|Publication number||US6329606 B1|
|Application number||US 09/203,826|
|Publication date||Dec 11, 2001|
|Filing date||Dec 1, 1998|
|Priority date||Apr 24, 1996|
|Also published as||CA2252379A1, DE69705222D1, DE69705222T2, EP0908076A1, EP0908076B1, US5852870, WO1997040651A1|
|Publication number||09203826, 203826, US 6329606 B1, US 6329606B1, US-B1-6329606, US6329606 B1, US6329606B1|
|Inventors||Bruce J. Freyman, John Briar, Jack C. Maxcy|
|Original Assignee||Amkor Technology, Inc.|
|Export Citation||BiBTeX, EndNote, RefMan|
|Patent Citations (28), Non-Patent Citations (7), Referenced by (122), Classifications (54), Legal Events (11)|
|External Links: USPTO, USPTO Assignment, Espacenet|
This application relates to commonly assigned U.S. patent application Ser. No. 08/214,339 filed Mar. 16, 1994 in the name of Bruce J. Freyman et al., now U.S. Pat. No. 5,635,671, issued on Jun. 3, 1997, and the commonly assigned and concurrently filed U.S. patent application Ser. No. 08/637,578 filed Apr. 24, 1996 in the name of Bruce J. Freyman and Robert F. Darveaux, now. U.S. Pat. No. 5,859,475, issued on Jan. 12, 1999, the disclosure of which concurrently filed application is incorporated herein by reference. It is also a divisional of 08/637,877, filed Apr. 24, 1996, now U.S. Pat. No. 5,852,870, issued on Dec. 29, 1998.
1. Field of the Invention
This invention relates to grid array semiconductor packages, including integrated circuit chips or dies, produced from an assembly of packages formed together in an elongated, connected strip using standard packaging equipment, with a maximized yield, and at a low cost.
2. Related Art
As integrated circuits have become more complex, a need has arisen for a packaged integrated circuit having a large number of high density, reliable external package connections. It is also desirable to include in a packaged integrated circuit one or more conductive layers for signal routing and provision for ground and power metallization traces. To meet these needs, the ball grid array has been developed as illustrated in FIG. 1 of the related application Ser. No. 08/214,339, now U.S. Pat. No. 5,635,671.
A typical ball grid array includes a semiconductor die, sometimes called herein an integrated circuit (IC) or chip, attached to a die attach surface on a printed circuit board (PCB) with adhesive. Electrically conductive bond pads on the die are connected by electrically conductive bond wires to electrically conductive traces and/or electrically conductive regions formed on or adjacent to the die attach surface of the substrate. Electrically conductive vias are formed through the substrate from the traces and/or regions on the die attach surface to a mounting surface of the substrate opposite the die attach surface. The electrically conductive traces formed on the mounting surface extend to solder pads formed on the mounting surface. Solder bumps are formed on each of the solder pads. The solder bumps are reflowed to attach the substrate to a larger mother board. An encapsulant such as plastic is formed to enclose the semiconductor die, the bond wires and a portion of the die attach surface of the substrate including most of the traces and/or regions. The vias are shown outside the encapsulant but can be inside the encapsulant. The encapsulant is frequently formed by injection or transfer molding or by conventional molding equipment to form the encapsulant over the die in a ball grid array. Liquid (glob top) encapsulant also can be used.
Recent related art is seen in the illustration of a wire bond TBGA (Tape Ball Grid Array) 1-Metal Microflex Circuit published by the Electronic Product Division of 3M where an IC chip is adhered to a stiffener/heatsink with a polyimide tape first surface containing metallization, wire bonded to the chip and providing conductive vias, outside of a central encapsulant over the chip and bond wires, to solder balls on an opposite surface of the tape.
Currently, molded plastic BGAs are assembled using a printed circuit board (PCB) strip containing multiple BGA (ball grid array) circuits that is rectangular in shape. A single unit BGA image is successively replicated on the PCB strip in order to maximize productivity during assembly. In this way, several BGAs are processed at the same time in many of the assembly processes. The PCB strip format also helps to reduce material handling expense in other areas of the assembly process that operate on only one site at a time.
One of the problems with procuring PCBs in strip form that have successively replicated BGA images is that the PCB vendor needs to provide 100% good units on the PCB strip so that the assembly facility does not process “bad” units. If the vendor or in-house manufacturing operation fabricates BGAs in strip form and includes a bad BGA image, all of the remaining good BGA images on the strip have to be thrown away. If the BGA assembly facility accepts bad BGA images on each strip, then the throughput of certain assembly processes is reduced because “bad” units are being processed. Also, the cost of the PCBs increases if the vendor cannot ship PCB strips that contain bad units.
An obvious method of using only “good” units in the BGA assembly process is to have the PCB vendor supply all good PCBs in single unit format instead of in a strip format. The problem with processing singles in the BGA assembly process is that almost all of the off the shelf assembly equipment used by industry today is configured to run PCBs in the strip format. The other drawback of processing single unit PCBs is that the resultant throughput of many of the assembly processes is reduced as compared to throughput in PCB strip processing.
In the manufacture of related art devices by molding operations, it is well recognized that during encapsulation and subsequent removal of a molding die section, the package encapsulant not only encloses the die and die bonds but also extends along the surface of the die-mounting substrate where a mold runner is located leading to a molten encapsulant supply pot. The excess encapsulant sometimes called “flash” or “bleed”, i.e., encapsulant other than that necessary to enclose the die and die bonds, must then be removed. However, when the excess encapsulant is peeled away from the substrate surface, the encapsulant adheres to the substrate surface, twisting the substrate and tearing or rupturing the substrate surface, thereby causing damage to the packaged device. This damage can be cosmetic (e.g. marring of the substrate surface) and/or functional (e.g. fracturing of the substrate; destruction of the electrically conductive traces on the substrate surface; tearing away of the solder mask on the substrate surface to undesirably expose, for instance, copper, and/or weakening or breaking of the seal between the encapsulant and the substrate surface).
