Search Images Maps Play YouTube News Gmail Drive More »
Sign in
Screen reader users: click this link for accessible mode. Accessible mode has the same essential features but works better with your reader.

Patents

  1. Advanced Patent Search
Publication numberUS5512998 A
Publication typeGrant
Application numberUS 08/263,575
Publication dateApr 30, 1996
Filing dateJun 22, 1994
Priority dateJun 22, 1994
Fee statusLapsed
Publication number08263575, 263575, US 5512998 A, US 5512998A, US-A-5512998, US5512998 A, US5512998A
InventorsJeffrey J. Puschell
Original AssigneeThe Titan Corporation
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Contactless method and system for determining static and dynamic characteristics of target objects
US 5512998 A
Abstract
The speed, acceleration and profile of a moving target object, such as a vehicle, are determined by processing signals provided by an array of detector elements in response to detecting a pair of laser beams reflected from the target object. The speed, acceleration and profile determinations are processed to classify the vehicle as belonging to one of a plurality of different predetermined speed, acceleration and profile categories, respectively.
Images(2)
Previous page
Next page
Claims(19)
I claim:
1. A system for determining characteristics of a target object moving through a given region in a predetermined direction, the system comprising
an array of detector elements aligned in the predetermined direction and facing the given region for detecting electromagnetic radiation of a predetermined wavelength received from the given region and for providing signals representative of said radiation detected by the detector elements;
a pair of sources of radiation of said predetermined wavelength disposed adjacent opposite ends of the array of detector elements for propagating said radiation along a respective pair of fixed paths into the given region so that said radiation is reflected from the given region generally toward the array of detector elements;
a lens disposed for collecting and focussing said radiation reflected from the given region upon the array of detector elements; and
a processor coupled to the detector elements and adapted for processing the signals provided by the detector elements to determine at least one dynamic characteristic of a target object moving through a given region in a predetermined direction.
2. A system according to claim 1, wherein the dynamic characteristic includes speed.
3. A system according to claim 2, wherein the dynamic characteristics further include acceleration.
4. A system according to claim 2, wherein the processor is further adapted for processing the signals provided by the detector elements to determine a profile of the target object.
5. A system according to claim 4, wherein the processor is adapted for determining said profile by processing the signals provided by the detector elements to determine a height above a background surface of each of a series of sampled segments of the object from which radiation of the predetermined wavelength is reflected to the array of detector elements as the object is moving through the given region in said predetermined direction and by combining the height determinations with the speed determinations to determine the profile of the target object.
6. A system according to claim 1, wherein the dynamic characteristics further include acceleration.
7. A system according to claim 1, wherein the processor is further adapted for processing the signals provided by the detector elements to determine a profile of the target object.
8. A system according to claim 1, wherein the pair of radiation beam sources include
means for generating a single radiation beam of said predetermined wavelength;
means for splitting the generated radiation beam into a pair of radiation beams; and
means for directing the split pair of radiation beams such that said pair of radiation beams are propagated respectively from positions adjacent said opposite ends of the array of detector elements along said respective pair of fixed paths into the given region.
9. A system for classifying objects moving through a given region in a predetermined direction, the system comprising
an array of detector elements aligned in the predetermined direction and facing the given region for detecting electromagnetic radiation of a predetermined wavelength received from the given region and for providing signals representative of said radiation detected by the detector elements;
a pair of sources of radiation of said predetermined wavelength disposed adjacent opposite ends of the array of detector elements for propagating said radiation along a respective pair of fixed paths into the given region so that said radiation is reflected from the given region generally toward the array of detector elements;
a lens disposed for collecting and focussing said radiation reflected from the given region upon the array of detector elements; and
a processor coupled to the detector elements and adapted for processing the signals provided by the detector elements to determine at least one dynamic characteristic of a target object moving through the given region in the predetermined direction, and to classify the object in accordance with the determined dynamic characteristic as belonging to one of a plurality of different categories.
