US7057655B1 - Amplifying solid-state imaging device, and method for driving the same - Google Patents

Amplifying solid-state imaging device, and method for driving the same Download PDF

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US7057655B1
US7057655B1 US09/417,097 US41709799A US7057655B1 US 7057655 B1 US7057655 B1 US 7057655B1 US 41709799 A US41709799 A US 41709799A US 7057655 B1 US7057655 B1 US 7057655B1
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row
signal
pixels
pixel
reset
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Masayuki Masuyama
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Panasonic Corp
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Matsushita Electric Industrial Co Ltd
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Assigned to MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. reassignment MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MATSUSHITA ELECTRONICS CORPORATION
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Priority to US12/428,143 priority patent/US7821556B2/en
Priority to US12/884,673 priority patent/US8218048B2/en
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    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/60Noise processing, e.g. detecting, correcting, reducing or removing noise
    • H04N25/63Noise processing, e.g. detecting, correcting, reducing or removing noise applied to dark current
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/60Noise processing, e.g. detecting, correcting, reducing or removing noise
    • H04N25/67Noise processing, e.g. detecting, correcting, reducing or removing noise applied to fixed-pattern noise, e.g. non-uniformity of response
    • H04N25/671Noise processing, e.g. detecting, correcting, reducing or removing noise applied to fixed-pattern noise, e.g. non-uniformity of response for non-uniformity detection or correction
    • H04N25/677Noise processing, e.g. detecting, correcting, reducing or removing noise applied to fixed-pattern noise, e.g. non-uniformity of response for non-uniformity detection or correction for reducing the column or line fixed pattern noise
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/71Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
    • H04N25/745Circuitry for generating timing or clock signals

Definitions

  • An amplifying solid-state imaging device as well as a CCD solid-state imaging device, adopts “electronic shuttering” as a sort of electronic diaphragm.
  • the “electronic shuttering” operation is performed to reset a signal charge storage section just before a photodiode in each pixel starts to store the signal charge, which has been created by the photodiode itself through photoelectric conversion, thereby making the charge storage period of the photodiode variable.
  • the signal charge stored in pixels is read out on a row-by-row basis responsive to a horizontal sync signal.
  • the electronic shuttering operation is also performed on the row-by-row basis (which is called a “focal plane operation”).
  • the electronic shuttering operation is performed on a certain row and then the signal charge starts to be stored. And after a predetermined time has passed since the start of charge storage, a signal readout operation is performed. When the readout operation is started, the storage section is reset again for the readout.
  • the “predetermined time” defines the charge storage period of each photodiode and is of an equal length for every row. Accordingly, supposing each pixel is receiving light with the same intensity, the same quantity of charge will be stored on each and every row theoretically speaking.
  • FIG. 1 illustrates a schematic configuration of a conventional amplifying solid-state imaging device 100 .
  • an imaging section is made up of a plurality of pixels 102 arranged in columns and rows. Each of these pixels 102 includes a photodiode for storing charge in a quantity corresponding to the amount of light received.
  • a row select encoder 103 for selecting one pixel row after another from the imaging section is disposed on the right-hand side of the imaging section.
  • the number of pixel rows is m, which is equal to or larger than two.
  • the row select encoder 103 includes the number m of row selectors that are connected in series to each other.
  • the row selecting operation for readout (i.e., an ordinary row selection) is also performed sequentially by the number m of row selectors.
  • the interval between the electronic shuttering and readout operations is preset at the same length for every row.
  • the signal read out from a selected row is supplied by a column select driver 107 to an output buffer 111 , from which the signal is output as a pixel signal.
  • the photodiode within each pixel 102 has the potential thereof compulsorily reset at a predetermined level (which will be called a “reset potential” in this specification).
  • the reset potential is supposed to be the same in each and every pixel 102 as a matter of principle.
  • the present inventors found that since a reset potential on a certain row might shift into a different reset potential on another row, horizontal noise might appear on the screen as a result. The horizontal noise always appears on a particular set of rows on the screen, thus degrading the resultant image quality.
  • An object of the present invention is providing (1) an amplifying solid-state imaging device that can substantially eliminate the horizontal noise resulting from the electronic shuttering operation and (2) a method for driving the device.
  • FIG. 1 illustrates a schematic configuration of a conventional amplifying solid-state imaging device.
  • FIG. 3 illustrates a configuration for an amplifying solid-state imaging device according to a first embodiment of the present invention.
  • FIG. 5 is a circuit diagram illustrating a row selector associated with an i th row and included in the row select encoder shown in FIG. 3 .
  • FIG. 6 is a timing diagram illustrating some control signals associated with the i th and n th rows in the device shown in FIG. 3 , where 1 ⁇ i ⁇ m and n ⁇ i.
  • FIGS. 7 , 8 , 9 and 10 illustrate an equivalent circuit of a pixel on the i th row, a schematic cross-sectional structure of the resetting device and a distribution of surface potentials at the times a- 1 , b- 1 , c and d shown in FIG. 6 , respectively.
  • FIG. 11 is a timing diagram illustrating control signals supplied by the row selectors within the row select encoder in the conventional device shown in FIG. 1 including no dummy pixels.
  • FIGS. 13 and 14 illustrate an equivalent circuit of a pixel on the i th row, a schematic cross-sectional structure of the resetting device and a distribution of surface potentials at the times a- 2 and b- 2 shown in FIG. 12 , respectively.
  • FIG. 15 illustrates a configuration for an amplifying solid-state imaging device according to a second embodiment of the present invention.
  • FIG. 16 is a circuit diagram illustrating respective configurations of the row selector associated with the m th row and the dummy row selector in the device shown in FIG. 15 .
  • FIG. 17 is a timing diagram illustrating control signals supplied from the row selectors and the dummy row selector in the device shown in FIG. 15 .
  • FIG. 18 illustrates a configuration for an amplifying solid-state imaging device according to a third embodiment of the present invention.
  • FIG. 19 is a circuit diagram illustrating respective configurations of the row selector associated with the m th row and the dummy row selector in the device shown in FIG. 18 .
  • FIG. 20 is a timing diagram illustrating control signals supplied from the row selectors and the dummy row selector in the device shown in FIG. 18 .
  • FIG. 21 is a circuit diagram illustrating another exemplary pixel configuration usable according to the present invention.
  • FIGS. 2 and 3 illustrate a configuration of an amplifying solid-state imaging device 1 according to a first exemplary embodiment of the present invention.
  • the amplifying solid-state imaging device 1 includes a plurality of pixels 2 arranged in matrix, i.e., in columns and rows, within a semiconductor region, which may be a region in a silicon substrate. Although a 2 ⁇ 2 matrix of pixels is illustrated in FIG. 2 , a great number of pixels are actually formed in columns and rows.
  • the respective numbers of rows and columns of pixels provided within an effective pixel area to generate pixel signals are represented by m and l (where m and l are both positive integers equal to or larger than two).
  • m and l are both within the range from 50 to 2,000.
  • m and l are supposed to be 480 and 640, respectively.
  • Each of these pixels 2 includes a signal storage section, which in turn includes a photoelectric transducer like a photodiode. Responsive to light incident on the photoelectric transducer, each signal storage section can store information, corresponding to the intensity of the light, as a “potential or a quantity of charge”. Although each photoelectric transducer is in a first potential state (reset potential) during resetting, a state transition subsequently takes place from the first into a second potential state as a result of creation and storage of charge responsive to the incident light.
  • the second potential state is represented by a level variable with the intensity of the incoming light.
  • the “second potential state” is variable with the total amount of light that has been incident on the photoelectric transducer after resetting was performed as the electronic shuttering operation. A more detailed internal configuration of each pixel 2 will be described later.
  • the device 1 includes a plurality of lines and circuits for selecting and accessing a particular one of the pixels 2 . These lines, circuits, transistors constituting respective pixels and so on are formed on a substrate by various techniques similar to well known ones for fabricating a semiconductor integrated circuit.
  • a row select encoder 3 is electrically connected to all of the pixels 2 through plural pairs of reset and row select lines 4 and 5 .
  • Each single reset line 4 is connected to all of the pixels 2 belonging to a single row associated with the reset line 4 .
  • each single row select line 5 is also connected to all of the pixels 2 belonging to a single row associated with the row select line 5 . That is to say, the number of the pairs of lines 4 and 5 , extending from the row select encoder 3 , is equal to the number of the pixel rows in the matrix.
  • the row select encoder 3 selectively changes the potential on a row select line 5 associated with the particular row from logically “Low” into “High”, for example.
  • the potentials on the other row select lines 5 associated with the remaining rows are held at logically “Low”.
  • a potential, corresponding to the logically “High” state is supplied to the respective control terminals of switching devices in all the pixels 2 included in the particular row, thereby turning these switching devices ON.
  • potentials, corresponding to the information that has been stored in respective signal storage sections on the selected row appear on associated vertical signal lines 6 .
  • the signal storage section of each pixel 2 is electrically disconnected from an associated vertical signal line 6 on the remaining rows other than the selected one.
  • the information which has been stored in the signal storage sections of all the pixels 2 included in a selected row, is output to all the corresponding vertical signal lines 6 and then read out column by column by a horizontal shift register (column select driver) 7 .
