|Publication number||US6849558 B2|
|Application number||US 10/246,379|
|Publication date||Feb 1, 2005|
|Filing date||Sep 17, 2002|
|Priority date||May 22, 2002|
|Also published as||CN1659691A, CN100446192C, CN101231473A, CN101231473B, CN101398617A, CN101398617B, EP1540716A2, EP1540716A4, EP1540716B1, EP2177950A1, EP2177950B1, US7345002, US7981814, US20030219992, US20060035164, US20100044837, WO2004027460A2, WO2004027460A3|
|Publication number||10246379, 246379, US 6849558 B2, US 6849558B2, US-B2-6849558, US6849558 B2, US6849558B2|
|Inventors||Charles Daniel Schaper|
|Original Assignee||The Board Of Trustees Of The Leland Stanford Junior University|
|Export Citation||BiBTeX, EndNote, RefMan|
|Patent Citations (3), Non-Patent Citations (10), Referenced by (254), Classifications (20), Legal Events (8)|
|External Links: USPTO, USPTO Assignment, Espacenet|
This application relates to, claims the benefit of the filing date of, and incorporates by reference the United States provisional patent applications entitled “Transfer lithography printing strategy”, No. 60/383,275, filed May 22, 2002, “Method and means for template manufacture”, No. 60/382,690, filed May 23, 2002, “Lithographic imprint array method and means”, No. 60/396,705, filed Jul. 16, 2002, “Molecular transfer lithography method and means from template”, No. 60/401,158, filed Aug. 3, 2002, which are all assigned to the assignee of the present invention.
The invention was made with government support under Grant (Contract) No. N66001-01-1-8962 awarded by the Defense Advanced Research Projects Agency (DARPA). The government has certain rights to this invention.
This invention relates to a new process for the replication of surface relief at the micrometer and the nanometer dimension scale. Furthermore, the process provides for the transfer of the replicated pattern from a master substrate to a second substrate. This invention describes a method of transfer lithography in which a disposable intermediate template is used. The process is also suitable for replicating and/or transferring single or multiple layers of microscopic elements that are to be used for photonic applications, metrology applications, and in the fabrication of integrated circuits and other microdevices.
Microlithographic patterning of integrated circuits has made great improvements in the recent years. Prototype devices with dimensions less than 100 nm in width have been demonstrated, and are expected to enter routine production soon.
These integrated devices are typically assembled sequentially, through a series of process steps that carry out the necessary deposition, patterning, and etching steps that result in the final device. A contemporary microdevice often comprises more than 25 distinct layers, each with its own mask to define feature dimensions, and a sequence of process steps that the entire wafer must undergo to create the desired layer.
Extremely high resolution lithography can be carried out using electron beam (or E-beam) lithography. This prior art technique for fabricating microdevices is illustrated in FIG. 1. In this example, a partially fabricated substrate 100, comprising an underlying substrate 110 with the previously fabricated layers 120 containing microstructures 112 and 122, is coated with a uniform layer 130 of the material to be processed (e.g. metal, polysilicon, etc.), and then coated with a polymer layer 150, commonly called a resist, sensitive to electron beam exposure. The sensitive layer 150 is then exposed to patterns of electron beams 160, as shown in
Although E-beam lithography can produce extremely high resolution patterns, the typical throughput of an E-beam machine is very slow. Beams must be directed to each spot on the wafer in sequence, which makes the process generally slow and impractical for large numbers of microstructures. Instead, in optical lithography, the E-beams 160 are replaced by an optical image of a mask, which exposes the sensitive film 150 in parallel. However, optical imaging techniques do not have the same resolution as E-beam systems, and fabricating nanostructures (features with dimensions on the order of 100 nm or smaller) in these layers has been growing exponentially more expensive. As a result, alternative paradigms for lithography of these layers have been investigated.
One example of these novel technological patterning paradigms is nanoimprint technology. In nanoimprint techniques, a master pattern is formed by a high resolution patterning technique, such as E-beam lithography. These high resolution masters are then used to create a corresponding pattern on the IC layer without the use of an imaging step, but with some kind of stamping or printing technique. This is in principle very similar to techniques used for creating the microscopic patterns found on compact discs (CDs).
The most straightforward illustration of this was developed by Stephen Chou et. al, and is illustrated in FIG. 2. Chou's process would take the same layer to be processed 130, coated on a partially fabricated substrate 100, but coat the assembled substrate with a layer of a deformable polymer 250, as shown in
C. Grant Willson et al. have proposed a variation on this technique as illustrated in FIG. 3. In this approach, the master 310 is transparent to ultraviolet light. This master 310 also contains indentations 312 patterned in the surface through a high resolution fabrication technique. As shown in
A drawback to these techniques is that the master must be repeatedly used again and again in the formation of the desired material. This can lead to damage to the master through normal wear and exposure to contaminants. A common technique used to replicate diffractive structures used for gratings and other photonic devices involves the creation of replicas of a master grating. These methods involve the creation of a master from which replications are made by applying a thin vacuum deposited separation layer on the master. A metal coating is then deposited on top of the separation layer, and an epoxy coated substrate is placed on top of the layer-covered master. The combination is then cured and the process is completed when the replicated grating is separated from the master grating. This approach suffers from throughput limitations requiring vacuum depositions on the master. With this approach, the master suffers degradation only from the creation of multiple replicas; the replicas themselves are used in the actual fabrication process and are discarded when damaged.
George Whitesides et al. have developed a similar process using a replica, or template, made from poly(dimethylsiloxane) (PDMS) for applications what he calls “soft lithography”. They have also developed a variation of this process using an inking technique, to minimize damage to the template. This is similar in concept to the inking of rubber stamps commonly used in other conventional printing applications.
An example of this process is illustrated in FIG. 4. The master 400 with indentations 402 itself is not used directly, but is replicated as a polymer template 410 with raised sections 412 corresponding to the indentations 402. This polymer template 410 can be used directly for imprint lithography, and discarded if damaged through reuse. To achieve the same patterns 132 from a layer to be processed 130, coated on a partially fabricated substrate 100, Whitesides' process coats the assembled substrate with a layer of a special material 450 which is selected for certain chemical characteristics. As shown in
This template 410 is then “inked” with a thin layer of special chemicals 414 such that only the raised portions 412 of the template 410 are coated with the chemical 414, as shown in
Some of the problems with PDMS as a template that limit its applicability include limited resolution (about 200 nm) because of the difference in thermal expansion coefficient between the PDMS and the mold material, and limited throughput because of the time needed for curing. It also suffers from material incompatibility since it will stick to large areas of clean silicon.
In all of these fabrication techniques, the imprinting technique serves as a method for pattering a layer or film directly on the final substrate, e.g. a silicon wafer. The imprint master or template is used again and again to stamp out duplicate copies of nanostructures at low cost.
There can be undesirable consequences from using these techniques. For example, the definition of a particular layer with extremely fine structures with E-beam exposure will inherently risk irradiating the underlying layers to the electron beam as well. Care must be taken to insure that the electrical structures already created in the underlying layers are not damaged. The mechanical stamping of the master or the template onto the substrate must also be precisely controlled, or the fragile structures underneath can be strained or cracked. Keeping the master or replica free of defects as it is used again and again can also present problems.
Furthermore, processing the wafer itself layer by layer, although the standard fabrication technique for integrated circuits, may be less than optimal. For example, a metal or polysilicon layer may be best processed at a high temperature for the best results, but this degree of heating may damage or even melt the layers previously prepared on the substrate. Because all subsequent steps in the manufacture of the microdevice are deposited on the same substrate, however, these problems in process compatibility and their required compromises remain.
Some manufacturing processes in other industries avoid these problems by having separate manufacturing processes for different components, and then assembling these at a later stage of integration. The packaging of ICs is one example of such a dual process, in which the IC itself is prepared on a silicon wafer, and then cut from the wafer placed and bonded into a pre-prepared package. The preparation of the package and the IC follow two separate manufacturing processes until the bonding step is required.
Another example of this kind of dual processing or patterning is found in the common sticker. A pattern in ink is prepared on paper, plastic or some other substrate, and an adhesive applied that allows bonding to another substrate. Examples of this are very common, for example, as decorations in a scrapbook, as a label on filing cabinet, or as a statement on an automobile bumper. Clearly, forcing a large object such as an automobile bumper to fit through a printing and patterning process to attach a simple humorous message would be awkward and very expensive. The bumper sticker is far more flexible and far less expensive.
Likewise, the separation of substrate preparation and even the fabrication of microstructures can be commonly seen. Embossed holograms, such as those found on common credit cards, have structures with sizes on the same order of magnitude as the wavelength of visible light (400-700 nm). These are easily created using a printing or mechanical stamping process, and can also be prepared with adhesives. They are then and attached to many other substrates, such as credit cards, bumper stickers, magazine pages, etc. that could not be used directly in a holographic fabrication process themselves. Integrated circuits themselves are also finding application when attached directly on the surface of various “smart cards”.
In a previous invention, described in US patent application entitled “Molecular Transfer Lithography” and assigned Ser. No. 09/898,521, we have disclosed an invention separating the preparation and imaging in lithographic materials, and the subsequent steps of processing the image and transferring the pattern into the final substrate. This was done by the formation of the required latent image in photoresist on an intermediate carrier. The photoresist containing the latent image is then mechanically aligned and transferred to the location on the final substrate where the subsequent processing is to occur.
This separation of processing steps allows an inventory of pre-processed latent images to be formed that can be used upon demand without delay. These latent images are typically formed on flat carriers under optimized imaging conditions. It also allows the preparation to be carried out on the carrier using an optimized process without concern for the immediate consequences on the substrate, since the substrate is not part of the process. The only concern would be the interaction of residues and the substrate once they are brought together.
Although the prior techniques reflect a great degree of innovation and creativity, and can offer significant cost advantages over conventional lithographic processing techniques, there is a need for a technique that has many or all of the advantages of a nanoimprint technique but does not have the problems associated with reusing a master or template. Furthermore, although the previously disclosed molecular transfer lithography technique addresses some of these issues, the latent image formed was generally flat and did not have topographic structures corresponding to the topography desired on the final wafers.
We disclose here a method of replicating microstructures or nanostructures from a master, processing the replicated structures, and transferring them using a dissolvable template. This dissolvable template is not reused to pattern several substrates, but is physically transferred to a substrate for pattern definition, and subsequently dissolved.