10. A system for classifying objects, comprising
an array of detector elements facing a given region for detecting electromagnetic radiation of a predetermined wavelength received from the given region and for providing signals representative of said radiation detected by the detector elements;
at least one source of radiation of said predetermined wavelength disposed for propagating said radiation into the given region so that said radiation is reflected from the given region generally toward the array of detector elements;
a lens disposed for collecting and focussing said radiation reflected from the given region upon the array of detector elements; and
a processor coupled to the detector elements and adapted for processing the signals provided by the detector elements to determine a profile of a target object within the given region, and to classify the object in accordance with the determined profile as belonging to one of a plurality of different profile categories.
11. A method of determining characteristics of a target object moving through a given region in a predetermined direction, comprising the steps of
(a) detecting electromagnetic radiation of a predetermined wavelength received from the given region with an array of detector elements aligned in the predetermined direction and facing the given region and providing signals representative of said radiation detected by the detector elements;
(b) propagating radiation of said predetermined wavelength along a pair of fixed paths into the given region from positions disposed adjacent opposite ends of the array of detector elements so that said radiation is reflected from the given region generally toward the array of detector elements;
(c) collecting and focussing upon the array of detector elements, said radiation reflected from the given region; and
(d) processing the signals provided by the detector elements to determine at least one dynamic characteristic of a target object moving through a given region in a predetermined direction.
12. A method according to claim 11, wherein the dynamic characteristic includes speed.
13. A method according to claim 12, wherein the dynamic characteristics further include acceleration.
14. A method according to claim 12, further comprising the step of
(e) processing the signals provided by the detector elements to determine a profile of the target object.
15. A method according to claim 14, wherein step (e) comprises the step of
(f) determining said profile by processing the signals provided by the detector elements to determine a height above a background surface of each of a series of sampled segments of the object from which radiation of the predetermined wavelength is reflected to the array of detector elements as the object is moving through the given region in said predetermined direction and by combining the height determinations with the speed determinations to determine the profile of the target object.
16. A method according to claim 11, wherein the dynamic characteristics further include acceleration.
17. A method according to claim 11, further comprising the step of
(e) processing the signals provided by the detector elements to determine a profile of the target object.
18. A method for classifying objects moving through a given region in a predetermined direction, comprising the steps of
(a) detecting electromagnetic radiation of a predetermined wavelength received from the given region with an array of detector elements aligned in the predetermined direction and facing the given region and providing signals representative of said radiation detected by the detector elements;
(b) propagating radiation of said predetermined wavelength along a pair of fixed paths into the given region from positions disposed adjacent opposite ends of the array of detector elements so that said radiation is reflected from the given region generally toward the array of detector elements;
(c) collecting and focussing upon the array of detector elements, said radiation reflected from the given region;
(d) processing the signals provided by the detector elements to determine at least one dynamic characteristic of a target object moving through the given region in the predetermined direction; and
(e) classifying the object in accordance with the determined dynamic characteristic as belonging to one of a plurality of different categories.
19. A method for classifying objects, comprising the steps of
(a) detecting electromagnetic radiation of a predetermined wavelength received from a given region with an array of detector elements facing the given region and providing signals representative of said radiation detected by the detector elements;
(b) propagating radiation of said predetermined wavelength into the given region so that said radiation is reflected from the given region generally toward the array of detector elements;
(c) collecting and focussing upon the array of detector elements, said radiation reflected from the given region;
(d) processing the signals provided by the detector elements to determine a profile of a target object within the given region; and
(e) classifying the object in accordance with the determined profile as belonging to one of a plurality of different profile categories.
Description
BACKGROUND OF THE INVENTION