  • the information is ultimately output as a signal through an output buffer (output amplifier) 11 .
  • the pixel 2 includes: a photodiode 21 functioning as a signal storage section; and an MOS transistor 23 , whose gate electrode 22 is connected to the photodiode 21 .
  • the photodiode 21 is implementable as a pn junction diode formed in a silicon substrate, for example.
  • the MOS transistor 23 may have an ordinary MOS structure including channel, source and drain regions within a silicon substrate, for example.
  • the MOS transistor 23 functions as a driver (amplifier) in a signal detector, which plays an important role in amplifying and reading out a tiny variation in the potential state of the photodiode 21 .
  • no capacitor is particularly inserted between the gate electrode 22 of the MOS transistor 23 and the photodiode 21 .
  • a capacitor may be inserted therebetween.
  • the pixel 2 further includes a resetting device 24 and a switching device 25 .
  • the resetting device 24 is an MOS transistor (reset transistor), whose gate electrode is connected to an associated reset line 4 .
  • the drain of the MOS transistor 24 is connected to a first power supply terminal (V DD ) 26 through a power line 260 , and the source thereof is connected to the photodiode 21 .
  • V DD first power supply terminal
  • the resetting devices 24 on the selected row turn ON.
  • the charge stored on the photodiodes 21 is drained toward the first power supply terminal (V DD ) 26 through the power line 260 .
  • the potential at each photodiode 21 i.e., that at the gate electrode 22 of the driver 23 , is compulsorily reset at a certain value determined by the supply potential (V DD ) at the first power supply terminal 26 .
  • V DD supply potential
  • the potential at the photodiode 21 gradually varies with the intensity of light received by the pixel 2 . It is because carriers are created due to the photoelectric conversion function of the photodiode 21 and then stored in the photodiode 21 that the potential state of the photodiode 21 is variable with the incidence of light.
  • the switching device 25 in each pixel 2 is an MOS transistor, whose gate electrode is connected to an associated row select line 5 .
  • the drain of the MOS transistor 25 is connected to the source of the driver 23 and the source thereof is connected to an associated vertical signal line 6 .
  • the switching device 25 turns ON.
  • the potential on the vertical signal line 6 is variable with the potential state of the photodiode 21 (i.e., the potential at the gate electrode 22 of the MOS transistor 23 ). Accordingly, the potential on the vertical signal line 6 has a level variable with the second potential state at the signal storage section of the pixel 2 .
  • the driver 23 belonging to the selected row, and an associated load device 27 are connected in series to each other between the first and second power supply terminals (V DD ) 26 and (V SS ) 28 to form a source follower circuit.
  • a single load device 27 is allocated to each column, and each driver 23 on the selected row is electrically connected to an associated load device 27 via an associated switching device 25 .
  • Such a source follower circuit can amplify the quantity of signal charge stored in each pixel and then output the charge as a potential signal.
  • the load devices 27 corresponding to all the columns will sometimes be collectively called a “load circuit” 30 .
  • the same power is supplied from the first power supply terminal (V DD ) 26 through the common power line 260 to the photodiodes 21 for the resetting purpose, and to the source follower circuits.
  • the device 1 additionally includes at least one dummy pixel row, which is provided separately from the number m of ordinary pixel rows.
  • the number m of pixel rows are located within an effective pixel area and make up an imaging section.
  • the at least one dummy pixel row is located out of the effective pixel area and makes up a dummy imaging section.
  • the number of the dummy pixel row(s) is obtained by subtracting m from the number of horizontal sync signals included in one frame interval.
  • the number of the horizontal sync signals per frame interval will be called an “HD number”.
  • the number of the dummy pixel row(s) is 45.
  • each of the pixels belonging to every dummy pixel row has totally the same configuration as each pixel located within the effective pixel area. That is to say, each pixel on every dummy pixel row also includes the photodiode 21 and transistors just like the pixel 2 shown in FIG. 2 , and is also connected to the load circuit 30 and to the column select driver 7 through the associated vertical signal line 6 .
  • the ordinary imaging section cannot be distinguished from the dummy imaging section by appearances.
  • the resetting and switching devices 24 and 25 included in the pixels belonging to the dummy pixel row receive a control signal and operate normally. Turn the switching device 250 N within a dummy pixel, and a current flows from the first power supply terminal (V DD ) 26 through the driver 23 and switching device 25 within the dummy pixel, vertical signal line 6 and load device 27 into the second power supply terminal (V SS ) 28 as shown in FIG. 2 .
  • each dummy pixel does not have to store signal information responsive to incoming light. Instead, each dummy pixel has only to allow the current to flow from the first power supply terminal (V DD ) 26 through the driver 23 , switching device 25 , vertical signal line 6 and load device 27 into the second power supply terminal (V SS ) 28 by turning the switching device 250 N just like an ordinary pixel. Accordingly, the dummy pixels need not perform photoelectric conversion function, either. In view of their intended function, the dummy pixels may be covered with a light blocking film and need not include any photodiode.
  • the role expected of the dummy pixel row is to equalize the reset potentials among all the rows within the imaging section by preventing a reset state from being varied on a pixel row, on which resetting is being carried out as the electronic shuttering operation.
  • This function of the dummy pixel row will be described in further detail later. Before that, it will be described with reference to FIG. 4 how the device 1 is driven.
  • FIG. 4 is a timing diagram illustrating control signals supplied by the row selectors included in the row select encoder 3 .
  • the waveform of the horizontal sync signal HD is illustrated.
  • the row selectors send the row select signals SL 1 through SL m+3 and reset signals RS 1 through RS m+3 to associated rows.
  • FIG. 4 only the signals associated with just a few rows are illustrated. It is noted that the time progresses rightward in FIG. 4 .
  • VSIN is a signal getting a row selecting operation for signal reading started by the row select encoder 3 .
  • VSSIN is a signal getting a row selecting operation for electronic shuttering started by the row select encoder 3 .
  • the signal VSIN is input to the row select encoder 3 once a frame interval, while the signal VSSIN is input to the row select encoder 3 at least once a frame interval.
  • CSL is a selection sync signal defining respective times the readout operation should be performed, while CRS is a reset sync signal defining respective times the reset operation should be performed.
  • the row select encoder 3 receives these signals and generates various types of control signals in synchronism with the horizontal sync signal HD, thereby performing the electronic shuttering and row selecting operations.
  • FIG. 5 illustrates a row selector associated with an i th row.
  • the row selectors associated with the first through (m+3) rd rows, each having the configuration shown in FIG. 5 are connected in series together to form the row select encoder 3 .
  • the row select encoder 3 includes two columns of vertical shift registers, i.e., first and second shift registers.
  • Each vertical shift register includes a plurality of flip-flop circuits 50 , which are connected in series to each other.
  • the 1 st -row part of the first shift register receives the horizontal sync signal HD and the start pulse signal VSIN supplied as a trigger of the readout operation.
  • the output Q i of the i th -row part of the first shift register is supplied to the D terminal of the flip-flop circuit 50 included in the (i+1) st -row part of the first shift register.
  • the first shift register sequentially performs such an output operation from the first through the last rows in synchronism with the horizontal sync signal HD.
  • the 1 st -row part of the second shift register receives the horizontal sync signal HD and the start pulse signal VSSIN supplied as a trigger of the electronic shuttering operation.
  • the output QS i of the i th -row part of the second shift register is supplied to the D terminal of the flip-flop circuit 50 included in the (i+1) st -row part of the second shift register.
  • the second shift register also performs a similar output operation sequentially from the first through the last rows in synchronism with the horizontal sync signal HD.
  • the row select encoder 3 Based on the outputs Q i and QS i of the first and second shift registers, the selection sync signal CSL and the reset sync signal CRS, the row select encoder 3 generates the row select signal SL i and reset signal RS i at respective times shown in FIG. 4 . Then, the row select encoder 3 supplies these control signals to the pixels on the i th row through the row select and reset lines 5 and 4 associated with the i th row.
  • a first pulse of the horizontal sync signal HD is supplied as the first HD for the frame interval in question. Thereafter, when the 525 th HD is supplied, the frame interval ends. And after the signal VSIN has risen to the “High” level, the next frame interval starts.
  • the row select encoder 3 In synchronism with the first HD, the row select encoder 3 generates the row select signal SL i and the reset signal RS 1 and sends these control signals to the pixels on the first row to perform a readout operation on the pixels belonging to the first row. Thereafter, in synchronism with the second HD, the row select encoder 3 generates the row select signal SL 2 and the reset signal RS 2 and sends these control signals to the pixels on the second row to perform a readout operation on the pixels belonging to the second row. A similar operation will be sequentially performed on the remaining rows.
  • the row select encoder 3 in synchronism with the horizontal sync signal supplied while the signal VSSIN is being at the logically “High” level (i.e., the fourth HD in FIG. 4 ), the row select encoder 3 generates the reset signal RS 1 and sends the signal to the pixels on the first row. As a result, resetting for the electronic shuttering operation is carried out on all the pixels belonging to the first row. Thereafter, in synchronism with the fifth HD, the row select encoder 3 generates the reset signal RS 2 and sends the signal to the pixels on the second row. As a result, resetting for the electronic shuttering operation is carried out on all the pixels belonging to the second row. A similar operation will be sequentially performed on the remaining rows.