Further, in production, it is desirable to integrally form a plurality of substrates in a strip having alignment holes that are located so as to be captured by tooling pins of a fixture, allowing the packaging process (including encapsulation) to be automated. The excess encapsulant must be removed from the strip prior to further processing since, if left attached to the strip, the excess encapsulant extends past the edge of the strip prohibiting automated handling in subsequent processes. Adherence of the excess encapsulant to the substrate during removal of the excess encapsulant may cause torquing of the strip that distorts the strip and renders the strip unusable for further processing. In the first related application, a novel degating region with noble metal plating is formed at each runner or gate location such that the molding compound (encapsulant) bonds weakly with the plated runner area on the PCB substrate allowing removal of excess encapsulant without damaging the remainder of the package assembly.
A plurality of individual grid array semiconductor packages are singulated from an assembly of packages fabricated together in the form of an elongated, connected strip using standard packaging equipment, with a maximized yield, and at a low cost. The strip assembly comprises a series of pre-tested and pre-accepted printed circuit boards mounted seriatim in apertures extending longitudinally along an elongated carrier strip. The circuit boards may comprise a semi-flexible plastic, e.g., an epoxy, and the carrier strip may comprise a metal, e.g., copper or steel.
Each of the circuit boards has an outer peripheral edge connected with an adhesive tape to an inner peripheral edge of a portion of the carrier strip bounding the apertures therein. An integrated circuit die is attached to each of the circuit boards. Each die has conductive pads that are wire bonded to bonding pads on a first surface of a corresponding one of the circuit boards. An encapsulant is molded over each die, corresponding wire bonds, and onto a portion of the first surface of the corresponding circuit board to form a protective body thereon.
Each of the circuit boards in the strip assembly includes an array of contact pads on an opposite second surface thereof, and conductive vias that extend from the contact pads to a metallization on the respective first surface thereof. A solder ball may extend from each of the contact pads to function as an input-output terminal.
When processing of the strip assembly is complete, the individual grid array packages are singulated from it by cutting through at least each circuit board around a periphery of the corresponding body of encapsulant, and in some embodiments, through the carrier strip as well. In one such embodiment, the packages are singulated from the strip assembly such that a portion of the carrier strip remains on each grid array package to function as a heat sink and a stiffener.
A better understanding of the above and other features and advantages of the present invention may be had from a consideration of the detailed description below of some exemplary embodiments thereof, particularly if such consideration is made in conjunction with the appended drawings.
FIG. 1 is a block flow diagram of the method according to an embodiment of the invention for forming a grid array assembly.
FIG. 2 is a plan view of a carrier strip showing on the right side a molded grid array package therein.
FIG. 3 is a plan view of a carrier strip section showing an obverse side of a mounted printed circuit board prior to die mounting, wire bonding and encapsulation.
FIG. 4 is a plan view of a strip section showing a reverse side of two printed circuit boards prior to forming ball bonds on an array of contact pads.
FIG. 5 is a schematic side partial view of a molding die and cavity for encapsulating the grid array die and wire bonds.
FIG. 6 is a schematic side view partially in cross-section showing the start of automolding operation of encapsulating a mounted die and wire bonds.
FIG. 7 is a schematic side view partially in cross-section showing the encapsulated die and wire bonds.
The invention provides an assembly of substrate-based grid array semiconductor packages fabricated together in the form of an elongated, connected strip, from which a plurality of individual packages may be singulated. A series of conforming (the same) generally planar printed circuit boards (PCB) are manufactured with suitable conductive traces (metallization), an IC die attach area(s) and bonding pads on one surface and an array of contact pads on an opposite surface with conductive vias extending from the metallization on the one surface to the contact pads on the opposite surface. In the past as described above, PCB's have been manufactured in strip form so that four, six, eight or more identical PCB's are formed in situ in strip format. In the present invention, following manufacturing either singly or on the normal plastic strip the PCB units are tested to ensure that each PCB meets a prescribed detailed performance specification. Any PCB not meeting the specification is rejected. Those PCB's meeting the specification, herein termed “accepted” boards, are singulated, if not already in a single form, and then attached to a disposable or re-usable carrier strip generally in the form of a strong, semi-flexible web of copper or stainless or other steel or other material stock of from about 0.2 mm to about 1.0 mm in thickness. The carrier strip is compatible with all the subsequent ball grid array (BGA) manufacture and assembly steps. Each carrier strip has a series of spaced apertures over which a single PCB is attached. The invention specifically allows for standard automolding of each PCB in the carrier strip.
FIG. 1 is a diagram of a process 10 for forming a ball grid array semiconductor package according to one embodiment of the invention.
In step 11 the PCB is manufactured with prescribed metallization including patterned conductive traces of copper or the like, die attach areas, conductive bonding pads, conductive vias extending from metallization on one PCB surface to an opposite surface forming through board interconnections with an array of contact pads on that opposite surface.
In step 20 each PCB is tested to the prescribed performance specification and those PCB not meeting the specification become rejects 21. Those PCB's meeting the specification are accepted boards 22.
In step 30 a prescribed number of the accepted boards are attached to an incoming carrier strip 31 by automatic assembly apparatus (not shown) which attaches, by adhesive bonding, welding, riveting, soldering or the like, marginal outer peripheral edges of each PCB to edge margins of a carrier strip aperture, as described herein with respect to FIG. 2. A PCB with no marginal outer peripheral edges which is attachable to the carrier strip by adhesive bonding in the carrier strip aperture may also be used. In this embodiment, the area dimension of the accepted boards is the same as the area dimension, e.g. 27 mm×27 mm, as the singulated assembly described below.
