|Publication number||US7466732 B2|
|Application number||US 11/983,601|
|Publication date||Dec 16, 2008|
|Filing date||Nov 9, 2007|
|Priority date||Mar 10, 2005|
|Also published as||EP1867016A1, US7305016, US20060203866, US20080069160, WO2006098897A1|
|Publication number||11983601, 983601, US 7466732 B2, US 7466732B2, US-B2-7466732, US7466732 B2, US7466732B2|
|Inventors||Edward Franklin Stephens, IV|
|Original Assignee||Northrop Grumman Corporation|
|Export Citation||BiBTeX, EndNote, RefMan|
|Patent Citations (103), Non-Patent Citations (7), Referenced by (7), Classifications (9), Legal Events (4)|
|External Links: USPTO, USPTO Assignment, Espacenet|
This application is a continuation of U.S. patent application Ser. No. 11/077,466, filed Mar. 10, 2005 now U.S. Pat. No. 7,305,016, now allowed, which is hereby incorporated by reference in their entireties.
The present invention relates generally to laser diodes and, in particular, to a cooling mechanism for a laser diode package that provides improved heat dissipation through use of macrochannel cooling channels housed within end blocks of the laser diode package.
Semiconductor laser diodes have numerous advantages. They are small and the widths of their active regions are typically a submicron to a few microns and their heights are usually no more than a fraction of a millimeter. The length of their active regions is typically less than about a millimeter. The internal reflective surfaces, which produce emission in one direction, are formed by cleaving the substrate from which the laser diodes are produced and, thus, have high mechanical stability.
High efficiencies are possible with semiconductor laser diodes with some pulsed junction laser diodes having external quantum efficiencies near 50%. Semiconductor laser diodes produce radiation at wavelengths from about 20 to about 0.7 microns depending on the semiconductor alloy that is used. For example, laser diodes made of gallium arsenide with aluminum doping (AlGaAs) emit radiation at approximately 0.8 microns (˜800 nm) which is near the absorption spectrum of common solid state laser rods and slabs made from Neodymium-doped, Yttrum-Aluminum Garnet (Nd:YAG), and other crystals and glasses. Thus, semiconductor laser diodes can be used as the optical pumping source for larger, solid state laser systems;
Universal utilization of semiconductor laser diodes has been restricted by thermally related problems. These problems are associated with the large heat dissipation per unit area of the laser diodes which results in elevated junction temperatures and stresses induced by thermal cycling. Laser diode efficiency and the service life of the laser diode are decreased as the operating temperature in the junction increases.
Furthermore, the emitted wavelength of a laser diode is a function of its junction temperature. Thus, when a specific output wavelength is desired, maintaining a constant junction temperature is essential. For example, AlGaAs laser diodes that are used to pump an Nd:YAG rod or slab should emit radiation at about 808 nm since this is the wavelength at which optimum energy absorption exists in the Nd:YAG. However, for every 3.5° C. to 4.0° C. deviation in the junction temperature of the AlGaAs laser diode, the wavelength shifts 1 nm. Accordingly, controlling the junction temperature and, thus, properly dissipating the heat is critical.
When solid state laser rods or slabs are pumped by laser diodes, dissipation of the heat becomes more problematic since it becomes necessary to densely pack a plurality of individual diodes into arrays which generate the required amounts of input power for the larger, solid state laser rod or slab. However, when the packing density of the individual laser diodes is increased, the space available for extraction of heat from the individual laser diodes decreases. This aggravates the problem of heat extraction from the arrays of individual diodes.
Laser diode systems must therefore utilize an effective heat transfer mechanism to operate as efficiently as possible. One of the current laser diode systems utilizes a pin fin heat exchanger though which cooling water flows and absorbs the heat. Specifically, the laser diode system has a laser diode bar soldered between two metallic end-blocks. The end-blocks are themselves soldered onto a partially metallized substrate. This package is known as an array submodule. The function of this package is to extract heat from the laser diode bar and allow the connection of electrical hook-ups. Before use, the package is soldered onto a water-cooled heat exchanger. The package generally pulls heat away from both sides of the laser diode bar via the end blocks, and the heat travels down to the pin fin heat exchanger where the heat is carried away by coolant water.
However, a disadvantage of this arrangement is the distance between the heat source of the laser and the water coolant. This distance can cause the package to run at elevated temperatures, e.g., when the laser diode bar is operated above 20 Watts. It also contributes to poor performance when operated in an ON/OFF cycled mode.
