US5854868A - Optical device and light waveguide integrated circuit - Google Patents
Optical device and light waveguide integrated circuit Download PDFInfo
- Publication number
- US5854868A US5854868A US08/694,705 US69470596A US5854868A US 5854868 A US5854868 A US 5854868A US 69470596 A US69470596 A US 69470596A US 5854868 A US5854868 A US 5854868A
- Authority
- US
- United States
- Prior art keywords
- waveguide
- optical
- pattern
- forming
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/138—Integrated optical circuits characterised by the manufacturing method by using polymerisation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/14—Mode converters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
- G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/31—Digital deflection, i.e. optical switching
- G02F1/313—Digital deflection, i.e. optical switching in an optical waveguide structure
- G02F1/3137—Digital deflection, i.e. optical switching in an optical waveguide structure with intersecting or branching waveguides, e.g. X-switches and Y-junctions
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/355—Non-linear optics characterised by the materials used
- G02F1/3556—Semiconductor materials, e.g. quantum wells
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12069—Organic material
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12195—Tapering
Definitions
- optical integrated circuits including waveguide devices.
- Optical integrated circuits are also useful in optically related devices such as optical disks and displays.
- the optical devices are mounted after formation of the waveguides, the optical devices usually have extremely small outgoing beam sizes of about 1 ⁇ m, such as in the case of LDs, thus requiring many manhours for alignment of the waveguides, and resulting in loss of coupling due to mismatching or misalignment.
- formation of a refractive index pattern or waveguide pattern on the substrate after mounting of the optical device allows realization of simple and high-precision alignment between the optical device and optical waveguide by photolithography techniques. Furthermore, according to the invention, gradual variation in the width of the optical waveguide or splitting of light exposure allows reduction in coupling loss, while changing the direction of thickness of the optical waveguide allows reduction in coupling loss due to mode mismatching.
- FIGS. 1A, 1B and 1C are schematic drawings illustrating an embodiment of the invention.
- FIGS. 2A, 2B and 2C are schematic drawings illustrating another embodiment of the invention.
- FIGS. 4A, 4B and 4C are schematic drawings illustrating yet another embodiment of the invention.
- FIGS. 5A, 5B, 5C and 5D are schematic drawings illustrating yet another embodiment of the invention.
- FIG. 6 is a schematic drawing illustrating an embodiment of a method of forming a layer while varying the thickness, according to the process of the invention.
- FIG. 1A is a schematic illustration of an embodiment of an optical integrated circuit produced by the process of the invention, and this circuit integrates an LD, a branched optical waveguide and optical fibers.
- the waveguide is split in two near the coupling section between the LD and waveguide, and is formed so that the respective sections gradually widen out at the boundaries, to achieve coupling between the waveguide.
- the waveguide is also formed so that it gradually widens and the thickness thereof gradually increases, to achieve coupling between the waveguide and the optical fibers.
- FIG. 1B is a schematic illustration of an embodiment of the process of integrating this type of circuit. Each of the steps are shown from left to right in the order of the process.
- the waveguide pattern for the optical circuit is then exposed to light (fifth step).
- the waveguide pattern connected to the light-emitting tips (edges or ends) of the LDs is exposed to light (sixth step), matching the marker of each LD.
- the resist is peeled off, and the buffer layer is coated (seventh step).
- the coating may be accomplished by spray coating, dip coating or spin coating.
- the waveguide width may be widened at the boundaries. Also, in order to prevent increasing loss, the enlarging of the width may be gradual.
- the boundaries do not necessarily have to form a gap, and they may be connected by an overlapping exposure.
- the thickness is varied gradually along the waveguide, to approximate the spot size of the fibers at the connection terminal with the fibers.
- the width of the waveguide may also be gradually changed to approximate the spot size of the fibers.
- FIG. 2A is a schematic drawing of another embodiment of an optical integrated circuit. This circuit has roughly the same construction as the one shown in FIG. 1A, but differs somewhat in that the thickness of the waveguide is varied at the coupling section between the branched optical waveguide and the optical fibers (FIG. 2C).
- a raised level is constructed on an Si substrate to form an electrode, and a buffer layer is then formed while varying the thickness.
- a core layer (waveguide layer) is formed on the buffer layer.
- the variation in the thickness of the underlying buffer layer causes variation in the thickness of the core layer.
- the waveguide may be formed using a highly transparent, highly heat-resistant polymer such as a fluorinated polyimide, or quartz or another glass or polymer material.
- a highly transparent, highly heat-resistant polymer such as a fluorinated polyimide, or quartz or another glass or polymer material.
- the same type of material may also be used for the underlying buffer layer, or an organic and/or inorganic hybrid may be used.
- the underlying buffer layer and waveguide layer may also be subjected to a high temperature process (when these layers are formed prior to LD mounting), but the upper buffer layer is preferably formed through a process at 200°-400° C. so as not to melt the LD mounting solder.
- FIGS. 3A-3C and FIGS. 4A-4C illustrate embodiments using a photopolymer or photoglass (a polymer or glass whose refractive index varies with light irradiation, or polymer or glass which hardens or becomes soluble upon light irradiation), and they correspond to FIGS. 1A-1C and FIGS. 2A-2C.
- a photopolymer or photoglass a polymer or glass whose refractive index varies with light irradiation, or polymer or glass which hardens or becomes soluble upon light irradiation
- a raised level is constructed on an Si substrate to form an electrode, and then a buffer layer is then formed.
- solder is used to mount LDs on the electrodes.
- a core layer is then formed on the buffer layer while varying the thickness (third step).
- spray application is effective to reduce the effect of the raised level.
- the polymer used in this embodiment was one which forms waveguide channels on the light-irradiated sections.
- the waveguide pattern for the optical circuit is then exposed to light (first exposure) (fourth step).
- first exposure light
- second exposure second exposure
- second exposure second exposure
- projection light which minimizes the effect of the raised level
- the buffer layer is coated (sixth step). The coating may be accomplished by spray coating, dip coating or spin coating.
- a raised level is constructed on an Si substrate to form an electrode, and then a buffer layer is then formed while varying the thickness.
- solder is used to mount LDs on the electrodes.
- a core layer is then formed on the buffer layer (third step).
- the variation in the thickness of the underlying buffer layer causes variation in the thickness of the core layer. Formation of the core layer may be accomplished by spray coating, dip coating or spin coating.
- the material for the lower buffer layer may be of the same type as used for the waveguide, or it may be a highly transparent, highly heat-resistant polymer such as a fluorinated polyimide, or quartz or another glass or polymer material. An organic and/or inorganic hybrid may also be used.
- the lower buffer layer may also be subjected to a high temperature process (when it is formed prior to LD mounting), but the upper buffer layer is preferably formed through a process at 200°-400° C. so as not to melt the LD mounting solder.
- the film forming method for polymer systems may be spin coating, dip coating, spray coating, or a vapor phase growth process such as evaporation polymerization or CVD.
- a vapor phase growth process such as evaporation polymerization or CVD.
- sputtering, evaporation, CVD, ion plating or the like may be employed, and when a sol-gel method is used, spin coating, dip coating or spray coating may be employed.
- FIG. 5C is a schematic drawing illustrating an embodiment integrating an LD and an optical modulator.
- This integrated circuit is useful as a simple, low-cost optical transmitter for an active optical connector, active optical circuit sheet, optical MCM, or the like.
- FIG. 5D is a schematic drawing illustrating an embodiment integrating LDs of different emission wavelengths. This is useful as a wavelength multiplex communications optical transmitter. The method for this integration may also be applied to coupling between LDs and fibers, as shown in FIGS. 1C, 2C, 3C and 4C.