In step 40 incoming semiconductor IC dies 41 are attached to each accepted PCB in a PCB die attach area using conventional materials such as epoxy or acrylic or polyimide adhesive, and by conventional processes.
In step 50 the mounted die 41 is wire bonded or otherwise connected to bonding pads on the PCB to form an assembly 51.
In step 60, the assembly 51 particularly the die and wire bonds are encapsulated to enclose the die and any other electronic device and at least a peripheral portion of the PCB encircling the die attach area, as explained in detail below. Briefly a mold die, having a cavity shaped generally to conform to the to-bemolded shape of the final BGA package, is positioned against peripheral edges of the carrier strip aperture and encapsulant transferred into the mold cavity and through a mold runner area on the carrier strip until the cavity is filled.
The encapsulant flows around die 41 and the wire bonds and adheres to interior portions of the PCB including metallization surrounding the die attach area. When the encapsulant hardens the mold die is removed or opened. Excess encapsulant (bleed) is formed on the surface of the carrier strip and poorly adheres thereto. It is easily removed in a later step by exerting a torqueing or tensile force on the mold runner attached to the strip carrier. This allows excess encapsulant to peel cleanly from the carrier and the package encapsulant without pulling any of the package encapsulant away from the PCB nor twisting the PCB so as to damage the resultant packaged electronic device, either cosmetically, mechanically or electrically.
In step 70 interconnection bumps, generally in a solder ball configuration, are formed.
In step 80 each so-formed ball grid array is singulated from the carrier strip.
FIG. 2 is a plan view of a portion of a carrier strip 31 showing on the left side an octagonal carrier strip aperture 32 under which a PCB is to be mounted. The preferably copper carrier strip includes tooling holes 33 and 34 which, respectively, are used to align a PCB 22 against the strip in aperture overlying position and to position the carrier strip on and with respect to the various apparati of standard manufacturing equipment e.g. the mold or wire bonder, used in the production of a packaged electronic device such as a BGA, in accord with this invention. As seen on the right side of FIG. 2 an accepted PCB 22 having in one embodiment a 27 mm by 29 mm rectangular size denoted by dashed outline lines 35 is positioned so as to underlie aperture 32 with the long ends 35 a and 35 b of the PCB 22 extending beyond holes 33. The short ends overlap the side marginal edges 35 c and 35 d of the carrier strip aperture 32 by only about 0.5 mm to about 0.8 mm. The PCB is attached to the carrier strip at those four overlaps, or at long end overlaps 35 a and 35 b only, by suitable adhesive 56 (FIG. 6). The adhesive may be a double-sided adhesive tape suitable for the processing environment to which it will be subjected, such as Lead Lock tape from Brady Co. of Milwaukee, Wis. or comparable tape from Tomoegawa of Japan or Pyralux™ adhesive tape from DuPont Co. After encapsulation to form a molded body 61, as in FIG. 7, a bevelled encapsulant edge 62 is formed encircling the body 61 inside a mold shut off area 63. Typical bleed or mold flash 61 b (FIG. 3) is shown extending on the top surface of the carrier strip 31. Flash 61 a (FIG. 3) may extend anywhere on this surface. Upon singulation of the BGA from the carrier strip in step 80 the finished/completed BGA package will have a 27 mm. by 27 mm. size with or without an attached portion of the carrier strip, as seen by the multi-dashed lines 64.
FIG. 3 illustrates the mounting of a PCB 22 in an overlying aperture 32 of a series of apertures in the carrier strip 31. A die attach area 36 is provided for mounting the IC die or electronic device. Metallization traces 37 including gold-plated or other electrically conductive bonding pads 38 extend over the top surface of the PCB 22 to vias through one or more board levels. The standard PCB substrate may be, for example, epoxy-glass or polyimide-glass or BT/epoxy (bismaleimide-triazine and epoxy). If multilayer PCB's are used electrically conductive traces or regions (e.g. ground planes or power planes) can be formed by conventional photoresist and masking processes, within the multilayer substrate and connected to the exterior opposite surface with conductively plated vias or through holes formed by well-known techniques including mechanical or laser drilling and followed by electroless or electro plating. Annular conductive rings may be provided at the end of the vias and connected to the adjacent areas containing the contact or solder pads on which the interconnection bumps will be formed. The strip 31 further functions as a mold gate at area 61 b and due to the ease of removal of any flash 61 a leaves a clean package outline when the mold halves 68 and 69 (FIG. 5) are separated.
FIG. 4 shows the reverse or underside of the attached accepted board 22 where the edges 27 mm. by 29 mm of the PCB are seen by lines 35. Vias 42 interconnect metallization 37 (FIG. 3) and contact pads 39. Interconnect balls or bumps 71 (FIG. 7) are later formed on contact pads 39. Parallel conductive traces 43 extend from certain bump pads to facilitate electroplating.
FIG. 5 illustrates the automolding of a package body 61 by the action of a molding die 68 having a cavity 64 which clamps against and around the periphery of the boundary surface edges 65 of the carrier strip apertures. The inner peripheral edges 66 (FIG. 6) of the strip aperture act as a stop or dam for the encapsulant with the strip aperture edges 65 acting as a mechanical shut-off for the liquid molding compound e.g. Plaskon molding compound, being dispensed into the molding die cavity. Arrows 67 indicate clamping of the mold die against the carrier strip 31 which is backed by a fixed mold die-supporting surface 69 during the clamping and encapsulating operations. When encapsulant is supplied into the cavity (with the top side of the PCB facing downwardly as shown in FIG. 4) a mold body 61 with or without a bevelled side edge 62 is formed upon hardening of the mold compound. A mold runner 61 a (FIG. 3) extends from a mold supply inlet (not shown) to the mold cavity. For illustration purposes a non-existent gap is seen between the die 68 and the molded body 61. By molding against the carrier strip aperture edges poor adhesion of the molding compound results and the compound does not tenaciously stick to PCB surfaces, other than at portions within the mold body surrounding the die attach area.