Another type of cooling system for a laser diode package utilizes macrochannel coolers. These laser diode packages are small, e.g., 1 mm thick, and have small water channels running though them. The water channels pass close to a bottom side of the heat source (i.e., the laser diode bar), allowing for efficient thermal transfer. However. the macrochannel coolers typically remove heat from only one side of the laser diode bar.
When the macrochannel coolers are used, electrical current and water coolant reside in the same physical space. Consequently, the coolant water must be deionized. However, the use of deionized water requires all parts that are exposed to the water supply be either glass, plastic, stainless steel, or gold-plated. Parts which are not made of these materials usually deteriorate quickly and can cause severe corrosion problems.
Macrochannel coolers are made from a stack of thin copper sheets diffusion-bonded together in multiple layers. Each layer is photoetched so that, after diffusion bonding with other layers, small channels are formed allowing coolant passage through an area underneath the laser diode. However, the macrochannel coolers are relatively large and expensive to make, due to the limitation on the materials of which they are formed. The present invention is directed to satisfying this and other needs.
The present invention is directed to a laser diode assembly having a laser diode. The laser diode has an emitting surface and a reflective surface opposing the emitting surface. The laser diode has first and second side surfaces between the emitting and reflective surfaces. A first electrically-insulating heat sink is attached to the first side surface of the laser diode via a first solder bond, and the first heat sink has a first cooling channel. A second electrically-insulating heat sink is attached to the second side surface of the laser diode via a second solder bond, and the second electrically-insulating heat sink has a second cooling channel. A substrate has a top side and a bottom side, and the top side being in communication with a first bottom side of the first electrically-insulating heat sink and a second bottom side of the second electrically-insulating heat sink. The substrate has a flow channel system for passing a coolant to the first cooling channel and the second cooling channel. A metallization layer is attached to the first electrically-insulating heat sink and the second electrically-insulating heat sink. The metallization layer is electrically coupled to the laser diode and conducts electrical current to the laser diode. The metallization layer is isolated from the coolant.
Another aspect of the invention is directed to a laser diode assembly having a laser diode with an emitting surface and a reflective surface opposing the emitting surface. The laser diode has first and second side surfaces between the emitting and reflective surfaces. A first heat sink is attached to the first side surface of the laser diode, and the first heat sink has first multiple components for creating a first cooling channel. A second heat sink is attached to the second side surface of the laser diode, and the second heat sink has second multiple components for creating a second cooling channel. At least one substrate is in communication with the first heat sink and the second heat sink. The at least one substrate has a flow channel system for passing a coolant to the first cooling channel and the second cooling channel. A metallic path is electrically coupled to the laser diode and conducts electrical current to the laser diode.
An additional aspect of the invention is directed to a method of manufacturing a laser diode assembly having a laser diode with an emitting surface and a reflective surface opposing the emitting surface. The laser diode has first and second side surfaces between the emitting and reflective surfaces. A first electrically-insulating heat sink is coupled to the first side surface of the laser diode via a first solder layer. The first heat sink has a first cooling channel. A second electrically-insulating heat sink is coupled to the second side surface of the laser diode via a second solder layer. The second heat sink has a second cooling channel. At least one substrate is coupled to the first electrically-insulating heat sink and the second electrically-insulating heat sink. The substrate(s) has a flow channel system for passing a coolant to the first cooling channel and the second cooling channel. A current path is created that is attached to the first electrically-insulating heat sink and the second electrically-insulating heat sink, and the current path is electrically isolated from the coolant.
The above summary of the present invention is not intended to represent each embodiment or every aspect of the present invention. The detailed description and Figures will describe many of the embodiments and aspects of the present invention.
The foregoing and other advantages of the invention will become apparent upon reading the following detailed description and upon reference to the drawings.
While the invention is susceptible to various modifications and alternative forms, specific embodiments have been shown by way of example in the drawings and will be described in detail herein. It should be understood, however, that the invention is not intended to be limited to the particular forms disclosed. Rather, the invention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the appended claims.
The laser diode 12 has an emitting surface 20 on one end and a reflecting surface 22 opposing the emitting surface 20. The height of the laser diode 12 is defined as the distance between the emitting surface 20 and the reflecting surface 22. The junction of the laser diode 12 where the photons are produced is nearest the right heat sink 16 in the laser diode assembly 10. Electrical power is guided to defined regions of the junction by providing electrically conductive material in the laser diode 12 adjacent those regions and less electrically conductive material outside those regions. Consequently, the laser diode 12 has a plurality of emission points on the emitting surface 20 corresponding to those regions where electrical energy is converted into light energy. When the electrical power is applied. photons propagate though the junction and are reflected off the reflecting surface 22 such that emission only occurs at the emitting surface 20.