- any desired refraction pattern other than a waveguide may be formed, such as a lens, prism, grating, pinhole, mirror, slit or hologram.
- FIGS. 5A and 5B show other embodiments for compensating for mispositioning between waveguides.
- a photopolymer or photoglass is formed between waveguides or between waveguides and fibers, and light of a wavelength to which the material is sensitive is emitted thereon from the fibers or waveguides (from either one, but preferably from both). This forms a coupling path between the two, and further increases the coupling efficiency between the two.
- writing light may be emitted from the waveguide by simply irradiating fluorescent excitation light into the waveguide. If an LD is also connected, the writing light may be emitted from the LD.
- the present invention provides a simple integrating technique for optical devices (especially semiconductor devices) and optical waveguides and a simple optical coupling technique between LDs or waveguides and fibers, making it possible to obtain optical integrated circuits characterized by having low cost, high functionality, large surface area and flexibility.
Abstract
Description
Claims (15)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/694,705 US5854868A (en) | 1994-06-22 | 1996-08-09 | Optical device and light waveguide integrated circuit |
Applications Claiming Priority (14)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6-140502 | 1994-06-22 | ||
JP14050294 | 1994-06-22 | ||
JP6200974A JPH0865251A (en) | 1994-08-25 | 1994-08-25 | Optical network and optical circuit board |
JP6-200974 | 1994-08-25 | ||
JP20492294A JPH0869024A (en) | 1994-08-30 | 1994-08-30 | Nonlinear optical material and optical circuit device and optical circuit board using the material |
JP6-204922 | 1994-08-30 | ||
JP7-59240 | 1995-03-17 | ||
JP5924095A JPH08253758A (en) | 1995-03-17 | 1995-03-17 | Photoelectric device and its production |
JP6109295 | 1995-03-20 | ||
JP7-61092 | 1995-03-20 | ||
US49375195A | 1995-06-22 | 1995-06-22 | |
JP8-026888 | 1996-02-14 | ||
JP2688896A JPH09218321A (en) | 1996-02-14 | 1996-02-14 | Method for integrating optical device and optical waveguide |
US08/694,705 US5854868A (en) | 1994-06-22 | 1996-08-09 | Optical device and light waveguide integrated circuit |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US49375195A Continuation-In-Part | 1994-06-22 | 1995-06-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
US5854868A true US5854868A (en) | 1998-12-29 |
Family
ID=27564118
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US08/694,705 Expired - Lifetime US5854868A (en) | 1994-06-22 | 1996-08-09 | Optical device and light waveguide integrated circuit |
Country Status (1)
Country | Link |
---|---|
US (1) | US5854868A (en) |
Cited By (71)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000060392A1 (en) * | 1999-03-31 | 2000-10-12 | Zenastra Photonics Inc. | Hybrid integrated opto-electronic circuits and method of making |
US6157759A (en) * | 1997-07-03 | 2000-12-05 | Samsung Electronics Co., Ltd. | Optical fiber passive alignment apparatus and method therefor |
US6160927A (en) * | 1997-03-13 | 2000-12-12 | Alcatel | Method of fabricating integrated optical circuits which minimizes optical coupling losses |
US6217231B1 (en) * | 1997-04-23 | 2001-04-17 | Fujitsu Limited | Optical fiber assembly, optical module including an optical fiber assembly, and a manufacturing process thereof |
US6278523B1 (en) * | 1998-02-13 | 2001-08-21 | Centre National De La Recherche Scientifique-Cnrs | Optical sensor on a silicon substrate and application for the in situ measurement of a fluorescent marker in the small bronchia |
US6309803B1 (en) * | 1999-07-01 | 2001-10-30 | Lumenon, Innovative Lightwave Technology, Inc. | On-substrate cleaving of sol-gel waveguide |
US6326939B1 (en) | 1999-09-24 | 2001-12-04 | Ronald S. Smith | Optical waveguide system for a flat-panel display |
WO2001096915A2 (en) * | 2000-06-15 | 2001-12-20 | 3M Innovative Properties Company | Microfabrication of organic optical elements |
US6343171B1 (en) | 1998-10-09 | 2002-01-29 | Fujitsu Limited | Systems based on opto-electronic substrates with electrical and optical interconnections and methods for making |
US6363185B2 (en) | 1999-07-09 | 2002-03-26 | Chiaro Networks Ltd. | Integrated optics beam deflectors |
US6368775B1 (en) * | 2000-01-27 | 2002-04-09 | Sandia Corporation | 3-D photo-patterning of refractive index structures in photosensitive thin film materials |
US20020076145A1 (en) * | 2000-12-15 | 2002-06-20 | Lightwave Microsystems Corporation | Optical devices for controlling insertion loss |
US6442315B1 (en) * | 1997-11-18 | 2002-08-27 | Samsung Electronics Co., Ltd. | Optical waveguide chip and method of formation thereof |
EP1271210A1 (en) * | 2001-02-14 | 2003-01-02 | TRW Inc. | Integrated optoelectronic device and method for making same |
US20030002793A1 (en) * | 2001-02-21 | 2003-01-02 | Dautartas Mindaugas F. | Method for making optical devices with a moving mask and optical devices made thereby |
US20030035632A1 (en) * | 2001-08-17 | 2003-02-20 | Alexei Glebov | Optical switching apparatus with adiabatic coupling to optical fiber |
US20030068149A1 (en) * | 2001-03-30 | 2003-04-10 | Dautartas Mindaugas F. | Tapered optical fiber for coupling to diffused optical waveguides |
US20030118310A1 (en) * | 2000-10-26 | 2003-06-26 | Steinberg Dan A. | Variable width waveguide for mode-matching and method for making |
EP1336894A2 (en) * | 2002-02-19 | 2003-08-20 | Omron Corporation | An optical wave guide, an optical component and an optical switch |
US6611635B1 (en) | 1998-10-09 | 2003-08-26 | Fujitsu Limited | Opto-electronic substrates with electrical and optical interconnections and methods for making |
US20030194651A1 (en) * | 2000-06-15 | 2003-10-16 | De Voe Robert J. | Multicolor imaging using multiphoton photochemical processes |
US20030199121A1 (en) * | 2000-07-27 | 2003-10-23 | Caletka David Vincent | Wafer scale thin film package |
US6669801B2 (en) | 2000-01-21 | 2003-12-30 | Fujitsu Limited | Device transfer method |
US20040013371A1 (en) * | 2002-07-18 | 2004-01-22 | Chiaro Networks Ltd. | Optical assembly and method for manufacture thereof |
US20040012872A1 (en) * | 2001-06-14 | 2004-01-22 | Fleming Patrick R | Multiphoton absorption method using patterned light |
US6684007B2 (en) | 1998-10-09 | 2004-01-27 | Fujitsu Limited | Optical coupling structures and the fabrication processes |
US20040017976A1 (en) * | 2000-12-14 | 2004-01-29 | Hui Luo | Optical waveguide termination with vertical and horizontal mode shaping |
US6690845B1 (en) | 1998-10-09 | 2004-02-10 | Fujitsu Limited | Three-dimensional opto-electronic modules with electrical and optical interconnections and methods for making |