Furthermore, we disclose here a method for pre-processing materials on the replica which are then transferred to the substrate, instead of conducting all processing on the final substrate itself.
We also disclose a method of actually fabricating layers or portions of layers of a microdevice on the replica, and transferring these pre-assembled elements or nanostructures to the final substrate.
To implement this method, we create a master pattern using a high resolution lithographic technique, such as electron beam lithography, on a durable substrate, such as silicon or quartz. Typically, this master pattern will have some definition of the features to be created as variations in topography, and may be identical to the master patterns used in other nanoimprint lithography techniques.
The patterns on the master are then replicated by one of a variety of processes onto a template, supported by an intermediate carrier. The template can serve merely as a disposable replica of the master for subsequent use in an imprint lithography system, or can serve as the basis for the formation of the nanostructure elements themselves. These nanostructures may be created on the carrier through the suitable sequence of deposition, electroplate, coating, patterning, and/or etching steps. The selection of processing details will depend on the specific application for the final device. Aside from micro and nanostructures for electronic devices, the template may be used to fabricate a diffraction grating or other photonic device depending on the desired application. Other applications are micro electro mechanical systems (MEMS), superconducting devices, and biological applications involving selective patterning of protein and DNA sequences.
Once the template is attached to the carrier, the carrier can be stored until it is required for manufacturing. At that time, it is aligned to the final device substrate and facilitates the transfer of the pattern. The template may be adhered to the surface directly or may be applied using a form of imprint lithography. However, the key element of our invention is that the template is actually transferred to the substrate and the carrier removed, leaving the template on the substrate for subsequent processing. The template is destroyed by this subsequent processing.
With inexpensively made templates, this disposable template technique offers all the advantages of nanoimprint lithography, while eliminating the problems that occur through template reuse. Once the template is created, however, it is clear that additional processing can take place on the template prior to the transfer. This can be as simple as coating to aid in a possible subsequent transfer or nanoimplint process, or the application of coatings to allow the template itself to become a optical component such as a polarizer or fresnel lens.
However, it is also possible to carry out a more elaborate sequence of processing steps on the template, actually pre-fabricating elements of components such as nanoscale wires or contacts that can be transferred directly into the final devices. These can then be transferred along with the dissolvable template, using a direct transfer from a carrier to a substrate, as part of the manufacturing process for the final device, or can be transferred as a nanoimprint process is carried out.
FIG. 1: FIG. 1: Processing steps for pattern formation by E-Beam Lithography (Prior Art).
FIG. 2: Processing steps for pattern formation by the nanoimprint technique of Chou (Prior Art).
FIG. 3: Processing steps for the step and flash process of Willson (Prior Art)
FIG. 4: Processing steps for the microcontact printing of Whitesides (Prior Art).
FIG. 5: Flow chart of generic process according to the invention.
FIG. 6. Processing steps for a nanoimprint process using a dissolvable template according to the invention.
FIG. 7: Representative flow chart for additional processing on the template.
FIG. 8: Representative flow chart for the creation of nanostructures on the template.
FIG. 9: Processing steps for the preparation of masters.
FIG. 10: Additional processing steps for the preparation of a multilayer master.
FIG. 11: A conventional spin coating apparatus.
FIG. 12: Processing steps for using a pre-formed disk.
FIG. 13: Process steps for sputtering onto a template and a nanoimprint process using that template.
FIG. 14: process steps for preparing patterned materials on a template and transferring the patterned materials to a substrate.
FIG. 15: Process steps for preparing nanostructures on a template and transferring the nanostructures to a substrate.
FIG. 16: Alternative processing steps for preparing patterned materials on a template and transferring the patterned materials to a substrate.
Note: All drawings in cross section are for illustration purposes only. The dimensions of the layers in these illustrations are not shown to scale, nor should any conclusion about the desired relative thickness of the layers be drawn from these illustrations.
Note: Although we have used identical numbers to represent a pre-formed partially fabricated substrate 100 and its elements, as well as layer 130 on this substrate representing the layer of material to be processed, it will be clear that any substrate with any number of preformed layers can be used with this technique.
As indicated above, this represents a manufacturing technique for integrated devices using a dissolvable template that is low cost, and can be applied to nanoimprint techniques or to the pre-fabrication of portions of microdevices that are stored until their use is required. We now present a more detailed description of the best and preferred embodiments of the invention.
In step 550, initial layers are fabricated on the substrate until the point is reached where the patterning corresponding to the pre-fabricated template is required. In step 560, the carrier/template is removed from storage, and in step 570 the carrier is aligned to the substrate. In step 580, the template is transferred to the substrate and the carrier removed. This step can comprise a nanoimprint transfer method, or can also comprise a simple mechanical transfer facilitated by adhesives. Finally, in step 590, the substrate and template undergo processing which destroys the template and leaves the desired patterns on the substrate.
The template 600 with raised structures 612 is then created by coating the master with a conforming coating 610. A typical material for this is polyvinyl alcohol (PVA). This results in a coated master, as illustrated in
The template 610 is then removed from the master 600 and attached to a carrier 630, typically with a pre-formed sheet 620 to aid adhesion. The sheet 620-is connected to the carrier 630, made for example from a polyolefin sheet, with a suitable adhesive 625. The removal and attachment steps can actually be combined, by having a carrier 630 with adhesive 625 placed in contact with the back of the template 610 and removing them together.
The carrier 630 with template 610 is then stored until a microdevice on a partially fabricated substrate 100 is processed to the point where a layer 130, as shown in
The partially fabricated substrate 100 with layer 130 is then prepared for transfer by coating with an deformable layer 650. This layer may be fabricated from the same material used to make deformable layers 250 or 350 in other nanoimprint processes, but can also be another material. The carrier 630 with the appropriate template 610 is removed from storage and aligned with the partially fabricated substrate 100, as shown in
It can be seen that this process, in which the deposition of a metal layer in step 732 (in this case gold) as a barrier layer, can be altered to be create thicker structures as well. The flow chart for this altered process is shown in FIG. 8. For this example, the optional processing step 530 from
In step 832, a coating of material suitable for the fabrication of the nanostructures of a layer of a microdevice is deposited on the template. This would be a material for example that corresponds to the material layer 130 used in the other examples of this application. This can be a simple deposition process, or in turn may comprise many process steps, such as the initial sputtering of a seed layer, followed by the growth of a thicker film through electroplating. In step 834, additional processing can be carried out, which can include coating the metal with a polymer. In step 836, the combined materials can be further processed, e.g. with an etching or polishing process, so that certain portions of the coated metal are then exposed, while other portions are remain protected. An additional step 838 may then also be executed to protect the exposed material for storage.
Once created, these micro or nanostructures are transferred along with the dissolvable template in step 580. This step can comprise a nanoimprint transfer method, or can also comprise a simple mechanical transfer facilitated by adhesives.
We now describe each of these steps in more detail.
Creation of the Master
The initial step in this process is the creation of the original master containing the layout pattern. The essential element in the patterning of the master is that it comprises a layout of the structures to be replicated in a reproducible form. This is most simply done by forming the layout as a relief pattern on a rigid substrate. The relief pattern can be created by patterning and selectively etching a rigid material, such as a silicon wafer, or by patterning a material deposited on the rigid substrate, such as a chrome/chrome oxide layers on quartz (a conventional photomask blank). Although a disc shaped master has certain advantages for processing, masters of other shapes, such as squares, rectangles, hexagons, octagons, etc. can also be used.
The master can be fabricated using conventional microfabrication or nanofabrication techniques. The preferred method involves the use of a direct-write E-beam lithography system to expose patterns in photoresist on a silicon wafer, because of its high reliability and high resolution. This is illustrated in FIG. 9. In this process, an unpatterned material 900 (also sometimes called a “blank” is coated with a layer 910 polymer material, commonly called a resist, sensitive to electron beam exposure. The sensitive layer 910 is then exposed to patterns of electron beams 960, where the geometric arrangement and dose defines the pattern to be formed, as shown in FIG. 9 a. The exposed material of layer 910 is then chemically processed, or developed, and, the unexposed regions 912 are left on the substrate, as shown in
There are alternatives to electron-beam lithography to create a master with relief for replication. For example, one could use an optical lithography system with a mask to expose the initial pattern. Other methods include EUV or x-ray lithography or nanoimprint lithography. In fact, any lithographic technique could be used to fabricate the master as long as the process had suitable resolution and accuracy.
Although silicon is a convenient material to use for the master, there are many materials that could be used for the master other than silicon. Semiconductors that have well known patterning processes such as silicon, germanium, GaAs, SiGe, Silicon-on-insulator (SOI), GaN, GaP, InP, etc. can also be used as blanks. Metals such as stainless steel, iron, copper, or aluminum could also be used as blanks. Since only the topographic structure on the substrate is transferred, one could coat any rigid material with a polymer such a photoresist, expose and develop the photoresist, and use the resulting relief pattern as the master rather than go through the subsequent etching and stripping steps for the blank material. There are many well known processes for photoresist that can leave topographic profiles of various kinds.
Another material suitable for a master are quartz or glass plates coated with chromium/chrome oxide materials that form the opaque layer of a conventional photomask. This can be especially useful if a subsequent step requires exposure through the master for UV curing. This is illustrated in
Typically, the layer 940 can be manufactured from a mixture of chrome and chrome oxides typically and sold as photomask blanks. However, other materials, such as aluminum or gold, could also be chosen as ingredients in layer 940 for their particular thermal, electrical, or chemical properties. Likewise, the underlying substrate material 930 of a photomask blank is typically quartz, but other transparent materials such as glasses, hardened polymers, or transparent crystals such as CaF2 can be used for substrate 930 as well. For situations sensitive to dimensional change from temperature control, a material with a low thermal expansion coefficient such as Zerodur can be used for the substrate 930. One could also form or coat a thin-film material on top of the relief pattern to aid in subsequent processing steps.
The relief pattern can also be created by etching the rigid substrate of a quartz master directly. This can be done using commonly used lithography techniques for photomasks, and etching procedures to create topographic structures for phase-shifting masks. Such processing steps can be based on wet etching, in which the exposed surface is selectively removed through a reaction with a liquid chemical such as the quartz etchant hydrofluoric (HF) acid, or a dry etching procedure such as reactive ion etching (RIE) in a suitable plasma chamber. Other etchants specific to various other rigid substrate materials, such as the semiconductor materials listed above, can also be used.