A substrate 30 is positioned below the left and right heat sinks 14 and 16 and is held to the left and right heat sinks 14 and 16 by solder layers 24 and 25, respectively. As with solder layers 18 and 19, solder layers 24 and 25 may be formed of an indium-based solder.
The substrate 30 is typically made of a material that has a high thermal conductivity, but a low electrical conductivity, such as beryllium oxide (“BeO”). The substrate 30 includes a metallization layer 32 on both of its top and bottom surfaces. The metallization layer 32 on the lower surface of the substrate 30 is present to allow the entire laser diode assembly 10 to be soldered onto a fluid manifold 33 (see
To create optical energy, electrical current must be conducted through the laser diode 12. When viewing the laser diode assembly 10 from right to left, the electrical current flows from the right heat sink 16, into the laser diode 12, and into the left heat sink 14. as illustrated by the arrow with reference 51 in
To ensure that the laser diode assembly 10 operates as efficiently as possibly, an effective heat transfer mechanism is employed. The laser diode assembly 10 includes a coolant channel 40 disposed therein that provides cooling to both sides of the laser diode 12. More specifically, the laser diode assembly 10 includes a coolant channel 40 having an inlet 42 at the bottom of one of the sides of the substrate 30, and a bypass region 45 extending through the substrate 30 and between the left and right heat sinks 14 and 16.
The coolant channel 40 also has an outlet 50 at an opposite side of the bottom of the substrate 30. The coolant channel 40 serves to allow coolant to flow in the direction shown by the arrow with reference 53. The coolant flows from the fluid manifold 33 up into the inlet 42, through the substrate 30 into the right heat sink 16, through a region of the right heat sink 16 near the right side of the laser diode 12, back down into the substrate 30 via the bypass region 45, up into the left heat sink 14 through a region near the left side of the laser diode 12, and then back down through the left side of the substrate 30, out the outlet 50 and back into the fluid manifold 33. The coolant in the coolant channel 40 absorbs heat from the laser diode 12 while allowing the laser diode assembly 10 to retain a compact design. Although only a single coolant channel 40 is shown, the laser diode assembly 10 may include a plurality of different coolant channels 40. The direction of flow of the coolant may also occur in the opposite direction (i.e., entering on the left side of the substrate 30 and exiting on the right side). The coolant flowing through the coolant channel 40 may be deionized water or another non-electrically conductive coolant such as fluroinert.
This transfer of heat from the laser diode assembly 10 to the coolant traveling through the coolant channel 40 allows the laser diode 12 to operate efficiently without breakdown due to overheating. By utilizing channeled right and left heat sinks 16 and 14, the coolant can get as close to the heat source (i.e., the laser diode 12) as in standard macrochannel coolers. However, unlike standard macrochannel coolers, both sides of the laser diode 12 of the present invention are cooled. With this double-sided cooling, the thermal performance of the laser diode 12 is superior to that of the standard macrochannel coolers while retaining compactness.
The substrates 30 of each of the diode assemblies 10 a 10 b, and 10 c may be soldered onto the top of the fluid manifold 33. The metallization layer 32 located on the bottom of each of the substrates 30 (see
In the embodiment of
A substrate 630 is positioned below the left and right heat sinks 614 and 616 and is held to the left and right heat sinks 614 and 616 by solder layers 624 and 625, respectively. As with solder layers 618 and 619, solder layers 624 and 625 may be formed of an indium-based solder. As shown, neither solder layers 618 nor 624 are located in a region around the lower right-hander corner of the left heat sink 614. The lack of solder in this region serves to electrically isolate solder layer 618 from solder layer 624. Similarly, solder layers 619 and 625 are electrically isolated from each other because neither solder layers 619 nor 625 are located in a region around the lower left-hander corner of the right heat sink 616.