  • a readout operation is performed on another row.
  • a readout operation is being performed on the (m+3) rd row.
  • the readout operation could not be performed on any row while resetting for the electronic shuttering operation is being performed on the (m ⁇ 2) nd to the m th rows.
  • dummy pixel rows are provided and driven just like the other rows in the imaging section within the effective pixel area.
  • a reset signal for the electronic shuttering operation can be supplied to each and every row within the imaging section under the same condition.
  • reset potentials resulting from the electronic shuttering operation can be equalized among all the pixels within the imaging section, and therefore, no horizontal noise appears on the screen anymore.
  • the horizontal noise disappears thanks to the existence of dummy pixels.
  • FIG. 6 is a timing diagram illustrating respective control signals associated with the i th and n th rows, where 1 ⁇ i ⁇ m and n ⁇ i.
  • the first power supply terminal (V DD ) 26 is electrically connected to the photodiodes 21 , and the charge that has been stored on the photodiodes 21 is drained to the first power supply terminal (V DD ) 26 .
  • the potential in the charge storage region of each of these photodiodes 21 is compulsorily reset at the first potential.
  • a readout operation is being performed on the i th row.
  • the readout operation is started by turning the switching devices 25 on the i th row ON with the rise of the row select signal SL i from the “Low” into “High” level. While the switching devices 25 on the i th row are conducting, current flows from the first power supply terminal (V DD ) 26 toward the second power supply terminal (V SS ) 28 through the vertical signal lines 6 as described above.
  • a signal potential corresponding to the quantity of charge that has been created and stored on the pixels on the i th row between the time a- 1 during resetting for the electronic shuttering operation and the time b- 1 , is output onto the vertical signal lines 6 .
  • the reset signal RS i has risen from the “Low” into the “High” level, thereby turning the resetting devices 24 on the i th row ON.
  • the switching devices 25 on the i th row are kept ON. Since the reset signal RS i has risen to the “High” level, the MOS transistors, which function as the resetting devices 24 on the i th row, have also been turned ON and are now conducting. As a result, the first power supply terminal (V SS ) 26 is electrically connected to the photodiodes 21 , and the charge that has been stored on the photodiodes 21 is drained to the first power supply terminal (V DD ) 26 .
  • the potential state of the photodiodes 21 after resetting is sensed. This sensing operation is performed in the same way as that performed at the time b- 1 before resetting. And based on a change in potential state of the photodiodes 21 before and after resetting at the time c, the information that has been stored in the pixels is read out as a signal.
  • a reset operation for electronic shuttering is being performed on the i th row, while a readout operation is being performed on the n th row.
  • the n th row may be any arbitrary row belonging to either the ordinary imaging section or the dummy imaging section.
  • the readout operation on the n th row is started by turning the switching devices 25 on the n th row ON with the rise of the row select signal SL n from the “Low” into “High” level. While the switching devices 25 on the n th row are conducting, current flows from the first power supply terminal (V DD ) 26 toward the second power supply terminal (V SS ) 28 through the vertical signal lines 6 as described above. As a result, a signal potential, corresponding to the quantity of charge that has been stored on the pixels on the n th row, is output onto the vertical signal lines 6 .
  • the potential, which has been output onto the vertical signal lines 6 as a result of the readout operation is usable as an effective pixel signal.
  • the potential, which has been output onto the vertical signal lines 6 as a result of the readout operation is non-usable as an effective pixel signal.
  • the readout operation on the dummy imaging section is performed for the very purpose of making the current flow from the first to second power supply terminal (V DD ) 26 to (V SS ) 28 through the vertical signal lines 6 while resetting for the electronic shuttering operation is being performed on the i th row (where 1 ⁇ i ⁇ m).
  • FIG. 7 illustrates an equivalent circuit of a pixel on the i th row, a schematic cross-sectional structure of the resetting device 24 and a distribution of surface potentials at the time a- 1 .
  • the resetting device 24 is implemented as an n-channel MOS transistor.
  • An n-type doped region of the photodiode 21 also functions as the source region of the resetting device 24 .
  • the resetting device 24 is surrounded by a field oxide 33 such as a LOCOS film.
  • a channel stopper 32 doped with a p-type dopant is formed under the field oxide 33 .
  • the potential at the photodiode 21 (more specifically, a surface potential of the n-type doped regions of the photodiode 21 ) is substantially equal to a potential in the drain region 31 of the resetting device 24 (hereinafter, simply referred to as a “reset drain 31 ”).
  • the reset drain 31 is connected to the first power supply terminal (V DD ) 26 through the power line 260 . Since a readout operation is performed on the n th row according to this embodiment, a source follower current I d flows through the power line 260 .
  • This current I d is much larger than the current flowing from the first power supply terminal (V DD ) 26 to the photodiode 21 on the i th row as a result of resetting the photodiode 21 (hereinafter, this current will be referred to as “reset drain current”).
  • the source follower current I d flowing through the load circuit 30 is on the orders of several to several hundreds ⁇ A
  • the reset drain current is on the orders of several to several hundreds fA.
  • R i Supposing the principal resistance of the power line is represented as R i , a voltage drop of I d ⁇ R i is caused in the power supplied to the reset drain 31 .
  • the interconnection resistance of the common power line 260 differs depending on the layout thereof, but is ordinarily on the orders of several tens ⁇ to several k ⁇ .
  • the source follower current I d per pixel is 10 ⁇ A
  • the reset drain current is 10 fA
  • the interconnection resistance of the common power line 260 is 1 k ⁇ , for instance.
  • the reset drain current is negligible compared to the source follower current, the effects of the voltage drop thereof are also negligible.
  • charge has been stored in the photodiode 21 at the time b- 1 , when the potential thereof is (V DD ′ ⁇ V sig ) that has decreased by V sig from the potential V DD ′ at the time of resetting.
  • the magnitude of V sig is determined depending on the quantity of charge that has been created and stored through photoelectric conversion.
  • This potential (V DD ′ ⁇ V sig ) is applied to the gate electrode of the driver 23 .
  • the readout operation on the i th row has already been started, and the source follower current I d is now flowing through the power line 260 .
  • This current I d flows from the first power supply terminal (V DD ) 26 through the driver 23 and switching device 25 on the i th row into the load circuit 30 . Since the readout operation is not being performed on the rows other than the i th row, the source follower current I d flowing through the other rows at the time b- 1 is substantially the same as that at the time a- 1 . At the time b- 1 , no reset drain current flows, but this current is negligible as described above.
  • the resetting device 24 has been turned OFF again at the time d.
  • the potential V DD ′ was applied to the gate electrode of the driver 23 . Accordingly, a signal potential corresponding to the potential V DD ′ appears on the vertical signal line 6 .
  • the potential at the photodiode 21 is compulsorily reset at V DD ′ by resetting for the electronic shuttering operation. If a light blocking metal film made of aluminum, for example, is used as the power line 260 to isolate the respective pixels from each other, then the potentials V DD ′ can be substantially equalized among all the rows. In other words, the variation in reset potential between a pair of pixel rows can be suppressed. As a result, an image of high quality with reduced horizontal noise can be provided.
  • FIGS. 11 through 14 how horizontal noise is caused in a conventional amplifying solid-state imaging device including no dummy pixels.
  • This device is obtained by removing the dummy pixels and associated row selectors from the device 1 shown in FIG. 3 .
  • the number of horizontal sync signals HD included in one frame interval is not equal to the number of pixel rows.
  • FIG. 11 is a timing diagram illustrating control signals supplied by the row selectors in the row select encoder within the amplifying solid-state imaging device including no dummy pixels as a comparative example of the timing diagram illustrated in FIG. 4 .
  • resetting for the electronic shuttering operation is being performed on the first row and a readout operation is being performed on the fourth row at a time I.
  • resetting for the electronic shuttering operation is being performed on the m th row, but no readout operation is being performed on any row.
  • FIG. 12 is a timing diagram illustrating respective control signals associated with the i th and n th rows, where 1 ⁇ i ⁇ m, 1 ⁇ n ⁇ m and n ⁇ i.
  • V DD ′ V DD ⁇ I d ⁇ R i .
  • the potential at the photodiode 21 is (V DD ⁇ V sig ) that has decreased by V sig from the potential V DD at the time of resetting.
  • the magnitude of V sig is determined depending on the quantity of charge that has been created and stored through photoelectric conversion. This potential (V DD ⁇ V sig ) is applied to the gate electrode of the driver 23 .
  • the signal information sensed from the pixel on the i th row at the time d has a magnitude corresponding to V DD ′ ⁇ (V DD ⁇ V sig ).
  • resetting for the electronic shuttering operation on a particular row and readout on any other row might be performed concurrently in the conventional amplifying solid-state imaging device.
  • the conventional device while resetting for the electronic shuttering operation is being performed on another particular row (e.g., the m th row), no readout operation might be being performed on any other row. That is to say, the reset state resulting from the electronic shuttering operation differs among the rows, thus causing the horizontal noise.
  • the electronic shuttering operation is performed under the same condition for the respective rows within the effective pixel area.