FIG. 6 shows the portion of the mold die 68 immediately before completion of clamping against the carrier strip 31. When clamping is completed against the carrier strip 31, encapsulant is injected into cavity 64 a to encapsulate die 41, wire bonds 55, the outer edges of the attach adhesive 53 and an annular portion 58 of the PCB 22. Flash is prevented or minimized by the clamping force of the molding die against the carrier strip.
FIG. 7 illustrates the final packaged assembly resultant from step 70 namely, the forming of interconnecting bumps, e.g. solder balls 71, on the contact pads 39 in electrical connection to vias 42 and to the metallization 37 on and the die 41 mounted to the PCB. V-cut edge 25 which aids in the singulation step 80 may be included around the edge periphery of PCB 22. The substrate is not adhesively bonded to the carrier strip in the area 56 a inside of the V-cut and is bonded only in area 56 b at an interface with the carrier strip outside of the V-cut, to facilitate the singulation of each BGA from the carrier strip.
In the singulation step 80 the finished BGA is broken out by pushing on the package to break it out of the carrier strip along the V-cut or by punching or sawing off 1.0 mm of the long sides of the original 27×29 mm PCB to result in a 27×27 mm packaged device.
An annular ring of copper from around the carrier strip aperture may be removed or left on to function as a heat sink and package stiffener to reduce package warpage. The carrier strip may be reused if no permanent damage results from excising the assembly from the carrier strip.
The above description of embodiments of this invention is intended to be illustrative and not limiting. Other embodiments of this invention will be obvious to those skilled in the art in view of the above disclosure.
|Cited Patent||Filing date||Publication date||Applicant||Title|
|US4283838 *||Feb 12, 1979||Aug 18, 1981||Mitsubishi Denki Kabushiki Kaisha||Method of making plastic encapsulated semiconductor devices|
|US4331940 *||Jun 3, 1980||May 25, 1982||Matsushita Electric Industrial Co., Ltd.||Solid-state MIC oscillator|
|US4756080||Jan 27, 1986||Jul 12, 1988||American Microsystems, Inc.||Metal foil semiconductor interconnection method|
|US5045921||Dec 26, 1989||Sep 3, 1991||Motorola, Inc.||Pad array carrier IC device using flexible tape|
|US5170328||Apr 24, 1990||Dec 8, 1992||Delco Electronics Corporation||Packaging for molded carriers of integrated circuits|
|US5355283||Apr 14, 1993||Oct 11, 1994||Amkor Electronics, Inc.||Ball grid array with via interconnection|
|US5406699 *||Dec 30, 1993||Apr 18, 1995||Matsushita Electric Industrial Co., Ltd.||Method of manufacturing an electronics package|
|US5474957||Apr 28, 1995||Dec 12, 1995||Nec Corporation||Process of mounting tape automated bonded semiconductor chip on printed circuit board through bumps|
|US5490324||Sep 15, 1993||Feb 13, 1996||Lsi Logic Corporation||Method of making integrated circuit package having multiple bonding tiers|
|US5534467||Aug 22, 1994||Jul 9, 1996||Lsi Logic Corporation||Semiconductor packages for high I/O semiconductor dies|
|US5614443||Mar 27, 1996||Mar 25, 1997||Mitsui High-Tec, Inc.||Method of producing a frame made of connected semiconductor die mounting substrates|
|US5620928||May 11, 1995||Apr 15, 1997||National Semiconductor Corporation||Ultra thin ball grid array using a flex tape or printed wiring board substrate and method|
|US5635671 *||Mar 16, 1994||Jun 3, 1997||Amkor Electronics, Inc.||Mold runner removal from a substrate-based packaged electronic device|
|US5654243||Aug 14, 1996||Aug 5, 1997||Fujitsu Limited||Process for fabricating a semiconductor device in a resin package housed in a frame having high conductivity|
|US5661086||Jan 11, 1996||Aug 26, 1997||Mitsui High-Tec, Inc.||Process for manufacturing a plurality of strip lead frame semiconductor devices|
|US5674785||Nov 27, 1995||Oct 7, 1997||Micron Technology, Inc.||Method of producing a single piece package for semiconductor die|
|US5705851 *||Jun 28, 1995||Jan 6, 1998||National Semiconductor Corporation||Thermal ball lead integrated package|
|US5732465 *||Jul 14, 1995||Mar 31, 1998||Shinko Electric Industries Co., Ltd.||Method of manufacturing one side resin sealing type semiconductor devices|
|US5852870 *||Apr 24, 1996||Dec 29, 1998||Amkor Technology, Inc.||Method of making grid array assembly|
|US5859475 *||Apr 24, 1996||Jan 12, 1999||Amkor Technology, Inc.||Carrier strip and molded flex circuit ball grid array|
|DE4141755A1||Dec 13, 1991||Jun 17, 1993||Schering Ag||Electro plating bath - is covered by a closed suction extn. hood with material passage openings shrouded by air curtains|
|DE29621837U1||Dec 16, 1996||Feb 27, 1997||Siemens Ag||Trägerelement für Halbleiterchips|
|EP0408101A2||Jun 26, 1990||Jan 16, 1991||Lsi Logic Corporation||Strip carrier for integrated circuits|
|EP0657921A1||Oct 28, 1994||Jun 14, 1995||Fujitsu Limited||Semiconductor device and method of producing the same|
