|Publication number||US7245009 B2|
|Application number||US 11/174,268|
|Publication date||Jul 17, 2007|
|Filing date||Jun 29, 2005|
|Priority date||Jun 29, 2005|
|Also published as||US20070001287|
|Publication number||11174268, 174268, US 7245009 B2, US 7245009B2, US-B2-7245009, US7245009 B2, US7245009B2|
|Inventors||Bruce A. Bosco, Rudy M. Emrick, Steven J. Franson, John E. Holmes, Stephen K. Rockwell|
|Original Assignee||Motorola, Inc.|
|Export Citation||BiBTeX, EndNote, RefMan|
|Patent Citations (6), Non-Patent Citations (2), Referenced by (6), Classifications (14), Legal Events (6)|
|External Links: USPTO, USPTO Assignment, Espacenet|
The present invention generally relates to electronic circuit packaging, and more particularly to packaging having a hermetic cavity for microelectronic applications.
With the growth of the use of personal communication devices, e.g., cell phones and two way radios, high performance and high frequency packaging materials have increased in importance. Desired characteristics for electronic packaging include high electric and thermal performance, thinness, low weight, small size, high component density, and low cost.
Conventional packages are fabricated from materials such as plastic, Teflon or ceramics. The type of material that is used depends on a number of factors which include frequency of operation, environment and cost. Plastic packages are typically the lowest in cost but may not be suitable for high frequencies of operation or very high temperatures. Applications that require exposure to extreme temperatures will commonly use ceramics. As the frequency of operation increases, it becomes advantageous to utilize materials that have lower dielectric constants to allow for the implementation so that the final package, with interconnects, will avoid noise or signal loss associated with high speed circuits.
Furthermore, as electronic devices continue to follow the trend of miniaturization, moisture and dust become more of a hindrance to maintaining functionality of such electronic devices. Patterned metal films generally have a thickness less than 25 μm and line widths of 50 μm or less for operating frequencies in the 1.0 to 100 GHz.
In U.S. Patent Application 2004/0207059, an adhesive between ceramic layer was used to seal a cavity. However, the adhesive material is substantially rigid, resulting in potential stress issues. Furthermore, the package is not inherently hermetic, the adhesive serves no purpose other than attaching the cover, and neither a multilayer interconnection nor low loss transmission lines are taught.
Accordingly, it is desirable to provide packaging having a hermetic cavity for microelectronic applications. Furthermore, other desirable features and characteristics of the present invention will become apparent from the subsequent detailed description of the invention and the appended claims, taken in conjunction with the accompanying drawings and this background of the invention.
A packaging structure is provided having a hermetic sealed cavity for microelectronic applications. The packaging structure comprises first and second packaging layers forming a cavity. Two LCP layers are formed between and hermetically seal the first and second packaging layers. First and second conductive strips are formed between the LCP layers and extend into the cavity. An electronic device is positioned within the cavity and is coupled to the first and second conductive strips.
The present invention will hereinafter be described in conjunction with the following drawing figures, wherein like numerals denote like elements, and
The following detailed description of the invention is merely exemplary in nature and is not intended to limit the invention or the application and uses of the invention. Furthermore, there is no intention to be bound by any theory presented in the preceding background of the invention or the following detailed description of the invention.
The package structure 10 is heated to about 260° to 270° C., or just below the melting temperature of the LCP layers. Pressure is applied while heating using a clamp and plate mechanism (not shown), for example, to apply a moderate amount of force to increase adhesion. The package structure 10 would then be cooled, singulated, externally metallized or coated if required and other optional post-processing steps.
Placing the device 24 in a hermetic cavity protects it from dust, smoke, and other particulate contaminants, as well as humidity. The cavity could be evacuated, or could be filled with inert gas. The cavity would provide physical protection should the device 10 be fragile. And as described later, the cavity would provide a means of implementing high Q-factor resonator devices and low loss transmission lines by suspending the transmission line above the air or dielectric-filled cavity.
LCP combines the properties of polymers with those of liquids and provide superior thermal and electrical properties including low loss, low dielectric constant, and low coefficient of thermal expansion (CTE) characteristics. LCP is especially advantageous for RF devices due to their low signal loss and low dielectric constant (3.01 at 1 MHz) over a wide frequency range and superior moisture barrier properties (0.04% water absorption).