It may be desirable to have a multi-level master, in which the several levels of topography are defined. This is illustrated in FIG. 10. This can be accomplished through a second set of lithographic exposure and development steps. Although E-beam lithography may be the preferred technique, it is easily recognized that any lithographic patterning step that can be aligned with the initial set of structures can be employed as well.
An example of this sequence is shown in FIG. 10. For this process, the original steps shown in
Although this has illustrated only a two-step process, it will be clear that this can be applied an indefinite number of times, with an indefinite number of arbitrarily defined layouts.
Although we have practiced this invention with masters formed on rigid substrate materials, it is clear to those skilled in the art that various degrees of rigidity may be allowed for different fabrication tolerances, and that flexible substrates with topographic structures may also be prepared to form masters for certain applications.
It will also be clear that any lithographic technique amenable to multiple exposure can be employed here as well. Although we have patterned our masters using silicon wafers and conventional e-beam lithography, extremely high resolution structures (e.g. 10-100 nm in size) can be obtained using X-ray lithography, EUV lithography, and even variations of optical lithography with a suitably high NA and the application of various resolution enhancement techniques. Even nanoimprint techniques can be used to fabricate the master.
Replication of the Master and Creation of the Template
Once the master has been created, the template that replicates the structures on the master must be created. This can be done by a variety of molding techniques, most of which comprise pouring a liquid on top of the master and allow the material to dry or harden. The main requirement is that the material be able to adequately fill the nanoscale topography structures on the master without the formation of bubbles or other voids between the master and the coating. Other desired properties include the ability to smoothly detach a smooth detachment from the mold, and the ability to prevent the introduction of foreign substances, i.e contaminants such as dust, that may introduce flaws. Still other desired properties include the ability to smoothly detach the template from the mold quickly for high throughput, and the ability to dry the mold without introducing thermal or mechanical distortions as part of the drying or curing process for good yield.
Many techniques can be used for this purpose, including spin coating, spray coating, droplet injection, puddle formation, electrodeposition techniques, etc. Spin coating has proven a very effective technique for creating thin conforming films. Typical spin coating is illustrated in FIG. 11. For spin coating, the master 900 is mounted on a chuck 1120 using a vacuum system 1110. A housing 1100 containing a motor spins the chuck and the master at various speeds, typically a few thousand RPM. Liquid material or solutions 1130 of the material to be molded can be poured from a container 1140 onto the surface of the spinning master. Excess material 1150 is thrown off the spinning master by centrifugal forces, leaving only a thin layer on the surface of the master. The residual solvent in this layer quickly evaporates, leaving only a thin layer of the molding material.
Alternatively, if a liquid material is used, spin coating may be used to create a uniform conformal coating, and the casting material may be polymerized or hardened with subsequent processing, or with reactions with the oxygen or other ambient gasses.
A material we have found that works well with this technique is polyvinyl alcohol (PVA). PVA is a water soluble compound, and so solutions can be created using purified water. Typical solutions can be obtained from a distributor such as Fiberlay of Seattle, Wash., USA, and sold under the brand names of Fiberlease or Partall Film #10 manufactured by Rexall. We have found the material of Fiberlease to work exceptionally well. The concentrations of Partall Film #10 in the Rexall MSDS are water (56-61%), ethyl alcohol (31-34%), Acetic Acid Ethenyl Ester, Polymer with Ethonol (7-8%), and butyl alcohol (1-2%). The material is usually used as a release layer for molding applications.
The PVA solution is then poured onto the spinning master, using for example spin speeds of 1800 RPM and 15 seconds on a conventional spin coater. If thicker films are desired, the procedure may be repeated, or slower speeds may be used. The resulting structures conform very well to the topographic structures on our masters, even for dimensions as small as 40 nm laterally. We have found that the three-dimensionally replication ability is excellent, that is the ability to replicate the pattern in the vertical dimension replicated to within 20 nm of 100 nm steps, and perhaps better, limited by our present ability to measure. The ultimate lateral resolution we have observed is not limited by the PVA, but rather by our ability to reliably fabricate structures this small in the master. Smaller structures can clearly be created in PVA.
An additional property of the PVA film is that, while the surface in contact with the master conforms to the topography of the master, the remaining film can be thick enough that the top surface remains uniform, i.e. does not vary with the underlying topography. The thickness can be adjusted by varying the concentration of the solution, by using solvents with different vapor pressures, by changing the spin speed, or by controlling the properties of the environment in which the coating takes place. Maintaining a contaminant free environment with temperature and pressure control allowing the best solvent evaporation conditions is important for ideal replication of the structures on the master.
Once the conforming layer has been created on the master, it must be removed. For thicker PVA films, the layer can simply be peeled off. This free-standing film, however, is usually only a few tens of microns thick, and can be delicate and difficult to store control.
Consequently, we have also used pre-formed discs of PVA to assist with the removal of the spin-coated PVA from the master. Pre-formed discs of PVA are commercially available from companies such as Shercon, Inc., of Santa Fe Springs, Calif. A process using these is illustrated in FIG. 12. In
In this embodiment of the invention, a master 600 coated with an initial dried film of PVA 610 is again spin-coated again with an additional layer of PVA 1205. Immediately, before the solvent is completely dried from the additional layer 1205, the pre-formed PVA disk 1210 mounted to the carrier 1230 with an adhesive 1220 is placed on the master 600 coated with PVA 610, as shown in
More generally, the carrier 1230 need not be a polymer film, but can be any material with a flat surface of the size and shape suitable for the size and shape of the layout on the master is created. This can be made from metal, quartz, a polymer, or any other material that can be stored without contaminating the film once transfer has occurred. Any solid and/or flexible material can serve this purpose, as long as it is coated with a suitable adhesive 1220 that allows the PVA coating to be removed from the master.
Creation of Structures on the Template
Once the PVA film that replicates the topography on the master has been created and attached to a carrier, material processing on this replicated structure or template can be carried out. This can be one of a variety of steps and will depend on the application.
The requirements for the subsequent processing on PVA is that (1) no reaction occurs with the PVA film, and (2) the processing steps not exceed a thermal decomposition temperature of the PVA film, roughly 230 C. Other template materials may have other physical and environmental requirements, depending on their material properties.
In one application, the PVA film may be coated with a metal film. This may be a simple coating to protect the template from contamination or decay.
A common process operation that works well with PVA is sputtering or evaporation of metal films. This is illustrated in FIG. 13. In a sputtering system, typically in a well controlled vacuum environment 1399, a target 1390 of the material desired provides a source for atoms or particles 1392 of the material to be deposited as a layer 1302 on the surface of the template 1208, mounted to a carrier 630. This is illustrated in
Once the film has been created, the carrier 630 with the template 1208 and film 1302 is removes, and can later be used for normal imprint lithography, as illustrated in
Sputtering tools are commonly available in processing labs, such as the Stanford University Nanofabrication Facility, or can be obtained commercially such as the sputter coater from Cressington Scientific Instruments, Inc., and distributed by Ted Pella, Inc. We have sputtered materials onto topographical PVA that include gold, copper, aluminum and chrome using simple sputtering tools. Other materials that can be sputtered or evaporated onto PVA include tungsten, Palladium, Platinum, Nickel, Nickel-Chromium. One can also evaporate materials such as Carbon. One can also perform a co-evaporation of superconductor materials such as Yttrium, Barium, and Cobolt.
Other methods of depositing films other than by evaporation/sputtering and still satisfy the requirements include chemical vapor deposition by hot filament methods. In these techniques, organic films can be deposited by passing an organic precursor vapor through a hot filament where it undergoes thermal fragmentation. The subsequent vapor products deposit in solid form on the PVA surface. With this method it is possible to keep the PVA at a low safe temperature during the film forming process. This method is commonly referred to as solventless deposition of photoresists, such as PMMA (poly methyl methacrylate).
Another method is through plasma enhanced chemical vapor deposition (PECVD) of thin films as long as the surface temperature is below the decomposition temperature of PVA. PECVD films are oxides, nitrides, oxynitrides, polysilicon, fluropolymers, and so forth.
Spin-coating of materials onto the PVA topographical can also be performed provided that the liquid not react or dissolve the PVA structure. Hence the material selection is limited to generally hydrophobic materials such as fluorine based compounds, for example, that do not have solvents that will react with PVA.
Further Processing of Structures on the Carrier
It may also be possible desirable to perform additional processing on the template. The layer on top of the PVA relief provides a convenient coating for the further development, and aids in flexibility since the subsequent processing steps will not interact directly with the delicate PVA material.
It may be desirable, for example, to use the PVA relief structures to actually preprocess a photoresist material. This material would then be transferred, along with the template, to the final substrate. To create a planar surface, at least two approaches may be used. The first involves spin-coating or depositing using other means an organic etch-resistant material such as photoresist on the barrier layer 1302. This material can form a thick coating that may be thinned using subsequent etching techniques.
This is illustrated in FIG. 14. In this FIGURE, a barrier layer 1302 is created from a sputtering source 1390 on a carrier 630 with a template 610 having indentations 612 as previously described, as shown in
In subsequent processing steps, the carrier 630 with these photoresist portions 1442 filling indentations 612 in the template 610 is aligned with a substrate 100 that has been partially manufactured and coated with a layer of material 130 to be patterned, as shown in
The partially fabricated substrate 100 with layer 130 and template 610 is then processed in such a manner that the template dissolves, leaving only the portions of the photoresist 1442 on the surface of the layer 130 to be processed, as shown in
It is clear that this additional processing can also comprise the creation of entire portions of nanostructures for microdevices, as long as a suitably reliable transfer mechanism is developed. In this case, the material deposited can be a much thicker layer, and additional processing steps can also be carried out as well.
Although such a layer can be fabricated entirely by sputtering techniques, another approach is to use a thin layer of sputtered metal as a seed layer, and then perform electroplating techniques to create a uniform film. Such electroplating techniques are useful with copper, aluminum, and gold seed layers.
One advantage that this technique has over other fabrication techniques for layers of microdevices is that the creation of this individual layer is independent of the layers that normally precede it in the fabrication process. This allows additional processing of this layer, and especially processing that might be incompatable with previous processing steps for the device, to be an option at this point.