US20040042937A1 (en) * | 2000-06-15 | 2004-03-04 | Bentsen James G | Process for producing microfluidic articles |
US6706546B2 (en) | 1998-10-09 | 2004-03-16 | Fujitsu Limited | Optical reflective structures and method for making |
US20040052464A1 (en) * | 2002-09-18 | 2004-03-18 | Helbing Rene P. | Optical module with alignment waveguide |
US6710366B1 (en) | 2001-08-02 | 2004-03-23 | Ultradots, Inc. | Nanocomposite materials with engineered properties |
US6735363B1 (en) | 2002-03-08 | 2004-05-11 | Lightwave Microsystems Corporation | Waveguide-grating router with output tapers configured to provide a passband that is optimized for each channel individually |
US20040126056A1 (en) * | 2002-12-26 | 2004-07-01 | Shigenori Aoki | Optical switches having a common waveguide for improved switch performance |
US20040126076A1 (en) * | 2001-04-30 | 2004-07-01 | Tony Mule | Backplane, printed wiring board, and/or multi-chip module-level optical interconnect layer having embedded air-gap technologies and methods of fabrication |
EP1441243A1 (en) * | 2003-01-24 | 2004-07-28 | Nitto Denko Corporation | Process of manufacturing optical waveguide and connection structure of optical devices |
US6785447B2 (en) | 1998-10-09 | 2004-08-31 | Fujitsu Limited | Single and multilayer waveguides and fabrication process |
US6787868B1 (en) | 2001-09-25 | 2004-09-07 | Lightwave Microsystems Corporation | Microlenses for integrated optical devices |
US6794265B2 (en) | 2001-08-02 | 2004-09-21 | Ultradots, Inc. | Methods of forming quantum dots of Group IV semiconductor materials |
US6813023B2 (en) | 2002-01-03 | 2004-11-02 | Chiaro Nerwork Ltd. | Automatic optical inter-alignment of two linear arrangements |
US6819845B2 (en) | 2001-08-02 | 2004-11-16 | Ultradots, Inc. | Optical devices with engineered nonlinear nanocomposite materials |
US6845184B1 (en) | 1998-10-09 | 2005-01-18 | Fujitsu Limited | Multi-layer opto-electronic substrates with electrical and optical interconnections and methods for making |
US20050025428A1 (en) * | 2003-07-28 | 2005-02-03 | Grot Annette C. | Optical alignment of optical waveguides |
US6852766B1 (en) | 2000-06-15 | 2005-02-08 | 3M Innovative Properties Company | Multiphoton photosensitization system |
US6898343B2 (en) | 2001-08-17 | 2005-05-24 | Fujitsu Limited | Optical switching apparatus and method for fabricating |
US20050117845A1 (en) * | 2002-04-26 | 2005-06-02 | Ibiden, Co., Ltd. | Optical transmission structural body, optical waveguide, optical waveguide formation method, and optical wiring connection body |
US6917725B2 (en) | 1999-05-17 | 2005-07-12 | Chiaro Networks Ltd. | Modulated light source |
US20050202554A1 (en) * | 2000-12-14 | 2005-09-15 | Hui Luo | Optical waveguide termination with vertical and horizontal mode shaping |
US20050208431A1 (en) * | 2000-06-15 | 2005-09-22 | Devoe Robert J | Multiphoton curing to provide encapsulated optical elements |
US6976792B1 (en) * | 2000-09-26 | 2005-12-20 | International Business Machines Corporation | Optical fiber space transformation |
FR2873454A1 (en) * | 2004-07-26 | 2006-01-27 | E Klo Sarl | Photoreceptor component, has waveguides interposed between photodiodes and optical fiber, where waveguides and photodiodes are formed on same substrate and each waveguide has end partially covering active surface of respective photodiode |
US7005669B1 (en) | 2001-08-02 | 2006-02-28 | Ultradots, Inc. | Quantum dots, nanocomposite materials with quantum dots, devices with quantum dots, and related fabrication methods |
US20060083461A1 (en) * | 2004-01-21 | 2006-04-20 | Hitachi Cable, Ltd. | Multimode wavelength multiplexing optical transceiver |
US7058245B2 (en) | 2000-04-04 | 2006-06-06 | Waveguide Solutions, Inc. | Integrated optical circuits |
US7166409B2 (en) | 2000-06-15 | 2007-01-23 | 3M Innovative Properties Company | Multipass multiphoton absorption method and apparatus |
US7358525B2 (en) | 2001-08-02 | 2008-04-15 | Ultradots, Inc. | Quantum dots of group IV semiconductor materials |
US20090323508A1 (en) * | 2007-06-28 | 2009-12-31 | Tatsuya Tomura | Photosensitized composite material, three-dimensional memory material and recording medium, optical power limiting material and element, and photocuring material and stereolithography system, and fluorescent material for multiphoton fluorescence microscope and multiphoton fluorescence microscope |
US20100098379A1 (en) * | 2008-10-20 | 2010-04-22 | Commissariat A L'energie Atomique | Structure and method for aligning an optical fiber on an optical waveguide |
US7790353B2 (en) | 2000-06-15 | 2010-09-07 | 3M Innovative Properties Company | Multidirectional photoreactive absorption method |
US20110052114A1 (en) * | 2009-09-02 | 2011-03-03 | Alcatel-Lucent Usa Inc. | Vertical optically emitting photonic devices with electronic steering capability |
US20120097850A1 (en) * | 2010-10-25 | 2012-04-26 | Uvic Industry Partnerships Inc. | Photomixer-waveguide coupling tapers |
US20120288278A1 (en) * | 2011-05-09 | 2012-11-15 | Huawei Technologies Co., Ltd. | Passive optical splitter and passive optical network system |
JP2015001734A (en) * | 2013-06-14 | 2015-01-05 | 吉村 徹三 | Method of manufacturing self-alignment optical coupling self-organization waveguide |
US20150048907A1 (en) * | 2013-08-13 | 2015-02-19 | Keyssa, Inc. | Contactless communication unit connector assemblies |
US20150117813A1 (en) * | 2013-10-28 | 2015-04-30 | Futurewei Technologies, Inc. | Mode Size Adjusting For Edge Coupling Devices |
US20150198767A1 (en) * | 2014-01-13 | 2015-07-16 | Cisco Technology, Inc. | Universal Waveguide Index Translator |
US9426435B2 (en) | 2010-08-12 | 2016-08-23 | Octrolix Bv | Scanning laser projector |
US9453962B2 (en) | 2010-08-12 | 2016-09-27 | Octrolix Bv | Beam combiner |
WO2017059445A1 (en) * | 2015-10-02 | 2017-04-06 | The Arizona Board Of Regents On Behalf Of The University Of Arizona | Fabrication of optical interconnect structures for a photonic integrated circuit |
US9939582B2 (en) * | 2011-04-21 | 2018-04-10 | Lionix International Bv | Layer having a non-linear taper and method of fabrication |
US20190086620A1 (en) * | 2016-05-17 | 2019-03-21 | Wuhan Telecommunication Devices Co., Ltd. | Planar optical waveguide structure, and coupling structure thereof and coupling method thereof |
Citations (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4087159A (en) * | 1974-09-20 | 1978-05-02 | Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. | Self imaging system using a waveguide |
JPS59222820A (en) * | 1983-06-01 | 1984-12-14 | Matsushita Electric Ind Co Ltd | Optical integrated circuit |
US4571080A (en) * | 1981-11-09 | 1986-02-18 | Thomson-Csf | Michelson interferometer with a photorefractive mirror |