  • dummy pixel rows are provided in this embodiment, thereby equalizing the total number of pixel rows with the number of horizontal sync signals (i.e., the HD number) included in one frame interval.
  • FIG. 15 illustrates a configuration for an amplifying solid-state imaging device 60 according to a second embodiment of the present invention.
  • the device 60 is different from the device 1 of the first embodiment in the number of dummy rows.
  • the device 60 further includes a dummy row selector A unlike the device 1 .
  • the number of dummy rows is one.
  • the dummy row selector A has a different configuration than that of the other first through m th row selectors. It should be noted that according to the first embodiment, the row selectors for the dummy rows have the same configuration as the row selectors for effective pixels.
  • FIG. 16 illustrates respective configurations of the row selector associated with the m th row and the dummy row selector A.
  • the dummy row selector A includes a D flip-flop 52 with a reset terminal R, at which the start pulse signal VSIN is received. More specifically, the dummy row selector A continuously outputs control signals SL dummy and RS dummy in synchronism with the horizontal sync signal HD after the D flip-flop 52 has received the output Qm of the m th row selector and until a start pulse signal VSIN for the next frame interval is received.
  • FIG. 17 is a timing diagram illustrating control signals supplied from the row selectors in the row select encoder 3 and the dummy row selector A within the amplifying solid-state imaging device 60 .
  • the row select signal SL dummy and the reset signal RS dummy are repeatedly output in synchronism with the horizontal sync signal HD.
  • the readout operation is repeatedly performed on the same dummy pixel row.
  • the readout operation is repeatedly performed on the dummy row, not on the ordinary imaging section.
  • resetting for the electronic shuttering operation is performed under the same condition on all the rows within the ordinary imaging section.
  • the device 60 even if the number of horizontal sync signals included in one frame interval has been changed, the device 60 still can operate normally.
  • FIG. 18 illustrates a configuration for an amplifying solid-state imaging device 70 according to a third embodiment of the present invention.
  • the device 70 is different from the device 60 of the second embodiment in the construction of the dummy row selector.
  • the dummy row selector B according to the third embodiment may have a configuration shown in FIG. 19 . Responsive to the output Qm of the m th row selector, the dummy row selector B starts to output the control signals SL dummy and RS dummy in synchronism with the horizontal sync signal HD.
  • the dummy row selector B continuously outputs the control signals SL dummy and RS dummy in synchronism with the horizontal sync signal HD until the selector B receives the start pulse signal VSIN or until resetting for the electronic shuttering operation on the m th row ends.
  • FIG. 20 is a timing diagram illustrating control signals supplied from the row selectors in the row select encoder 3 and the dummy row selector B within the amplifying solid-state imaging device 70 according to the third embodiment.
  • the row select signal SL dummy and the reset signal RS dummy are repeatedly output in synchronism with the horizontal sync signal HD.
  • the readout operation is repeatedly performed on the dummy row, not on the ordinary imaging section.
  • resetting for the electronic shuttering operation is performed under the same condition on all the rows within the ordinary imaging section.
  • the device 70 according to the third embodiment is more advantageous than the device 60 according to the second embodiment in that the dummy row is driven a required minimum number of times to cut down the power dissipation.
  • just one dummy row is provided.
  • a plurality of dummy row may be provided instead. For example, if two dummy rows are provided, then two dummy row selectors are provided correspondingly. In such a case, the readout operation is performed alternately and repeatedly on these dummy rows in synchronism with the horizontal sync signal HD.
  • the readout operation on the dummy row is performed at a relatively late stage of a frame interval.
  • the readout operation on the dummy row may be performed at a relatively early stage of the frame interval.
  • the dummy rows i.e., the (m+1) th through 525 th rows
  • the effective pixel area i.e., the 1 st through m th rows.
  • these dummy rows may be disposed over the effective pixel area.
  • the reset signal for the electronic shuttering operation is generated within the row select encoder 3 and then output therefrom.
  • a circuit for generating the reset signal for the electronic shuttering operation may be disposed on the left-hand side of the imaging section shown in FIG. 3 .
  • a circuit for outputting a control signal for the readout operation may be disposed on the right-hand side of the imaging section.
  • the disposition of these circuits may be inverted horizontally.
  • a pixel with a configuration shown in FIG. 21 may also be used.
  • a transfer gate 56 is provided in addition to the photodiode 21 within the signal storage section and a potential of a capacitor 55 , which is connected to a signal storage node, is applied to the gate electrode of the driver 23 .
  • the source follower circuit senses a potential at the signal storage node.
  • the present invention is not limited to the pixel configuration exemplified in the foregoing embodiments.
  • a signal TR 1 is supplied to the transfer gate 56 for controlling the ON/OFF states thereof.
  • the present invention is generally applicable to any MOS solid-state imaging device of such a type as amplifying and sensing signal charge stored on a pixel by making current flow through a load circuit.
  • a signal detector may be constructed using an inverter instead of the source follower circuit. The key point is that the detector is at least required to sense, amplify and output signal charge stored within a pixel before and after resetting.
  • the row select encoder 3 includes two columns of vertical shift registers. Thus, the rows are selected sequentially in a physical space. Alternatively, a row select encoder for accessing rows located at physically random positions may also be used.

Abstract

By providing dummy pixels separately from effective pixels, the total number of pixel rows is equalized with the number of horizontal sync signals included in one frame interval (which is called an “HD number”). A period during which a reset signal for an electronic shuttering operation is being supplied to an arbitrary pixel row overlaps with a period during which another pixel row is selected to perform a readout operation thereon. Thus, it is possible to suppress a variation in reset potential among effective pixels.

Description

BACKGROUND OF THE INVENTION
The present invention relates to an amplifying solid-state imaging device and a method for driving the same.
An amplifying solid-state imaging device, as well as a CCD solid-state imaging device, adopts “electronic shuttering” as a sort of electronic diaphragm. The “electronic shuttering” operation is performed to reset a signal charge storage section just before a photodiode in each pixel starts to store the signal charge, which has been created by the photodiode itself through photoelectric conversion, thereby making the charge storage period of the photodiode variable. The signal charge stored in pixels is read out on a row-by-row basis responsive to a horizontal sync signal. Thus, the electronic shuttering operation is also performed on the row-by-row basis (which is called a “focal plane operation”). More specifically, the electronic shuttering operation is performed on a certain row and then the signal charge starts to be stored. And after a predetermined time has passed since the start of charge storage, a signal readout operation is performed. When the readout operation is started, the storage section is reset again for the readout. The “predetermined time” defines the charge storage period of each photodiode and is of an equal length for every row. Accordingly, supposing each pixel is receiving light with the same intensity, the same quantity of charge will be stored on each and every row theoretically speaking.
FIG. 1 illustrates a schematic configuration of a conventional amplifying solid-state imaging device 100. In the device 100, an imaging section is made up of a plurality of pixels 102 arranged in columns and rows. Each of these pixels 102 includes a photodiode for storing charge in a quantity corresponding to the amount of light received. As shown in FIG. 1, a row select encoder 103 for selecting one pixel row after another from the imaging section is disposed on the right-hand side of the imaging section. In the example illustrated in FIG. 1, the number of pixel rows is m, which is equal to or larger than two. The row select encoder 103 includes the number m of row selectors that are connected in series to each other. An ith (where 1≦i≦m) row selector generates a reset signal for the electronic shuttering operation at a predetermined time, and then sends the signal to all the pixels 102 belonging to the ith row. The row selectors included in the row select encoder 103 output the reset signal for the electronic shuttering operation at respectively times, which are different from each other among the rows. That is to say, the reset signal is sequentially output in the descending order, i.e., from the first through mth rows.
On the other hand, the row selecting operation for readout (i.e., an ordinary row selection) is also performed sequentially by the number m of row selectors. The interval between the electronic shuttering and readout operations is preset at the same length for every row. The signal read out from a selected row is supplied by a column select driver 107 to an output buffer 111, from which the signal is output as a pixel signal.
When the electronic shuttering operation is performed, the photodiode within each pixel 102 has the potential thereof compulsorily reset at a predetermined level (which will be called a “reset potential” in this specification). The reset potential is supposed to be the same in each and every pixel 102 as a matter of principle. However, the present inventors found that since a reset potential on a certain row might shift into a different reset potential on another row, horizontal noise might appear on the screen as a result. The horizontal noise always appears on a particular set of rows on the screen, thus degrading the resultant image quality.
SUMMARY OF THE INVENTION
An object of the present invention is providing (1) an amplifying solid-state imaging device that can substantially eliminate the horizontal noise resulting from the electronic shuttering operation and (2) a method for driving the device.
To achieve this object, the present invention provides dummy pixel rows and drives these dummy pixel rows in the same way as an imaging section within an effective pixel area, thereby providing a reset signal for the electronic shuttering operation to each pixel row in the imaging section. As a result, the reset potentials resulting from the electronic shuttering operation can be equalized among all the pixels within the imaging section, thus eliminating the horizontal noise from the screen.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 illustrates a schematic configuration of a conventional amplifying solid-state imaging device.
FIG. 2 illustrates a detailed configuration of a pixel in an amplifying solid-state imaging device.