Such optional processing can comprise an annealing step for a metal, sputtering of material mixtures for specific properties, creation of multiple layers with dimensions controlled for their anti-reflective optical properties, or the creation of a sequence of proteins for a biochip array. With the suitable choice of template and carrier material, processing at temperatures or under conditions not tolerated by the previously fabricated device layers can be done with impunity, as long as the process is compatible with the disposable template material.
This is illustrated in FIG. 15. In this case, if patterns equivalent to the master 600 of the previous example is to be achieved, the template 1510 must actually be inverted, that is, having raised areas 1512 corresponding to the indentations 612 of the previous templates 610.
A thin layer 1501 of the material to be processed is created from by sputtering from a target 1590 made from that material, as shown in
Typically, this is then coated with a layer of a polymer 1540, which is then processed by etching or polishing to expose only the raised portions 1512 of the film 1502, while leaving leftover material 1542 from the polymer film 1540 in the indentations, with the result shown in
After a partially fabricated substrate 100 has reached the point in its manufacture where this layer is required, the template 1510 with nanostructures 1512 and carrier 630 is removed from storage and aligned with the partially fabricated substrate 100, as shown in
The template is then dissolved, leaving only the polymer and the metal. Subsequent processing can also remove the polymer material and the excess portion of layer 1502, leaving only the portions 1532 of that correspond to the nanostructures desired in the device. These would, for example, correspond in size and shape to the structures 132 shown in the other figures.
An alternative process is shown in FIG. 16. Here, a thin layer 1601 of the material to be processed is created from by sputtering from a target 1590 made from that material, as shown in
This structure can then be further polished or etched to remove all but the portions 1632 of film 1602 that filled indentations 612, with the result shown in
After a partially fabricated substrate 100 has reached the point in its manufacture where this layer is required, the template 610 with nanostructures 1632 and carrier 630 is removed from storage and aligned with the partially fabricated substrate 100, as shown in
As a final step, the partially fabricated substrate 100 and template 610 with nanostructures 1632 are processed so that the template 610 dissolves, leaving only the nanostructures 1632 in specific locations on the partially fabricated substrate 100. This corresponds to the structures 132 formed on the partially fabricated substrate 100 in other processing sequences disclosed in this application.
Although we have originally conceived this as a technique for the prefabrication of layers or nanostructures for integrated circuits, this can apply to any technology which requires a patterning or lithographic technique. For integrated optical applications, certain dopants for altering fused silica waveguides may be pre-patterned and placed on the template. For biochip applications, certain proteins or DNA strands with specific sequences may be attached to the template and stored.
Storage of the Template
Once the material structure of the layer has been created on the template, it can be stored until it is needed. Although this may be only a few minutes, creating inventories of prefabricated device layers can avoid the queuing problems associated with “traffic jams” in wafer fabrication, and template and carrier properties, as well as the storage environment, should be chosen for chemical stability, as well as to minimize contamination from outgassing, to reduce physical deformation from temperature fluctuations, and to generally preserve the material on the template and carrier indefinitely.
Typically, the template will be enclosed in a sealed container, with controls for temperature, humidity, atmospheric content and pressure, and other variables controlled with the goal of maintaining mechanical and chemical integrity of the template and the structures fabricated on it.
The template or replicated structure may also be adhered, frontside down, to a glass or silicon disc as part of the storage process. The disc provides a more rigid support and can be utilized within a typical bonding or aligning tool as part of the transfer process. The adhesive in this case may be a water soluble glue, for example, such as polyvinyl alcohol. This adhesive would permit the effect separation of the replicated pattern from the hard support during the transfer procedure. The solid structure may then be placed into the solid container for transportation.
The template or replicated structure may also be adhered, backside down, to a glass or silicon disc as part of the storage process. This would allow the components to be faceside up during the transfer process.
It may also be desirable to dice the template into individual components or chips as part of the storage procedure. The dicing process enables more precise placement of the fabricated piece during the transfer to the final substrate.
Transfer of the Nanostructures to the Substrate.
Once there is a substrate that requires the transfer of the particular pattern replicated on the carrier, the suitable carrier is removed from storage. The surface of the substrate is prepared, if necessary, with a suitable adhesion promoter layer 1462 or 1562 made from a suitable material such as cyanoacrylate ester. This can be done using a simple deposition technique, such as applying drops of liquid onto the surface from a nozzle, or using a more uniform spin coating technique. Other adhesive materials, such as epoxies, acrylics, polyurathanes, photoresist, polyimides, low-k dielectrics, silicon dioxide, aluminum oxide, PZT, P(L)ZT, Ruthenium oxide, barium titanate, barium strontium titanate, cadmium oxide, hafnium oxide, indium tin oxide, lead titanate, lead zirconate, tantalum pentoxide, titanium oxide, tungstun oxide, zinc oxide, FSG, HSQ, HOSP, SILK, FEARE, PAE-2, probromide, paralene, PTFE, xero-gel, nano glass, and bizbenzocyclobutane, can also be used. When transferring nanostructures themselves instead of a pattern, some residue of this adhesion layer will typically remain between the substrate and the nanostructures, so care must be taken to insure that this residue is compatible with the material being transferred, and that the desired properties (e.g. electrical contact, etc.) of the interface be maintained.
Actual transfer of the patterned layer, or of the nanostructures themselves from the carrier to the substrate can occur in a number of ways. Pressure can be uniformly applied from one side, or pressure can start from one corner and be successively applied over the surface to insure air bubbles are not trapped between the carrier and substrate. Pressure can be intermediate or pressure can be applied and held for some period of time. High pressure may be required to insure good contact and uniformity. Adhesives that bind with pressure can be used, with the suitable application of pressure. Adhesives that bind with heat can be used, with the suitable application of heat. Adhesives that bind with UV photoexposure or curing can be used, along with the suitable application of UV exposure.
Once this step is finished, the template will adhere to the substrate, and the carrier itself can be removed. Because the patterning material (e.g. gold and polymer for our example) remains attached, the template can now be removed, leaving these other atructures attached to the substrate. For our example of PVA as a template material, this can be accomplished by simply dissolving the PVA from the surface with purified water. For other template materials, other solvents may be suitable. Additional steps of mild abrasion or wiping may also be used to selectively remove the template material, while leaving behind the metal and polymer combination.
Now that a patterned structure has been placed on the surface of the substrate, subsequent processing steps of deposition, etching, doping, or other chemical treatments can take place just as they would in any other printing technique.
Additional methods of adhesion can be deployed from the area of wafer bonding. Some methods include the thermal fusion of metal to metal or anodic bonding. In the case of gold barrier layer contacting the silicon surface. An initial adhesion of the PVA-metal layer is achieved by long-range forces. After the PVA is dissolved, the material structure may then be heated to high temperature to form a eutectic bond between the metal and silicon surface.
Another method involves directly heating a metallic interface between the template and substrate using an energetic laser beam. This forms a weld between the template and substrate upon cooling.
When the nanostructure itself has been fabricated on the template and transferred the adhesive layer on the substrate must be carefully chosen so that electrical properties are not impaired and good electrical contact with the substrate is achieved. Care must also be taken to align all the overlapping structures exactly. Although the alignment and transfer of several thousand or even millions of pre-fabricated metal nanostructure wires may be hard to achieve with good repeatability, there are applications (the repair of a single IC, for example), where the placement of a single nanowire can add value for an IC.
It will also be understood that the metal coated template or polymer coated template can also be used as a master itself in subsequent processes, including those found in the prior art nanoimprint techniques. In this case, the template is not destroyed, but again replicated, and the replicas can be used and destroyed without damage to the template.
Alignment of the Carrier and Substrate
To align and transfer the smooth template onto the substrate, standard wafer aligners and bonders are useful. Examples of commercially available aligner equipment that can be used to transfer the pattern onto the substrate include the EVG620 sold by the EV Group of Austria. Bonding equipment that can be coupled include the EVG520 bonder sold also by the EV Group. In this approach, alignment marks are recorded of the template. The gold or organic coating relief image creates sufficient contrast to determine the position of the template relative to the substrate. After recording the relative positions, servos manipulate the substrate to align and contact the template. A vacuum assisted bond helps to remove air bubbles between the template and substrate.
Additional Processing Options.
Further processing steps may be added to the above sequence to form specialized structures. It is possible to form a latent image on top of the PVA contoured metal surface replica prior to removal from the master surface.
It is also possible to develop the latent image pattern on the contoured metal surface. Subsequently, additional PVA solution may be spin-coated onto the developed pattern to form a multilayer structure of metal and organic material. The combined structure may then be removed from the surface of the master using the aforementioned techniques. The structure may then be transferred onto a second substrate or used directly.
While specific materials, coatings, carriers, substrates, and process steps have been set forth to describe and exemplify this invention and its preferred embodiment, such descriptions are not intended to be limiting. Modifications and changes may be apparent to those skilled in the art, and it is intended that this invention be limited only by the scope of the appended claims.