The present invention pertains to methods and systems for determining various characteristics of target objects, such as vehicles.

Contactless methods and systems for determining static characteristics of objects, such as a profile of an object, are described in U.S. Pat. No. 5,071,252 to Matsuura and U.S. Pat. No. 5,056,913 to Tanaka et al.

SUMMARY OF THE INVENTION

The present invention provides a method of determining characteristics of a target object moving through a given region in a predetermined direction, comprising the steps of (a) detecting electromagnetic radiation of a predetermined wavelength received from the given region with an array of detector elements aligned in the predetermined direction and facing the given region and providing signals representative of said radiation detected by the detector elements; (b) propagating radiation of said predetermined wavelength along a pair of fixed paths into the given region from positions disposed adjacent opposite ends of the array of detector elements so that said radiation is reflected from the given region generally toward the array of detector elements; (c) collecting and focussing upon the array of detector elements, said radiation reflected from the given region; and (d) processing the signals provided by the detector elements to determine at least one dynamic characteristic, such as speed, of a target object moving through a given region in a predetermined direction.

The present invention also provides a system for determining characteristics of a target object moving through a given region in a predetermined direction, the system comprising an array of detector elements aligned in the predetermined direction and facing the given region for detecting electromagnetic radiation of a predetermined wavelength received from the given region and for providing signals representative of said radiation detected by the detector elements; a pair of sources of radiation of said predetermined wavelength disposed adjacent opposite ends of the array of detector elements for propagating said radiation along a respective pair of fixed paths into the given region so that said radiation is reflected from the given region generally toward the array of detector elements; a lens disposed for collecting and focussing said radiation reflected from the given region upon the array of detector elements; and a processor coupled to the detector elements and adapted for processing the signals provided by the detector elements to determine at least one dynamic characteristic, such as speed, of a target object moving through a given region in a predetermined direction.

The processor is further adapted for determining a profile of the target object by processing the signals provided by the detector elements to determine a height above a background surface of each of a series of sampled segments of the object from which radiation of the predetermined wavelength is reflected to the array of detector elements as the object is moving through the given region in said predetermined direction and by combining the height determinations with the speed determinations to determine the profile of the target object.

In another aspect, the present invention provides a system for classifying objects, comprising an array of detector elements facing a given region for detecting electromagnetic radiation of a predetermined wavelength received from the given region and for providing signals representative of said radiation detected by the detector elements; at least one source of radiation of said predetermined wavelength disposed for propagating said radiation into the given region so that said radiation is reflected from the given region generally toward the array of detector elements; a lens disposed for collecting and focussing said radiation reflected from the given region upon the array of detector elements; and a processor coupled to the detector elements and adapted for processing the signals provided by the detector elements to determine a profile of a target object within the given region, and to classify the object in accordance with the determined profile as belonging to one of a plurality of different profile categories.

In this other aspect, the present invention also provides a method for classifying objects, comprising the steps of (a) detecting electromagnetic radiation of a predetermined wavelength received from a given region with an array of detector elements facing the given region and providing signals representative of said radiation detected by the detector elements; (b) propagating radiation of said predetermined wavelength into the given region so that said radiation is reflected from the given region generally toward the array of detector elements; (c) collecting and focussing upon the array of detector elements, said radiation reflected from the given region; (d) processing the signals provided by the detector elements to determine a profile of a target object within the given region; and (e) classifying the object in accordance with the determined profile as belonging to one of a plurality of different profile categories.

Additional features of the present invention are described in relation to the detailed description of the preferred embodiments.

BRIEF DESCRIPTION OF THE DRAWING

FIG. 1 is a block diagram of a preferred embodiment of the system of the present invention.

FIG. 2 is an exemplary graph of a cross correlation of vehicle profile segments as a function of the index used in the discrete Fourier transform used for determining cross correlation.

FIG. 3 is a diagram of the broad processing steps performed by the processor in the system of FIG. 1.

FIG. 4 is a diagram of the steps performed by the processor in the system of FIG. 1 to classify vehicles according to profile category.

FIG. 5 is a diagram of a system of light beam sources for use in the system of FIG. 1 in lieu of the pair of lasers shown therein.

DETAILED DESCRIPTION

Referring to FIG. 1, a preferred embodiment of a system according to the present invention for determining characteristics of a target object 10, such as a motor vehicle, moving through a given region 12 in a predetermined direction 13 includes an array of detector elements 14, a pair of lasers 16, 17, a lens 18 and a processor 20. In the preferred embodiment, the processor 20 is a microcomputer.

The array of detector elements 14 is aligned in the predetermined direction and faces the given region 12 for detecting electromagnetic radiation of a predetermined wavelength received from the given region 12 and provides signals 22 representative of the radiation detected by each of the detector elements 14.