US4571377A (en) * | 1984-01-23 | 1986-02-18 | Battelle Memorial Institute | Photopolymerizable composition containing a photosensitive donor and photoinitiating acceptor |
US4666236A (en) * | 1982-08-10 | 1987-05-19 | Omron Tateisi Electronics Co. | Optical coupling device and method of producing same |
US4711514A (en) * | 1985-01-11 | 1987-12-08 | Hughes Aircraft Company | Product of and process for forming tapered waveguides |
EP0262409A2 (en) * | 1986-08-29 | 1988-04-06 | Fujitsu Limited | An optical bus type communication system |
EP0358476A2 (en) * | 1988-09-08 | 1990-03-14 | Akzo Nobel N.V. | Integrated optic components |
EP0386958A1 (en) * | 1989-03-09 | 1990-09-12 | AT&T Corp. | Dual rail dilated switching networks |
JPH02281047A (en) * | 1989-04-21 | 1990-11-16 | Agency Of Ind Science & Technol | Complex thin film, its production and thin film of electronic optical element consisting of the same thin film |
US5028105A (en) * | 1989-12-21 | 1991-07-02 | Galileo Electro-Optics Corporation | Photorefractive effect in bulk glass and devices made therefrom |
WO1991010149A1 (en) * | 1989-12-26 | 1991-07-11 | Allied-Signal Inc. | Method for forming optically active waveguides |
EP0449125A2 (en) * | 1990-03-26 | 1991-10-02 | Idemitsu Kosan Company Limited | Thin film electroluminescence device and process for production thereof |
EP0452895A1 (en) * | 1990-04-18 | 1991-10-23 | Canon Kabushiki Kaisha | Optical communication network system and communication method using the same |
EP0461719A2 (en) * | 1990-06-13 | 1991-12-18 | TELETTRA Telefonia Elettronica e Radio S.p.A. | System and device for the optical control of the coupling/uncoupling between dielectric wave guides |
EP0472296A1 (en) * | 1990-08-02 | 1992-02-26 | AT&T Corp. | High-performance packet-switched wdm ring networks with tunable lasers |
JPH04204423A (en) * | 1990-11-29 | 1992-07-24 | Matsushita Electric Ind Co Ltd | Nonlinear optical thin film and production thereof |
EP0506368A2 (en) * | 1991-03-26 | 1992-09-30 | Fujitsu Limited | Organic functional thin film, fabrication and use thereof |
EP0541303A2 (en) * | 1991-11-05 | 1993-05-12 | AT&T Corp. | Optical circulating shift register |
JPH05142599A (en) * | 1991-11-21 | 1993-06-11 | Matsushita Electric Ind Co Ltd | Wavelength conversion element and production thereof |
JPH05265063A (en) * | 1992-03-19 | 1993-10-15 | Fujitsu Ltd | Production of organic function film |
US5292620A (en) * | 1988-01-15 | 1994-03-08 | E. I. Du Pont De Nemours And Company | Optical waveguide devices, elements for making the devices and methods of making the devices and elements |
GB2272306A (en) * | 1992-11-09 | 1994-05-11 | Fujitsu Ltd | Coupling optical waveguides by fusion or photosensitive monomer-polymer compositions |
EP0617314A1 (en) * | 1992-09-10 | 1994-09-28 | Fujitsu Limited | Optical circuit system and its constituents |
US5439647A (en) * | 1994-02-25 | 1995-08-08 | Fiberchem, Inc. | Chip level waveguide sensor |
US5452118A (en) * | 1993-04-20 | 1995-09-19 | Spire Corporation | Optical heterodyne receiver for fiber optic communications system |
US5460907A (en) * | 1990-10-26 | 1995-10-24 | International Business Machines Corporation | Photorefractive materials |
-
1996
- 1996-08-09 US US08/694,705 patent/US5854868A/en not_active Expired - Lifetime
Patent Citations (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4087159A (en) * | 1974-09-20 | 1978-05-02 | Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. | Self imaging system using a waveguide |
US4571080A (en) * | 1981-11-09 | 1986-02-18 | Thomson-Csf | Michelson interferometer with a photorefractive mirror |
US4666236A (en) * | 1982-08-10 | 1987-05-19 | Omron Tateisi Electronics Co. | Optical coupling device and method of producing same |
JPS59222820A (en) * | 1983-06-01 | 1984-12-14 | Matsushita Electric Ind Co Ltd | Optical integrated circuit |
US4571377A (en) * | 1984-01-23 | 1986-02-18 | Battelle Memorial Institute | Photopolymerizable composition containing a photosensitive donor and photoinitiating acceptor |
US4711514A (en) * | 1985-01-11 | 1987-12-08 | Hughes Aircraft Company | Product of and process for forming tapered waveguides |
EP0262409A2 (en) * | 1986-08-29 | 1988-04-06 | Fujitsu Limited | An optical bus type communication system |
US5292620A (en) * | 1988-01-15 | 1994-03-08 | E. I. Du Pont De Nemours And Company | Optical waveguide devices, elements for making the devices and methods of making the devices and elements |
EP0358476A2 (en) * | 1988-09-08 | 1990-03-14 | Akzo Nobel N.V. | Integrated optic components |
EP0386958A1 (en) * | 1989-03-09 | 1990-09-12 | AT&T Corp. | Dual rail dilated switching networks |
JPH02281047A (en) * | 1989-04-21 | 1990-11-16 | Agency Of Ind Science & Technol | Complex thin film, its production and thin film of electronic optical element consisting of the same thin film |
US5028105A (en) * | 1989-12-21 | 1991-07-02 | Galileo Electro-Optics Corporation | Photorefractive effect in bulk glass and devices made therefrom |
WO1991010149A1 (en) * | 1989-12-26 | 1991-07-11 | Allied-Signal Inc. | Method for forming optically active waveguides |
EP0449125A2 (en) * | 1990-03-26 | 1991-10-02 | Idemitsu Kosan Company Limited | Thin film electroluminescence device and process for production thereof |
EP0452895A1 (en) * | 1990-04-18 | 1991-10-23 | Canon Kabushiki Kaisha | Optical communication network system and communication method using the same |
EP0461719A2 (en) * | 1990-06-13 | 1991-12-18 | TELETTRA Telefonia Elettronica e Radio S.p.A. | System and device for the optical control of the coupling/uncoupling between dielectric wave guides |
EP0472296A1 (en) * | 1990-08-02 | 1992-02-26 | AT&T Corp. | High-performance packet-switched wdm ring networks with tunable lasers |
US5460907A (en) * | 1990-10-26 | 1995-10-24 | International Business Machines Corporation | Photorefractive materials |
JPH04204423A (en) * | 1990-11-29 | 1992-07-24 | Matsushita Electric Ind Co Ltd | Nonlinear optical thin film and production thereof |
EP0506368A2 (en) * | 1991-03-26 | 1992-09-30 | Fujitsu Limited | Organic functional thin film, fabrication and use thereof |
EP0541303A2 (en) * | 1991-11-05 | 1993-05-12 | AT&T Corp. | Optical circulating shift register |
JPH05142599A (en) * | 1991-11-21 | 1993-06-11 | Matsushita Electric Ind Co Ltd | Wavelength conversion element and production thereof |
JPH05265063A (en) * | 1992-03-19 | 1993-10-15 | Fujitsu Ltd | Production of organic function film |
EP0617314A1 (en) * | 1992-09-10 | 1994-09-28 | Fujitsu Limited | Optical circuit system and its constituents |
GB2272306A (en) * | 1992-11-09 | 1994-05-11 | Fujitsu Ltd | Coupling optical waveguides by fusion or photosensitive monomer-polymer compositions |