|Cited Patent||Filing date||Publication date||Applicant||Title|
|US5629579 *||Jun 7, 1995||May 13, 1997||International Business Machines Corporation||Process and structure of an integrated vacuum microelectronic device|
|US6518194 *||Dec 28, 2000||Feb 11, 2003||Thomas Andrew Winningham||Intermediate transfer layers for nanoscale pattern transfer and nanostructure formation|
|US6656568 *||May 30, 2000||Dec 2, 2003||The Regents Of The University Of Colorado||Ordered arrays of nanoclusters|
|1||Babak Heidari, Ivan Maximov, Eva-Lena Sarwe, & Lars Montelius, "Large scale nanolithography using nanoimprint lithography", Journal of Vacuum Science & Technology B vol. 17(6), Nov./Dec. 1999 pp. 2962-2964, USA.|
|2||James Wilbur, Amit Kumar, Hans Biebuyck, Enoch Kim, & George Whitesides, "Microcontact printing of self-assembled monolayers: applications in microfabrication", in Nanotechnology vol. 7, 1996, pp. 452-457, UK.|
|3||Jan Haisma, Martin Verheuen, Kees Van Den Heuvel, & Jan Van Den Berg, "Mold-assisted nanolithography: A process for reliable pattern replication", Journal of Vacuum Science & Technology B vol. 14(6), Nov./Dec. 1996 pp. 4124-4128, USA.|
|4||M. Colburn, S. Johnson, M. Stewart, S. Damle, T. Tailey, B. Choi, M. Wedlake, T. Michaelson, S.V. Sreenivasan, J. Ekerdt, & C. Grant Willson, "Step and flash imprint lithography: A new approach to high-resolution printing", in Emerging Lithographic Technologies III, Y. Vladimirsky, ed. Proceedings of the SPIE vol. 3676, Mar. 1999, pp. 379-389, USA.|
|5||P. Ruchhoeft, M. Colburn, B. Choi, H. Nounu, S. Johnson, T. Bailey, S. Damle, M. Stewart, J. Ekerdt, S.V. Sreenivasan, J.C. Wolfe, & C. Grant Willson, "Patterning curved surfaces: Template generation by ion beam proximity lithography and relief transfer by step and flash imprint lithography", Journal of Vacuum Science & Technology B vol. 17(6), Nov./Dec. 1996 pp. 2965-2969, USA.|
|6||Shinichi Ueki, Isao Ashida, & Hiroichi Kawahira, "New data processing of dummy pattern generation adaptive for CMP process", in Photomask and X-Ray mask Technology VI, H. Morimoto, ed. Proceedings of the SPIE vol. 3748, Apr. 1999 pp. 265-272, USA.|
|7||Stephen Chou, Peter Krauss, & Preston Renstrom. "Imprint Lithography with 25-Nanometer Resolution", Science vol. 272, Apr. 5, 1996 pp. 85-87, USA.|
|8||Stephen Chou, Peter Krauss, & Preston Renstrom. "Nanoimprint Lithography", Journal of Vacuum Science & Technology B vol. 14(6), Nov./Dec. 1996 pp. 4129-4133, USA.|
|9||Thomas Whidden, David Ferry, Michael Kozicki, Enoch Kim, Amit Kumar, James Wilbur, & George Whitesides, "Pattern transfer to silicon by microcontact and RIE", in Nanotechnology vol. 7, 1996, pp. 447-451, UK.|
|10||Younan Xia & George Whitesides, "Soft lithography", in Annual Reviews of Material Science vol. 28, 1998, pp. 153-184, USA.|
|Citing Patent||Filing date||Publication date||Applicant||Title|
|US7013562 *||Mar 31, 2003||Mar 21, 2006||Intel Corporation||Method of using micro-contact imprinted features for formation of electrical interconnects for substrates|
|US7067328 *||Sep 25, 2003||Jun 27, 2006||Nanosys, Inc.||Methods, devices and compositions for depositing and orienting nanostructures|
|US7074631||Mar 5, 2004||Jul 11, 2006||Luminus Devices, Inc.||Light emitting device methods|
|US7083993 *||Nov 26, 2003||Aug 1, 2006||Luminus Devices, Inc.||Methods of making multi-layer light emitting devices|
|US7084434||Nov 26, 2003||Aug 1, 2006||Luminus Devices, Inc.||Uniform color phosphor-coated light-emitting diode|
|US7098589||Nov 26, 2003||Aug 29, 2006||Luminus Devices, Inc.||Light emitting devices with high light collimation|
|US7138666||Sep 27, 2004||Nov 21, 2006||Luminus Devices, Inc.||Light emitting devices|
|US7140861||Apr 27, 2004||Nov 28, 2006||Molecular Imprints, Inc.||Compliant hard template for UV imprinting|
|US7166870||Nov 19, 2004||Jan 23, 2007||Luminus Devices, Inc.||Light emitting devices with improved extraction efficiency|
|US7166871||Dec 12, 2003||Jan 23, 2007||Luminus Devices, Inc.||Light emitting systems|
|US7170100||Aug 23, 2005||Jan 30, 2007||Luminus Devices, Inc.||Packaging designs for LEDs|
|US7179079||Jul 7, 2003||Feb 20, 2007||Molecular Imprints, Inc.||Conforming template for patterning liquids disposed on substrates|
|US7186656||Sep 21, 2004||Mar 6, 2007||Molecular Imprints, Inc.||Method of forming a recessed structure employing a reverse tone process|
|US7211831||Nov 26, 2003||May 1, 2007||Luminus Devices, Inc.||Light emitting device with patterned surfaces|
|US7229273||Jan 13, 2004||Jun 12, 2007||Board Of Regents, The University Of Texas System||Imprint lithography template having a feature size under 250 nm|
|US7262550||Nov 26, 2003||Aug 28, 2007||Luminus Devices, Inc.||Light emitting diode utilizing a physical pattern|
|US7270533||Jul 23, 2004||Sep 18, 2007||University Of Texas System, Board Of Regents||System for creating a turbulent flow of fluid between a mold and a substrate|
|US7274043||Jun 18, 2004||Sep 25, 2007||Luminus Devices, Inc.||Light emitting diode systems|
|US7301271||Feb 7, 2005||Nov 27, 2007||Luminus Devices, Inc.||Light-emitting devices with high light collimation|
|US7309225||Aug 13, 2004||Dec 18, 2007||Molecular Imprints, Inc.||Moat system for an imprint lithography template|
|US7344903||Jul 22, 2004||Mar 18, 2008||Luminus Devices, Inc.||Light emitting device processes|
|US7345416||Feb 7, 2005||Mar 18, 2008||Luminus Devices, Inc.||Patterned light emitting devices|
|US7357876||Nov 30, 2005||Apr 15, 2008||Molecular Imprints, Inc.||Eliminating printability of sub-resolution defects in imprint lithography|
|US7410904 *||Apr 24, 2003||Aug 12, 2008||Hewlett-Packard Development Company, L.P.||Sensor produced using imprint lithography|
|US7417367||May 18, 2005||Aug 26, 2008||Luminus Devices, Inc.||Patterned light emitting devices|
|US7432634||Feb 28, 2005||Oct 7, 2008||Board Of Regents, University Of Texas System||Remote center compliant flexure device|
|US7442336||Aug 21, 2003||Oct 28, 2008||Molecular Imprints, Inc.||Capillary imprinting technique|
|US7450311||Jun 18, 2004||Nov 11, 2008||Luminus Devices, Inc.||Optical display systems and methods|
|US7459845||Feb 7, 2005||Dec 2, 2008||Luminus Devices, Inc.||Light emitting devices|
|US7482640||Feb 9, 2006||Jan 27, 2009||Luminus Devices, Inc.||Electronic device contact structures|
|US7495260||Sep 14, 2006||Feb 24, 2009||Luminus Devices, Inc.||Light emitting devices|
|US7504268||May 25, 2005||Mar 17, 2009||Board Of Regents, The University Of Texas System||Adaptive shape substrate support method|
|US7504669||Jul 13, 2007||Mar 17, 2009||Luminus Devices, Inc.||Light emitting devices|
|US7521273||Dec 23, 2005||Apr 21, 2009||Luminus Devices, Inc.||Light emitting device methods|
|US7521854||Nov 26, 2003||Apr 21, 2009||Luminus Devices, Inc.||Patterned light emitting devices and extraction efficiencies related to the same|
|US7531025||Jul 23, 2004||May 12, 2009||Molecular Imprints, Inc.||Method of creating a turbulent flow of fluid between a mold and a substrate|
|US7535645||Oct 3, 2006||May 19, 2009||Luminus Devices, Inc.||Optical display systems and methods|
|US7635263||Mar 23, 2007||Dec 22, 2009||Molecular Imprints, Inc.||Chucking system comprising an array of fluid chambers|
|US7636999||Jan 31, 2005||Dec 29, 2009||Molecular Imprints, Inc.||Method of retaining a substrate to a wafer chuck|
|US7641840||May 17, 2007||Jan 5, 2010||Molecular Imprints, Inc.||Method for expelling gas positioned between a substrate and a mold|
|US7662299||Aug 30, 2005||Feb 16, 2010||Micron Technology, Inc.||Nanoimprint lithography template techniques for use during the fabrication of a semiconductor device and systems including same|
|US7665981||Aug 25, 2005||Feb 23, 2010||Molecular Imprints, Inc.||System to transfer a template transfer body between a motion stage and a docking plate|
|US7667238||Aug 23, 2005||Feb 23, 2010||Luminus Devices, Inc.||Light emitting devices for liquid crystal displays|
|US7670529||Nov 30, 2006||Mar 2, 2010||Molecular Imprints, Inc.||Method and system for double-sided patterning of substrates|
|US7670530||Jan 19, 2007||Mar 2, 2010||Molecular Imprints, Inc.||Patterning substrates employing multiple chucks|
|US7670534||Sep 21, 2005||Mar 2, 2010||Molecular Imprints, Inc.||Method to control an atmosphere between a body and a substrate|
|US7691313||Nov 30, 2006||Apr 6, 2010||Molecular Imprints, Inc.||Method for expelling gas positioned between a substrate and a mold|
|US7692207||Aug 23, 2005||Apr 6, 2010||Luminus Devices, Inc.||Packaging designs for LEDs|
|US7699598||Jan 31, 2007||Apr 20, 2010||Molecular Imprints, Inc.||Conforming template for patterning liquids disposed on substrates|
|US7719019||Apr 22, 2006||May 18, 2010||Luminus Devices, Inc.||Light emitting devices|
|US7727453||May 11, 2005||Jun 1, 2010||Molecular Imprints, Inc.||Step and repeat imprint lithography processes|
|US7733007||Jul 15, 2008||Jun 8, 2010||Luminus Devices, Inc.||Patterned light emitting devices|
|US7737450||Feb 8, 2006||Jun 15, 2010||Luminus Devices, Inc.||Light emitting diode systems|
|US7749915||Mar 31, 2008||Jul 6, 2010||International Business Machines Corporation||Protection of polymer surfaces during micro-fabrication|