The pair of lasers 16, 17 are sources of radiation of the predetermined wavelength. The pair of lasers 16, 17 are disposed adjacent opposite ends of the array of detector elements 14 equidistant from the optical axis of the lens 18 and aligned in the predetermined direction 13 for respectively propagating the radiation in a first light beam b1 and in a second light beam b2 along a pair of fixed paths into the given region 12 so that the radiation is reflected from the given region 12 generally toward the array of detector elements 14. The optical axis of the lens 18 has a nadir angle θ. Preferably, the path of the first light beam b1 and the path of the second light beam b2 are parallel to the optical axis of the lens 18; and the nadir angle θ is within three degrees of zero degrees.

The lens 18 is disposed for collecting and focussing radiation reflected from the given region 12 upon the array of detector elements 14.

The processor 20 is coupled to the detector elements 14 and adapted for processing the signals 22 provided by the detector elements 14 to determine the speed, acceleration and profile of a target object, such as a motor vehicle 10, moving through the given region 12 in the predetermined direction 13.

The height component of the vehicle profile is determined by processing the electrical signals 22 provided by the array of detector elements 14, which are sampled at a rate of at least 200 Hertz, to compute the height h above the background surface 24 of each of a series of sampled segments of the vehicle 10, from which radiation of the predetermined wavelength is reflected to the array of detector elements 14 as the vehicle 10 is moving through the given region 12 in the predetermined direction 13.

The height h1 of a sampled segment of the vehicle 10 contacted by the first light beam b1 propagated from the laser 16 disposed at side 1 of the array of detector elements 14 is determined by computing

h1 =hs +S sinθ-d1 cosθ          (Eq. 1)

wherein hs is the height of the center of the lens 18 above the background surface 24 in the given area 12.

θ is the nadir angle of the optical axis of the lens 18;

S is the distance from the optical axis of the lens 18 to the propagation axis of each of the first light bean b1 and the second light beam b2 as measured in a plane 25 bisecting the lens 18 and normal to the optical axis of the lens 18; and

d1 is the distance along the first beam b1 from the plane 25 to the sampled segment of the vehicle 10 from which the first light beam b1 is reflected, wherein d1 is determined by computing

d1 =f(1+S/Y1)                                    (Eq. 2)

wherein f is focal length of the lens 18, and

Y1 is the distance from the center of the array of detector elements 14 to the center of the location on the array to which the reflected first beam b1 is focussed, or

Y1 =|X1 -(L/2-δ)|ΔX (Eq. 3)

wherein X1 is the center of the location on the array of detector elements 14 to which the reflected first beam b1 is focussed, as measured by the number of detector elements from side 1 of the array, at which the first laser 16 is positioned;

L is the number of detector elements 14 in the array;

δ is the number of detector elements by which the center of the array of detector elements 14 is offset from the optical axis of the lens 18; and

ΔX is the breadth of a single detector element 14 of the array.

The height h2 of a sampled segment of the vehicle 10 contacted by the second light beam b2 propagated from the second laser 17 disposed on side 2 of the array of detector elements 14 is determined by computing

h2 =hs -S sinθ-d2 cosθ          (Eq. 4)

wherein hs, S and θ are as defined above; and

d2 is the distance along the second beam b2 from the plane 25 to the sampled segment of the vehicle 10 from which the second light beam b2 is reflected, wherein d2 is determined by computing

d2 =f(1+S/Y2)                                    (Eq. 5)

and Y2 is the distance from the center of the array of detector elements 14 to the center of the location on the array to which the reflected second beam b2 is focussed, or

Y2 =|X2 -(L/2-δ)|ΔX (Eq. 6)

wherein X2 is the center of the location on the array of detector elements 14 to which the reflected second beam b2 is focussed, as measured by the number of detector elements from side 1 of the array, at which the first laser 16 is positioned, as shown in FIG. 1.

Preferably, Xj (for side j≡1 or 2) is computed from measured amplitudes of signals 22 provided by the respective detector elements 14 of the array in accordance with the following equation: ##EQU1## wherein i is the number of the detector element as counted from side 1 of the array of detector elements;

n(i) is the amplitude of the signal 22i provided by detector array element i;

rj is the reference signal amplitude or detection threshold value for the detector elements 14 on side j and is determined by ascertaining a signal amplitude for the detector elements 14 on side j such that there is a specified number of detector elements for which the signal amplitude is at least such amplitude; and

mj is the number of detector elements 14 on the side j in which the signal amplitude exceeds the reference signal amplitude rj.