As with the substrate 30 of the embodiment described above with respect to
A coolant channel 640 extends through the laser diode assembly 610. This coolant channel 640 is similar to the coolant channel 40 of the first embodiment shown in
As shown, the laser diode assembly 610 has a metallization layer 660 attached to the left and right heat sinks 614 and 616. The metallization layer 660 may be disposed on top of the left and right heat sinks 614 and 616 or could also be attached such that it is imbedded in the left and right heat sinks 614 and 616. This metallization layer 660 is utilized to supply the electric current to the laser diode 612. Because the left and right heat sinks are formed of electrically insulating silicon, the metallization layer 660 is necessary to supply the electric current necessary to operate the laser diode 612. Also, because the left and right heat sinks 614 and 616 are formed of the insulating silicon, the coolant and electric current flow paths 653 and 651, respectively, do not intersect or overlap. Consequently, there is no overlap of the electrical current path 651 and the coolant flow path 652. Therefore, there is no requirement that non-electrically conductive coolant (such as deionized water or fluroinert) be utilized as the coolant flowing through the coolant channel 640. The substrate 630 may also be a metal (e.g., copper) in a modification to this embodiment because the left and right silicon heat sinks 614 and 616 insulate the electrical current. Also, if the substrate 630 is made of copper, then the metallization layer 632 is not required, and may be omitted. The metallization layer 660
The left heat sink 714 also includes an impingement cooler 737 that circulates the coolant from the coolant channel 740 to the diamond layer 735, where heat is absorbed. The impingement cooler 737 receives the coolant from the coolant channel 740, and directs the coolant into a channeled structure 739. The channeled structure 739 may be formed of nickel. The channeled structure 739 is akin to a nozzle and has a honeycomb-like arrangement of a plurality of holes through which the coolant can flow until it reaches the exposed surface of the diamond layer 735. The channeled structure 739 also has return holes through which the coolant returns, in a direction away from the diamond layer 735, toward the impingement cooler 737. On its return, the coolant flows downwardly out of the impingement cooler 737, back down into the substrate 730, and out to a coolant manifold or heat exchanger connected thereto. The right heat sink 716 has the diamond layer 741 that is in close proximity to the laser diode 712. The right heat sink 716 has its own impingement cooler 743 and channeled structure 744. A metallization layer 760 is located on an exterior surface of the right and left heat sinks 716 and 714. Electric current flows to the laser diode 712 through the metallization layer 760 in the direction of arrow 751.
During the cooling process, coolant flows into the inlet 742 up into the coolant channel 740 in the coolant flow direct indicated by the arrows shown with reference 753. the coolant flows up into the right heat sink 716, then through the impingement cooler 743, the channeled structure 744, and against the diamond layer 741. The coolant then returns through the channeled structure 744, and downward from the impingement cooler 743, and back into the substrate 730 in a bypass region 745. Next, the coolant flows up through the left heat sink 714, and through the impingement cooler 737, the channeled structure 739, and against the diamond layer 735. Finally, the coolant returns through the channeled structure 739 and then flows down through the substrate and out an outlet 750 and into the coolant manifold or heat exchanger connected thereto. The coolant may be water. The electric current flowing through the metallization layer 760 is electrically isolated from the coolant channel 740.
Although the embodiment shown in
In addition to the impingement region described above that carries heat away, heat transfer could also be performed by an evaporative spray cooler, such as those manufactured by Rini Technologies™.
The various embodiments described above all describe coolant channels that move coolant in a path up from a coolant manifold or heat exchanger into a substrate, up through a right heat sink, back down into the substrate again via a bypass region, and then through the left heat sink and back down through the substrate and to the coolant manifold or heat exchanger. This is known as a serial path—i.e., there is one path in which the coolant flows throughout the laser diode assembly. However, it should be appreciated that parallel coolant paths may also be utilized. In other words, there may be separate coolant channels for the left and right sinks. For example, a first coolant channel may extend from the coolant manifold up through the substrate, throughout the right heat sink, and then back down through the substrate so the heated coolant can return to the coolant manifold or heat exchanger. A second coolant channel would extend from the coolant manifold up through the substrate, through the left manifold, and then back down thought the substrate again so that the heated coolant can return to the coolant manifold or heat exchanger. This arrangement is known as a parallel path because the coolant traveling to each heat sink has to go through different paths.
While the present invention has been described, with reference to one or more particular embodiments, those skilled in the art will recognize that many changes may be made thereto without departing from the spirit and scope of the present invention. Each of these embodiments and obvious variations thereof is contemplated as falling within the spirit and scope of the claimed invention, which is set forth in the following claims.
