, 2003||Aug 12, 2004||Nikon Corporation||Exposure apparatus and exposure method|
|US20060007416 *||Sep 20, 2005||Jan 12, 2006||Canon Kabushiki Kaisha||Exposure apparatus|
|US20060086114 *||Oct 24, 2005||Apr 27, 2006||Tetsuro Nishiyama||Constant-temperature fluid supply system|
|US20080304168 *||Aug 4, 2008||Dec 11, 2008||Quality Vision International, Inc.||System and method for focal length stabilization using active temperature control|
|US20090059188 *||Sep 24, 2008||Mar 5, 2009||Canon Kabushiki Kaisha||Exposure Apparatus|
|EP0844532A2 *||Nov 24, 1997||May 27, 1998||Nikon Corporation||Exposure apparatus|
|EP0844532A3 *||Nov 24, 1997||Aug 18, 1999||Nikon Corporation||Exposure apparatus|
|EP0886184A2 *||Jun 16, 1998||Dec 23, 1998||Svg Lithography Systems, Inc.||Vacuum assisted debris removal system|
|EP0886184A3 *||Jun 16, 1998||Mar 29, 2000||Svg Lithography Systems, Inc.||Vacuum assisted debris removal system|
|EP1041605A1 *||Aug 24, 1998||Oct 4, 2000||Nikon Corporation||Temperature adjusting method and aligner to which this method is applied|
|EP1041605A4 *||Aug 24, 1998||Sep 21, 2005||Nippon Kogaku Kk||Temperature adjusting method and aligner to which this method is applied|
|EP1050900A1 *||Jan 19, 1999||Nov 8, 2000||Nikon Corporation||Exposure system, exposure apparatus, and coating developing exposure apparatus|
|EP1050900A4 *||Jan 19, 1999||Feb 11, 2004||Nippon Kogaku Kk||Exposure system, exposure apparatus, and coating developing exposure apparatus|
|EP1333329A1 *||Jan 30, 2003||Aug 6, 2003||ASML Netherlands B.V.||Lithographic apparatus and device manufacturing method|
|U.S. Classification||355/30, 355/53, 355/55|
|Cooperative Classification||G03F7/70875, G03F7/70891, G03F7/70883, G03F7/70866|
|European Classification||G03F7/70P6B, G03F7/70P6D2, G03F7/70P6D, G03F7/70P6B2|
|Jun 28, 1990||AS||Assignment|
Owner name: NIKON CORPORATION, A CORP. OF JAPAN, JAPAN
Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNOR:KAMIYA, SABURO;REEL/FRAME:005362/0910
Effective date: 19900227
|Jul 28, 1994||FPAY||Fee payment|
Year of fee payment: 4
|Jul 20, 1998||FPAY||Fee payment|
Year of fee payment: 8
|Jul 4, 2002||FPAY||Fee payment|
Year of fee payment: 12