US5452118A (en) * | 1993-04-20 | 1995-09-19 | Spire Corporation | Optical heterodyne receiver for fiber optic communications system |
US5439647A (en) * | 1994-02-25 | 1995-08-08 | Fiberchem, Inc. | Chip level waveguide sensor |
Non-Patent Citations (22)
Title |
---|
"Two-wavelength photorefractive dynamic optical interconnect"; R. McRuer et al.; Optics Letters; Nov. 1, 1989; 1, No. 21, Washington, DC; pp. 1174-1176. |
Applied Physics Letters, vol. 62, No. 24, 14 Jun. 1993, pp. 3068 3070, XP000380957 Tumolillo Jr T A et al: Multilevel Registered Polymeric Mach Zehnder Intensity Modulator Array . * |
Applied Physics Letters, vol. 62, No. 24, 14 Jun. 1993, pp. 3068-3070, XP000380957 Tumolillo Jr T A et al: "Multilevel Registered Polymeric Mach-Zehnder Intensity Modulator Array". |
Japanese Journal Of Applied Physics, vol. 32 No. 12a, Dec. 1993, Tokyo JP, pp. L1746 L1749, XP002015570 K. Tajima: All Optical Switch Off Time . . . . * |
Japanese Journal Of Applied Physics, vol. 32 No. 12a, Dec. 1993, Tokyo JP, pp. L1746-L1749, XP002015570 K. Tajima: "All-Optical Switch-Off Time . . . ". |
One World Through Communications, Florence, May 4, 8, 1992 vol. 1 Of 3, 1 Jan. 1992, Institute Of Electrical And Electronics Engineers, pp. 459 467, XP000300076 Jun Nishikido et al: Optical Routing Control Using Coherent Pattern Matching Circuit For Photonic Self Routing Switch . * |
One World Through Communications, Florence, May 4,-8, 1992 vol. 1 Of 3, 1 Jan. 1992, Institute Of Electrical And Electronics Engineers, pp. 459-467, XP000300076 Jun Nishikido et al: "Optical Routing Control Using Coherent Pattern-Matching Circuit For Photonic Self-Routing Switch". |
Proceedings Of The 5th Toyota Conference On Nonlinear Optical Materials, 6 9 Oct. 1991, Aichi Ken Japan, pp. 317 322, XP002016713 Tetsuzo Yoshimura et al: One Dimensional Conjugated Polymer Film And Quantum Well Fabrication By Molecular Layer Deposition (MLD) And Chemical Vapor Deposition . * |
Proceedings Of The 5th Toyota Conference On Nonlinear Optical Materials, 6-9 Oct. 1991, Aichi-Ken Japan, pp. 317-322, XP002016713 Tetsuzo Yoshimura et al: "One-Dimensional Conjugated Polymer Film And Quantum Well Fabrication By Molecular Layer Deposition (MLD) And Chemical Vapor Deposition". |
Proceedings Of The European Conference On Optical Communication (EC, Amsterdam, Sep. 16 20, 1990 Post Deadline Papers, vol. 3, 16 Sep. 1990, PTT Nederland And Philips Research Laboratories, pp. 1015 1018, XP000436529 Erman M et al: INP Monolithically Integrated Passive Access Node Switches For Very High Speed Optical Loop . * |
Proceedings Of The European Conference On Optical Communication (EC, Amsterdam, Sep. 16-20, 1990 Post Deadline Papers, vol. 3, 16 Sep. 1990, PTT Nederland And Philips Research Laboratories, pp. 1015-1018, XP000436529 Erman M et al: "INP Monolithically Integrated Passive Access Node Switches For Very High Speed Optical Loop". |
Thin Solid Films, vol. 244, No. 1/02, 15 May 1994, pp. 1007 1011, XP000468018 Hodge P et al: Efficient Second Harmonic Generation From All Polymeric Langmuir Blodgett AB Films Containing Up To 600 Layers . * |
Thin Solid Films, vol. 244, No. 1/02, 15 May 1994, pp. 1007-1011, XP000468018 Hodge P et al: "Efficient Second-Harmonic Generation From All-Polymeric Langmuir-Blodgett AB Films Containing Up To 600 Layers". |
Two wavelength photorefractive dynamic optical interconnect ; R. McRuer et al.; Optics Letters ; Nov. 1, 1989; 1, No. 21, Washington, DC; pp. 1174 1176. * |
WO 90/10884 A (Pacific Bell). "Improved Fiber Optic Distribution System", published Sep. 20, 1990. |
WO 90/10884 A (Pacific Bell). Improved Fiber Optic Distribution System , published Sep. 20, 1990. * |
WO 93/07179 A (Institut Fur Neue Materialien Gemeinnutzige). "Composite Materials Containing Nanoscalar Particles, Process For Producing Them And Their Use For Optical Components", published Apr. 15, 1993. |
WO 93/07179 A (Institut Fur Neue Materialien Gemeinnutzige). Composite Materials Containing Nanoscalar Particles, Process For Producing Them And Their Use For Optical Components , published Apr. 15, 1993. * |
WO 93/08574 A (British Telecommunications Public Limited Company). "Optical Memory", published Apr. 29, 1993. |
WO 93/08574 A (British Telecommunications Public Limited Company). Optical Memory , published Apr. 29, 1993. * |
Zayats A V et al: "Optical transistions and nonlinearities in amorphous Si/SiO/sub 2/quantum structures" chapters I & II * p. 309 -p. 320*, SPIE vol. 2139 (1994). |
Zayats A V et al: Optical transistions and nonlinearities in amorphous Si/SiO/sub 2/quantum structures chapters I & II * p. 309 p. 320*, SPIE vol. 2139 (1994). * |
Cited By (133)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6160927A (en) * | 1997-03-13 | 2000-12-12 | Alcatel | Method of fabricating integrated optical circuits which minimizes optical coupling losses |
US6217231B1 (en) * | 1997-04-23 | 2001-04-17 | Fujitsu Limited | Optical fiber assembly, optical module including an optical fiber assembly, and a manufacturing process thereof |
US6157759A (en) * | 1997-07-03 | 2000-12-05 | Samsung Electronics Co., Ltd. | Optical fiber passive alignment apparatus and method therefor |
US6442315B1 (en) * | 1997-11-18 | 2002-08-27 | Samsung Electronics Co., Ltd. | Optical waveguide chip and method of formation thereof |
US6278523B1 (en) * | 1998-02-13 | 2001-08-21 | Centre National De La Recherche Scientifique-Cnrs | Optical sensor on a silicon substrate and application for the in situ measurement of a fluorescent marker in the small bronchia |
US6684007B2 (en) | 1998-10-09 | 2004-01-27 | Fujitsu Limited | Optical coupling structures and the fabrication processes |
US6690845B1 (en) | 1998-10-09 | 2004-02-10 | Fujitsu Limited | Three-dimensional opto-electronic modules with electrical and optical interconnections and methods for making |
US6343171B1 (en) | 1998-10-09 | 2002-01-29 | Fujitsu Limited | Systems based on opto-electronic substrates with electrical and optical interconnections and methods for making |
US6706546B2 (en) | 1998-10-09 | 2004-03-16 | Fujitsu Limited | Optical reflective structures and method for making |
US6785447B2 (en) | 1998-10-09 | 2004-08-31 | Fujitsu Limited | Single and multilayer waveguides and fabrication process |
US6845184B1 (en) | 1998-10-09 | 2005-01-18 | Fujitsu Limited | Multi-layer opto-electronic substrates with electrical and optical interconnections and methods for making |
US6611635B1 (en) | 1998-10-09 | 2003-08-26 | Fujitsu Limited | Opto-electronic substrates with electrical and optical interconnections and methods for making |