|Cited Patent||Filing date||Publication date||Applicant||Title|
|US3303432||Apr 18, 1966||Feb 7, 1967||Gen Electric||High power semiconductor laser devices|
|US3339151||Jan 12, 1966||Aug 29, 1967||Ibm||Beam deflecting lasers|
|US3590248||Apr 13, 1965||Jun 29, 1971||Massachusetts Inst Technology||Laser arrays|
|US3654497||Dec 1, 1969||Apr 4, 1972||Bell Telephone Labor Inc||Semiconductor lasers utilizing internal saturable absorbers|
|US3683296||Oct 13, 1970||Aug 8, 1972||Texas Instruments Inc||High efficiency laser cavity|
|US3771031||Mar 5, 1973||Nov 6, 1973||Texas Instruments Inc||Header assembly for lasers|
|US3802967||Aug 27, 1971||Apr 9, 1974||Rca Corp||Iii-v compound on insulating substrate and its preparation and use|
|US3896473||Dec 4, 1973||Jul 22, 1975||Bell Telephone Labor Inc||Gallium arsenide schottky barrier avalance diode array|
|US3958263||Apr 25, 1974||May 18, 1976||Bell Telephone Laboratories, Incorporated||Stress reduction in algaas-algaasp multilayer structures|
|US3962655||Jan 28, 1975||Jun 8, 1976||International Standard Electric Corporation||Semiconductor laser stack|
|US4057101||Mar 10, 1976||Nov 8, 1977||Westinghouse Electric Corporation||Heat sink|
|US4092614||Jan 7, 1977||May 30, 1978||Nippon Electric Co., Ltd.||Semiconductor laser device equipped with a silicon heat sink|
|US4219072||Feb 10, 1978||Aug 26, 1980||Barlow Donald W Sr||Phase change material heat exchanger|
|US4228406||May 10, 1978||Oct 14, 1980||The University Of Rochester||Laser apparatus|
|US4233567||Dec 13, 1978||Nov 11, 1980||General Electric Company||Face-cooled laser device having increased energy storage and output|
|US4315225||Aug 24, 1979||Feb 9, 1982||Mcdonnell Douglas Corporation||Heat sink laser diode array|
|US4383270||Jul 10, 1980||May 10, 1983||Rca Corporation||Structure for mounting a semiconductor chip to a metal core substrate|
|US4393393||May 8, 1981||Jul 12, 1983||Mcdonnell Douglas Corporation||Laser diode with double sided heat sink|
|US4415234||Apr 2, 1981||Nov 15, 1983||Eastman Kodak Company||Passive cooling of mirrors|
|US4454602||Mar 26, 1982||Jun 12, 1984||Mcdonnell Douglas Corporation||Conductively cooled laser diode array|
|US4573067||Mar 7, 1984||Feb 25, 1986||The Board Of Trustees Of The Leland Stanford Junior University||Method and means for improved heat removal in compact semiconductor integrated circuits|
|US4617585||Dec 24, 1985||Oct 14, 1986||Tokyo Shibaura Denki Kabushiki Kaisha||Plastic enclosing device|
|US4673030||Oct 20, 1980||Jun 16, 1987||Hughes Aircraft Company||Rechargeable thermal control system|
|US4709750||Apr 10, 1986||Dec 1, 1987||Internorth, Inc.||Phase change heat exchanger|
|US4716568||May 1, 1986||Dec 29, 1987||Spectra Diode Laboratories, Inc.||Stacked diode laser array assembly|
|US4730324||Oct 2, 1986||Mar 8, 1988||General Electric Company||Method and apparatus for compensating for wave front distortion in a slab laser|
|US4782222||Sep 3, 1987||Nov 1, 1988||Power Spectra||Bulk avalanche semiconductor switch using partial light penetration and inducing field compression|
|US4831629||Sep 1, 1987||May 16, 1989||Xerox Corporation||Incoherent, optically coupled laser arrays with increased spectral width|
|US4837768||Sep 23, 1988||Jun 6, 1989||Alcatel N.V.||Laser module and method of coupling an optical fiber thereto|
|US4847848||Feb 16, 1988||Jul 11, 1989||Sanyo Electric Co., Ltd.||Semiconductor laser device|
|US4852109||Dec 2, 1988||Jul 25, 1989||General Electric Company||Temperature control of a solid state face pumped laser slab by an active siderail|
|US4877641||May 31, 1988||Oct 31, 1989||Olin Corporation||Process for plasma depositing silicon nitride and silicon dioxide films onto a substrate|
|US4881233||Jun 22, 1988||Nov 14, 1989||Von Arb Hans Peter||Laser with improved cooling system|
|US4881237||Aug 26, 1988||Nov 14, 1989||Massachusetts Institute Of Technology||Hybrid two-dimensional surface-emitting laser arrays|