FIG. 3 illustrates a configuration for an amplifying solid-state imaging device according to a first embodiment of the present invention.
FIG. 4 is a timing diagram illustrating control signals supplied by the row selectors within the row select encoder shown in FIG. 3.
FIG. 5 is a circuit diagram illustrating a row selector associated with an ith row and included in the row select encoder shown in FIG. 3.
FIG. 6 is a timing diagram illustrating some control signals associated with the ith and nth rows in the device shown in FIG. 3, where 1≦i≦m and n≠i.
FIGS. 7, 8, 9 and 10 illustrate an equivalent circuit of a pixel on the ith row, a schematic cross-sectional structure of the resetting device and a distribution of surface potentials at the times a-1, b-1, c and d shown in FIG. 6, respectively.
FIG. 11 is a timing diagram illustrating control signals supplied by the row selectors within the row select encoder in the conventional device shown in FIG. 1 including no dummy pixels.
FIG. 12 is a timing diagram illustrating some control signals associated with the ith and nth rows in the conventional device shown in FIG. 1, where 1≦i≦m and n≠i.
FIGS. 13 and 14 illustrate an equivalent circuit of a pixel on the ith row, a schematic cross-sectional structure of the resetting device and a distribution of surface potentials at the times a-2 and b-2 shown in FIG. 12, respectively.
FIG. 15 illustrates a configuration for an amplifying solid-state imaging device according to a second embodiment of the present invention.
FIG. 16 is a circuit diagram illustrating respective configurations of the row selector associated with the mth row and the dummy row selector in the device shown in FIG. 15.
FIG. 17 is a timing diagram illustrating control signals supplied from the row selectors and the dummy row selector in the device shown in FIG. 15.
FIG. 18 illustrates a configuration for an amplifying solid-state imaging device according to a third embodiment of the present invention.
FIG. 19 is a circuit diagram illustrating respective configurations of the row selector associated with the mth row and the dummy row selector in the device shown in FIG. 18.
FIG. 20 is a timing diagram illustrating control signals supplied from the row selectors and the dummy row selector in the device shown in FIG. 18.
FIG. 21 is a circuit diagram illustrating another exemplary pixel configuration usable according to the present invention.
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, preferred embodiments of an amplifying solid-state imaging device according to the present invention will be described with reference to the accompanying drawings. FIGS. 2 and 3 illustrate a configuration of an amplifying solid-state imaging device 1 according to a first exemplary embodiment of the present invention.
First, referring to FIG. 2, the amplifying solid-state imaging device 1 includes a plurality of pixels 2 arranged in matrix, i.e., in columns and rows, within a semiconductor region, which may be a region in a silicon substrate. Although a 2×2 matrix of pixels is illustrated in FIG. 2, a great number of pixels are actually formed in columns and rows. In this specification, the respective numbers of rows and columns of pixels provided within an effective pixel area to generate pixel signals are represented by m and l (where m and l are both positive integers equal to or larger than two). In a typical solid-state imaging device, m and l are both within the range from 50 to 2,000. In this embodiment, m and l are supposed to be 480 and 640, respectively.
Each of these pixels 2 includes a signal storage section, which in turn includes a photoelectric transducer like a photodiode. Responsive to light incident on the photoelectric transducer, each signal storage section can store information, corresponding to the intensity of the light, as a “potential or a quantity of charge”. Although each photoelectric transducer is in a first potential state (reset potential) during resetting, a state transition subsequently takes place from the first into a second potential state as a result of creation and storage of charge responsive to the incident light. The second potential state is represented by a level variable with the intensity of the incoming light. In this specification, the “second potential state” is variable with the total amount of light that has been incident on the photoelectric transducer after resetting was performed as the electronic shuttering operation. A more detailed internal configuration of each pixel 2 will be described later.
The device 1 includes a plurality of lines and circuits for selecting and accessing a particular one of the pixels 2. These lines, circuits, transistors constituting respective pixels and so on are formed on a substrate by various techniques similar to well known ones for fabricating a semiconductor integrated circuit. In this embodiment, a row select encoder 3 is electrically connected to all of the pixels 2 through plural pairs of reset and row select lines 4 and 5. Each single reset line 4 is connected to all of the pixels 2 belonging to a single row associated with the reset line 4. In the same way, each single row select line 5 is also connected to all of the pixels 2 belonging to a single row associated with the row select line 5. That is to say, the number of the pairs of lines 4 and 5, extending from the row select encoder 3, is equal to the number of the pixel rows in the matrix.
To select a particular one of the rows, the row select encoder 3 selectively changes the potential on a row select line 5 associated with the particular row from logically “Low” into “High”, for example. In this case, the potentials on the other row select lines 5 associated with the remaining rows are held at logically “Low”. As a result, a potential, corresponding to the logically “High” state, is supplied to the respective control terminals of switching devices in all the pixels 2 included in the particular row, thereby turning these switching devices ON. Upon the activation of the switching devices, potentials, corresponding to the information that has been stored in respective signal storage sections on the selected row, appear on associated vertical signal lines 6. In this case, the signal storage section of each pixel 2 is electrically disconnected from an associated vertical signal line 6 on the remaining rows other than the selected one. The configuration and operation of a circuit for sensing information this way will be described in greater detail later.
The information, which has been stored in the signal storage sections of all the pixels 2 included in a selected row, is output to all the corresponding vertical signal lines 6 and then read out column by column by a horizontal shift register (column select driver) 7. The information is ultimately output as a signal through an output buffer (output amplifier) 11.
Next, the configuration of each pixel 2 according to this embodiment will be described in further detail. As shown in FIG. 2, the pixel 2 includes: a photodiode 21 functioning as a signal storage section; and an MOS transistor 23, whose gate electrode 22 is connected to the photodiode 21. The photodiode 21 is implementable as a pn junction diode formed in a silicon substrate, for example. The MOS transistor 23 may have an ordinary MOS structure including channel, source and drain regions within a silicon substrate, for example. The MOS transistor 23 functions as a driver (amplifier) in a signal detector, which plays an important role in amplifying and reading out a tiny variation in the potential state of the photodiode 21. In the illustrated embodiment, no capacitor is particularly inserted between the gate electrode 22 of the MOS transistor 23 and the photodiode 21. Optionally, a capacitor may be inserted therebetween.
The pixel 2 further includes a resetting device 24 and a switching device 25. The resetting device 24 is an MOS transistor (reset transistor), whose gate electrode is connected to an associated reset line 4. The drain of the MOS transistor 24 is connected to a first power supply terminal (VDD) 26 through a power line 260, and the source thereof is connected to the photodiode 21. When the potential on the reset line 4 associated with the selected row is selectively changed by the row select encoder 3 from logically “Low” into “High”, the resetting devices 24 on the selected row turn ON. As a result, the charge stored on the photodiodes 21 is drained toward the first power supply terminal (VDD) 26 through the power line 260. The potential at each photodiode 21, i.e., that at the gate electrode 22 of the driver 23, is compulsorily reset at a certain value determined by the supply potential (VDD) at the first power supply terminal 26. After the resetting operation is finished, the potential at the photodiode 21 gradually varies with the intensity of light received by the pixel 2. It is because carriers are created due to the photoelectric conversion function of the photodiode 21 and then stored in the photodiode 21 that the potential state of the photodiode 21 is variable with the incidence of light.
The switching device 25 in each pixel 2 is an MOS transistor, whose gate electrode is connected to an associated row select line 5. The drain of the MOS transistor 25 is connected to the source of the driver 23 and the source thereof is connected to an associated vertical signal line 6. When the potential on the row select line 5 shown in FIG. 2 is selectively changed by the row select encoder 3 from logically “Low” into “High”, the switching device 25 turns ON. As a result, current flows from the first power supply terminal (VDD) 26 through the driver 23, switching device 25, vertical signal line 6 and load device 27 into a second power supply terminal (VSS) 28. In this case, the potential on the vertical signal line 6 is variable with the potential state of the photodiode 21 (i.e., the potential at the gate electrode 22 of the MOS transistor 23). Accordingly, the potential on the vertical signal line 6 has a level variable with the second potential state at the signal storage section of the pixel 2.
Considering a particular column, the driver 23, belonging to the selected row, and an associated load device 27 are connected in series to each other between the first and second power supply terminals (VDD) 26 and (VSS) 28 to form a source follower circuit. In other words, a single load device 27 is allocated to each column, and each driver 23 on the selected row is electrically connected to an associated load device 27 via an associated switching device 25. Such a source follower circuit can amplify the quantity of signal charge stored in each pixel and then output the charge as a potential signal. In this specification, the load devices 27 corresponding to all the columns will sometimes be collectively called a “load circuit” 30.
To utilize the chip area effectively, the same power is supplied from the first power supply terminal (VDD) 26 through the common power line 260 to the photodiodes 21 for the resetting purpose, and to the source follower circuits.