|EP0664562A1||Dec 14, 1994||Jul 26, 1995||AT&T Corp.||Ball grid array plastic package|
|EP0676806A2||Dec 16, 1994||Oct 11, 1995||Sgs-Thomson Microelectronics, Inc.||Ball grid array intergrated circuit package with high thermal conductivity|
|JPH08107127A||Title not available|
|WO1989010005A1||Mar 31, 1989||Oct 19, 1989||Justin C Bolger||Pre-formed chip carrier cavity package|
|1||Freyman et al., PCT Application Serial No. PCT/US97/06371 filed Apr. 23, 1997; entitled "Molded Flex Circuit Ball Grid Array and Method of Making"; 17 pgs.|
|2||Hattas, D., et al: "Mounting Technology of GBA-P and GBA-T", 17th IEEE/CPMT Int'l Electronics Manufacturing Technology Symposium, Austin, Oct. 2-4, 1995. IEEE, pp. 417-421, XP000580510.|
|3||Karnezos, M., et al: "Flex Tape Ball Grid Array", 1996 Proceedings of 46th Electronic Components and Technology Conf., May 28-31, 1996 IEEE, pp. 1271-1277, XP000684990.|
|4||Schueller et al., "Design Consideration for a Reliable Low Cost Tape Ball Grid Array Package"; Tape Ball Grid Array; 1-Metal Microflex Circuit-Wire Bond; Electronic Products Division; 3M Corporation; published in Proceedings of IEPS Conference, San Diego, CA, Sep. 1995; 16 pgs.|
|5||Schueller et al., "Design Consideration for a Reliable Low Cost Tape Ball Grid Array Package"; Tape Ball Grid Array; 1-Metal Microflex Circuit—Wire Bond; Electronic Products Division; 3M Corporation; published in Proceedings of IEPS Conference, San Diego, CA, Sep. 1995; 16 pgs.|
|6||Schueller R.D.: "Design Considerations for a Reliable Low Cost Tape Ball Grid Array Package", International Journal Microcircuits and Electronic Packaging, vol. 19, No. 2, Apr. 1996, pp. 146-154, XP000639477.|
|7||Schueller, R.D.: "Design Considerations for a Reliable Low Cost Tape Ball Grid Array Package", Proceedings of IEPS Conference, San Diego, CA, Sep. 1995, pp. 1-14.|
|Citing Patent||Filing date||Publication date||Applicant||Title|
|US6544461 *||Oct 2, 2000||Apr 8, 2003||Micron Technology, Inc.||Test carrier with molded interconnect for testing semiconductor components|
|US6555924 *||Aug 18, 2001||Apr 29, 2003||Siliconware Precision Industries Co., Ltd.||Semiconductor package with flash preventing mechanism and fabrication method thereof|
|US6564452 *||Sep 14, 2001||May 20, 2003||Intel Corporation||Method for creating printed circuit board substrates having solder mask-free edges|
|US6573612 *||Mar 24, 2000||Jun 3, 2003||Sharp Kabushiki Kaisha||Resin-encapsulated semiconductor device including resin extending beyond edge of substrate|
|US6632996 *||Aug 29, 2001||Oct 14, 2003||Samsung Electronics Co., Ltd.||Micro-ball grid array package tape including tap for testing|
|US6638820||Feb 8, 2001||Oct 28, 2003||Micron Technology, Inc.||Method of forming chalcogenide comprising devices, method of precluding diffusion of a metal into adjacent chalcogenide material, and chalcogenide comprising devices|
|US6642730||Jan 27, 2003||Nov 4, 2003||Micron Technology, Inc.||Test carrier with molded interconnect for testing semiconductor components|
|US6646902||Aug 30, 2001||Nov 11, 2003||Micron Technology, Inc.||Method of retaining memory state in a programmable conductor RAM|
|US6653193||Dec 8, 2000||Nov 25, 2003||Micron Technology, Inc.||Resistance variable device|
|US6660559||Jun 25, 2001||Dec 9, 2003||Amkor Technology, Inc.||Method of making a chip carrier package using laser ablation|
|US6674355 *||May 21, 2001||Jan 6, 2004||M-Flex Multi-Fineline Electronix, Inc.||Slot core transformers|
|US6709887||Oct 31, 2001||Mar 23, 2004||Micron Technology, Inc.||Method of forming a chalcogenide comprising device|
|US6709958||Aug 30, 2001||Mar 23, 2004||Micron Technology, Inc.||Integrated circuit device and fabrication using metal-doped chalcogenide materials|
|US6710423||Aug 23, 2002||Mar 23, 2004||Micron Technology, Inc.||Chalcogenide comprising device|
|US6727192||Mar 1, 2001||Apr 27, 2004||Micron Technology, Inc.||Methods of metal doping a chalcogenide material|
|US6730547||Nov 1, 2002||May 4, 2004||Micron Technology, Inc.||Integrated circuit device and fabrication using metal-doped chalcogenide materials|
|US6731528||May 3, 2002||May 4, 2004||Micron Technology, Inc.||Dual write cycle programmable conductor memory system and method of operation|
|US6734455||Mar 15, 2001||May 11, 2004||Micron Technology, Inc.||Agglomeration elimination for metal sputter deposition of chalcogenides|
|US6737312||Aug 27, 2001||May 18, 2004||Micron Technology, Inc.||Method of fabricating dual PCRAM cells sharing a common electrode|
|US6737726||Oct 3, 2002||May 18, 2004||Micron Technology, Inc.||Resistance variable device, analog memory device, and programmable memory cell|
|US6751114||Mar 28, 2002||Jun 15, 2004||Micron Technology, Inc.||Method for programming a memory cell|
|US6784018||Aug 29, 2001||Aug 31, 2004||Micron Technology, Inc.||Method of forming chalcogenide comprising devices and method of forming a programmable memory cell of memory circuitry|
|US6791859||Nov 20, 2001||Sep 14, 2004||Micron Technology, Inc.||Complementary bit PCRAM sense amplifier and method of operation|