|US4899204||Dec 1, 1987||Feb 6, 1990||General Electric Company||High voltage switch structure with light responsive diode stack|
|US4901330||Jul 20, 1988||Feb 13, 1990||Amoco Corporation||Optically pumped laser|
|US4949346||Aug 14, 1989||Aug 14, 1990||Allied-Signal Inc.||Conductively cooled, diode-pumped solid-state slab laser|
|US4963741||Jun 22, 1987||Oct 16, 1990||Molectron Detector, Inc.||Large area pyroelectric joulemeter|
|US4975923||Mar 5, 1990||Dec 4, 1990||Plessey Overseas Limited||Semiconductor diode laser array|
|US5001355||Sep 25, 1989||Mar 19, 1991||General Electric Company||Photon energy activated radio frequency signal switch|
|US5005640||Sep 17, 1990||Apr 9, 1991||Mcdonnell Douglas Corporation||Isothermal multi-passage cooler|
|US5022042||Sep 10, 1990||Jun 4, 1991||General Dynamics Corp.||High power laser array with stable wavelength|
|US5031187||Feb 14, 1990||Jul 9, 1991||Bell Communications Research, Inc.||Planar array of vertical-cavity, surface-emitting lasers|
|US5040187||Jan 3, 1990||Aug 13, 1991||Karpinski Arthur A||Monolithic laser diode array|
|US5073838||Dec 4, 1989||Dec 17, 1991||Ncr Corporation||Method and apparatus for preventing damage to a temperature-sensitive semiconductor device|
|US5076348||Dec 11, 1990||Dec 31, 1991||United Technologies Corporation||Solid-to-liquid phase change cooled mirror arrangement|
|US5084888||Dec 26, 1990||Jan 28, 1992||Hoya Corporation||Laser medium for use in a composite slab type laser|
|US5099214||Sep 27, 1989||Mar 24, 1992||General Electric Company||Optically activated waveguide type phase shifter and attenuator|
|US5099488||Mar 27, 1991||Mar 24, 1992||Spectra Diode Laboratories, Inc.||Ribbed submounts for two dimensional stacked laser array|
|US5105429||Jul 6, 1990||Apr 14, 1992||The United States Of America As Represented By The Department Of Energy||Modular package for cooling a laser diode array|
|US5115445||Aug 22, 1990||May 19, 1992||Massachusetts Institute Of Technology||Microchip laser array|
|US5128951||Mar 4, 1991||Jul 7, 1992||Karpinski Arthur A||Laser diode array and method of fabrication thereof|
|US5156999||Jun 8, 1990||Oct 20, 1992||Wai-Hon Lee||Packaging method for semiconductor laser/detector devices|
|US5163064||May 10, 1991||Nov 10, 1992||Samsung Electronics Co., Ltd.||Laser diode array and manufacturing method thereof|
|US5212699||Jul 15, 1991||May 18, 1993||Fujitsu Limited||Temperature-controlling laser diode assembly|
|US5216263||Nov 29, 1990||Jun 1, 1993||Xerox Corporation||High density, independently addressable, surface emitting semiconductor laser-light emitting diode arrays|
|US5216688||Apr 30, 1990||Jun 1, 1993||Adlas Gmbh & Co. Kg||Solid state laser with pumping laser diodes|
|US5220954||Oct 7, 1992||Jun 22, 1993||Shape, Inc.||Phase change heat exchanger|
|US5253260||Dec 20, 1991||Oct 12, 1993||Hughes Aircraft Company||Apparatus and method for passive heat pipe cooling of solid state laser heads|
|US5265113||Mar 26, 1991||Nov 23, 1993||Messerschmitt-Bolkow-Blohm Gmbh||Integrated microsystem|
|US5284790||Jan 30, 1992||Feb 8, 1994||Karpinski Arthur A||Method of fabricating monolithic laser diode array|
|US5287375||Feb 12, 1993||Feb 15, 1994||Nec Corporation||Apparatus for driving a laser diode array|
|US5305344||Apr 29, 1993||Apr 19, 1994||Opto Power Corporation||Laser diode array|
|US5311535||Jul 28, 1992||May 10, 1994||Karpinski Arthur A||Monolithic laser diode array providing emission from a minor surface thereof|
|US5311536||Jul 23, 1993||May 10, 1994||Xerox Corporation||Vertically stacked, accurately positioned diode lasers|
|US5315154||May 14, 1993||May 24, 1994||Hughes Aircraft Company||Electronic assembly including heat absorbing material for limiting temperature through isothermal solid-solid phase transition|