Next, the feature of the amplifying solid-state imaging device 1 according to the first embodiment will be described with reference to FIG. 3. As shown in FIG. 3, the device 1 additionally includes at least one dummy pixel row, which is provided separately from the number m of ordinary pixel rows. The number m of pixel rows are located within an effective pixel area and make up an imaging section. On the other hand, the at least one dummy pixel row is located out of the effective pixel area and makes up a dummy imaging section. According to this embodiment, the number of the dummy pixel row(s) is obtained by subtracting m from the number of horizontal sync signals included in one frame interval. In this specification, the number of the horizontal sync signals per frame interval will be called an “HD number”. In this exemplary embodiment, since m is 480 and the HD number is 525 (in compliance with the NTSC standard), the number of the dummy pixel row(s) (=HD number−m) is 45.
Each of the pixels belonging to every dummy pixel row has totally the same configuration as each pixel located within the effective pixel area. That is to say, each pixel on every dummy pixel row also includes the photodiode 21 and transistors just like the pixel 2 shown in FIG. 2, and is also connected to the load circuit 30 and to the column select driver 7 through the associated vertical signal line 6. Thus, according to this embodiment, the ordinary imaging section cannot be distinguished from the dummy imaging section by appearances.
When a dummy pixel row is selected by the row select encoder 3, the resetting and switching devices 24 and 25 included in the pixels belonging to the dummy pixel row receive a control signal and operate normally. Turn the switching device 250N within a dummy pixel, and a current flows from the first power supply terminal (VDD) 26 through the driver 23 and switching device 25 within the dummy pixel, vertical signal line 6 and load device 27 into the second power supply terminal (VSS) 28 as shown in FIG. 2.
However, the dummy pixels do not have to store signal information responsive to incoming light. Instead, each dummy pixel has only to allow the current to flow from the first power supply terminal (VDD) 26 through the driver 23, switching device 25, vertical signal line 6 and load device 27 into the second power supply terminal (VSS) 28 by turning the switching device 250N just like an ordinary pixel. Accordingly, the dummy pixels need not perform photoelectric conversion function, either. In view of their intended function, the dummy pixels may be covered with a light blocking film and need not include any photodiode. That is to say, the role expected of the dummy pixel row is to equalize the reset potentials among all the rows within the imaging section by preventing a reset state from being varied on a pixel row, on which resetting is being carried out as the electronic shuttering operation. This function of the dummy pixel row will be described in further detail later. Before that, it will be described with reference to FIG. 4 how the device 1 is driven.
FIG. 4 is a timing diagram illustrating control signals supplied by the row selectors included in the row select encoder 3. On the top of FIG. 4, the waveform of the horizontal sync signal HD is illustrated. In synchronism with the horizontal sync signal HD, the row selectors send the row select signals SL1 through SLm+3 and reset signals RS1 through RSm+3 to associated rows. In FIG. 4, only the signals associated with just a few rows are illustrated. It is noted that the time progresses rightward in FIG. 4.
In FIG. 4, VSIN is a signal getting a row selecting operation for signal reading started by the row select encoder 3. VSSIN is a signal getting a row selecting operation for electronic shuttering started by the row select encoder 3. The signal VSIN is input to the row select encoder 3 once a frame interval, while the signal VSSIN is input to the row select encoder 3 at least once a frame interval. CSL is a selection sync signal defining respective times the readout operation should be performed, while CRS is a reset sync signal defining respective times the reset operation should be performed. The row select encoder 3 receives these signals and generates various types of control signals in synchronism with the horizontal sync signal HD, thereby performing the electronic shuttering and row selecting operations.
FIG. 5 illustrates a row selector associated with an ith row. The row selectors associated with the first through (m+3)rd rows, each having the configuration shown in FIG. 5, are connected in series together to form the row select encoder 3. The row select encoder 3 includes two columns of vertical shift registers, i.e., first and second shift registers. Each vertical shift register includes a plurality of flip-flop circuits 50, which are connected in series to each other.
The 1st-row part of the first shift register receives the horizontal sync signal HD and the start pulse signal VSIN supplied as a trigger of the readout operation. The output Qi of the ith-row part of the first shift register is supplied to the D terminal of the flip-flop circuit 50 included in the (i+1)st-row part of the first shift register. In this manner, the first shift register sequentially performs such an output operation from the first through the last rows in synchronism with the horizontal sync signal HD. On the other hand, the 1st-row part of the second shift register receives the horizontal sync signal HD and the start pulse signal VSSIN supplied as a trigger of the electronic shuttering operation. The output QSi of the ith-row part of the second shift register is supplied to the D terminal of the flip-flop circuit 50 included in the (i+1)st-row part of the second shift register. In this manner, the second shift register also performs a similar output operation sequentially from the first through the last rows in synchronism with the horizontal sync signal HD.
Based on the outputs Qi and QSi of the first and second shift registers, the selection sync signal CSL and the reset sync signal CRS, the row select encoder 3 generates the row select signal SLi and reset signal RSi at respective times shown in FIG. 4. Then, the row select encoder 3 supplies these control signals to the pixels on the ith row through the row select and reset lines 5 and 4 associated with the ith row.
Referring back to FIG. 4, while the signal VSIN is being at the logically “High” level, a first pulse of the horizontal sync signal HD is supplied as the first HD for the frame interval in question. Thereafter, when the 525th HD is supplied, the frame interval ends. And after the signal VSIN has risen to the “High” level, the next frame interval starts.
In synchronism with the first HD, the row select encoder 3 generates the row select signal SLi and the reset signal RS1 and sends these control signals to the pixels on the first row to perform a readout operation on the pixels belonging to the first row. Thereafter, in synchronism with the second HD, the row select encoder 3 generates the row select signal SL2 and the reset signal RS2 and sends these control signals to the pixels on the second row to perform a readout operation on the pixels belonging to the second row. A similar operation will be sequentially performed on the remaining rows.
On the other hand, in synchronism with the horizontal sync signal supplied while the signal VSSIN is being at the logically “High” level (i.e., the fourth HD in FIG. 4), the row select encoder 3 generates the reset signal RS1 and sends the signal to the pixels on the first row. As a result, resetting for the electronic shuttering operation is carried out on all the pixels belonging to the first row. Thereafter, in synchronism with the fifth HD, the row select encoder 3 generates the reset signal RS2 and sends the signal to the pixels on the second row. As a result, resetting for the electronic shuttering operation is carried out on all the pixels belonging to the second row. A similar operation will be sequentially performed on the remaining rows.
As can be seen from FIG. 4, whenever a reset signal for the electronic shuttering operation is supplied to an arbitrary ith (where 1≦i≦m) row included in the effective pixel area, a readout operation is performed on another row. For example, while resetting for the electronic shutting operation is being performed on the mth row, a readout operation is being performed on the (m+3)rd row. Were it not for the dummy pixel rows, i.e., the (m+1)st through (m+3)rd rows in this case, the readout operation could not be performed on any row while resetting for the electronic shuttering operation is being performed on the (m−2)nd to the mth rows.
According to this embodiment, dummy pixel rows are provided and driven just like the other rows in the imaging section within the effective pixel area. In this manner, a reset signal for the electronic shuttering operation can be supplied to each and every row within the imaging section under the same condition. Thus, reset potentials resulting from the electronic shuttering operation can be equalized among all the pixels within the imaging section, and therefore, no horizontal noise appears on the screen anymore. Hereinafter, it will be described in further detail why the horizontal noise disappears thanks to the existence of dummy pixels.
FIG. 6 is a timing diagram illustrating respective control signals associated with the ith and nth rows, where 1≦i≦m and n≠i. First, at a time a-1, a control signal for the electronic shuttering operation is being supplied to the ith row, but the row select signal SLi remains “Low”. Accordingly, the switching devices 25 on the ith row are kept OFF. In contrast, since the reset signal RSi has risen to the “High” level, the MOS transistors, which function as the resetting devices 24 on the ith row, have been turned ON and are now conducting. As a result, the first power supply terminal (VDD) 26 is electrically connected to the photodiodes 21, and the charge that has been stored on the photodiodes 21 is drained to the first power supply terminal (VDD) 26. By performing the reset operation in this manner, the potential in the charge storage region of each of these photodiodes 21 is compulsorily reset at the first potential.
Next, at a time b-1, a readout operation is being performed on the ith row. The readout operation is started by turning the switching devices 25 on the ith row ON with the rise of the row select signal SLi from the “Low” into “High” level. While the switching devices 25 on the ith row are conducting, current flows from the first power supply terminal (VDD) 26 toward the second power supply terminal (VSS) 28 through the vertical signal lines 6 as described above. As a result, a signal potential, corresponding to the quantity of charge that has been created and stored on the pixels on the ith row between the time a-1 during resetting for the electronic shuttering operation and the time b-1, is output onto the vertical signal lines 6.
Subsequently, at a time c, the reset signal RSi has risen from the “Low” into the “High” level, thereby turning the resetting devices 24 on the ith row ON. On the other hand, the switching devices 25 on the ith row are kept ON. Since the reset signal RSi has risen to the “High” level, the MOS transistors, which function as the resetting devices 24 on the ith row, have also been turned ON and are now conducting. As a result, the first power supply terminal (VSS) 26 is electrically connected to the photodiodes 21, and the charge that has been stored on the photodiodes 21 is drained to the first power supply terminal (VDD) 26.