The computation defined by Equation 7 enables the center of the location on the array of detector elements 14 to which a reflected laser beam b1, b2 is focussed to be determined by setting a detection threshold that is exceeded at only those detector elements that are within the spot of the laser beam and by calculating the center of distribution of the laser beam spot among those detector elements.

Vehicle speed V is determined by processing the provided electrical signals to compute

V=SP tmax 

wherein SP is the projected separation distance between the propagated first light beam b1 and second light beam b2 at the background surface 24, and

tmax is the elapsed time corresponding to the maximum of cross correlation between vehicle profile segments h1 k and h2 k.

The cross correlation Xk (t) for each kth segment is determined by computing

Xk (t)=F-1 {Nk F h1 k (t)!F h2 k (t)!}(Eq. 8)

wherein Nk is the number of vehicle height measurements in the kth segment of the complete set of vehicle height measurements, F represents the discrete Fourier transform operation and F-1 represents the inverse Fourier transform operation.

An exemplary graph of cross correlation Xk (t) as a function of the index i used in the discrete Fourier transform used for determining cross correlation is shown in FIG. 2.

If the maximum in the cross correlation occurs for an index imax in the discrete Fourier transform F, then

tmax =Δt (Xmax -1)2!                  (Eq. 9)

wherein Δt is the sampling interval, and by using parabolic interpolation, ##EQU2##

Vehicle acceleration is determined by computing the change in vehicle speed over the time interval between adjacent segments of the vehicle profile.

Preferably, only the series of the height determinations h1 determined by processing the signals provided in response to the reflections of the first light beam b1 from a vehicle 10 moving in the predetermined direction 13 is used to determine the length and the profile of the vehicle 10.

The length component t of the vehicle profile is determined by the processor 20 processing the series of height determinations h1 in combination with the speed and acceleration determinations.

l(i)=l(i-1)+0.5 V(i)+V(i-1)!Δt                       (Eq. 11)

wherein l(i) is the vehicle length corresponding to a surface height measurement number i;

l(i-1) is the length at the previous (i-1) height measurement; and

V(i) and V(i-1) are associated speed measurements derived from the cross correlation analysis; and by averaging these speed measurements, acceleration also is accounted for.

The vehicle profile is determined by correlating the vehicle height and length measurements.

The foregoing processing steps performed by the processor 20 are summarized with reference to FIG. 3.

In step 1, the processor 20 processes the signals 22 provided by the detector elements 14 that detect reflections of the first light beam b1 from a vehicle 10 moving through the given region 12 to determine the height h1 from the background surface 24 of each of a series of sampled segments of the vehicle 10 from which the first light beam b1 is reflected; and also processes the signals 22 provided by the detector elements 14 that detect reflections of the second light beam b2 from the vehicle 10 moving through the given region 12 to determine the height h2 of each of a series of sampled segments of the vehicle 10 from which the second light beam b2 is reflected.

In step 2, the processor 20 determines the vehicle speed V by combining the projected separation distance SP of the light beams b1 and b2 on the background surface 24 with a measure of elapsed time tmax corresponding to maximum cross correlation of the series of heights h1 and the series of heights h2.

In step 3, the processor 20 determines the vehicle acceleration by measuring any change in speed ΔV over an integral multiple of the sampling interval Δt.

In step 4, the processor 20 combines one series of height determinations h1 with the measurements of speed V for each sampling interval to determine the length of the vehicle 10.

In step 5, the processor 20 combines one series of height determinations h1 with the length determination to determine the profile of the vehicle 10.

In step 6, the processor 20 classifies the vehicle 10 according to predetermined profile categories, as described in greater detail below with reference to FIG. 4.

In step 7, the processor 20 counts the number of vehicles 10 classified in each profile category over a predetermined duration.

In step 8, the processor 20 classifies the vehicle 10 according to the determined speed V.