|US5323411||Nov 20, 1992||Jun 21, 1994||The Furukawa Electric Co., Ltd.||Laser diode array device|
|US5325384||Jan 9, 1992||Jun 28, 1994||Crystallume||Structure and method for mounting laser diode arrays|
|US5337325||May 4, 1992||Aug 9, 1994||Photon Imaging Corp||Semiconductor, light-emitting devices|
|US5351259||Oct 23, 1992||Sep 27, 1994||Mitsubishi Denki Kabushiki Kaisha||Semiconductor laser-pumped solid-state laser with plural beam output|
|US5388755||Jan 28, 1994||Feb 14, 1995||Polaroid Corp.||Apparatus and method of bonding isolation grooves of a ridge wave-guide laser diode|
|US5394426||Nov 13, 1992||Feb 28, 1995||Hughes Aircraft Company||Diode laser bar assembly|
|US5394427||Apr 29, 1994||Feb 28, 1995||Cutting Edge Optronics, Inc.||Housing for a slab laser pumped by a close-coupled light source|
|US5402436||Dec 29, 1993||Mar 28, 1995||Xerox Corporation||Nonmonolithic array structure of multiple beam diode lasers|
|US5402437||Jun 15, 1993||Mar 28, 1995||Massachusetts Institute Of Technology||Microchip laser|
|US5438580||Sep 24, 1993||Aug 1, 1995||Opto Power Corporation||Laser package and method of assembly|
|US5485482||Dec 8, 1993||Jan 16, 1996||Selker; Mark D.||Method for design and construction of efficient, fundamental transverse mode selected, diode pumped, solid state lasers|
|US5520244||Jun 13, 1994||May 28, 1996||Sdl, Inc.||Micropost waste heat removal system|
|US5526373||Jun 2, 1994||Jun 11, 1996||Karpinski; Arthur A.||Lens support structure for laser diode arrays|
|US5548605||May 15, 1995||Aug 20, 1996||The Regents Of The University Of California||Monolithic microchannel heatsink|
|US5663979||Nov 22, 1995||Sep 2, 1997||Light Solutions Corporation||Fiber stub end-pumped laser|
|US5734672||Aug 6, 1996||Mar 31, 1998||Cutting Edge Optronics, Inc.||Smart laser diode array assembly and operating method using same|
|US5764675||Jul 11, 1996||Jun 9, 1998||Juhala; Roland E.||Diode laser array|
|US5834840||May 25, 1995||Nov 10, 1998||Massachusetts Institute Of Technology||Net-shape ceramic processing for electronic devices and packages|
|US5835518||Jan 31, 1997||Nov 10, 1998||Star Medical Technologies, Inc.||Laser diode array packaging|
|US5898211||Apr 30, 1996||Apr 27, 1999||Cutting Edge Optronics, Inc.||Laser diode package with heat sink|
|US5985684||Apr 5, 1999||Nov 16, 1999||Cutting Edge Optronics, Inc.||Process for manufacturing a laser diode having a heat sink|
|US5987043||Nov 12, 1997||Nov 16, 1999||Opto Power Corp.||Laser diode arrays with offset components|
|US6091746||Nov 8, 1996||Jul 18, 2000||Commissariat A L'energie Atomique||Assembly of cooled laser diode arrays|
|US6307871||Mar 17, 1999||Oct 23, 2001||Cutting Edge Optronics, Inc.||Laser system using phase change material for thermal control|
|US6310900||Apr 5, 1999||Oct 30, 2001||Cutting Edge Optronics, Inc.||Laser diode package with heat sink|
|US6351478||Sep 11, 1998||Feb 26, 2002||Cutting Edge Optronics, Inc.||Passively cooled solid-state laser|
|US6352873||Apr 24, 2000||Mar 5, 2002||Decade Products, Inc.||Method for modular laser diode assembly|
|US6397618 *||May 30, 2001||Jun 4, 2002||International Business Machines Corporation||Cooling system with auxiliary thermal buffer unit for cooling an electronics module|
|US6421364 *||Dec 22, 2000||Jul 16, 2002||Robert W. Lubrano||Solid state optical pumping laser with shielded laser cavity insert|
|US6570895||Oct 9, 2001||May 27, 2003||Cutting Edge Optronics, Inc.||Laser system using phase change material for thermal control|
|US6636538||Mar 29, 1999||Oct 21, 2003||Cutting Edge Optronics, Inc.||Laser diode packaging|
|US6650680 *||Sep 21, 2001||Nov 18, 2003||Trumpf Lasertechnik Gmbh||Gas laser with cooled coaxial electrode tubes|
|US6845110 *||Nov 14, 2002||Jan 18, 2005||Honeywell International Inc.||Vapor cycle system (VCS) with thermal reservoirs for reducing requisite VCS power and size with intermittent heat loads|