Then, at a time d, the potential state of the photodiodes 21 after resetting is sensed. This sensing operation is performed in the same way as that performed at the time b-1 before resetting. And based on a change in potential state of the photodiodes 21 before and after resetting at the time c, the information that has been stored in the pixels is read out as a signal.
According to this embodiment, at the time a-1, a reset operation for electronic shuttering is being performed on the ith row, while a readout operation is being performed on the nth row. The nth row may be any arbitrary row belonging to either the ordinary imaging section or the dummy imaging section. The readout operation on the nth row is started by turning the switching devices 25 on the nth row ON with the rise of the row select signal SLn from the “Low” into “High” level. While the switching devices 25 on the nth row are conducting, current flows from the first power supply terminal (VDD) 26 toward the second power supply terminal (VSS) 28 through the vertical signal lines 6 as described above. As a result, a signal potential, corresponding to the quantity of charge that has been stored on the pixels on the nth row, is output onto the vertical signal lines 6.
If the nth row belongs to the ordinary imaging section, the potential, which has been output onto the vertical signal lines 6 as a result of the readout operation, is usable as an effective pixel signal. In contrast, if the nth row belongs to the dummy imaging section, the potential, which has been output onto the vertical signal lines 6 as a result of the readout operation, is non-usable as an effective pixel signal. The readout operation on the dummy imaging section is performed for the very purpose of making the current flow from the first to second power supply terminal (VDD) 26 to (VSS) 28 through the vertical signal lines 6 while resetting for the electronic shuttering operation is being performed on the ith row (where 1≦i≦m).
Hereinafter, the potential states of a photodiode 21 on the ith row while these operations are being performed will be described with reference to FIGS. 7 through 10.
FIG. 7 illustrates an equivalent circuit of a pixel on the ith row, a schematic cross-sectional structure of the resetting device 24 and a distribution of surface potentials at the time a-1. In the example illustrated in FIG. 7, the resetting device 24 is implemented as an n-channel MOS transistor. An n-type doped region of the photodiode 21 also functions as the source region of the resetting device 24. The resetting device 24 is surrounded by a field oxide 33 such as a LOCOS film. A channel stopper 32 doped with a p-type dopant is formed under the field oxide 33.
At the time a-1, resetting for the electronic shuttering operation is being performed. Accordingly, the potential at the photodiode 21 (more specifically, a surface potential of the n-type doped regions of the photodiode 21) is substantially equal to a potential in the drain region 31 of the resetting device 24 (hereinafter, simply referred to as a “reset drain 31”). The reset drain 31 is connected to the first power supply terminal (VDD) 26 through the power line 260. Since a readout operation is performed on the nth row according to this embodiment, a source follower current Id flows through the power line 260. This current Id is much larger than the current flowing from the first power supply terminal (VDD) 26 to the photodiode 21 on the ith row as a result of resetting the photodiode 21 (hereinafter, this current will be referred to as “reset drain current”). For example, the source follower current Id flowing through the load circuit 30 is on the orders of several to several hundreds μA, whereas the reset drain current is on the orders of several to several hundreds fA. Supposing the principal resistance of the power line is represented as Ri, a voltage drop of Id×Ri is caused in the power supplied to the reset drain 31. Thus, the potential at the reset drain 31 is represented as VDD′=VDD−Id×Ri.
The interconnection resistance of the common power line 260 differs depending on the layout thereof, but is ordinarily on the orders of several tens Ω to several k Ω. Suppose the source follower current Id per pixel is 10 μA, the reset drain current is 10 fA and the interconnection resistance of the common power line 260 is 1 k Ω, for instance. In such a case, the voltage drop of the power supplied to the pixel while the reset drain current is flowing is 10 fA×1 k Ω=10 pV. On the other hand, the voltage drop of the power supplied to the pixel while the source follower current is flowing is 10 μA×1 k Ω=10 mV. As can be seen, since the reset drain current is negligible compared to the source follower current, the effects of the voltage drop thereof are also negligible.
At the time a-1, since the switching device 25 on the ith row is not conducting, no source follower current flows through the switching device 25 on the ith row. It should be noted, however, that the source follower current Id does flow through the switching device 25 on the nth row. As described above, according to this embodiment, whenever resetting for the electronic shuttering operation is being performed on an arbitrary ith row (where 1≦i≦m), a readout operation is being performed on another row. This principle is applicable to all the rows within the effective pixel area (where i=1, 2, . . . , m−1, and m).
Next, referring to FIG. 8, charge has been stored in the photodiode 21 at the time b-1, when the potential thereof is (VDD′−Vsig) that has decreased by Vsig from the potential VDD′ at the time of resetting. The magnitude of Vsig is determined depending on the quantity of charge that has been created and stored through photoelectric conversion. This potential (VDD′−Vsig) is applied to the gate electrode of the driver 23. Also, at the time b-1, the readout operation on the ith row has already been started, and the source follower current Id is now flowing through the power line 260. This current Id flows from the first power supply terminal (VDD) 26 through the driver 23 and switching device 25 on the ith row into the load circuit 30. Since the readout operation is not being performed on the rows other than the ith row, the source follower current Id flowing through the other rows at the time b-1 is substantially the same as that at the time a-1. At the time b-1, no reset drain current flows, but this current is negligible as described above.
Then, referring to FIG. 9, resetting for the readout operation is being performed at the time c and the charge that has been stored in the photodiode 21 is being drained to the first power supply terminal (VDD) 26. As a result, the potential at the photodiode 21 is equalized with the potential VDD′ of the reset drain 31. The potential VDD′ is applied to the gate electrode of the driver 23. Accordingly, a signal potential corresponding to the potential VDD′ starts to appear on the vertical signal line 6.
Subsequently, referring to FIG. 10, the resetting device 24 has been turned OFF again at the time d. Immediately after resetting, the potential VDD′ was applied to the gate electrode of the driver 23. Accordingly, a signal potential corresponding to the potential VDD′ appears on the vertical signal line 6. As a result, the signal information sensed from the pixel on the ith row has a magnitude represented as VDD′−(VDD′−Vsig)=Vsig.
As described above, according to this embodiment, the potential at the photodiode 21 is compulsorily reset at VDD′ by resetting for the electronic shuttering operation. If a light blocking metal film made of aluminum, for example, is used as the power line 260 to isolate the respective pixels from each other, then the potentials VDD′ can be substantially equalized among all the rows. In other words, the variation in reset potential between a pair of pixel rows can be suppressed. As a result, an image of high quality with reduced horizontal noise can be provided.
Next, it will be described with reference to FIGS. 11 through 14 how horizontal noise is caused in a conventional amplifying solid-state imaging device including no dummy pixels. This device is obtained by removing the dummy pixels and associated row selectors from the device 1 shown in FIG. 3. In this case, the number of horizontal sync signals HD included in one frame interval is not equal to the number of pixel rows.
FIG. 11 is a timing diagram illustrating control signals supplied by the row selectors in the row select encoder within the amplifying solid-state imaging device including no dummy pixels as a comparative example of the timing diagram illustrated in FIG. 4. As shown in FIG. 11, resetting for the electronic shuttering operation is being performed on the first row and a readout operation is being performed on the fourth row at a time I. At a time II, resetting for the electronic shuttering operation is being performed on the mth row, but no readout operation is being performed on any row.
FIG. 12 is a timing diagram illustrating respective control signals associated with the ith and nth rows, where 1≦i≦m, 1≦n≦m and n≠i. First, at a time a-2, a control signal for the electronic shuttering operation is being supplied to the ith row. That is to say, the row select signal SLi remains “Low”, but the reset signal RSi has risen to the “High” level. Accordingly, the resetting devices 24 on the ith row are now conducting. As a result, the potential in the charge storage region of each photodiode 21 is compulsorily reset at the first potential. At the time a-2, no readout operation is being performed on any row other than the ith row. In such a case, resetting for the electronic shuttering operation is being performed as shown in FIG. 13. Accordingly, the potential at the photodiode 21 is equalized with a potential at the reset drain 31. Since no source follower current Id is flowing through the power line 260 at this time, the potential at the reset drain 31 is substantially equal to VDD. Accordingly, the potential at the photodiode 21 after resetting is also VDD. Thereafter, the photodiode 21 will create and store charge in a quantity corresponding to the amount of light received.
Next, at a time b-2, a readout operation is being performed on the ith row. At this time, the source follower current Id is now flowing through the power line 260 and the pixel on the Ith row as shown in FIG. 14. Accordingly, the potential at the reset drain 31 decreases to VDD′=VDD−Id×Ri. On the other hand, the potential at the photodiode 21 is (VDD−Vsig) that has decreased by Vsig from the potential VDD at the time of resetting. As described above, the magnitude of Vsig is determined depending on the quantity of charge that has been created and stored through photoelectric conversion. This potential (VDD−Vsig) is applied to the gate electrode of the driver 23.
Subsequently, at a time c, resetting for the readout operation is being performed. At this time, since the source follower current Id is flowing through the power line 260 and the pixel on the ith row, the potential at the photodiode 21 is compulsorily reset at VDD′=VDD−Id×Ri.
As a result, the signal information sensed from the pixel on the ith row at the time d has a magnitude corresponding to VDD′−(VDD−Vsig).