WO2000060392A1 (en) * | 1999-03-31 | 2000-10-12 | Zenastra Photonics Inc. | Hybrid integrated opto-electronic circuits and method of making |
US6445837B1 (en) | 1999-03-31 | 2002-09-03 | Nu-Wave Photonics, Inc. | Hybrid opto-electronic circuits and method of making |
US6917725B2 (en) | 1999-05-17 | 2005-07-12 | Chiaro Networks Ltd. | Modulated light source |
US6309803B1 (en) * | 1999-07-01 | 2001-10-30 | Lumenon, Innovative Lightwave Technology, Inc. | On-substrate cleaving of sol-gel waveguide |
US6366720B1 (en) | 1999-07-09 | 2002-04-02 | Chiaro Networks Ltd. | Integrated optics beam deflector assemblies utilizing side mounting blocks for precise alignment |
US6363185B2 (en) | 1999-07-09 | 2002-03-26 | Chiaro Networks Ltd. | Integrated optics beam deflectors |
US6459833B2 (en) | 1999-07-09 | 2002-10-01 | Chiaro Networks Ltd. | Integrated optics beam deflectors |
US6463196B2 (en) | 1999-07-09 | 2002-10-08 | Chiaro Networks Ltd. | Integrated optics beam deflectors |
US6370302B2 (en) | 1999-07-09 | 2002-04-09 | Chiaro Networks Ltd. | Integrated optics beam deflectors |
US6643435B2 (en) | 1999-07-09 | 2003-11-04 | Chiaro Networks Ltd. | Integrated optics beam deflectors |
US6504978B2 (en) | 1999-07-09 | 2003-01-07 | Chiaro Networks, Ltd | Integrated optics beam deflectors |
US6647178B2 (en) | 1999-07-09 | 2003-11-11 | Chiaro Networks Ltd. | Method for producing an optical device and the optical device produced thereby |
US6377733B2 (en) | 1999-07-09 | 2002-04-23 | Chiaro Networks Ltd | Integrated optics beam deflectors |
US6654524B2 (en) | 1999-07-09 | 2003-11-25 | Chiaro Networks Ltd. | Method for accurately mounting an optical element in an optical assembly |
US6326939B1 (en) | 1999-09-24 | 2001-12-04 | Ronald S. Smith | Optical waveguide system for a flat-panel display |
US6669801B2 (en) | 2000-01-21 | 2003-12-30 | Fujitsu Limited | Device transfer method |
US6368775B1 (en) * | 2000-01-27 | 2002-04-09 | Sandia Corporation | 3-D photo-patterning of refractive index structures in photosensitive thin film materials |
US7058245B2 (en) | 2000-04-04 | 2006-06-06 | Waveguide Solutions, Inc. | Integrated optical circuits |
US6855478B2 (en) | 2000-06-15 | 2005-02-15 | 3M Innovative Properties Company | Microfabrication of organic optical elements |
US6852766B1 (en) | 2000-06-15 | 2005-02-08 | 3M Innovative Properties Company | Multiphoton photosensitization system |
US20030194651A1 (en) * | 2000-06-15 | 2003-10-16 | De Voe Robert J. | Multicolor imaging using multiphoton photochemical processes |
US7091255B2 (en) | 2000-06-15 | 2006-08-15 | 3M Innovative Properties Company | Multiphoton photosensitization system |
WO2001096915A3 (en) * | 2000-06-15 | 2002-04-25 | 3M Innovative Properties Co | Microfabrication of organic optical elements |
US8530118B2 (en) | 2000-06-15 | 2013-09-10 | 3M Innovative Properties Company | Multiphoton curing to provide encapsulated optical elements |
US20050208431A1 (en) * | 2000-06-15 | 2005-09-22 | Devoe Robert J | Multiphoton curing to provide encapsulated optical elements |
US20050054744A1 (en) * | 2000-06-15 | 2005-03-10 | 3M Innovative Properties Company | Multiphoton photosensitization system |
KR100810546B1 (en) | 2000-06-15 | 2008-03-18 | 쓰리엠 이노베이티브 프로퍼티즈 캄파니 | Method of fabricating three dimensional optical elements |
US7026103B2 (en) | 2000-06-15 | 2006-04-11 | 3M Innovative Properties Company | Multicolor imaging using multiphoton photochemical processes |
US20040042937A1 (en) * | 2000-06-15 | 2004-03-04 | Bentsen James G | Process for producing microfluidic articles |
US7060419B2 (en) | 2000-06-15 | 2006-06-13 | 3M Innovative Properties Company | Process for producing microfluidic articles |
US7790353B2 (en) | 2000-06-15 | 2010-09-07 | 3M Innovative Properties Company | Multidirectional photoreactive absorption method |
US7014988B2 (en) | 2000-06-15 | 2006-03-21 | 3M Innovative Properties Company | Multiphoton curing to provide encapsulated optical elements |
WO2001096915A2 (en) * | 2000-06-15 | 2001-12-20 | 3M Innovative Properties Company | Microfabrication of organic optical elements |
US7601484B2 (en) | 2000-06-15 | 2009-10-13 | 3M Innovative Properties Company | Multiphoton curing to provide encapsulated optical elements |
US7166409B2 (en) | 2000-06-15 | 2007-01-23 | 3M Innovative Properties Company | Multipass multiphoton absorption method and apparatus |
US20040126694A1 (en) * | 2000-06-15 | 2004-07-01 | Devoe Robert J. | Microfabrication of organic optical elements |
US7348261B2 (en) * | 2000-07-27 | 2008-03-25 | International Business Machines Corporation | Wafer scale thin film package |
US20030199121A1 (en) * | 2000-07-27 | 2003-10-23 | Caletka David Vincent | Wafer scale thin film package |
US6976792B1 (en) * | 2000-09-26 | 2005-12-20 | International Business Machines Corporation | Optical fiber space transformation |
US20030118310A1 (en) * | 2000-10-26 | 2003-06-26 | Steinberg Dan A. | Variable width waveguide for mode-matching and method for making |
US7068870B2 (en) | 2000-10-26 | 2006-06-27 | Shipley Company, L.L.C. | Variable width waveguide for mode-matching and method for making |
US20040017976A1 (en) * | 2000-12-14 | 2004-01-29 | Hui Luo | Optical waveguide termination with vertical and horizontal mode shaping |
US7251406B2 (en) | 2000-12-14 | 2007-07-31 | Shipley Company, L.L.C. | Optical waveguide termination with vertical and horizontal mode shaping |
US6987919B2 (en) | 2000-12-14 | 2006-01-17 | Shipley Company, L.L.C. | Optical waveguide termination with vertical and horizontal mode shaping |
US20050202554A1 (en) * | 2000-12-14 | 2005-09-15 | Hui Luo | Optical waveguide termination with vertical and horizontal mode shaping |
US20020076145A1 (en) * | 2000-12-15 | 2002-06-20 | Lightwave Microsystems Corporation | Optical devices for controlling insertion loss |
US6823103B2 (en) | 2000-12-15 | 2004-11-23 | Lightwave Microsystems Corporation | Optical devices for controlling insertion loss |
EP1760504A2 (en) * | 2001-02-14 | 2007-03-07 | Northrop Grumman Corporation | Integrated optoelectronic device and method for making same |
EP1271210A1 (en) * | 2001-02-14 | 2003-01-02 | TRW Inc. | Integrated optoelectronic device and method for making same |
EP1760504A3 (en) * | 2001-02-14 | 2009-05-27 | Northrop Grumman Corporation | Integrated optoelectronic device and method for making same |
US6608950B2 (en) | 2001-02-14 | 2003-08-19 | Northrop Grumman Corporation | Integrated optoelectronic device and method for making same |
US7158701B2 (en) | 2001-02-21 | 2007-01-02 | Shipley Company, L.L.C. | Method for making optical devices with a moving mask and optical devices made thereby |
US20030002793A1 (en) * | 2001-02-21 | 2003-01-02 | Dautartas Mindaugas F. | Method for making optical devices with a moving mask and optical devices made thereby |