In step 9, the processor 20 counts the number of vehicles 10 classified in each speed category over a predetermined duration.

The processor 20 also classifies the vehicle 10 according to the determined acceleration and counts the number of vehicles 10 classified in each acceleration category over a predetermined duration.

Referring to FIG. 4, the processor 20 classifies the vehicle in accordance with the determined profile as belonging to one of a plurality of different predetermined profile categories by performing the following steps:

In step 1, the processor 20 determines the variance hVAR in the height h1 of the vehicle surface from which the beam b1 is reflected from different points i over the length of the vehicle 10 by computing ##EQU3## wherein

q=h1 -h1 (ave)                                   (Eq. 13)

and ##EQU4##

In step 2, the processor 20 determines deviations ΔhVAR, ΔL and ΔH of the height variance hVAR, the length L and the overall height H, respectively of the vehicle from predetermined height variance, length and overall height dimensions for each of a plurality of different categories of vehicles. The overall height H is the maximum value of h1 for the vehicle. The height variance, length and overall height dimensions for each category are predetermined by averaging each such dimension of the different vehicles included in the category.

In step 3, the processor 20 determines the combined deviation with respect to each of the different categories by computing

Dev=(ΔhVAR 2 +ΔL2 +ΔH2)1/2(Eq. 15)

In step 4, the processor 20 classifies the vehicle in the category for which the computed combined deviation Dev is the least.

In an alternative preferred embodiment, a system of light beam sources, as shown in FIG. 5, is used in the system of FIG. 1 in lieu of the pair of lasers 16, 17 shown therein. This system includes a single laser 26, a beam splitter 28 and a pair of mirrors 30, 31.

The laser 26 generates a single light beam b' of the predetermined wavelength to which the detector elements 14 are most sensitive and thereby avoids inconsistencies in measurements resulting from light beams of different wavelengths being generated respectively by a pair of lasers, such as shown in the embodiment of FIG. 1.

The beam splitter 28 splits the generated light beam b' into a pair of light beams b'1 and b'2.

The pair of mirrors 30, 31 are disposed adjacent the opposite ends of the array of detector elements 14 in positions on the opposite side of the array of detector elements 14 from the lens 18 for directing the split pair of light beams b'1 and b'2 such that the pair of light beams b'1 and b'2 are propagated along the same respective pair of fixed paths into the given region 12 as the first and second light beams b1 and b2 are propagated in the embodiment shown in FIG. 1.