|US6791885||Feb 19, 2002||Sep 14, 2004||Micron Technology, Inc.||Programmable conductor random access memory and method for sensing same|
|US6796017||May 8, 2003||Sep 28, 2004||M-Flex Multi-Fineline Electronix, Inc.||Slot core transformers|
|US6800504||Nov 1, 2002||Oct 5, 2004||Micron Technology, Inc.||Integrated circuit device and fabrication using metal-doped chalcogenide materials|
|US6804883 *||Jun 26, 2000||Oct 19, 2004||Robert Bosch Gmbh||Method for producing a pressure sensor|
|US6809362||Feb 20, 2002||Oct 26, 2004||Micron Technology, Inc.||Multiple data state memory cell|
|US6812087||Aug 6, 2003||Nov 2, 2004||Micron Technology, Inc.||Methods of forming non-volatile resistance variable devices and methods of forming silver selenide comprising structures|
|US6813176||Nov 5, 2003||Nov 2, 2004||Micron Technology, Inc.||Method of retaining memory state in a programmable conductor RAM|
|US6813178||Mar 12, 2003||Nov 2, 2004||Micron Technology, Inc.||Chalcogenide glass constant current device, and its method of fabrication and operation|
|US6815818||Nov 19, 2001||Nov 9, 2004||Micron Technology, Inc.||Electrode structure for use in an integrated circuit|
|US6818481||Mar 7, 2001||Nov 16, 2004||Micron Technology, Inc.||Method to manufacture a buried electrode PCRAM cell|
|US6825135||Jun 6, 2002||Nov 30, 2004||Micron Technology, Inc.||Elimination of dendrite formation during metal/chalcogenide glass deposition|
|US6831019||Aug 29, 2002||Dec 14, 2004||Micron Technology, Inc.||Plasma etching methods and methods of forming memory devices comprising a chalcogenide comprising layer received operably proximate conductive electrodes|
|US6833559||Sep 12, 2003||Dec 21, 2004||Micron Technology, Inc.||Non-volatile resistance variable device|
|US6838307||Jul 14, 2003||Jan 4, 2005||Micron Technology, Inc.||Programmable conductor memory cell structure and method therefor|
|US6847535||Feb 20, 2002||Jan 25, 2005||Micron Technology, Inc.||Removable programmable conductor memory card and associated read/write device and method of operation|
|US6864500||Apr 10, 2002||Mar 8, 2005||Micron Technology, Inc.||Programmable conductor memory cell structure|
|US6878569||Oct 28, 2002||Apr 12, 2005||Micron Technology, Inc.||Agglomeration elimination for metal sputter deposition of chalcogenides|
|US6881623||Aug 29, 2001||Apr 19, 2005||Micron Technology, Inc.||Method of forming chalcogenide comprising devices, method of forming a programmable memory cell of memory circuitry, and a chalcogenide comprising device|
|US6912147||Jun 28, 2004||Jun 28, 2005||Micron Technology, Inc.||Chalcogenide glass constant current device, and its method of fabrication and operation|
|US6933596 *||Jul 1, 2003||Aug 23, 2005||Northrop Grumman Corporation||Ultra wideband BGA|
|US6961277||Jul 8, 2003||Nov 1, 2005||Micron Technology, Inc.||Method of refreshing a PCRAM memory device|
|US7015494||Jul 10, 2002||Mar 21, 2006||Micron Technology, Inc.||Assemblies displaying differential negative resistance|
|US7022555||Feb 10, 2004||Apr 4, 2006||Micron Technology, Inc.||Methods of forming a semiconductor memory device|
|US7030405||Jan 22, 2004||Apr 18, 2006||Micron Technology, Inc.||Method and apparatus for resistance variable material cells|
|US7030410||Aug 18, 2004||Apr 18, 2006||Micron Technology, Inc.||Resistance variable device|
|US7057297||Feb 27, 2004||Jun 6, 2006||Micron Technology, Inc.||Tape substrates with mold gate support structures that are coplanar with conductive traces thereof and associated methods|
|US7061071||Feb 13, 2004||Jun 13, 2006||Micron Technology, Inc.||Non-volatile resistance variable devices and method of forming same, analog memory devices and method of forming same, programmable memory cell and method of forming same, and method of structurally changing a non-volatile device|
|US7067348||Apr 16, 2004||Jun 27, 2006||Micron Technology, Inc.||Method of forming a programmable memory cell and chalcogenide structure|
|US7102150||May 11, 2001||Sep 5, 2006||Harshfield Steven T||PCRAM memory cell and method of making same|
|US7126179||Jan 16, 2004||Oct 24, 2006||Micron Technology, Inc.||Memory cell intermediate structure|
|US7132675||Feb 27, 2004||Nov 7, 2006||Micron Technology, Inc.||Programmable conductor memory cell structure and method therefor|
|US7135952||Sep 11, 2003||Nov 14, 2006||Multi-Fineline Electronix, Inc.||Electronic transformer/inductor devices and methods for making same|
|US7151273||Apr 12, 2002||Dec 19, 2006||Micron Technology, Inc.||Silver-selenide/chalcogenide glass stack for resistance variable memory|
|US7178220||Sep 27, 2004||Feb 20, 2007||Multi-Fineline Electronix, Inc.||Method of making slotted core inductors and transformers|
|US7190081||Jul 21, 2005||Mar 13, 2007||Micron Technology, Inc.||Mold gates and tape substrates including the mold gates|
|US7250687||Jul 21, 2005||Jul 31, 2007||Micron Technology, Inc.||Systems for degating packaged semiconductor devices with tape substrates|
|US7271697||Dec 7, 2005||Sep 18, 2007||Multi-Fineline Electronix||Miniature circuitry and inductive components and methods for manufacturing same|