|US7754524||Sep 14, 2005||Jul 13, 2010||Nanosys, Inc.||Methods, devices and compositions for depositing and orienting nanostructures|
|US7759407||Jul 22, 2005||Jul 20, 2010||Molecular Imprints, Inc.||Composition for adhering materials together|
|US7780893||Apr 3, 2007||Aug 24, 2010||Molecular Imprints, Inc.||Method of concurrently patterning a substrate having a plurality of fields and a plurality of alignment marks|
|US7785096||Feb 20, 2009||Aug 31, 2010||Molecular Imprints, Inc.||Enhanced multi channel alignment|
|US7785526||Jul 20, 2004||Aug 31, 2010||Molecular Imprints, Inc.||Imprint alignment method, system, and template|
|US7799585||Nov 17, 2008||Sep 21, 2010||Luminus Devices, Inc.||Light emitting device methods|
|US7802978||Mar 30, 2007||Sep 28, 2010||Molecular Imprints, Inc.||Imprinting of partial fields at the edge of the wafer|
|US7803308||Dec 1, 2005||Sep 28, 2010||Molecular Imprints, Inc.||Technique for separating a mold from solidified imprinting material|
|US7811505||Apr 7, 2005||Oct 12, 2010||Molecular Imprints, Inc.||Method for fast filling of templates for imprint lithography using on template dispense|
|US7829351||Aug 21, 2006||Nov 9, 2010||Nanosys, Inc.||Methods, devices and compositions for depositing and orienting nanostructures|
|US7854864 *||Apr 19, 2007||Dec 21, 2010||Konica Minolta Opto, Inc.||Method for manufacturing an optical film having a convexoconcave structure|
|US7854867||Apr 19, 2007||Dec 21, 2010||Molecular Imprints, Inc.||Method for detecting a particle in a nanoimprint lithography system|
|US7863071 *||Aug 21, 2007||Jan 4, 2011||Rf Micro Devices, Inc.||Combined micro-electro-mechanical systems device and integrated circuit on a silicon-on-insulator wafer|
|US7871895||Feb 19, 2008||Jan 18, 2011||International Business Machines Corporation||Method and structure for relieving transistor performance degradation due to shallow trench isolation induced stress|
|US7880872||Oct 8, 2009||Feb 1, 2011||Molecular Imprints, Inc.||Interferometric analysis method for the manufacture of nano-scale devices|
|US7906058||Dec 16, 2005||Mar 15, 2011||Molecular Imprints, Inc.||Bifurcated contact printing technique|
|US7915679||Sep 27, 2004||Mar 29, 2011||Luminus Devices, Inc.||Light-emitting devices including a nonperiodic pattern|
|US7920329||Jun 20, 2008||Apr 5, 2011||Aptina Imaging Corporation||Embedded lens for achromatic wafer-level optical module and methods of forming the same|
|US7934841||Nov 4, 2008||May 3, 2011||Luminus Devices, Inc.||Optical display systems and methods|
|US7939131||Aug 16, 2004||May 10, 2011||Molecular Imprints, Inc.||Method to provide a layer with uniform etch characteristics|
|US7981481||Dec 8, 2006||Jul 19, 2011||Molecular Imprints, Inc.||Method for controlling distribution of fluid components on a body|
|US7994521||Oct 9, 2008||Aug 9, 2011||Luminus Devices, Inc.||Light emitting devices|
|US8012395||May 12, 2009||Sep 6, 2011||Molecular Imprints, Inc.||Template having alignment marks formed of contrast material|
|US8071277||Dec 1, 2008||Dec 6, 2011||3M Innovative Properties Company||Method and system for fabricating three-dimensional structures with sub-micron and micron features|
|US8072134||Nov 26, 2007||Dec 6, 2011||Luminus Devices, Inc.||Light-emitting devices|
|US8076386||Feb 23, 2004||Dec 13, 2011||Molecular Imprints, Inc.||Materials for imprint lithography|
|US8110425||Mar 20, 2008||Feb 7, 2012||Luminus Devices, Inc.||Laser liftoff structure and related methods|
|US8142850||Mar 28, 2007||Mar 27, 2012||Molecular Imprints, Inc.||Patterning a plurality of fields on a substrate to compensate for differing evaporation times|
|US8158728||Aug 9, 2006||Apr 17, 2012||The University Of North Carolina At Chapel Hill||Methods and materials for fabricating microfluidic devices|
|US8162526||Jun 14, 2011||Apr 24, 2012||Rambus International Ltd.||Light-emitting devices for liquid crystal displays|
|US8183138||Feb 15, 2010||May 22, 2012||Micron Technology, Inc.||Methods for forming nanodots and/or a patterned material during the formation of a semiconductor device|
|US8211214||Feb 5, 2008||Jul 3, 2012||Molecular Imprints, Inc.||Single phase fluid imprint lithography method|
|US8215946||Oct 20, 2009||Jul 10, 2012||Molecular Imprints, Inc.||Imprint lithography system and method|
|US8217415||Jan 21, 2009||Jul 10, 2012||Luminus Devices, Inc.||Electronic device contact structures|
|US8251520||Apr 8, 2011||Aug 28, 2012||Luminus Devices, Inc.||Optical display systems and methods|
|US8263129||Dec 20, 2004||Sep 11, 2012||The University Of North Carolina At Chapel Hill||Methods for fabricating isolated micro-and nano-structures using soft or imprint lithography|
|US8268446||Sep 23, 2004||Sep 18, 2012||The University Of North Carolina At Chapel Hill||Photocurable perfluoropolyethers for use as novel materials in microfluidic devices|
|US8273413||Jul 2, 2009||Sep 25, 2012||International Business Machines Corporation||Methods of forming metal oxide nanostructures, and nanostructures thereof|
|US8282383 *||Feb 17, 2010||Oct 9, 2012||Molecular Imprints, Inc.||Method for expelling gas positioned between a substrate and a mold|
|US8366434 *||Jul 13, 2010||Feb 5, 2013||Molecular Imprints, Inc.||Imprint alignment method, system and template|
|US8382466||Mar 11, 2010||Feb 26, 2013||Applied Materials, Inc.||Large area dissolvable template lithography|
|US8405298||Nov 2, 2011||Mar 26, 2013||Luminus Devices, Inc.||Large emission area light-emitting devices|
|US8420124||Jul 6, 2007||Apr 16, 2013||The University Of North Carolina At Chapel Hill||Methods for fabricating isolated micro- and nano-structures using soft or imprint lithography|
|US8426872||Jun 8, 2011||Apr 23, 2013||Luminus Devices, Inc.||Light emitting diode systems including optical display systems having a microdisplay|
|US8444899||Apr 3, 2012||May 21, 2013||The University Of North Carolina At Chapel Hill||Methods and materials for fabricating microfluidic devices|
|US8455285||Jan 19, 2012||Jun 4, 2013||Luminus Devices, Inc.||Laser liftoff structure and related methods|
|US8499810||Aug 27, 2010||Aug 6, 2013||Transfer Devices Inc.||Molecular transfer lithography apparatus and method for transferring patterned materials to a substrate|
|US8513692||Jun 28, 2011||Aug 20, 2013||Luminus Devices, Inc.||Light emitting devices|
|US8535766||Oct 22, 2008||Sep 17, 2013||Applied Materials, Inc.||Patterning of magnetic thin film using energized ions|
|US8551578||Oct 22, 2008||Oct 8, 2013||Applied Materials, Inc.||Patterning of magnetic thin film using energized ions and thermal excitation|
|US8557351||Jul 22, 2005||Oct 15, 2013||Molecular Imprints, Inc.||Method for adhering materials together|
|US8647554||Jul 13, 2010||Feb 11, 2014||Molecular Imprints, Inc.||Residual layer thickness measurement and correction|
|US8703406||Jul 12, 2012||Apr 22, 2014||Transfer Devices Inc.||Method of forming large-area masters for replication of transfer lithography templates|
|US8771632||Aug 10, 2012||Jul 8, 2014||International Business Machines Corporation||Methods of forming metal oxide nanostructures, and nanostructures thereof|
|US8808808||Apr 12, 2007||Aug 19, 2014||Molecular Imprints, Inc.||Method for imprint lithography utilizing an adhesion primer layer|
|US8815622||Jun 3, 2013||Aug 26, 2014||Luminus Devices, Inc.||Laser liftoff structure and related methods|
|US8828298||Feb 21, 2013||Sep 9, 2014||Applied Materials, Inc.||Large area dissolvable template lithography|
|US8850980||Mar 30, 2007||Oct 7, 2014||Canon Nanotechnologies, Inc.||Tessellated patterns in imprint lithography|
|US8992992||Mar 28, 2013||Mar 31, 2015||The University Of North Carolina At Chapel Hill||Methods for fabricating isolated micro- or nano-structures using soft or imprint lithography|
|US9040090||Nov 7, 2006||May 26, 2015||The University Of North Carolina At Chapel Hill||Isolated and fixed micro and nano structures and methods thereof|
|US9219200||Feb 21, 2013||Dec 22, 2015||Luminus Devices, Inc.||Large emission area light-emitting devices|
|US9223202||Jul 9, 2007||Dec 29, 2015||Board Of Regents, The University Of Texas System||Method of automatic fluid dispensing for imprint lithography processes|
|US9246134||Jan 20, 2014||Jan 26, 2016||3M Innovative Properties Company||Lamination transfer films for forming articles with engineered voids|
|US9263078||Sep 17, 2013||Feb 16, 2016||Applied Materials, Inc.||Patterning of magnetic thin film using energized ions|
|US9341944||Feb 12, 2010||May 17, 2016||Asml Netherlands B.V.||Imprint lithography|
|US9419250||Dec 4, 2015||Aug 16, 2016||3M Innovative Properties Company||Methods of forming transfer films|
|US9472788||Aug 27, 2014||Oct 18, 2016||3M Innovative Properties Company||Thermally-assisted self-assembly method of nanoparticles and nanowires within engineered periodic structures|
|US9586385||Aug 27, 2014||Mar 7, 2017||3M Innovative Properties Company||Inorganic multilayer lamination transfer films|
|US20040047039 *||Jun 17, 2003||Mar 11, 2004||Jian Wang||Wide angle optical device and method for making same|