In contrast, if the readout operation is being performed on any other row while resetting for the electronic shuttering operation is being performed on the ith row, then signal information with a magnitude corresponding to Vsig is obtained as already described with reference to FIGS. 7 through 10. Accordingly, in the conventional device, a variation corresponding to the potential difference (VDD′−VDD) is caused among the output signals of respective rows.
As can be seen from FIG. 11, resetting for the electronic shuttering operation on a particular row and readout on any other row might be performed concurrently in the conventional amplifying solid-state imaging device. In the conventional device, however, while resetting for the electronic shuttering operation is being performed on another particular row (e.g., the mth row), no readout operation might be being performed on any other row. That is to say, the reset state resulting from the electronic shuttering operation differs among the rows, thus causing the horizontal noise.
In contrast, according to the present invention, the electronic shuttering operation is performed under the same condition for the respective rows within the effective pixel area. For that purpose, dummy pixel rows are provided in this embodiment, thereby equalizing the total number of pixel rows with the number of horizontal sync signals (i.e., the HD number) included in one frame interval.
FIG. 15 illustrates a configuration for an amplifying solid-state imaging device 60 according to a second embodiment of the present invention. The device 60 is different from the device 1 of the first embodiment in the number of dummy rows. In addition, the device 60 further includes a dummy row selector A unlike the device 1.
According to the second embodiment, the number of dummy rows is one. Also, the dummy row selector A has a different configuration than that of the other first through mth row selectors. It should be noted that according to the first embodiment, the row selectors for the dummy rows have the same configuration as the row selectors for effective pixels.
FIG. 16 illustrates respective configurations of the row selector associated with the mth row and the dummy row selector A. The dummy row selector A includes a D flip-flop 52 with a reset terminal R, at which the start pulse signal VSIN is received. More specifically, the dummy row selector A continuously outputs control signals SLdummy and RSdummy in synchronism with the horizontal sync signal HD after the D flip-flop 52 has received the output Qm of the mth row selector and until a start pulse signal VSIN for the next frame interval is received.
FIG. 17 is a timing diagram illustrating control signals supplied from the row selectors in the row select encoder 3 and the dummy row selector A within the amplifying solid-state imaging device 60. As shown in FIG. 17, after the readout operation has been performed on the mth row, the row select signal SLdummy and the reset signal RSdummy are repeatedly output in synchronism with the horizontal sync signal HD. In other words, the readout operation is repeatedly performed on the same dummy pixel row. Thus, after the readout operation has been performed on all the rows within the ordinary imaging section and before the next frame interval begins, the readout operation is repeatedly performed on the dummy row, not on the ordinary imaging section. As a result, resetting for the electronic shuttering operation is performed under the same condition on all the rows within the ordinary imaging section.
According to the second embodiment, even if the number of horizontal sync signals included in one frame interval has been changed, the device 60 still can operate normally.
FIG. 18 illustrates a configuration for an amplifying solid-state imaging device 70 according to a third embodiment of the present invention. The device 70 is different from the device 60 of the second embodiment in the construction of the dummy row selector. The dummy row selector B according to the third embodiment may have a configuration shown in FIG. 19. Responsive to the output Qm of the mth row selector, the dummy row selector B starts to output the control signals SLdummy and RSdummy in synchronism with the horizontal sync signal HD. Thereafter, the dummy row selector B continuously outputs the control signals SLdummy and RSdummy in synchronism with the horizontal sync signal HD until the selector B receives the start pulse signal VSIN or until resetting for the electronic shuttering operation on the mth row ends.
FIG. 20 is a timing diagram illustrating control signals supplied from the row selectors in the row select encoder 3 and the dummy row selector B within the amplifying solid-state imaging device 70 according to the third embodiment. As shown in FIG. 20, after the readout operation has been performed on the mth row and until resetting for the electronic shuttering operation on the mth row ends, the row select signal SLdummy and the reset signal RSdummy are repeatedly output in synchronism with the horizontal sync signal HD. Thus, after the readout operation has been performed on all the rows within the ordinary imaging section and before resetting for the electronic shuttering operation has been performed on all the rows within the ordinary imaging section, the readout operation is repeatedly performed on the dummy row, not on the ordinary imaging section. As a result, resetting for the electronic shuttering operation is performed under the same condition on all the rows within the ordinary imaging section.
The device 70 according to the third embodiment is more advantageous than the device 60 according to the second embodiment in that the dummy row is driven a required minimum number of times to cut down the power dissipation.
According to the second and third embodiments, just one dummy row is provided. Alternatively, a plurality of dummy row may be provided instead. For example, if two dummy rows are provided, then two dummy row selectors are provided correspondingly. In such a case, the readout operation is performed alternately and repeatedly on these dummy rows in synchronism with the horizontal sync signal HD.
Also, according to the second and third embodiments, the readout operation on the dummy row is performed at a relatively late stage of a frame interval. However, according to the first embodiment, the readout operation on the dummy row may be performed at a relatively early stage of the frame interval. In the example illustrated in FIG. 3, the dummy rows (i.e., the (m+1)th through 525th rows) are disposed under the effective pixel area (i.e., the 1st through mth rows). Alternatively, these dummy rows may be disposed over the effective pixel area.
In the foregoing embodiments, the reset signal for the electronic shuttering operation is generated within the row select encoder 3 and then output therefrom. However, the present invention is in no way limited to such a specific embodiment. For example, a circuit for generating the reset signal for the electronic shuttering operation may be disposed on the left-hand side of the imaging section shown in FIG. 3. And a circuit for outputting a control signal for the readout operation (row selectors) may be disposed on the right-hand side of the imaging section. Also, the disposition of these circuits may be inverted horizontally.
Moreover, according to the present invention, a pixel with a configuration shown in FIG. 21 may also be used. In the pixel shown in FIG. 21, a transfer gate 56 is provided in addition to the photodiode 21 within the signal storage section and a potential of a capacitor 55, which is connected to a signal storage node, is applied to the gate electrode of the driver 23. In other words, the source follower circuit senses a potential at the signal storage node. As can be seen, the present invention is not limited to the pixel configuration exemplified in the foregoing embodiments. In FIG. 21, a signal TR1 is supplied to the transfer gate 56 for controlling the ON/OFF states thereof.
The present invention is generally applicable to any MOS solid-state imaging device of such a type as amplifying and sensing signal charge stored on a pixel by making current flow through a load circuit. For example, a signal detector may be constructed using an inverter instead of the source follower circuit. The key point is that the detector is at least required to sense, amplify and output signal charge stored within a pixel before and after resetting.
In the foregoing embodiments, the row select encoder 3 includes two columns of vertical shift registers. Thus, the rows are selected sequentially in a physical space. Alternatively, a row select encoder for accessing rows located at physically random positions may also be used.

Claims (5)

1. An amplifying solid-state imaging device comprising:
a plurality of pixels arranged in columns and rows, each said pixel including a signal storage section for creating signal charge through photoelectric conversion and storing thereon signal information corresponding to the signal charge;
reset signal supply means for generating a reset signal for an electronic shuttering operation and supplying the reset signal to the pixels belonging to one of the rows that has been selected to perform the electronic shuttering operation thereon, thereby resetting the signal storage sections included in the pixels on the selected row;
row selecting means for sequentially selecting at least one row of pixels from the pixels to perform a signal readout operation thereon; and
a signal detector for reading out the signal information, which is stored in the signal storage sections included in the pixels on the row that has been selected by the row selecting means to perform the signal readout operation thereon, the signal detector including an amplifier that is connected in series between first and second power supplies, the signal detector sensing the signal information by making a current flow between the first and second power supplies, amplifying the signal information and then outputting the amplified signal information,
wherein every period during which the reset signal supply means is supplying the reset signal necessarily overlaps with a period during which the row selecting means is selecting one of the pixel rows other than the pixel row receiving the reset signal from the reset signal supply means to perform the readout operation thereon; and
the reset signal supplied from the reset signal supply means is output to imaging pixels provided within an effective pixel area and dummy pixels that are provided in an area other than the effective pixel area; and
the number of pixel rows formed by the dummy pixels is obtained by subtracting the number of pixel rows formed by the imaging pixels from an HD number, which is the number of horizontal sync pulses included in one frame interval.
2. The amplifying solid-state imaging device of claim 1, wherein the amplifier of the signal detector comprises:
drivers provided for the respective pixels; and
load devices provided for the respective pixel columns.
3. The amplifying solid-state imaging device of claim 2, wherein each said driver is a transistor comprising:
a gate electrode connected to associated one of the signal storage sections;
a drain connected to the first power supply; and
a source connected to associated one of the load devices.
4. The amplifying solid-state imaging device of claim 2, wherein each said driver and associated one of the load devices together form a source follower circuit.
5. The amplifying solid-state imaging device of claim 1, wherein each said signal storage section comprises:
a photodiode for performing photoelectric conversion;
a capacitor for storing thereon charge created by the photodiode; and
a transistor for electrically connecting or disconnecting the photodiode to/from the capacitor.
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US20060197858A1 (en) 2006-09-07
US7821556B2 (en) 2010-10-26
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US7532243B2 (en) 2009-05-12
US20110007197A1 (en) 2011-01-13
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