|US7277002||Sep 15, 2003||Oct 2, 2007||Multi-Fineline Electronix, Inc.||Electronic transformer/inductor devices and methods for making same|
|US7315465||Jan 13, 2005||Jan 1, 2008||Micro Technology, Inc.||Methods of operating and forming chalcogenide glass constant current devices|
|US7354795||Mar 7, 2007||Apr 8, 2008||Micron Technology, Inc.||Methods for packaging and encapsulating semiconductor device assemblies that include tape substrates|
|US7387909||Jul 15, 2005||Jun 17, 2008||Micron Technology, Inc.||Methods of forming assemblies displaying differential negative resistance|
|US7410863||Sep 7, 2006||Aug 12, 2008||Micron Technology, Inc.||Methods of forming and using memory cell structures|
|US7436282||Jul 6, 2007||Oct 14, 2008||Multi-Fineline Electronix, Inc.||Miniature circuitry and inductive components and methods for manufacturing same|
|US7477124||Dec 13, 2006||Jan 13, 2009||Multi-Fineline Electronix, Inc.||Method of making slotted core inductors and transformers|
|US7542319||Jan 17, 2007||Jun 2, 2009||Micron Technology, Inc.||Chalcogenide glass constant current device, and its method of fabrication and operation|
|US7602272||Aug 24, 2007||Oct 13, 2009||Multi-Fineline Electronix, Inc.||Miniature circuitry and inductive components and methods for manufacturing same|
|US7645941||Apr 24, 2007||Jan 12, 2010||Multi-Fineline Electronix, Inc.||Shielded flexible circuits and methods for manufacturing same|
|US7646007||Oct 24, 2006||Jan 12, 2010||Micron Technology, Inc.||Silver-selenide/chalcogenide glass stack for resistance variable memory|
|US7656263||Sep 18, 2008||Feb 2, 2010||Multi-Fineline Electronix, Inc.||Miniature circuitry and inductive components and methods for manufacturing same|
|US7663133||Nov 15, 2006||Feb 16, 2010||Micron Technology, Inc.||Memory elements having patterned electrodes and method of forming the same|
|US7663137||Dec 21, 2007||Feb 16, 2010||Micron Technology, Inc.||Phase change memory cell and method of formation|
|US7668000||Jun 25, 2007||Feb 23, 2010||Micron Technology, Inc.||Method and apparatus providing a cross-point memory array using a variable resistance memory cell and capacitance|
|US7682992||May 20, 2008||Mar 23, 2010||Micron Technology, Inc.||Resistance variable memory with temperature tolerant materials|
|US7687793||May 22, 2007||Mar 30, 2010||Micron Technology, Inc.||Resistance variable memory cells|
|US7690110||Aug 24, 2007||Apr 6, 2010||Multi-Fineline Electronix, Inc.||Methods for manufacturing miniature circuitry and inductive components|
|US7692177||Jul 5, 2006||Apr 6, 2010||Micron Technology, Inc.||Resistance variable memory element and its method of formation|
|US7696852||Aug 29, 2007||Apr 13, 2010||Multi-Fineline Electronix, Inc.||Electronic transformer/inductor devices and methods for making same|
|US7700422||Oct 25, 2006||Apr 20, 2010||Micron Technology, Inc.||Methods of forming memory arrays for increased bit density|
|US7701760||Sep 12, 2008||Apr 20, 2010||Micron Technology, Inc.||Resistance variable memory device with sputtered metal-chalcogenide region and method of fabrication|
|US7709289||Apr 22, 2005||May 4, 2010||Micron Technology, Inc.||Memory elements having patterned electrodes and method of forming the same|
|US7709885||Feb 13, 2007||May 4, 2010||Micron Technology, Inc.||Access transistor for memory device|
|US7723713||May 31, 2006||May 25, 2010||Micron Technology, Inc.||Layered resistance variable memory device and method of fabrication|
|US7745808||Dec 28, 2007||Jun 29, 2010||Micron Technology, Inc.||Differential negative resistance memory|
|US7749853||Jan 11, 2008||Jul 6, 2010||Microntechnology, Inc.||Method of forming a variable resistance memory device comprising tin selenide|
|US7759665||Feb 21, 2007||Jul 20, 2010||Micron Technology, Inc.||PCRAM device with switching glass layer|
|US7785976||Feb 28, 2008||Aug 31, 2010||Micron Technology, Inc.||Method of forming a memory device incorporating a resistance-variable chalcogenide element|
|US7791058||Jun 25, 2009||Sep 7, 2010||Micron Technology, Inc.||Enhanced memory density resistance variable memory cells, arrays, devices and systems including the same, and methods of fabrication|
|US7863597||Jan 24, 2008||Jan 4, 2011||Micron Technology, Inc.||Resistance variable memory devices with passivating material|
|US7869249||Mar 11, 2008||Jan 11, 2011||Micron Technology, Inc.||Complementary bit PCRAM sense amplifier and method of operation|
|US7879646||Jan 31, 2008||Feb 1, 2011||Micron Technology, Inc.||Assemblies displaying differential negative resistance, semiconductor constructions, and methods of forming assemblies displaying differential negative resistance|
|US7910397||Nov 13, 2006||Mar 22, 2011||Micron Technology, Inc.||Small electrode for resistance variable devices|
|US7924603||Feb 4, 2010||Apr 12, 2011||Micron Technology, Inc.||Resistance variable memory with temperature tolerant materials|