|US20040115279 *||Sep 5, 2003||Jun 17, 2004||The Ohio State University||Microfabrication of polymer microparticles|
|US20040163563 *||Feb 18, 2004||Aug 26, 2004||The Board Of Regents, The University Of Texas System||Imprint lithography template having a mold to compensate for material changes of an underlying liquid|
|US20040168586 *||Jan 13, 2004||Sep 2, 2004||Board Of Regents, The University Of Texas System||Imprint lithography template having a feature size under 250 nm|
|US20040168613 *||Feb 27, 2003||Sep 2, 2004||Molecular Imprints, Inc.||Composition and method to form a release layer|
|US20040187310 *||Mar 31, 2003||Sep 30, 2004||Charan Gurumurthy||Method of using micro-contact imprinted features for formation of electrical interconnects for substrates|
|US20040188381 *||Mar 25, 2003||Sep 30, 2004||Molecular Imprints, Inc.||Positive tone bi-layer imprint lithography method|
|US20040200411 *||Feb 11, 2004||Oct 14, 2004||The Board Of Regents, The University Of Texas System||Apparatus for fabricating nanoscale patterns in light curable compositions using an electric field|
|US20040206962 *||Nov 26, 2003||Oct 21, 2004||Erchak Alexei A.||Light emitting devices|
|US20040207310 *||Nov 26, 2003||Oct 21, 2004||Erchak Alexei A.||Light emitting devices|
|US20040207319 *||Nov 26, 2003||Oct 21, 2004||Erchak Alexei A.||Light emitting devices|
|US20040207320 *||Nov 26, 2003||Oct 21, 2004||Erchak Alexei A.||Light emitting devices|
|US20040207323 *||Nov 26, 2003||Oct 21, 2004||Erchak Alexei A.||Light emitting devices|
|US20040211754 *||Apr 25, 2003||Oct 28, 2004||Molecular Imprints, Inc.||Method of forming stepped structures employing imprint lithography|
|US20040214447 *||Apr 24, 2003||Oct 28, 2004||James Stasiak||Sensor produced using imprint lithography|
|US20040256764 *||Jun 17, 2003||Dec 23, 2004||University Of Texas System Board Of Regents||Method to reduce adhesion between a conformable region and a pattern of a mold|
|US20040259279 *||Mar 5, 2004||Dec 23, 2004||Erchak Alexei A.||Light emitting device methods|
|US20040259285 *||Mar 5, 2004||Dec 23, 2004||Erchak Alexei A.||Light emitting device methods|
|US20050040419 *||Sep 27, 2004||Feb 24, 2005||Luminus Devices, Inc., A Delaware Corporation||Light emitting devices|
|US20050040424 *||Jun 18, 2004||Feb 24, 2005||Erchak Alexei A.||Light emitting diode systems|
|US20050051698 *||Jul 7, 2003||Mar 10, 2005||Molecular Imprints, Inc.||Conforming template for patterning liquids disposed on substrates|
|US20050051787 *||Sep 27, 2004||Mar 10, 2005||Luminus Devices, Inc., A Delaware Corporation||Light emitting devices|
|US20050059179 *||Jul 22, 2004||Mar 17, 2005||Erchak Alexei A.||Light emitting device processes|
|US20050061773 *||Aug 21, 2003||Mar 24, 2005||Byung-Jin Choi||Capillary imprinting technique|
|US20050064344 *||Sep 18, 2003||Mar 24, 2005||University Of Texas System Board Of Regents||Imprint lithography templates having alignment marks|
|US20050066883 *||Sep 25, 2003||Mar 31, 2005||Nanosys, Inc.||Methods, devices and compositions for depositing and orienting nanostructures|
|US20050072757 *||Jul 23, 2004||Apr 7, 2005||University Of Texas System Board Of Regents||Method of creating a turbulent flow of fluid between a mold and a substrate|
|US20050074512 *||Jul 23, 2004||Apr 7, 2005||University Of Texas System Board Of Regents||System for creating a turbulent flow of fluid between a mold and a substrate|
|US20050084804 *||Oct 16, 2003||Apr 21, 2005||Molecular Imprints, Inc.||Low surface energy templates|
|US20050087754 *||Dec 12, 2003||Apr 28, 2005||Erchak Alexei A.||Light emitting systems|
|US20050087757 *||Nov 19, 2004||Apr 28, 2005||Luminus Devices, Inc., A Delaware Corporation||Light emitting devices|
|US20050098534 *||Nov 12, 2003||May 12, 2005||Molecular Imprints, Inc.||Formation of conductive templates employing indium tin oxide|
|US20050127375 *||Jun 18, 2004||Jun 16, 2005||Erchak Alexei A.||Optical display systems and methods|
|US20050145877 *||Feb 7, 2005||Jul 7, 2005||Luminus Devices, Inc. A Delaware Corporation||Light emitting devices|
|US20050151125 *||Feb 7, 2005||Jul 14, 2005||Luminus Device Inc., A Delaware Corporation||Light emitting devices|
|US20050160934 *||Jan 23, 2004||Jul 28, 2005||Molecular Imprints, Inc.||Materials and methods for imprint lithography|
|US20050167687 *||Feb 7, 2005||Aug 4, 2005||Luminus Devices, Inc.||Light emitting devices|
|US20050186774 *||Apr 18, 2005||Aug 25, 2005||Charan Gurumurthy||Method of using micro-contact imprinted features for formation of electrical interconnects for substrates|
|US20050187339 *||Feb 23, 2004||Aug 25, 2005||Molecular Imprints, Inc.||Materials for imprint lithography|
|US20050189676 *||Feb 27, 2004||Sep 1, 2005||Molecular Imprints, Inc.||Full-wafer or large area imprinting with multiple separated sub-fields for high throughput lithography|
|US20050208689 *||Apr 29, 2005||Sep 22, 2005||Luminus Devices, Inc., A Delaware Corporation||Light emitting devices|
|US20050211994 *||May 18, 2005||Sep 29, 2005||Luminus Devices, Inc., A Delaware Corporation||Light emitting devices|
|US20050236360 *||Apr 27, 2004||Oct 27, 2005||Molecular Imprints, Inc.||Compliant hard template for UV imprinting|
|US20050258435 *||Jul 22, 2005||Nov 24, 2005||Luminus Devices, Inc., A Delaware Corporation||Light-emitting devices|
|US20050260848 *||Sep 21, 2004||Nov 24, 2005||Molecular Imprints, Inc.||Method of forming a recessed structure employing a reverse tone process|
|US20050263077 *||May 25, 2005||Dec 1, 2005||Board Of Regents, The University Of Texas System||Adaptive shape substrate support method|
|US20050270312 *||Jun 2, 2005||Dec 8, 2005||Molecular Imprints, Inc.||Fluid dispensing and drop-on-demand dispensing for nano-scale manufacturing|
|US20060032437 *||Aug 13, 2004||Feb 16, 2006||Molecular Imprints, Inc.||Moat system for an imprint lithography template|
|US20060035029 *||Aug 16, 2004||Feb 16, 2006||Molecular Imprints, Inc.||Method to provide a layer with uniform etch characteristics|
|US20060038188 *||Aug 19, 2005||Feb 23, 2006||Erchak Alexei A||Light emitting diode systems|
|US20060043391 *||Aug 23, 2005||Mar 2, 2006||Erchak Alexei A||Light emitting devices for liquid crystal displays|
|US20060043400 *||Aug 23, 2005||Mar 2, 2006||Erchak Alexei A||Polarized light emitting device|
|US20060062922 *||Sep 23, 2004||Mar 23, 2006||Molecular Imprints, Inc.||Polymerization technique to attenuate oxygen inhibition of solidification of liquids and composition therefor|
|US20060063112 *||Sep 21, 2004||Mar 23, 2006||Molecular Imprints, Inc.||Pattern reversal employing thick residual layers|
|US20060063359 *||Sep 21, 2004||Mar 23, 2006||Molecular Imprints, Inc.||Patterning substrates employing multi-film layers defining etch differential interfaces|
|US20060111454 *||Feb 28, 2005||May 25, 2006||Molecular Imprints, Inc.||Composition to reduce adhesion between a conformable region and a mold|
|US20060113697 *||Nov 30, 2005||Jun 1, 2006||Molecular Imprints, Inc.||Eliminating printability of sub-resolution defects in imprint lithography|
|US20060115999 *||Nov 30, 2005||Jun 1, 2006||Molecular Imprints, Inc.||Methods of exposure for the purpose of thermal management for imprint lithography processes|
|US20060125154 *||Feb 3, 2006||Jun 15, 2006||Molecular Imprints, Inc.||Method to improve the flow rate of imprinting material employing an absorption layer|
|US20060126058 *||Nov 30, 2004||Jun 15, 2006||Molecular Imprints, Inc.||Interferometric analysis for the manufacture of nano-scale devices|
|US20060141648 *||Dec 23, 2005||Jun 29, 2006||Luminus Devices, Inc., A Delaware Corporation||Light emitting device methods|
|US20060163590 *||Aug 23, 2005||Jul 27, 2006||Erchak Alexei A||Packaging designs for LEDs|
|US20060172553 *||Jan 31, 2005||Aug 3, 2006||Molecular Imprints, Inc.||Method of retaining a substrate to a wafer chuck|
|US20060177535 *||Feb 4, 2005||Aug 10, 2006||Molecular Imprints, Inc.||Imprint lithography template to facilitate control of liquid movement|
|US20060192194 *||Feb 9, 2006||Aug 31, 2006||Luminus Devices, Inc.||Electronic device contact structures|
|US20060220055 *||Feb 8, 2006||Oct 5, 2006||Luminus Devices, Inc.||Light emitting diode systems|
|US20060266916 *||May 25, 2005||Nov 30, 2006||Molecular Imprints, Inc.||Imprint lithography template having a coating to reflect and/or absorb actinic energy|
|US20070000864 *||May 20, 2004||Jan 4, 2007||Japan Science And Technolgy Agency||Piezoelectric material working method|
|US20070021520 *||Jul 22, 2005||Jan 25, 2007||Molecular Imprints, Inc.||Composition for adhering materials together|
|US20070045640 *||Aug 23, 2005||Mar 1, 2007||Erchak Alexei A||Light emitting devices for liquid crystal displays|
|US20070049028 *||Aug 30, 2005||Mar 1, 2007||Micron Technology, Inc.||Nanoimprint lithography template techniques for use during the fabrication of a semiconductor device and systems including same|
|US20070064384 *||Aug 25, 2005||Mar 22, 2007||Molecular Imprints, Inc.||Method to transfer a template transfer body between a motion stage and a docking plate|
|US20070071582 *||Aug 25, 2005||Mar 29, 2007||Molecular Imprints, Inc.||System to transfer a template transfer body between a motion stage and a docking plate|