|US20020018498||Oct 9, 2001||Feb 14, 2002||Heberle Geoffrey O.||Laser system using phase change material for thermal control|
|US20020110165||Feb 14, 2001||Aug 15, 2002||Filgas David M.||Method and system for cooling at least one laser diode with a cooling fluid|
|US20040182548||Jul 1, 2003||Sep 23, 2004||Cooligy, Inc.||Multi-level microchannel heat exchangers|
|EP0458469A1||Apr 26, 1991||Nov 27, 1991||Nippon Steel Corporation||Composite lead frame and semiconductor device using the same|
|1||Ahearn, W.E., Thermal Spacer For Room Temperature Close-Packed GaAs Laser Arrays, IBM Technical Disclosure Bulleting, vol. 12, No. 12, p. 2311, May 1970.|
|2||Coherent Laser Group, Laser Diodes and Bars (article) (5 pages).|
|3||Endriz, John G. "High Power Diode Laser Arrays," IEEE Journal of Quantum Electronics, No. 4, pp. 952-965, Apr. 1992.|
|4||IBM Corp. "Circuit Module Cooling With Multiple Pistons Contacting A Heat Spreader/Electrical Buffer Plate In Contact With Chip," IBM Technical Disclosure Bulletin, vol. 31, No. 12, pp. 5-7, May 1989.|
|5||IBM Corp. "Heat Sink Assembly for Tab-Mounted Devices," IBM Technical Disclosure Bulletin, vol. 31, No. 6, pp. 372-373, Nov. 1988.|
|6||Mundinger, D. High Average Power Edge Emitting Laser Diode Arrays on Silicon Microchannel Coolers, Nov. 19, 1990.|
|7||Thomson CSF Semiconducteurs Specifiques, Package Specification (schematic), p. 3 (one page). Date unknown.|
|Citing Patent||Filing date||Publication date||Applicant||Title|
|US7990711||Feb 24, 2010||Aug 2, 2011||International Business Machines Corporation||Double-face heat removal of vertically integrated chip-stacks utilizing combined symmetric silicon carrier fluid cavity and micro-channel cold plate|
|US8486766 *||Sep 8, 2010||Jul 16, 2013||Jenoptik Laser Gmbh||Method for thermally contacting opposing electrical connections of a semiconductor component arrangement|
|US9031104||May 7, 2012||May 12, 2015||Obzerv Technologies Inc.||Low inductance laser diode bar mount|
|US20090274189 *||May 4, 2009||Nov 5, 2009||Flir Systems, Inc.||Scalable thermally efficient pump diode systems|
|US20110205708 *||Feb 24, 2010||Aug 25, 2011||International Business Machines Corporation||Double-face heat removal of vertically integrated chip-stacks utilizing combined symmetric silicon carrier fluid cavity and micro-channel cold plate|
|US20120252144 *||Sep 8, 2010||Oct 4, 2012||Jenoptik Laser Gmbh||Method for thermally contacting opposing electrical connections of a semiconductor component arrangement|
|US20140254099 *||Feb 18, 2014||Sep 11, 2014||Nec Corporation||Electronic component and electronic component cooling method|
|U.S. Classification||372/35, 372/36|
|Cooperative Classification||H01S5/02484, H01S5/02272, H01S5/02208, H01S5/02423, H01S5/4025|
|Nov 9, 2007||AS||Assignment|
Owner name: NORTHROP GRUMMAN CORPORATION, CALIFORNIA
Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:STEPHENS, EDWARD F.;REEL/FRAME:020800/0531
Effective date: 20060831
|Nov 30, 2009||AS||Assignment|
Owner name: NORTHROP GRUMMAN SPACE & MISSION SYSTEMS CORP.,CAL
Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:NORTHROP GRUMMAN CORPORTION;REEL/FRAME:023699/0551
Effective date: 20091125
Owner name: NORTHROP GRUMMAN SPACE & MISSION SYSTEMS CORP., CA
Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:NORTHROP GRUMMAN CORPORTION;REEL/FRAME:023699/0551
Effective date: 20091125
|Feb 10, 2010||AS||Assignment|
Owner name: NORTHROP GRUMMAN SYSTEMS CORPORATION,CALIFORNIA
Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:NORTHROP GRUMMAN SPACE & MISSION SYSTEMS CORP.;REEL/FRAME:023915/0446
Effective date: 20091210
Owner name: NORTHROP GRUMMAN SYSTEMS CORPORATION, CALIFORNIA
Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:NORTHROP GRUMMAN SPACE & MISSION SYSTEMS CORP.;REEL/FRAME:023915/0446
Effective date: 20091210
|Jun 8, 2012||FPAY||Fee payment|
Year of fee payment: 4