|US7940556||Mar 16, 2010||May 10, 2011||Micron Technology, Inc.||Resistance variable memory device with sputtered metal-chalcogenide region and method of fabrication|
|US8080816||Dec 3, 2009||Dec 20, 2011||Micron Technology, Inc.||Silver-selenide/chalcogenide glass stack for resistance variable memory|
|US8148804 *||Jan 13, 2009||Apr 3, 2012||Dai Nippon Printing Co., Ltd.||Wiring device for semiconductor device, composite wiring device for semiconductor device, and resin-sealed semiconductor device|
|US8367475||Mar 25, 2011||Feb 5, 2013||Broadcom Corporation||Chip scale package assembly in reconstitution panel process format|
|US8466445||Nov 23, 2011||Jun 18, 2013||Micron Technology, Inc.||Silver-selenide/chalcogenide glass stack for resistance variable memory and manufacturing method thereof|
|US8531014 *||Sep 27, 2010||Sep 10, 2013||Infineon Technologies Ag||Method and system for minimizing carrier stress of a semiconductor device|
|US8796832||Feb 23, 2012||Aug 5, 2014||Dai Nippon Printing Co., Ltd.||Wiring device for semiconductor device, composite wiring device for semiconductor device, and resin-sealed semiconductor device|
|US9001522||Nov 12, 2012||Apr 7, 2015||Apple Inc.||Printed circuits with staggered contact pads and compact component mounting arrangements|
|US20040104206 *||Nov 12, 2003||Jun 3, 2004||Hall Frank L.||Methods for preparing ball grid array substrates via use of a laser|
|US20040135662 *||Sep 11, 2003||Jul 15, 2004||Harding Philip A.||Electronic transformer/inductor devices and methods for making same|
|US20040161894 *||Feb 13, 2004||Aug 19, 2004||Gilton Terry L.||Non-volatile resistance variable devices and method of forming same, analog memory devices and method of forming same, programmable memory cell and method of forming same, and method of structurally changing a non-volatile device|
|US20040169024 *||Mar 2, 2004||Sep 2, 2004||Hall Frank L.||Methods for preparing ball grid array substrates via use of a laser|
|US20040179390 *||Mar 12, 2003||Sep 16, 2004||Campbell Kristy A.||Chalcogenide glass constant current device, and its method of fabrication and operation|
|US20040191961 *||Apr 16, 2004||Sep 30, 2004||Campbell Kristy A.||Method of forming non-volatile resistance variable devices and method of forming a programmable memory cell of memory circuitry|
|US20040233728 *||Jun 28, 2004||Nov 25, 2004||Campbell Kristy A.||Chalcogenide glass constant current device, and its method of fabrication and operation|
|US20050001296 *||Jul 1, 2003||Jan 6, 2005||Northrop Grumman Corporation||Ultra wideband BGA|
|US20050034297 *||Sep 27, 2004||Feb 17, 2005||Harding Philip A.||Slot core transformers|
|US20050051880 *||Feb 27, 2004||Mar 10, 2005||Lee Teck Kheng||Tape substrates with mold gate support structures that are coplanar with conductive traces thereof and associated methods|
|US20050093672 *||Nov 22, 2004||May 5, 2005||Harding Philip A.||Electronic transformer/inductor devices and methods for making same|
|US20050133778 *||Jan 13, 2005||Jun 23, 2005||Campbell Kristy A.||Chalcogenide glass constant current device, and its method of fabrication and operation|
|US20050170658 *||Mar 25, 2005||Aug 4, 2005||Hall Frank L.||Methods for preparing ball grid array substrates via use of a laser|
|US20050253238 *||Jul 21, 2005||Nov 17, 2005||Lee Teck K||Systems for degating packaged semiconductor device with tape substrates|
|US20050253250 *||Jul 21, 2005||Nov 17, 2005||Lee Teck K||Mold gates, tape substrates with the mold gates, and packaging methods|
|US20050263871 *||May 20, 2005||Dec 1, 2005||Yasuhiro Shinma||Method of fabricating semiconductor device and semiconductor device|
|US20120074568 *||Sep 27, 2010||Mar 29, 2012||Eichinger Oliver||Method and system for minimizing carrier stress of a semiconductor device|
|EP2610905A2 *||Dec 5, 2012||Jul 3, 2013||Princo Corp.||Packaging method for electronic components using a thin substrate|
|EP2610905A3 *||Dec 5, 2012||Jan 22, 2014||Princo Corp.||Packaging method for electronic components using a thin substrate|
|U.S. Classification||174/260, 438/464, 257/E21.525, 257/E23.065, 438/112, 257/E21.504, 257/E23.069, 174/557, 438/458, 174/534|
|International Classification||H01L21/68, H01L21/48, H01L21/66, H05K1/18, H01L21/56, H01L23/50, H01L23/12, H01L23/28, H01L23/31, H01L23/498|
|Cooperative Classification||H01L2224/451, Y10T29/49121, Y10T29/49144, Y10T29/49146, H01L24/48, H01L2924/01029, H01L21/6835, H01L21/565, H01L23/49816, H01L2924/01039, H01L22/20, H01L2224/32225, H01L2224/73265, H01L2924/15151, H01L2224/48091, H01L2924/014, H01L2924/01078, H01L2924/01013, H01L2224/48227, H01L2924/15311, H01L2924/01079, H01L2224/48465, H01L21/568, H01L23/4985, H01L23/3128, H01L21/4853|
|European Classification||H01L21/683T, H01L22/20, H01L23/498J, H01L21/56M, H01L23/498C4, H01L23/31H2B, H01L21/48C4C, H01L21/56T|
|Nov 15, 2000||AS||Assignment|
|Apr 16, 2001||AS||Assignment|
|Apr 1, 2003||CC||Certificate of correction|
|Apr 23, 2003||AS||Assignment|
|Jul 6, 2004||AS||Assignment|
|Jul 16, 2004||AS||Assignment|
|Nov 2, 2004||AS||Assignment|
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