Patent Citations
Cited PatentFiling datePublication dateApplicantTitle
US4696567 *Nov 19, 1984Sep 29, 1987Eltro GmbhRadiation detection method
US4864515 *Mar 30, 1987Sep 5, 1989Honeywell Inc.Electronic sensing screen for measuring projectile parameters
US5015868 *Nov 29, 1988May 14, 1991Goldstar Co., Ltd.Real time distance sensor
US5056913 *Sep 5, 1990Oct 15, 1991Stanley Electric CorporationOptical gauging apparatus
US5071252 *Aug 31, 1988Dec 10, 1991Fanuc Ltd.Method for contactless profiling normal to a surface
US5166533 *Dec 21, 1990Nov 24, 1992Mitsubishi Denki K.K.Triangulation type distance sensor for moving objects with window forming means
US5193120 *Feb 27, 1991Mar 9, 1993Mechanical Technology IncorporatedMachine vision three dimensional profiling system
US5194908 *Nov 29, 1991Mar 16, 1993Computing Devices Canada Ltd.Detecting target movement
US5198877 *Oct 15, 1990Mar 30, 1993Pixsys, Inc.Method and apparatus for three-dimensional non-contact shape sensing
US5202741 *Jun 29, 1992Apr 13, 1993The United States Of America As Represented By The Department Of EnergyActive imaging system with Faraday filter
US5204732 *Mar 6, 1992Apr 20, 1993Stanley Electric Co., Ltd.Optical distance measuring apparatus
Referenced by
Citing PatentFiling datePublication dateApplicantTitle
US6188469 *May 28, 1999Feb 13, 2001Quarton, Inc.Laser apparatus and method for speed measurement
US6505140Jan 18, 2000Jan 7, 2003Intelligent Automation, Inc.Computerized system and method for bullet ballistic analysis
US6614536 *May 1, 2000Sep 2, 2003Siemens AktiengesellschaftArrangement and method for simultaneous measurement of the speed as well as the surface shape of moving objects
US6785634Jan 6, 2003Aug 31, 2004Intelligent Automation, Inc.Computerized system and methods of ballistic analysis for gun identifiability and bullet-to-gun classifications
US6985206Jun 2, 2003Jan 10, 2006Anderson James RBaseball pitch speed measurement and strike zone detection devices
US7107144Feb 26, 2004Sep 12, 2006Spectra Research, Inc.Non-intrusive traffic monitoring system
US7212949Aug 31, 2005May 1, 2007Intelligent Automation, Inc.Automated system and method for tool mark analysis
US8384903 *Mar 3, 2008Feb 26, 2013Kla-Tencor CorporationDetection system for nanometer scale topographic measurements of reflective surfaces
Classifications
U.S. Classification356/28
International ClassificationG01P3/36, G01P15/16
Cooperative ClassificationG01P15/16, G01P3/36
European ClassificationG01P15/16, G01P3/36
Legal Events
DateCodeEventDescription
Jun 17, 2008FPExpired due to failure to pay maintenance fee
Effective date: 20080430
Apr 30, 2008LAPSLapse for failure to pay maintenance fees
Nov 5, 2007REMIMaintenance fee reminder mailed
Oct 15, 2003FPAYFee payment
Year of fee payment: 8
Nov 7, 2002ASAssignment
Owner name: WACHOVIA BANK, N.A., AS ADMINISTRATIVE AGENT, NORT
Free format text: PATENT SECURITY AGREEMENT;ASSIGNOR:TITAN CORPORATION, THE;REEL/FRAME:013438/0928
Effective date: 20020523
Owner name: WACHOVIA BANK, N.A., AS ADMINISTRATIVE AGENT ONE W
Free format text: PATENT SECURITY AGREEMENT;ASSIGNOR:TITAN CORPORATION, THE /AR;REEL/FRAME:013438/0928
May 19, 2000ASAssignment
Owner name: CREDIT SUISSE FIRST BOSTON, NEW YORK
Free format text: SECURITY AGREEMENT;ASSIGNOR:THE TITAN CORPORATION;REEL/FRAME:010859/0353
Effective date: 20000223
Owner name: CREDIT SUISSE FIRST BOSTON ELEVEN MADISON AVENUE N
May 16, 2000ASAssignment
Owner name: TITAN CORPORATION, THE, CALIFORNIA
Free format text: TERMINATION OF INTEREST;ASSIGNOR:BANK OF NOVA SCOTIA, THE;REEL/FRAME:010832/0759
Effective date: 20000223
Owner name: TITAN CORPORATION, THE 3033 SCIENCE PARK ROAD SAN
Aug 23, 1999FPAYFee payment
Year of fee payment: 4
Oct 14, 1998ASAssignment
Owner name: BANK OF NOVA SCOTIA, THE, AS ADMINISTRATIVE AGENT,
Free format text: SECURITY INTEREST;ASSIGNOR:TITAN CORPORATION, THE;REEL/FRAME:009547/0243
Effective date: 19980729
Jun 2, 1997ASAssignment
Owner name: SUMITOMO BANK OF CALIFORNIA AS AGENT FOR ITSELF AN
Free format text: SECURITY AGREEMENT;ASSIGNOR:SUMITOMO BANK OF CALIFORNIA, THE;REEL/FRAME:008535/0923
Effective date: 19970515
Sep 12, 1996ASAssignment
Owner name: SUMITOMO BANK OF CALIFORNIA, CALIFORNIA
Free format text: SECURITY AGREEMENT;ASSIGNOR:TITAN CORPORATION, THE, A DELAWARE CORPORATION;REEL/FRAME:008126/0447
Effective date: 19960906
Jun 22, 1994ASAssignment
Owner name: TITAN CORPORATION, THE, CALIFORNIA
Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:PUSCHELL, JEFFREY J.;REEL/FRAME:007051/0492
Effective date: 19940620