|US20070074635 *||Aug 25, 2005||Apr 5, 2007||Molecular Imprints, Inc.||System to couple a body and a docking plate|
|US20070114546 *||Sep 14, 2006||May 24, 2007||Luminus Devices, Inc.||Light emitting devices|
|US20070115556 *||Oct 3, 2006||May 24, 2007||Luminus Devices, Inc.||Optical display systems and methods|
|US20070122942 *||Jan 31, 2007||May 31, 2007||Molecular Imprints, Inc.||Conforming Template for Patterning Liquids Disposed on Substrates|
|US20070126156 *||Dec 1, 2005||Jun 7, 2007||Molecular Imprints, Inc.||Technique for separating a mold from solidified imprinting material|
|US20070132152 *||Nov 30, 2006||Jun 14, 2007||Molecular Imprints, Inc.||Method and System for Double-Sided Patterning of Substrates|
|US20070141271 *||Dec 8, 2006||Jun 21, 2007||Molecular Imprints, Inc.||Method for controlling distribution of fluid components on a body|
|US20070170617 *||Jan 19, 2007||Jul 26, 2007||Molecular Imprints, Inc.||Patterning Substrates Employing Multiple Chucks|
|US20070190200 *||Mar 23, 2007||Aug 16, 2007||Molecular Imprints, Inc.||Chucking system comprising an array of fluid chambers|
|US20070228589 *||May 17, 2007||Oct 4, 2007||Molecular Imprints, Inc.||Method for expelling gas positioned between a substrate and a mold|
|US20070228593 *||Mar 30, 2007||Oct 4, 2007||Molecular Imprints, Inc.||Residual Layer Thickness Measurement and Correction|
|US20070228608 *||Mar 30, 2007||Oct 4, 2007||Molecular Imprints, Inc.||Preserving Filled Features when Vacuum Wiping|
|US20070231981 *||Mar 28, 2007||Oct 4, 2007||Molecular Imprints, Inc.||Patterning a Plurality of Fields on a Substrate to Compensate for Differing Evaporation Times|
|US20070243655 *||Mar 29, 2007||Oct 18, 2007||Molecular Imprints, Inc.||Self-Aligned Process for Fabricating Imprint Templates Containing Variously Etched Features|
|US20070252293 *||Apr 19, 2007||Nov 1, 2007||Konica Minolta Opto, Inc.||Method for manufacturing an optical film having a convexoconcave structure, optical film, wire grid polarizer and retardation film|
|US20070257601 *||Jul 12, 2007||Nov 8, 2007||Luminus Devices, Inc.||Light-emitting diode utilizing a physical pattern|
|US20070264481 *||Nov 7, 2006||Nov 15, 2007||Desimone Joseph M||Isolated and fixed micro and nano structures and methods thereof|
|US20070275193 *||Feb 14, 2005||Nov 29, 2007||Desimone Joseph M||Functional Materials and Novel Methods for the Fabrication of Microfluidic Devices|
|US20080023693 *||Sep 14, 2005||Jan 31, 2008||Nanosys, Inc.||Methods, devices and compositions for depositing and orienting nanostructures|
|US20080099777 *||Dec 30, 2005||May 1, 2008||Luminus Devices, Inc.||Light-emitting devices and related systems|
|US20080110557 *||Nov 15, 2006||May 15, 2008||Molecular Imprints, Inc.||Methods and Compositions for Providing Preferential Adhesion and Release of Adjacent Surfaces|
|US20080141862 *||Feb 5, 2008||Jun 19, 2008||Molecular Imprints, Inc.||Single Phase Fluid Imprint Lithography Method|
|US20080157111 *||Nov 26, 2007||Jul 3, 2008||Luminus Devices, Inc.||Light-emitting devices|
|US20080181958 *||Jul 17, 2007||Jul 31, 2008||Rothrock Ginger D||Nanoparticle fabrication methods, systems, and materials|
|US20080199816 *||Jul 9, 2007||Aug 21, 2008||The University Of Texas Board Of Regents||Method of Automatic Fluid Dispensing for Imprint Lithography Processes|
|US20080220613 *||Mar 31, 2008||Sep 11, 2008||Ute Drechsler||Protection of polymer surfaces during micro-fabrication|
|US20080248602 *||Mar 17, 2008||Oct 9, 2008||Luminus Devices, Inc.||Light emitting device processes|
|US20080274574 *||Mar 20, 2008||Nov 6, 2008||Luminus Devices, Inc.||Laser liftoff structure and related methods|
|US20080305440 *||Mar 20, 2008||Dec 11, 2008||The Board Of Regents, The University Of Texas System||Apparatus for fabricating nanoscale patterns in light curable compositions using an electric field|
|US20080309900 *||Jun 12, 2007||Dec 18, 2008||Micron Technology, Inc.||Method of making patterning device, patterning device for making patterned structure, and method of making patterned structure|
|US20090014742 *||Jul 15, 2008||Jan 15, 2009||Luminus Devices, Inc.||Patterned light emitting devices|
|US20090023239 *||Sep 24, 2008||Jan 22, 2009||Luminus Devices, Inc.||Light emitting device processes|
|US20090027603 *||Feb 3, 2006||Jan 29, 2009||Samulski Edward T||Low Surface Energy Polymeric Material for Use in Liquid Crystal Displays|
|US20090028910 *||Dec 20, 2004||Jan 29, 2009||University Of North Carolina At Chapel Hill||Methods for Fabrication Isolated Micro-and Nano-Structures Using Soft or Imprint Lithography|
|US20090037004 *||Sep 11, 2008||Feb 5, 2009||Molecular Imprints, Inc.||Method and System to Control Movement of a Body for Nano-Scale Manufacturing|
|US20090061152 *||Jul 6, 2007||Mar 5, 2009||Desimone Joseph M||Methods for fabricating isolated micro- and nano- structures using soft or imprint lithography|
|US20090121243 *||Oct 9, 2008||May 14, 2009||Luminus Devices, Inc.||Light emitting devices|
|US20090121657 *||Nov 4, 2008||May 14, 2009||Luminus Devices, Inc.||Optical display systems and methods|
|US20090162799 *||Dec 1, 2008||Jun 25, 2009||3M Innovative Properties Company||Method and system for fabricating three-dimensional structures with sub-micron and micron features|
|US20090165320 *||Jul 6, 2007||Jul 2, 2009||Desimone Joseph M||Photocurable perfluoropolyethers for use as novel materials in microfluidic devices|
|US20090169662 *||Feb 20, 2009||Jul 2, 2009||Molecular Imprints, Inc.||Enhanced Multi Channel Alignment|
|US20090199768 *||Feb 12, 2008||Aug 13, 2009||Steven Verhaverbeke||Magnetic domain patterning using plasma ion implantation|
|US20090206442 *||Feb 19, 2008||Aug 20, 2009||International Business Machines Corporation||Method and structure for relieving transistor performance degradation due to shallow trench isolation induced stress|
|US20090230545 *||Jan 21, 2009||Sep 17, 2009||Luminus Devices, Inc.||Electronic device contact structures|
|US20090250840 *||May 12, 2009||Oct 8, 2009||Molecular Imprints, Inc.||Template Having Alignment Marks Formed of Contrast Material|
|US20090304992 *||Aug 8, 2006||Dec 10, 2009||Desimone Joseph M||Micro and Nano-Structure Metrology|
|US20090316273 *||Jun 20, 2008||Dec 24, 2009||Micron Technology, Inc.||Embedded lens for achromatic wafer-level optical module and methods of forming the same|
|US20100075468 *||Aug 21, 2006||Mar 25, 2010||Nanosys, Inc.||Methods, devices and compositions for depositing and orienting nanostructures|
|US20100096256 *||Oct 22, 2008||Apr 22, 2010||Omkaram Nalamasu||Patterning of magnetic thin film using energized ions and thermal excitation|
|US20100098873 *||Oct 22, 2008||Apr 22, 2010||Applied Materials, Inc.||Patterning of magnetic thin film using energized ions|
|US20100139862 *||Feb 12, 2010||Jun 10, 2010||Asml Netherlands B.V.||Imprint lithography|
|US20100143521 *||Feb 17, 2010||Jun 10, 2010||Molecular Imprints, Inc.||Method for Expelling Gas Positioned Between a Substrate and a Mold|
|US20100151031 *||Mar 24, 2008||Jun 17, 2010||Desimone Joseph M||Discrete size and shape specific organic nanoparticles designed to elicit an immune response|
|US20100230039 *||Mar 11, 2010||Sep 16, 2010||Applied Materials, Inc.||Large area dissolvable template lithography|
|US20100278955 *||Jul 13, 2010||Nov 4, 2010||Molecular Imprints, Inc.||Imprint Alignment Method, System and Template|
|US20110002841 *||Jul 2, 2009||Jan 6, 2011||International Business Machines Corporation||Methods of Forming Metal Oxide Nanostructures, and Nanostructures Thereof|
|US20110058150 *||Aug 27, 2010||Mar 10, 2011||Schaper Charles D||Molecular transfer lithography apparatus and method for transferring patterned materials to a substrate|
|WO2007089050A1 *||Jan 31, 2006||Aug 9, 2007||Seoul National University Industry Foundation||Method of forming fine channel using electrostatic attraction and method of forming fine structure using the same|
|WO2007125857A1||Apr 23, 2007||Nov 8, 2007||Konica Minolta Opto, Inc.||Process for producing optical film with uneven structure, optical film, wire grid polarizer, and retardation film|
|U.S. Classification||438/758, 438/942|
|International Classification||B82B3/00, H01L21/027, B81C1/00, G03F7/09, G03F7/00|
|Cooperative Classification||B82Y10/00, B82Y40/00, Y10S438/942, G03F7/0002, G03F7/091, B81C1/0046, B29C33/52|
|European Classification||B82Y10/00, B82Y40/00, B29C33/52, G03F7/00A, G03F7/09A, B81C1/00F2F|
|Jan 21, 2003||AS||Assignment|
Owner name: BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UN
Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:SCHAPER, CHARLES DANIEL;REEL/FRAME:013660/0556
Effective date: 20020917
|Jan 14, 2004||AS||Assignment|
Owner name: UNITED STATES AIR FORCE, OHIO
Free format text: CONFIRMATORY LICENSE;ASSIGNOR:STANDORD UNIVERSITY;REEL/FRAME:014250/0573
Effective date: 20020813
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|Apr 19, 2011||CC||Certificate of correction|
|Aug 1, 2012||FPAY||Fee payment|
Year of fee payment: 8
|Aug 1, 2016||FPAY||Fee payment|
Year of fee payment: 12