US20030068149A1 (en) * | 2001-03-30 | 2003-04-10 | Dautartas Mindaugas F. | Tapered optical fiber for coupling to diffused optical waveguides |
US6912345B2 (en) | 2001-03-30 | 2005-06-28 | Shipley Company, L.L.C. | Tapered optical fiber for coupling to diffused optical waveguides |
US20040126076A1 (en) * | 2001-04-30 | 2004-07-01 | Tony Mule | Backplane, printed wiring board, and/or multi-chip module-level optical interconnect layer having embedded air-gap technologies and methods of fabrication |
US6788867B2 (en) | 2001-04-30 | 2004-09-07 | Georgia Tech Research Corp. | Backplane, printed wiring board, and/or multi-chip module-level optical interconnect layer having embedded air-gap technologies and methods of fabrication |
US20040012872A1 (en) * | 2001-06-14 | 2004-01-22 | Fleming Patrick R | Multiphoton absorption method using patterned light |
US6710366B1 (en) | 2001-08-02 | 2004-03-23 | Ultradots, Inc. | Nanocomposite materials with engineered properties |
US6961499B2 (en) * | 2001-08-02 | 2005-11-01 | Ultradots, Inc. | Optical devices with engineered nonlinear nanocomposite materials |
US6819845B2 (en) | 2001-08-02 | 2004-11-16 | Ultradots, Inc. | Optical devices with engineered nonlinear nanocomposite materials |
US7358525B2 (en) | 2001-08-02 | 2008-04-15 | Ultradots, Inc. | Quantum dots of group IV semiconductor materials |
US7005669B1 (en) | 2001-08-02 | 2006-02-28 | Ultradots, Inc. | Quantum dots, nanocomposite materials with quantum dots, devices with quantum dots, and related fabrication methods |
US6794265B2 (en) | 2001-08-02 | 2004-09-21 | Ultradots, Inc. | Methods of forming quantum dots of Group IV semiconductor materials |
US7020372B2 (en) | 2001-08-02 | 2006-03-28 | Ultradots, Inc. | Optical devices with engineered nonlinear nanocomposite materials |
US7402832B2 (en) | 2001-08-02 | 2008-07-22 | Ultradots, Inc. | Quantum dots of group IV semiconductor materials |
US6898343B2 (en) | 2001-08-17 | 2005-05-24 | Fujitsu Limited | Optical switching apparatus and method for fabricating |
US20030035632A1 (en) * | 2001-08-17 | 2003-02-20 | Alexei Glebov | Optical switching apparatus with adiabatic coupling to optical fiber |
US6922508B2 (en) | 2001-08-17 | 2005-07-26 | Fujitsu Limited | Optical switching apparatus with adiabatic coupling to optical fiber |
US6787868B1 (en) | 2001-09-25 | 2004-09-07 | Lightwave Microsystems Corporation | Microlenses for integrated optical devices |
US6813023B2 (en) | 2002-01-03 | 2004-11-02 | Chiaro Nerwork Ltd. | Automatic optical inter-alignment of two linear arrangements |
EP1336894A3 (en) * | 2002-02-19 | 2004-12-15 | Omron Corporation | An optical wave guide, an optical component and an optical switch |
EP1336894A2 (en) * | 2002-02-19 | 2003-08-20 | Omron Corporation | An optical wave guide, an optical component and an optical switch |
US6735363B1 (en) | 2002-03-08 | 2004-05-11 | Lightwave Microsystems Corporation | Waveguide-grating router with output tapers configured to provide a passband that is optimized for each channel individually |
US20050117845A1 (en) * | 2002-04-26 | 2005-06-02 | Ibiden, Co., Ltd. | Optical transmission structural body, optical waveguide, optical waveguide formation method, and optical wiring connection body |
US8078024B2 (en) | 2002-04-26 | 2011-12-13 | Ibiden Co., Ltd. | Optical transmission structural body, optical waveguide, optical waveguide formation method, and optical wiring connection body |
US7933480B2 (en) | 2002-04-26 | 2011-04-26 | Ibiden Co., Ltd. | Optical transmission structural body, optical waveguide, optical waveguide formation method, and optical wiring connection body |
US20090285531A1 (en) * | 2002-04-26 | 2009-11-19 | Ibiden, Co., Ltd. | Optical transmission structural body, optical waveguide, optical waveguide formation method, and optical wiring connection body |
US7574085B2 (en) | 2002-04-26 | 2009-08-11 | Ibiden Co., Ltd. | Optical transmission structural body, optical waveguide, optical waveguide formation method, and optical wiring connection body |
US7418174B2 (en) | 2002-04-26 | 2008-08-26 | Ibiden Co., Ltd. | Optical transmission structural body, optical waveguide, optical waveguide formation method, and optical wiring connection body |
US20070269165A1 (en) * | 2002-04-26 | 2007-11-22 | Ibiden, Co., Ltd. | Optical transmission structural body, optical waveguide, optical waveguide formation method, and optical wiring connection body |
US20040013371A1 (en) * | 2002-07-18 | 2004-01-22 | Chiaro Networks Ltd. | Optical assembly and method for manufacture thereof |
US6886994B2 (en) | 2002-07-18 | 2005-05-03 | Chiaro Networks Ltd. | Optical assembly and method for manufacture thereof |
US6853778B2 (en) * | 2002-09-18 | 2005-02-08 | Agilent Technologies, Inc. | Optical module with alignment waveguide |
US20040052464A1 (en) * | 2002-09-18 | 2004-03-18 | Helbing Rene P. | Optical module with alignment waveguide |
US20040126056A1 (en) * | 2002-12-26 | 2004-07-01 | Shigenori Aoki | Optical switches having a common waveguide for improved switch performance |
US6819818B2 (en) | 2002-12-26 | 2004-11-16 | Fujitsu Limited | Optical switches having a common waveguide for improved switch performance |
US20040178522A1 (en) * | 2003-01-24 | 2004-09-16 | Nitto Denko Corporation | Process of manufacturing optical waveguide and connection structure of optical devices |
EP1441243A1 (en) * | 2003-01-24 | 2004-07-28 | Nitto Denko Corporation | Process of manufacturing optical waveguide and connection structure of optical devices |
US7641821B2 (en) * | 2003-01-24 | 2010-01-05 | Nitto Denko Corporation | Process of manufacturing optical waveguide and connection structure of optical devices |
CN100339732C (en) * | 2003-01-24 | 2007-09-26 | 日东电工株式会社 | Method for manufacturing optical waveguide and connecting structure of optical device |
US7065277B2 (en) * | 2003-07-28 | 2006-06-20 | Grot Annette C | Optical alignment of optical waveguides |
US20050025428A1 (en) * | 2003-07-28 | 2005-02-03 | Grot Annette C. | Optical alignment of optical waveguides |
US20060083461A1 (en) * | 2004-01-21 | 2006-04-20 | Hitachi Cable, Ltd. | Multimode wavelength multiplexing optical transceiver |
FR2873454A1 (en) * | 2004-07-26 | 2006-01-27 | E Klo Sarl | Photoreceptor component, has waveguides interposed between photodiodes and optical fiber, where waveguides and photodiodes are formed on same substrate and each waveguide has end partially covering active surface of respective photodiode |
EP1621906A1 (en) | 2004-07-26 | 2006-02-01 | E-Klo | Device including a flush-mounted optoelectronic element covered by a waveguide |