LCP is an ordered thermoplastic polymer with long stiff molecules that offer an excellent combination of electronic, thermal, mechanical and chemical properties that make them an excellent material choice for electronic devices. LCPs are highly crystalline materials based on aromatic ring-structured compounds that are very stable after polymerizing. Characteristics of a particular LCP depend on the manufacturer, but exist in a variety of unfilled, glass-filled, mineral-filled, carbon fiber reinforced, and glass fiber-reinforced grades that allow for numerous options in key properties such as the CTE. LCP laminates have a CTE that can be readily matched to that of ceramic, silicon and other materials. Also, the high moisture and chemical resistance improve LCP performance in unfriendly operating environments, and the low CTE, low dielectric constant, and high dielectric strength make it desirable as circuit board laminates for electronics packaging. Furthermore, LCP has a high moisture barrier which may be used to seal and protect electronic components from high humidity.
LCP layers would be manufactured in sheet form using standard processes known to the industry. A selection of off-the-shelf and/or customized CTE LCP layers would be made for a particular application. The layers would be laminated using interleaved adhesive layers or alternating single sided metalized LCP layers, or other standard method in conjunction with the proper heat and pressure to achieve proper bonding.
The foam filler 36, preferably a low dielectric foam, for example an LCP foam having a dielectric constant between that of air and of the LCP layers 16, 22, would provide mechanical support for the device 10.
Several devices 62, 64, 66 may thereby be placed within a single cavity. Additionally, an optional flexible conductor may be used for the conductors 16, 58, 59, 60, 61. In this embodiment, the conductors 16, 58, 59, 60, 61 would comprise a single sheet of metal with a flexible curved portion 68 integrally connecting conductors 18 and 58, and a flexible curved portion 70 integrally connecting conductors 59 and 61. The packaging structure 50 provides a high level of integration, intentional electrical mechanical coupling of structures on different layers, and a three dimensional package. These devices 62, 64, 66 may comprise filters, resonators, sampling structures, multi-port coupling structures, coupled vertical interconnects. The flexible portions 68, 70 may optionally be formed in an area away from the substrate 12 and layers 44, 46, or in an area above the substrate 12 and below the layer 28 as shown.
The present invention utilizes a low temperature, co-fired, multi-layer ceramic technology having a LCP material between the ceramic layers to provide a hermetically sealed cavity; thereby protecting electronic devices within the cavity from, for example, smoke, dust, and humidity.
While at least one exemplary embodiment has been presented in the foregoing detailed description of the invention, it should be appreciated that a vast number of variations exist. It should also be appreciated that the exemplary embodiment or exemplary embodiments are only examples, and are not intended to limit the scope, applicability, or configuration of the invention in any way. Rather, the foregoing detailed description will provide those skilled in the art with a convenient road map for implementing an exemplary embodiment of the invention, it being understood that various changes may be made in the function and arrangement of elements described in an exemplary embodiment without departing from the scope of the invention as set forth in the appended claims.
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|Citing Patent||Filing date||Publication date||Applicant||Title|
|US8014167 *||Sep 7, 2007||Sep 6, 2011||Seagate Technology Llc||Liquid crystal material sealed housing|
|US8450846 *||May 28, 2013||Broadcom Corporation||Method and system for communicating via flip-chip die and package waveguides|
|US8610224 *||Aug 21, 2012||Dec 17, 2013||Panasonic Corporation||MEMS element and electrical device using the same|
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|US20100201003 *||Nov 23, 2005||Aug 12, 2010||Dane Thompson||Packaging Systems Incorporating Thin Film Liquid Crystal Polymer (LCP) and Methods of Manufacture|
|U.S. Classification||257/710, 257/E23.128, 257/E23.059, 257/E23.193, 257/787, 257/711|
|Cooperative Classification||H01L2924/0002, H01L2924/1423, H01L23/10, H01L2924/01079, H01L2924/3011, H01L2924/09701|
|Jun 29, 2005||AS||Assignment|
Owner name: MOTOROLA, INC., ILLINOIS
Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:BOSCO, BRUCE A.;EMRICK, RUDY M.;FRANSON, STEVEN J.;AND OTHERS;REEL/FRAME:016753/0406;SIGNING DATES FROM 20050628 TO 20050629
|Dec 28, 2010||FPAY||Fee payment|
Year of fee payment: 4
|Apr 6, 2011||AS||Assignment|
Owner name: MOTOROLA SOLUTIONS, INC., ILLINOIS
Free format text: CHANGE OF NAME;ASSIGNOR:MOTOROLA, INC;REEL/FRAME:026081/0001
Effective date: 20110104
|Feb 27, 2015||REMI||Maintenance fee reminder mailed|
|Jul 17, 2015||LAPS||Lapse for failure to pay maintenance fees|
|Sep 8, 2015||FP||Expired due to failure to pay maintenance fee|
Effective date: 20150717