US20090323508A1 (en) * | 2007-06-28 | 2009-12-31 | Tatsuya Tomura | Photosensitized composite material, three-dimensional memory material and recording medium, optical power limiting material and element, and photocuring material and stereolithography system, and fluorescent material for multiphoton fluorescence microscope and multiphoton fluorescence microscope |
US8192917B2 (en) | 2007-06-28 | 2012-06-05 | Ricoh Company, Ltd. | Material for multiphoton fluorescence microscope and multiphoton fluorescence microscope |
US20100098379A1 (en) * | 2008-10-20 | 2010-04-22 | Commissariat A L'energie Atomique | Structure and method for aligning an optical fiber on an optical waveguide |
US8666211B2 (en) * | 2008-10-20 | 2014-03-04 | Commissariat A L'energie Atomique | Structure and method for aligning an optical fiber on an optical waveguide |
US8515217B2 (en) * | 2009-09-02 | 2013-08-20 | Alcatel Lucent | Vertical optically emitting photonic devices with electronic steering capability |
US20110052114A1 (en) * | 2009-09-02 | 2011-03-03 | Alcatel-Lucent Usa Inc. | Vertical optically emitting photonic devices with electronic steering capability |
US9453962B2 (en) | 2010-08-12 | 2016-09-27 | Octrolix Bv | Beam combiner |
US9426435B2 (en) | 2010-08-12 | 2016-08-23 | Octrolix Bv | Scanning laser projector |
US9040919B2 (en) * | 2010-10-25 | 2015-05-26 | Thomas E. Darcie | Photomixer-waveguide coupling tapers |
US20120097850A1 (en) * | 2010-10-25 | 2012-04-26 | Uvic Industry Partnerships Inc. | Photomixer-waveguide coupling tapers |
US9939582B2 (en) * | 2011-04-21 | 2018-04-10 | Lionix International Bv | Layer having a non-linear taper and method of fabrication |
US20120288278A1 (en) * | 2011-05-09 | 2012-11-15 | Huawei Technologies Co., Ltd. | Passive optical splitter and passive optical network system |
JP2015001734A (en) * | 2013-06-14 | 2015-01-05 | 吉村 徹三 | Method of manufacturing self-alignment optical coupling self-organization waveguide |
US9571161B2 (en) * | 2013-08-13 | 2017-02-14 | Keyssa, Inc. | Contactless communication unit connector assemblies |
US20150048907A1 (en) * | 2013-08-13 | 2015-02-19 | Keyssa, Inc. | Contactless communication unit connector assemblies |
US10122059B2 (en) | 2013-08-13 | 2018-11-06 | Keyssa, Inc. | Contactless communication unit connector assemblies |
WO2015065940A1 (en) * | 2013-10-28 | 2015-05-07 | Huawei Technologies Co., Ltd. | Mode size adjusting for edge coupling devices |
US9638857B2 (en) * | 2013-10-28 | 2017-05-02 | Futurewei Technologies, Inc. | Mode size adjusting for edge coupling devices using multiple inverse tapers |
US20150117813A1 (en) * | 2013-10-28 | 2015-04-30 | Futurewei Technologies, Inc. | Mode Size Adjusting For Edge Coupling Devices |
US9304256B2 (en) * | 2014-01-13 | 2016-04-05 | Cisco Technology, Inc. | Universal waveguide index translator |
US20150198767A1 (en) * | 2014-01-13 | 2015-07-16 | Cisco Technology, Inc. | Universal Waveguide Index Translator |
WO2017059445A1 (en) * | 2015-10-02 | 2017-04-06 | The Arizona Board Of Regents On Behalf Of The University Of Arizona | Fabrication of optical interconnect structures for a photonic integrated circuit |
US11402752B2 (en) | 2015-10-02 | 2022-08-02 | Arizona Board Of Regents On Behalf Of The University Of Arizona | Fabrication of optical interconnect structures for a photonic integrated circuit |
US20190086620A1 (en) * | 2016-05-17 | 2019-03-21 | Wuhan Telecommunication Devices Co., Ltd. | Planar optical waveguide structure, and coupling structure thereof and coupling method thereof |
US10656350B2 (en) * | 2016-05-17 | 2020-05-19 | Wuhan Telecommunication Devices Co., Ltd. | Planar optical waveguide structure, and coupling structure thereof and coupling method thereof |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5854868A (en) | Optical device and light waveguide integrated circuit | |
US6826333B2 (en) | Optical waveguides and grating structures fabricated using polymeric dielectric compositions | |
US7050691B2 (en) | Optical waveguide and method of manufacturing the same | |
US5499732A (en) | Method for fabricating an optical device | |
US6767756B2 (en) | Method of manufacturing tapered optical waveguide | |
US7215862B2 (en) | Process for producing optical waveguide | |
EP1662283B1 (en) | Process for producing a film optical waveguide | |
US6037105A (en) | Optical waveguide device fabricating method | |
CN1193117A (en) | Low-consumption optical active device and mfg. method thereof | |
JP2005275405A (en) | Optical structure and method for connecting optical circuit board components | |
US8383327B2 (en) | Method for producing an electro-optical printed circuit board with optical waveguide structures | |
JP2000047044A (en) | Optical signal transmission system and its manufacture | |
JPH09218321A (en) | Method for integrating optical device and optical waveguide | |
US6445837B1 (en) | Hybrid opto-electronic circuits and method of making | |
US5879571A (en) | Lensed planar optical waveguides for packaging opto-electronic devices | |
JP2004279687A (en) | Optoelectronic microsystem, waveguide element, variable well optical ic and optoelectronic micro/nanosystem | |
JP2001116944A (en) | Method for adding optical coupler to plane optical circuit and plane optical circuit | |
JP3690646B2 (en) | Connection structure between optical waveguide circuit board and optical fiber array | |
Deng et al. | Self-aligned single-mode polymer waveguide interconnections for efficient chip-to-chip optical coupling | |
JPS6396609A (en) | Optical connecting circuit | |
JP2000147283A (en) | Optical waveguide circuit | |
US20050063660A1 (en) | Optical element and method of fabrication thereof | |
US6956997B2 (en) | Methods for fabricating an aligned optoelectronic waveguide circuit | |
US20040146248A1 (en) | Integrated optic modules using embedded fibers and processes of fabrication thereof | |
JP2001159718A (en) | Array waveguide type wavelength multiplexing/ demultiplexing circuit |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: FUJITSU LIMITED, JAPAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:YOSHIMURA, TETSUZO;SOTOYAMA, WATARU;REEL/FRAME:008224/0885 Effective date: 19960925 |
|
STCF | Information on status: patent grant |
Free format text: PATENTED CASE |
|
FEPP | Fee payment procedure |
Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
|
FPAY | Fee payment |
Year of fee payment: 4 |
|
AS | Assignment |
Owner name: DOSA ADVANCES LLC, NEVADA Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:FUJITSU LIMITED;REEL/FRAME:016745/0196 Effective date: 20050331 |
|
FPAY | Fee payment |
Year of fee payment: 8 |
|
FEPP | Fee payment procedure |
Free format text: PAYER NUMBER DE-ASSIGNED (ORIGINAL EVENT CODE: RMPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
|
FPAY | Fee payment |
Year of fee payment: 12 |